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Page 1: Chemical Vapor Depositionhome.iitk.ac.in/~nsinha/Microfabrication II.pdf · 2016-10-19 · • Chemical vapor deposition (CVD) is the most important process in microfabrication. •

Chemical Vapor DepositionChemical Vapor DepositionChemical Vapor DepositionChemical Vapor Deposition

Page 2: Chemical Vapor Depositionhome.iitk.ac.in/~nsinha/Microfabrication II.pdf · 2016-10-19 · • Chemical vapor deposition (CVD) is the most important process in microfabrication. •

Chemical Vapor DepositionChemical Vapor DepositionChemical Vapor DepositionChemical Vapor Deposition

Page 3: Chemical Vapor Depositionhome.iitk.ac.in/~nsinha/Microfabrication II.pdf · 2016-10-19 · • Chemical vapor deposition (CVD) is the most important process in microfabrication. •

Chemical Vapor DepositionChemical Vapor DepositionChemical Vapor DepositionChemical Vapor Deposition

Page 4: Chemical Vapor Depositionhome.iitk.ac.in/~nsinha/Microfabrication II.pdf · 2016-10-19 · • Chemical vapor deposition (CVD) is the most important process in microfabrication. •

Chemical Vapor DepositionChemical Vapor DepositionChemical Vapor DepositionChemical Vapor Deposition

Page 5: Chemical Vapor Depositionhome.iitk.ac.in/~nsinha/Microfabrication II.pdf · 2016-10-19 · • Chemical vapor deposition (CVD) is the most important process in microfabrication. •

Chemical Vapor DepositionChemical Vapor DepositionChemical Vapor DepositionChemical Vapor Deposition

Page 6: Chemical Vapor Depositionhome.iitk.ac.in/~nsinha/Microfabrication II.pdf · 2016-10-19 · • Chemical vapor deposition (CVD) is the most important process in microfabrication. •

Chemical Vapor DepositionChemical Vapor DepositionChemical Vapor DepositionChemical Vapor Deposition

Page 7: Chemical Vapor Depositionhome.iitk.ac.in/~nsinha/Microfabrication II.pdf · 2016-10-19 · • Chemical vapor deposition (CVD) is the most important process in microfabrication. •

Deposition by EpitaxyDeposition by EpitaxyDeposition by EpitaxyDeposition by Epitaxy

Page 8: Chemical Vapor Depositionhome.iitk.ac.in/~nsinha/Microfabrication II.pdf · 2016-10-19 · • Chemical vapor deposition (CVD) is the most important process in microfabrication. •

Taxonomy of Taxonomy of Taxonomy of Taxonomy of MicrofabricationMicrofabricationMicrofabricationMicrofabrication ProcessesProcessesProcessesProcesses

Page 9: Chemical Vapor Depositionhome.iitk.ac.in/~nsinha/Microfabrication II.pdf · 2016-10-19 · • Chemical vapor deposition (CVD) is the most important process in microfabrication. •

EtchingEtchingEtchingEtching

Isotropic EtchantsAnisotropic Etchants

Page 10: Chemical Vapor Depositionhome.iitk.ac.in/~nsinha/Microfabrication II.pdf · 2016-10-19 · • Chemical vapor deposition (CVD) is the most important process in microfabrication. •

Bulk Bulk Bulk Bulk MicromanufacturingMicromanufacturingMicromanufacturingMicromanufacturing

Page 11: Chemical Vapor Depositionhome.iitk.ac.in/~nsinha/Microfabrication II.pdf · 2016-10-19 · • Chemical vapor deposition (CVD) is the most important process in microfabrication. •

Bulk Bulk Bulk Bulk MicromanufacturingMicromanufacturingMicromanufacturingMicromanufacturing

Page 12: Chemical Vapor Depositionhome.iitk.ac.in/~nsinha/Microfabrication II.pdf · 2016-10-19 · • Chemical vapor deposition (CVD) is the most important process in microfabrication. •

Bulk Bulk Bulk Bulk MicromanufacturingMicromanufacturingMicromanufacturingMicromanufacturing

Page 13: Chemical Vapor Depositionhome.iitk.ac.in/~nsinha/Microfabrication II.pdf · 2016-10-19 · • Chemical vapor deposition (CVD) is the most important process in microfabrication. •

Bulk Bulk Bulk Bulk MicromanufacturingMicromanufacturingMicromanufacturingMicromanufacturing

Page 14: Chemical Vapor Depositionhome.iitk.ac.in/~nsinha/Microfabrication II.pdf · 2016-10-19 · • Chemical vapor deposition (CVD) is the most important process in microfabrication. •

Surface MicromachiningSurface MicromachiningSurface MicromachiningSurface Micromachining

Page 15: Chemical Vapor Depositionhome.iitk.ac.in/~nsinha/Microfabrication II.pdf · 2016-10-19 · • Chemical vapor deposition (CVD) is the most important process in microfabrication. •

Surface MicromachiningSurface MicromachiningSurface MicromachiningSurface Micromachining

Page 16: Chemical Vapor Depositionhome.iitk.ac.in/~nsinha/Microfabrication II.pdf · 2016-10-19 · • Chemical vapor deposition (CVD) is the most important process in microfabrication. •

Surface MicromachiningSurface MicromachiningSurface MicromachiningSurface Micromachining

Page 17: Chemical Vapor Depositionhome.iitk.ac.in/~nsinha/Microfabrication II.pdf · 2016-10-19 · • Chemical vapor deposition (CVD) is the most important process in microfabrication. •

Surface MicromachiningSurface MicromachiningSurface MicromachiningSurface Micromachining

Page 18: Chemical Vapor Depositionhome.iitk.ac.in/~nsinha/Microfabrication II.pdf · 2016-10-19 · • Chemical vapor deposition (CVD) is the most important process in microfabrication. •

LIGA (Lithographie, Galvanoformung, Abformung)LIGA (Lithographie, Galvanoformung, Abformung)LIGA (Lithographie, Galvanoformung, Abformung)LIGA (Lithographie, Galvanoformung, Abformung)

(Lithography, Electroplating, and Molding)

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