chems - vacco · 2018. 8. 9. · vacco integrated xenon feed system. the data contained in this...

The Data Contained in this Document is Proprietary to VACCO InduThe Data Contained in this Document is Proprietary to VACCO IndustriesstriesVACCOVACCOSPACE PRODUCTS

ChEMSChEMSChEMSChEMSChEMSChEMSChEMSChEMS TechnologyTechnologyTechnologyTechnologyTechnologyTechnologyTechnologyTechnology

ChChemically emically EEtched tched MMicro icro SSystems (ChEMSystems (ChEMS))

Chemical Micromachining of metal is primary manufacturing process

Layers Micromachined & Integrated to form Modules

Components & Connections Fabricated Simultaneously

Integrated using Adhesive Bonding, Diffusion Bonding, EB Welding & Fasteners

Extension of VACCO Etched Disc Filter Technology

Patent #6,334,301


ChEMSChEMSChEMSChEMSChEMSChEMSChEMSChEMS ProdProdProdProduction Capabilityuction Capabilityuction Capabilityuction CapabilityProduction CapabilityProduction CapabilityProduction CapabilityProduction Capability

ChChemically emically EEtched tched MMicro icro SSystems (ChEMSystems (ChEMS))Chemical Micromachining at

VACCO since 1964:Aerospace, Military, Medical,

Electronic and Industrial Applications

Eleven Lines Currently in Production

Variety of Materials:Titanium, CRES, Copper, Aluminum,

Brass, Nitinol and Molybdenum

Excellent Strength, Ductility & Chemical Compatibility

Features Down to 2 Micron Routinely Produced for Spacecraft Filters


NANANANASA Cross Enterprise NRASA Cross Enterprise NRASA Cross Enterprise NRASA Cross Enterprise NRANASA Cross Enterprise NRANASA Cross Enterprise NRANASA Cross Enterprise NRANASA Cross Enterprise NRA

$1.4M, (3) Year ContractDeliverables:

Engineering FCM & PCMBreadboard FCM & PCM(2) Electronic ControllersIntegrated Feed SystemVarious Reports

Pressure and Flow Control:1500 to 200 psia Inlet Pressure20 to 100 psia Outlet Pressure0 to 185 sccm Xe Flow Rate

Test Plan:Bench Testing at VACCOBench Top Testing at JPLHot Fire Testing at NASA GRC

Development Team:VACCO, Prime Contractor, Pressure &

Flow Control ModulesAerojet RRC, Electronic ControllerJPL, NASA GRC, Testing

Pressure Control Module

Flow Control Module


ChEMSChEMSChEMSChEMSChEMSChEMSChEMSChEMS Pressure Control ModulePressure Control ModulePressure Control ModulePressure Control ModulePressure Control ModulePressure Control ModulePressure Control ModulePressure Control Module

(5) Functional Components:(1) 5µ System Filter.(4) NC Bang-Bang Valves.

1,500 psia Operating PressurePressure Control Valves:

All-Welded Titanium.Suspended Armatures(No Sliding Fits).

Viton Poppet Seals.Tested to 180K Cycles.

Less than 198 grams.Titanium Manifold.

Outlet toPlenum

Pressure Control Module

XenonStorage

Tank

Pu

Tu

High Pressure & Temperature Transducers

A1 A2

B1 B25 micron Filter


ChEMSChEMSChEMSChEMSChEMSChEMSChEMSChEMS Flow Control ModuleFlow Control ModuleFlow Control ModuleFlow Control ModuleFlow Control ModuleFlow Control ModuleFlow Control ModuleFlow Control Module

Flow Control Module

Development Unit


Digital Digital Digital Digital Xenon Flow Control ModuleXenon Flow Control ModuleXenon Flow Control ModuleXenon Flow Control ModuleDigital Xenon Flow Control ModuleDigital Xenon Flow Control ModuleDigital Xenon Flow Control ModuleDigital Xenon Flow Control Module

-2468

1012

Flow(mg/s

X e)

1 2 3 4 5 6 7 8

Control V alve No.

05

101520

1 27 53 79 105

131

157

183

209

235

Binary Number

Flow(mg/s Xe)

0.08 mg/sec Min Bit Size0.08 mg/sec Min Bit Size0 to 20.4 mg/s Xe @ 40 psia & 70F0 to 20.4 mg/s Xe @ 40 psia & 70F

�(21) Functional Components:� (1) 5 Micron Filter� (4) Isolation Valves.� (8) Flow Control Valves.� (8) Flow Resistors.

� 120 psia Operating Pressure� High Reliability Valve Design:

� All-Welded Titanium Construction.� Suspended Armature

(No Sliding Fits).� Viton Poppet Seals.

� Mass: 398 grams.� (14) Manifolds Built & Tested to

Demonstrate Producability.


ChEMSChEMSChEMSChEMSChEMSChEMSChEMSChEMS FCM SchematicFCM SchematicFCM SchematicFCM SchematicFCM SchematicFCM SchematicFCM SchematicFCM Schematic

PlenumTank

Pd

TdOutlet toThruster

Low Pressure & Temperature Transducers

Flow Control Valve Array

C1 C2

D1 D2

Development FlowControl Module

5 micron Filter

V1

V2

V3

V4

V6

V7

V8

V5


NASA GRC Hot Fire TestingNASA GRC Hot Fire TestingNASA GRC Hot Fire TestingNASA GRC Hot Fire TestingNASA GRC Hot Fire TestingNASA GRC Hot Fire TestingNASA GRC Hot Fire TestingNASA GRC Hot Fire Testing

Graphic User Interface

Flow Control Module

Electronic Controller

Pressure Control Module Thrust Chamber w/120 watt HET

Flow Calibration Assembly

VACCO Integrated Xenon Feed System


MSFC Cycle MSFC Cycle MSFC Cycle MSFC Cycle 2 NRA: Advanced FCM2 NRA: Advanced FCM2 NRA: Advanced FCM2 NRA: Advanced FCMMSFC Cycle 2 NRA: Advanced FCMMSFC Cycle 2 NRA: Advanced FCMMSFC Cycle 2 NRA: Advanced FCMMSFC Cycle 2 NRA: Advanced FCM

Cycle 2 Flow Control Module Concept

INLETCATHODE

MAIN

NEUTRALIZER

Increase from TRL 3 to TRL 6Diffusion Bonded Construction120 psia Operating PressureFlow Control:

Main, (8) BitCathode, (3) BitNeutralizer, Split off Cath

NC to Latching Valves:Consumes no powerSelf-heating eliminated

Low Mass (


Xenon Latch Valve ModuleXenon Latch Valve ModuleXenon Latch Valve ModuleXenon Latch Valve ModuleXenon Latch Valve ModuleXenon Latch Valve ModuleXenon Latch Valve ModuleXenon Latch Valve Module

XLVM:(4) Latching Isolation Valves

(1) 2µ System Filter

(2) Voltage Suppression Diode Boards

High Reliability Design:All-Welded Titanium Construction

Suspended Armature

(No Sliding Fits)

Kel-F Valve Seals

Etched Disc Filter

4,000 psia Operating Pressure


JPL MicroJPL MicroJPL MicroJPL MicroJPL MicroJPL MicroJPL MicroJPL Micro--------Ion Thruster GridIon Thruster GridIon Thruster GridIon Thruster GridIon Thruster GridIon Thruster GridIon Thruster GridIon Thruster Grid

MOLYBDENUM - TITANIUM

ION THRUSTER GRID

ASSEMBLY

chems - vacco · 2018. 8. 9. · vacco integrated xenon feed system. the data contained in this...

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