chapter 03 dual-fluid spray cleaning technique for particle removal 1copyright owned by james t....
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![Page 1: Chapter 03 Dual-Fluid Spray Cleaning Technique for Particle Removal 1Copyright owned by James T. Snow, Masanobu Sato, and Takayoshi Tanaka](https://reader035.vdocument.in/reader035/viewer/2022081414/55147969550346b2598b46e8/html5/thumbnails/1.jpg)
Chapter 03
Dual-Fluid Spray Cleaning Technique for Particle Removal
1Copyright owned by James T. Snow, Masanobu Sato, and Takayoshi Tanaka.
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FIGURE 3.1 Cleaning process window depicting particle adhesion force distribution (left) compared with structural integrity force (right) with optimized cleaning forces located in between.
James T. Snow , Masanobu Sato , Takayoshi Tanaka
Chapter 3 - Dual-Fluid Spray Cleaning Technique for Particle Removal
Developments in Surface Contamination and Cleaning - Methods of Cleaning and Cleanliness Verification. Pages 107 – 138
http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0
Copyright owned by James T. Snow, Masanobu Sato, and Takayoshi Tanaka. 2
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FIGURE 3.2 Droplet jet and ultrasonic (US) shock wave forces exceeding van der Waals particle attachment force.
James T. Snow , Masanobu Sato , Takayoshi Tanaka
Chapter 3 - Dual-Fluid Spray Cleaning Technique for Particle Removal
Developments in Surface Contamination and Cleaning - Methods of Cleaning and Cleanliness Verification. Pages 107 – 138
http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0
Copyright owned by James T. Snow, Masanobu Sato, and Takayoshi Tanaka. 3
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FIGURE 3.3 Comparison of the shock wave drag force necessary to remove all particles with the structural strengths of bulk and deposited structures.
James T. Snow , Masanobu Sato , Takayoshi Tanaka
Chapter 3 - Dual-Fluid Spray Cleaning Technique for Particle Removal
Developments in Surface Contamination and Cleaning - Methods of Cleaning and Cleanliness Verification. Pages 107 – 138
http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0
Copyright owned by James T. Snow, Masanobu Sato, and Takayoshi Tanaka. 4
![Page 5: Chapter 03 Dual-Fluid Spray Cleaning Technique for Particle Removal 1Copyright owned by James T. Snow, Masanobu Sato, and Takayoshi Tanaka](https://reader035.vdocument.in/reader035/viewer/2022081414/55147969550346b2598b46e8/html5/thumbnails/5.jpg)
FIGURE 3.4 Test structures of amorphous-Si on SION (a) and polysilicon on SiO2 (b) surfaces for AFM measurements.
James T. Snow , Masanobu Sato , Takayoshi Tanaka
Chapter 3 - Dual-Fluid Spray Cleaning Technique for Particle Removal
Developments in Surface Contamination and Cleaning - Methods of Cleaning and Cleanliness Verification. Pages 107 – 138
http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0
Copyright owned by James T. Snow, Masanobu Sato, and Takayoshi Tanaka. 5
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FIGURE 3.5 Cleaning process window showing less energy required to remove particles vs damage structures. Figure provided courtesy of Tae-Gon Kim and used with permission.
James T. Snow , Masanobu Sato , Takayoshi Tanaka
Chapter 3 - Dual-Fluid Spray Cleaning Technique for Particle Removal
Developments in Surface Contamination and Cleaning - Methods of Cleaning and Cleanliness Verification. Pages 107 – 138
http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0
Copyright owned by James T. Snow, Masanobu Sato, and Takayoshi Tanaka. 6
![Page 7: Chapter 03 Dual-Fluid Spray Cleaning Technique for Particle Removal 1Copyright owned by James T. Snow, Masanobu Sato, and Takayoshi Tanaka](https://reader035.vdocument.in/reader035/viewer/2022081414/55147969550346b2598b46e8/html5/thumbnails/7.jpg)
FIGURE 3.6 Examples of spray cleaning nozzles.
James T. Snow , Masanobu Sato , Takayoshi Tanaka
Chapter 3 - Dual-Fluid Spray Cleaning Technique for Particle Removal
Developments in Surface Contamination and Cleaning - Methods of Cleaning and Cleanliness Verification. Pages 107 – 138
http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0
Copyright owned by James T. Snow, Masanobu Sato, and Takayoshi Tanaka. 7
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FIGURE 3.7 (a) Liquid drop impact on solid surface showing formation of a shock front. (b) Close-up view moments after impact and start of sideways liquid jetting.
James T. Snow , Masanobu Sato , Takayoshi Tanaka
Chapter 3 - Dual-Fluid Spray Cleaning Technique for Particle Removal
Developments in Surface Contamination and Cleaning - Methods of Cleaning and Cleanliness Verification. Pages 107 – 138
http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0
Copyright owned by James T. Snow, Masanobu Sato, and Takayoshi Tanaka. 8
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FIGURE 3.8 Photograph of crown resulting from droplet impact on liquid surface.
James T. Snow , Masanobu Sato , Takayoshi Tanaka
Chapter 3 - Dual-Fluid Spray Cleaning Technique for Particle Removal
Developments in Surface Contamination and Cleaning - Methods of Cleaning and Cleanliness Verification. Pages 107 – 138
http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0
Copyright owned by James T. Snow, Masanobu Sato, and Takayoshi Tanaka. 9
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FIGURE 3.9 Droplet impact on liquid layer showing propagation of shock waves.
James T. Snow , Masanobu Sato , Takayoshi Tanaka
Chapter 3 - Dual-Fluid Spray Cleaning Technique for Particle Removal
Developments in Surface Contamination and Cleaning - Methods of Cleaning and Cleanliness Verification. Pages 107 – 138
http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0
Copyright owned by James T. Snow, Masanobu Sato, and Takayoshi Tanaka. 10
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FIGURE 3.10 Pressure curves (in bar) from shock wave formed from droplet impact on a surface coated with a 10 µm liquid film at different velocities with different droplet diameters.
James T. Snow , Masanobu Sato , Takayoshi Tanaka
Chapter 3 - Dual-Fluid Spray Cleaning Technique for Particle Removal
Developments in Surface Contamination and Cleaning - Methods of Cleaning and Cleanliness Verification. Pages 107 – 138
http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0
Copyright owned by James T. Snow, Masanobu Sato, and Takayoshi Tanaka. 11
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FIGURE 3.11 Dynamic pressure curves (in bar) formed from droplet impact on a surface coated with a 10 µm liquid film at different velocities and droplet diameters.
James T. Snow , Masanobu Sato , Takayoshi Tanaka
Chapter 3 - Dual-Fluid Spray Cleaning Technique for Particle Removal
Developments in Surface Contamination and Cleaning - Methods of Cleaning and Cleanliness Verification. Pages 107 – 138
http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0
Copyright owned by James T. Snow, Masanobu Sato, and Takayoshi Tanaka. 12
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FIGURE 3.12 Averaged PRE for removal of silicon nitride particles for various fluids dispensed through Soft Spray nozzle.
James T. Snow , Masanobu Sato , Takayoshi Tanaka
Chapter 3 - Dual-Fluid Spray Cleaning Technique for Particle Removal
Developments in Surface Contamination and Cleaning - Methods of Cleaning and Cleanliness Verification. Pages 107 – 138
http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0
Copyright owned by James T. Snow, Masanobu Sato, and Takayoshi Tanaka. 13
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FIGURE 3.13 Droplet size and velocity distribution from atomized liquid spray with gas flow rate of 25 L/min.
James T. Snow , Masanobu Sato , Takayoshi Tanaka
Chapter 3 - Dual-Fluid Spray Cleaning Technique for Particle Removal
Developments in Surface Contamination and Cleaning - Methods of Cleaning and Cleanliness Verification. Pages 107 – 138
http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0
Copyright owned by James T. Snow, Masanobu Sato, and Takayoshi Tanaka. 14
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FIGURE 3.14 Schematic drawings of Nanospray (a) and Soft Spray (b) nozzles.
James T. Snow , Masanobu Sato , Takayoshi Tanaka
Chapter 3 - Dual-Fluid Spray Cleaning Technique for Particle Removal
Developments in Surface Contamination and Cleaning - Methods of Cleaning and Cleanliness Verification. Pages 107 – 138
http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0
Copyright owned by James T. Snow, Masanobu Sato, and Takayoshi Tanaka. 15
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FIGURE 3.15 (a) Effect of nitrogen flow on droplet size for Soft Spray and Nanospray nozzles. (b) Droplet size distribution for Soft Spray and Nanospray nozzles at 80 L/min nitrogen flow.
James T. Snow , Masanobu Sato , Takayoshi Tanaka
Chapter 3 - Dual-Fluid Spray Cleaning Technique for Particle Removal
Developments in Surface Contamination and Cleaning - Methods of Cleaning and Cleanliness Verification. Pages 107 – 138
http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0
Copyright owned by James T. Snow, Masanobu Sato, and Takayoshi Tanaka. 16
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FIGURE 3.16 Effect of N 2 flow on PRE and typical damage to 70 nm poly lines using Nanospray (a). Example of typical damage to 70 nm poly line (b).
James T. Snow , Masanobu Sato , Takayoshi Tanaka
Chapter 3 - Dual-Fluid Spray Cleaning Technique for Particle Removal
Developments in Surface Contamination and Cleaning - Methods of Cleaning and Cleanliness Verification. Pages 107 – 138
http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0
Copyright owned by James T. Snow, Masanobu Sato, and Takayoshi Tanaka. 17
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FIGURE 3.17 High-speed camera images of droplets from Nanospray2 (a) and NanosprayÅ (b) nozzles.
James T. Snow , Masanobu Sato , Takayoshi Tanaka
Chapter 3 - Dual-Fluid Spray Cleaning Technique for Particle Removal
Developments in Surface Contamination and Cleaning - Methods of Cleaning and Cleanliness Verification. Pages 107 – 138
http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0
Copyright owned by James T. Snow, Masanobu Sato, and Takayoshi Tanaka. 18
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FIGURE 3.18 Droplet size (a) and velocity distributions (b) for Nanospray2 and NanosprayÅ.
James T. Snow , Masanobu Sato , Takayoshi Tanaka
Chapter 3 - Dual-Fluid Spray Cleaning Technique for Particle Removal
Developments in Surface Contamination and Cleaning - Methods of Cleaning and Cleanliness Verification. Pages 107 – 138
http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0
Copyright owned by James T. Snow, Masanobu Sato, and Takayoshi Tanaka. 19
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FIGURE 3.19 Damage to photoresist structures for two droplet sizes at varying velocity.
James T. Snow , Masanobu Sato , Takayoshi Tanaka
Chapter 3 - Dual-Fluid Spray Cleaning Technique for Particle Removal
Developments in Surface Contamination and Cleaning - Methods of Cleaning and Cleanliness Verification. Pages 107 – 138
http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0
Copyright owned by James T. Snow, Masanobu Sato, and Takayoshi Tanaka. 20
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FIGURE 3.20 Correlation of droplet energy density with number of damage sites.
James T. Snow , Masanobu Sato , Takayoshi Tanaka
Chapter 3 - Dual-Fluid Spray Cleaning Technique for Particle Removal
Developments in Surface Contamination and Cleaning - Methods of Cleaning and Cleanliness Verification. Pages 107 – 138
http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0
Copyright owned by James T. Snow, Masanobu Sato, and Takayoshi Tanaka. 21
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FIGURE 3.21 Threshold energy curve separating damage-free from damage-potential zone.
James T. Snow , Masanobu Sato , Takayoshi Tanaka
Chapter 3 - Dual-Fluid Spray Cleaning Technique for Particle Removal
Developments in Surface Contamination and Cleaning - Methods of Cleaning and Cleanliness Verification. Pages 107 – 138
http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0
Copyright owned by James T. Snow, Masanobu Sato, and Takayoshi Tanaka. 22
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FIGURE 3.22 Damage threshold curve with Nanospray2 droplets. Below the threshold curve is a damage-free zone and above the curve is the damage-potential zone.
James T. Snow , Masanobu Sato , Takayoshi Tanaka
Chapter 3 - Dual-Fluid Spray Cleaning Technique for Particle Removal
Developments in Surface Contamination and Cleaning - Methods of Cleaning and Cleanliness Verification. Pages 107 – 138
http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0
Copyright owned by James T. Snow, Masanobu Sato, and Takayoshi Tanaka. 23
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FIGURE 3.23 Relationship between droplet velocity and number of removed 78 nm SiO2 particles.
James T. Snow , Masanobu Sato , Takayoshi Tanaka
Chapter 3 - Dual-Fluid Spray Cleaning Technique for Particle Removal
Developments in Surface Contamination and Cleaning - Methods of Cleaning and Cleanliness Verification. Pages 107 – 138
http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0
Copyright owned by James T. Snow, Masanobu Sato, and Takayoshi Tanaka. 24
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FIGURE 3.24 Relationship between droplet energy density and PRE.
James T. Snow , Masanobu Sato , Takayoshi Tanaka
Chapter 3 - Dual-Fluid Spray Cleaning Technique for Particle Removal
Developments in Surface Contamination and Cleaning - Methods of Cleaning and Cleanliness Verification. Pages 107 – 138
http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0
Copyright owned by James T. Snow, Masanobu Sato, and Takayoshi Tanaka. 25
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FIGURE 3.25 Threshold curves for particle removal and pattern damage generation with dual-fluid Nanospray2 and NanosprayÅ nozzles.
James T. Snow , Masanobu Sato , Takayoshi Tanaka
Chapter 3 - Dual-Fluid Spray Cleaning Technique for Particle Removal
Developments in Surface Contamination and Cleaning - Methods of Cleaning and Cleanliness Verification. Pages 107 – 138
http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0
Copyright owned by James T. Snow, Masanobu Sato, and Takayoshi Tanaka. 26
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FIGURE 3.26 The PRE performance of Nanospray2 and NanosprayÅ nozzles for removal of PSL spheres.
James T. Snow , Masanobu Sato , Takayoshi Tanaka
Chapter 3 - Dual-Fluid Spray Cleaning Technique for Particle Removal
Developments in Surface Contamination and Cleaning - Methods of Cleaning and Cleanliness Verification. Pages 107 – 138
http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0
Copyright owned by James T. Snow, Masanobu Sato, and Takayoshi Tanaka. 27
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FIGURE 3.27 PRE results from removal of PSL spheres using conventional dual-fluid spray cleaning and frozen water.
James T. Snow , Masanobu Sato , Takayoshi Tanaka
Chapter 3 - Dual-Fluid Spray Cleaning Technique for Particle Removal
Developments in Surface Contamination and Cleaning - Methods of Cleaning and Cleanliness Verification. Pages 107 – 138
http://dx.doi.org/10.1016/B978-1-4377-7879-3.00003-0
Copyright owned by James T. Snow, Masanobu Sato, and Takayoshi Tanaka. 28