cml series high-flow mass flow meter user's manual · the cml series gas mass flow meter uses...

44
CML Series High-Flow Mass Flow Meter User's Manual No. CP-SP-1161E Thank you for purchasing the CML Sereis. This manual contains information for ensuring correct use of the CML Sereis. It also provides necessary information for installation, maintenance, and trou- bleshooting. This manual should be read by those who design and maintain devices that use the CML Sereis. Be sure to keep this manual nearby for handy reference. TM

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Page 1: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

CML SeriesHigh-Flow Mass Flow Meter

User's Manual

No. CP-SP-1161E

Thank you for purchasing the CMLSereis.

This manual contains information forensuring correct use of the CML Sereis.It also provides necessary informationfor installation, maintenance, and trou-bleshooting.

This manual should be read by thosewho design and maintain devices thatuse the CML Sereis. Be sure to keepthis manual nearby for handy reference.

TM

Page 2: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

“Natural gas” in this document refers to city gas in Japan.

NOTICE

The µFTM

is a trademark of Azbil Corporation in Japan.

NOTICE

© 2004-2012 Azbil Corporation All Rights Reserved.

Be sure that the user receives this manual before the product is used.

Copying or duplicating this user’s manual in part or in whole is forbid-den. The information and specifications in this manual are subject tochange without notice.

Considerable effort has been made to ensure that this manual is freefrom inaccuracies and omissions. If you should find an error or omis-sion, please contact the azbil Group.

In no event is Azbil Corporation liable to anyone for any indirect, specialor consequential damages as a result of using this product.

Page 3: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

i

About IconsThe safety precautions described in this manual are indicated by various icons.Please be sure you read and understand the icons and their meanings describedbelow before reading the rest of the manual.

Safety precautions are intended to ensure the safe and correct use of this prod-uct, to prevent injury to the operator and others, and to prevent damage to proper-ty. Be sure to observe these safety precautions.

Examples

Use caution when handling the product.

The indicated action is prohibited.

Be sure to follow the indicated instructions.

SAFETY PRECAUTIONS

WARNINGWarnings are indicated when mishandling thisproduct might result in death or serious injury.

CAUTIONCautions are indicated when mishandling thisproduct might result in minor injury to the user, oronly physical damage to the product.

Page 4: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

ii

WARNING

CAUTIONDo not mount with the display facing down.Doing so might cause measurement error or equipment failure.

Do not flush out the pipes when this device is installed. If foreignmatter enters this device it could cause equipment failure or errors inmeasurement.

To prevent leakage from the pipes, tighten bolts to the specified torque.Otherwise a leak could occur.

Be sure the load connected to the output terminals does not exceed therated values given in the specifications. An excessive load coulddamage this device.

After wiring and before turning the power on, be sure to check that thewiring, the polarity of the power supply, etc., are correct. Wiring errorcould cause damage or malfunction.

Be sure that the gas temperature does not fall below –25°C. Using thegas below –25°C, the O-ring might crack and cause gas leakage.

After the piping work is complete, remove the self-standing brackets.Otherwise someone might bump into them and be injured.

Be sure to use this device within the flowrate range stated in thespecifications. To prevent excessive flow, use a suitable means tocontrol the supply pressure or use a throttle valve or the like to controlthe flowrate. If the flowrate exceeds the upper limit, both the flowratedisplay and the output voltage/current may indicate considerably lowervalues than the actual flowrate.

If damage could result from the abnormal functioning of this device,include appropriate redundancy in the system design.

If this device is used for measuring natural gas 13A or propane, mountit on the upstream side of the safety shutoff valve.If somehow air gets into the pipes and an explosive mixture isproduced, and if the sensor makes a spark due to lightning or someother reason, the gas mixture in the pipes could explode.

Do not step on this device or installed pipes. Doing so might damagethe device or the pipes, or might cause physical injury.

The weight of this device is 14 to 45kg, depending upon the model.When moving or transporting this device, take the precaution of usingappropriate equipment or handling with two or more persons. Carelesslifting and falling could cause injury or damage.

Page 5: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

Contents

iii

SAFETY PRECAUTIONSConventions Used in This Manual

Chapter 1. INTRODUCTION

Introduction • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 1 Features • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 1 System configuration example• • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 2 Model selection guide• • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 2 Gas type and flowrate range • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 3

Chapter 2. NAMES AND FUNCTIONS OF PARTS

Chapter 3. MOUNTING AND WIRING

Installation site• • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 6 Behavior when the flowrate greatly exceeds the upper limit

of flowrate range • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 7 Pipes • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 8 Pipe installation • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 12 Wiring• • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 14

Chapter 4. OPERATION

Flowrate display • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 17 Temperature and pressure display • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 17 Integrating display and integrated count resetting function • • • • • • • • • • • • 17 Function setup• • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 18 Function setup item list • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 19 Parameter setup • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 20 Parameter setup item table • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 21

Chapter 5. TROUBLESHOOTING

Chapter 6. SPECIFICATIONS

Specifications • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 24 External dimensions • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 25 Pressure loss (flowrate - pressure loss characteristics) • • • • • • • • • • • • • • • • 27 Filter • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • • 30

Page 6: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

Conventions Used in This Manual

iv

The following conventions are used in this manual:

Handling Precautions: Handling Precautions indicate items that the user should pay attention to

when handling the CML.

Note : Notes indicate useful information that the user might benefit by knowing.

: This indicates the item or page that the user is requested to refer to.

(1), (2), (3) : The numbers with the parentheses indicate steps in a sequence orindicate corresponding parts in an explanation.

S-02 : This indicates 7-segment indication on the setup display.

key : This indicates a key on the display.MODE

Page 7: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

Chapter 1. INTRODUCTION

IntroductionThe CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter

referred to as a µF sensor) as the sensing section. The µF sensor is a thermal flow

velocity sensor made using proprietary technology. This device is a mass flow

meter having the features of high accuracy and high rangeability.

Features• As the CML Series is a thermal mass flow meter, it is not influenced by

temperature nor pressure. With no need for any expensive temperature and

pressure compensation device, a cost reduction can be achieved.

• The CML Series incorporates a µF sensor made possible by silicon micro-

machining technology and thin-film technology.

One side of the µF sensor is a mere 1.7mm, and at a thickness of 0.5mm, this

thermal flow velocity sensor features high sensitivity and response. Four

sensors are installed in the CML Series.

• Two sets of sensors for high and low flowrate ranges are mounted on the flow

passage walls at 90˚ intervals. By selecting alternately the sensors according to

the measurement flowrate ranges, the CML Series can achieve high accuracy

(±2%RD in the range of more than FS5% of measurement range) and high

rangeability (all models 160:1) in flowrate measurement.

• All of CML Series is provided with wide range of functions to meet various

applications: LCD display function, analog output (4 to 20mA), integrating

calculation and display, integral pulse output (open collector) and instantaneous

flowrate alarm output.

Also, the communication function is provided as a standard function, a large

amount of instrumentation cost reduction can be achieved when data is

transferred to the upper system.

• Photoelectric touch sensors are used to allow easy setting change without

opening the case.

• The straightener (honeycomb) is installed in the flow passage of the CMLSeries, the length in the straight pipe sections can be shortened.

Even when this CML Series is mounted at the downstream side of an elbow

type pipe, the straight pipe section is not necessary.

1

Page 8: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

2

System configuration example

Model selection guideBasic Pipe size Model Material Connecti- Gas Output Power Commu- Mounting Option 1 Option 2 Append- Description

model No. type on method type supply nication direction ed

CML High-Flow Mass Flow Meter

050 Pipe size 50A (2B)

080 Pipe size 80A (3B)

100 Pipe size 100A (4B)

150 Pipe size 150A (6B)

0 Applicable pressure range 0 to 1MPa

S Material of major parts SUS304/SCS13

J JIS10KRF Flange

NAir, Nitrogen (Setting can be changedto standard compatible gases *1)

S Oxygen *3

0 4 to 20mA output + Integration pulse output

F Multi-voltage power supply 85 to 264Vac *4

1 RS-485 Communications

0 Horizontal (Flow direction:left to right) *2

1 Horizontal (Flow direction:right to left) *2

2 Vertical (Flow direction:upward) *2

3 Vertical (Flow direction:downward) *2

0 Without optional function

1 Gas-contacting parts treated to be oil free

0 Without optional function

D Inspection certificate providedY Inspection certificate provided+

complying with the traceability certificationK Inspection certificate provided+

complying with the traceability certification+calibration certificate provided

0 Product version

i*1. Standard compatible gases indicate air/nitrogen, natural gas 13A (LNG), argon,butane, propane and carbon dioxide. The setting of this device can be changedby key operation.

*2. Specify at the order entry. Cannot be changed after delivery.*3. When gas type S is selected, specify the code 1 (oil free treatment) at option 1.*4. The model of 24Vdc power supply can be supplied as a special order.

LOADER

power

SD

RD

SD

RD

HO

ST CM

CC

MC

LOC

AL

CM

C AD

DR

ESS

789

12

0

345

678

9

12

0

HOST CMCB.RATE

ERR

RESET

CMC10

11

12

13

14

15

CMC10G

PLCSmart terminalEST-Z series

Pulse counterPCG13

PLC etc.

Pulse outputEvent output

4 to 20mAinstantaneous flowrate

output

ControllerSDC series etc.

CMLRS-485 Communications

Chapter 1. INTRODUCTION

Page 9: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

3

Gas type and flowrate range

*1 01: Oxygen can be selected only for oxygen models.

*2 Refer to;

Chapter 6. Specification (page 24).

Chapter 1. INTRODUCTION

Gas typeGas type Flow range [m3/h(normal)]

setting S-08 CML050 CML080 CML100 CML150

Air, Nitrogen 00 0 to 160 0 to 400 0 to 650 0 to 1600

Oxygen 01 *1 0 to 160 0 to 400 0 to 650 0 to 1600

Carbon dioxide(CO2) 02 0 to 120 0 to 300 0 to 480 0 to 1200

Argon 03 o to 160 0 to 400 0 to 650 0 to 1600

Natural gas13A(46MJ) *2 04 0 to 160 0 to 400 0 to 650 0 to 1600

Butane *2 05 0 to 50 0 to 120 0 to 190 0 to 480

Propane *2 06 0 to 60 0 to 140 0 to 220 0 to 500

Natural gas13A(45MJ) *2 09 0 to 160 0 to 400 0 to 650 0 to 1600

Page 10: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

Chapter 2. NAMES AND FUNCTIONS OF PARTS

4

(Note) There are 3 wiring connection ports.

The water-proof gland is assembled at only one upper location when

shipped from factory.

Other two water-proof glands are attached. The figure shows that the

glands are assembled to all 3 locations.

kPa

EV3

M O D E ENT

X 10l3

m

3l/minm/h

EV1 EV2 CML

Meter FlowMass

kPa

EV3

MODE ENT

X 10l3

m

3m/h

EV1 EV2 CML

Meter FlowMass

Self-standing prevention bracketsUsed when this device is temporarily placed on the ground.Dismount after pipe installation.

Display and setting sectionUsed for the display of instantaneous flowrate, integrated flowrate, alarm status and error, and for the setup of this device

Terminal boxThe wiring of the power supply, instantaneous flowrate output, integrated pulse output, event output and integration reset input are connected.

Wiring connection port(with a water-proof gland)

FlangeThis is JIS10K RF flange andconnected to the pipe.

DownstreamConnection at the

downstream side of gas flow.

UpstreamConnection at the

upstream side of gas flow

MODE key: Used at the parameter setup.↑, ↓ key: Used when the parameter setting value is

changed or the temperature / pressure displayis switched.

ENT key: Used to fix and store the setting value.

EVENT LEDEV1, EV2: Lights when event output is on.EV3: Lights when self-diagnosis output is on.

Instantaneous flowrate display 5 digits (m3/h)

Integrated flowrate display 9 digits (m3)

Pressure unitindication

Switches

Eyebolt

EyeboltUsed when this device is mounted on the piping or hung up by a crane.Dismount after piping.

Built-in filterAttached as standard except oil free model to protect CML internal.Do not remove in ordinary use.

Page 11: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

Chapter 3. MOUNTING AND WIRING

Handling Precautions• This device is a precision instrument. Do not drop it nor subject it to

shock. Doing so might damage the device.

• When connecting to the pipe, be sure to check that there is noinclination of pipes nor any pipe center line misalignment, and theninstall the device. Doing so might cause leakage.

• When mounting the device, firmly fasten to prevent vibration.

• When used outdoors, protect from direct sunlight.

• If rust, oil mist or dust powder flows into the pipe, provide a strainer atthe upstream side so that the foreign matter does not flow into thisdevice. Any foreign matter might cause malfunction.

• When wiring, take care not to tug the display.The components inside might become damaged.

• Separate the wires of 4 to 20mA output, open collector output andcommunication from power lines, and do not lay in the same conduit.Doing so might cause faulty operation.

• Provide a main power supply shutdown switch of this device within thereach of the operator for this device.

• The common mode voltage between output and ground is less than 33Vr.m.s., 46.7V peak and 70Vdc, excluding power supply and relay contactoutput.

• Dismount the eyebolt after completion of piping work.

• Make sure that the gas flows in the direction of the arrow on the side ofthe body. If the gas flows in the opposite direction, it cannot bemeasured accurately.

5

WARNINGIf this device is used for measuring natural gas 13A or propane, mount it onthe upstream side of the safety shutoff valve.If somehow air gets into the pipes and an explosive mixture is produced, andif the sensor makes a spark due to lightning or some other reason, the gasmixture in the pipes could explode.

Do not step on this device or installed pipes. Doing so might damage thedevice or the pipes, or might cause physical injury.

The weight of this device is 14 to 45kg, depending upon the model. Whenmoving or transporting this device, take the precaution of using appropriateequipment or handling with two or more persons. Careless lifting and fallingcould cause injury or damage.

CAUTIONDo not mount with the display facing down.Doing so might cause measurement error or equipment failure.

After the piping work is complete, remove the self-standing brackets.Otherwise someone might bump into them and be injured.

Page 12: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

6

Installation siteAvoid mounting this device in the following locations:

• Locations whose ambient temperature falls below -25˚C and rises above +60˚C

• Locations whose ambient humidity exceeds 90%RH

• Locations subject to sudden changes in temperature and condensation

• Locations be filled with corrosive gases and flammable gases

• Locations where there are lots of conductive substances (e.g. dust, salt or iron

dust), or organic solvents

• Locations subject to vibration or shock

• Locations subject to direct sunlight

• Locations subject to splashing by fluids (e.g. oil, chemicals.)

• Locations where strong magnetic or electrical fields are generated

Handling Precautions• This device may be installed outdoors, but it is advisable to shield it from

direct sunlight. In direct sunlight its temperature will rise, possiblycausing malfunction or equipment failure.

• To facilitate maintenance, hold enough space to check the terminal box,as shown in the photograph below.

400mm

400mm

GasGas

* Make sure that the gas flows in the direction of the arrow on the side of the body. If the gas flows in the opposite direction, it cannot be measured accurately.

Gas Flow

Chapter 3. MOUNTING AND WIRING

Page 13: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

7

Behavior when the flowrate greatly exceeds the upper limit of flowrate range

When the flowrate exceeds the upper limit of flowrate range, both the flowrate

display and the output voltage/current may indicate lower values than the actual

flowrate. Be sure to use this product within the flowrate range stated in the

specifications.

If the actual flowrate exceeds 120 % of the upper limit, both the flowrate display

and the output voltage/current will stop increasing in proportion to the flowrate.

If the flowrate is more than 200 % of the upper limit, both the flowrate display and

the output voltage/current will begin to decrease, giving the appearance that the

flowrate is within the flowrate range limits.

Also, if there is a sudden greatly excessive flowrate (200% of the upper limit or

more) for a very short period, the flowrate display and the output voltage/current

will continue to indicate flow within the flowrate range, without indicating the

spike.

Especially when this device is used for flow control, make sure to take appropriate

measures, such as controlling the supply pressure or using a throttle valve, so that

even at maximum control output, the flowrate does not exceed 120% of the upper

limit.

Actual flowrate

Flowrate displayand

output voltage/current

Flowrate range

100%Upper limit

200%120%

Chapter 3.MOUNTING AND WIRING

CAUTIONBe sure to use this device within the flowrate range stated in thespecifications. To prevent excessive flow, use a suitable means to control thesupply pressure or use a throttle valve or the like to control the flowrate. If theflowrate exceeds the upper limit, both the flowrate display and the outputvoltage/current may indicate considerably lower values than the actualflowrate.

If damage could result from the abnormal functioning of this device, includeappropriate redundancy in the system design.

Page 14: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

8

Pipes Precautions for piping installation

This device is a precision instrument. Entering of foreign matter such as dust,

water or oil mist might cause faulty operation or measurement error. For piping

installation, follow the guidelines below and install so that no foreign matter enters

the device.

• Before mounting the device, flush thoroughly to clean the inside of the

upstream and downstream pipes to eliminate welding fumes or dust.

• Wipe clean the inside of pipes to be connected to this device.

• When installing this device, be sure to provide the bypass piping as shown below.

Also, for the valves before and after this device, use a ball valve like as having

the structure which does not disturb the gas flow.

• Install a straight pipe section in upstream side and downstream side.Refer to the drawings below for the length of upstream pipe section. D indicatesthe pipe size. In case of a same diameter pipe, a straight pipe section in thedownstream side may not be required. Except in a case of a same diameter pipe,locate a straight pipe section with 2D length in the downstream side.

5D min. 5D min.

5D min.5D min.

5D min.

A straight pipe section in upstream side

CML

CML

CML CML

CML

CML

CML CML

CML

CML

90° elbow

FC type filter(Kimmon)

MFF300-L type filter

MFF100 filter(Azbil Corporation)

MFF300-Y typefilter

T-piping

Gate valve(full open)

Various valves

Reducing pipe (considered to be a straightpipe section.)

Enlarging pipe with more than 15° circularcone angle (The pipe section with less than15° circular cone angle isconsidered to be a straightpipe section.)

Unnecessary Unnecessary

Unnecessary

Unnecessary

Unnecessary *

* To connecting this filter, a pipe with thread, a flange adaptor or a DIN-JIS flange adaptor is needed.

Downstream side valveUpstream side valve

CML

Valve

Filter

Chapter 3. MOUNTING AND WIRING

Page 15: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

9

• If the oil, water or dust is contained in a fluid, install a device to remove them.

If the oil, water or dust is contained in a fluid, they might cause measurement

error or faulty operation.

• Remove the water using a dryer so that it does not cause dew condensation

in the pipe.

• Use a dust-eliminating filter of less than 1µm mesh.

• Use an oil-eliminating mist separator with the eliminating capability of

residual oil density less than 0.01mg / m3.

Specifications of filter: For details,

Azbil Corporation's Specification sheet CP-SS-1824E.

• Do not install at a location receiving the influence of pulsating flow.

• Do not install this device at the location near the exit of compressor. At the

location near the exit of compressor the strong pulsating flow is caused and

there might be a dispersing of iron powder depending on the compressor type,

there is a possibility of causing faulty operation.

Note

As shown in the below figure, provide the devices eliminating the foreign

matters such as oil, water and iron powder, and install a receiver tank as the

measures against pulsating flow ; at the upstream of CML series.

• Take an effective measures in case of installation near the pump.

When installed this device near the pump, there is a possibility to be received

the influence of pulsating flow. Install a receiver tank between the pump and

this device to suppress the influence of pulsating effect as much as possible.

Handling Precautions• If foreign matter cannot be fully eliminated by flushing or wiping, or if

the regular presence of foreign matter can be expected, be sure toinstall a filter. If dust, oil or moisture adheres to the metallic mesh or tothe µF sensor chip, measurement error or faulty operation may result.

FilterAir tank Dryer Mist separator

Receivertank

CMLCMLF F

Compressor Compressor (screw type, etc.)

Chapter 3. MOUNTING AND WIRING

Page 16: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

Built-in filter

Except for the oil free model, CML flowmeters have a built-in filter on the

upstream side and the downstream side as a standard equipment (models with the

number CML SJN0F1 0 ).

Its purpose is to temporarily protect the CML from dust during piping work. If a

large amount of dust enters the filter, pressure loss could become great enough to

stop the gas flow.

Handling Precautions• If there is a large amount of dust, or if there is a danger that dust will

regularly enter the CML, be sure to install a filter separately.For filters,

Azbil Corporation's Specification sheet CP-SS-1824E.In addition, since the built-in filter cannot eliminate water or oil, installa filter in that case.

The built-in filter might cause pressure loss as shown on page 27. If no dust

entered the filter at all, and if decreased pressure loss is desired, remove the built-

in filter to obtain the pressure loss levels shown on page 28 and 29.

Removing the built-in filter

(1) Pull the tab on the packing that holds the built-in filter,

and remove the packing.

(2) For a filter in the downstream side, hook a C type-

retaining ring with a small flat-head screwdriver and

remove it.

(3) Remove the built-in filter

If it is hard to remove the filter, use adhesive tape to

remove it as shown in the photograph.

10

Chapter 3. MOUNTING AND WIRING

Converter

Detector

Flowdirection

Wire mesh Honeycomb Micro flow sensor

Built-in filterAttached as normally toprotect CML internalsensors.Do not remove this filter in ordinary use.

Built-infilter

Tab on packing

C ring

Page 17: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

11

Chapter 3. MOUNTING AND WIRING

Filter installationIf foreign matters in a gas adhere to the sensor of this device, it may cause faulty

operation or measurement error. Be sure to install a filter below.

(1) Filter for natural gas

• FC type filter (Product of Kimmon Co.)

Operating pressure range: 0 to 0.3MPa

Filter element: Built-in

• FDSNC type filter (Product of Kimmon Co.)

Operating pressure range: 0 to 0.98MPa

Filter element: Built-in

• MFF300-Y type filter

Operating pressure range: 0 to 0.98MPa

Filter element: Built-in

• MFF300-L type filter

Operating pressure range: 0 to 0.98MPa

Filter element: Built-in

(2) Filter for gas contained oil mist constantly, such as com-

pressed air, propane and butane gas

Model No.: MFF100 series

For about specifications,

See Specification sheet CP-SS-1824E.

FC type filte

(Product of Kimmon Co.)

Spare filter element of FC type filter (Product of Azbil Corporation)

Bore Model Number50A 80394037-00180A 80394038-001100A 80394039-001150A 80394040-001

FDSNC type filter

(Product of Kimmon Co.)

Spare filter element of FDSNC type filter(Product of Azbil Corporation)

Bore Model Number50A 80394057-00180A 80394057-002100A 80394057-003150A 80394057-004

Page 18: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

Pipe installation

Handling Precautions• Be sure to flush the inside of the pipe before installation of this device to

eliminate any foreign matter which might exist inside the pipe.

Mounting the gasketA gasket is required for flange connection.

Refer to the table below for the inside diameter of gasket.

Handling Precautions• If the inside diameter of the gasket is too

small, it might disturb the flowstraightening condition inside of thisdevice and cause inaccuracies.

• If the inside diameter is too large, it might cause leakage.

Flange shapeUse a flange which can secure a large contacting area with a gasket.

Good example Bad example

Flange

Welded part

Pipe

Welded part

(As the contact area with a gasket is small, there is a fear of leakage.)

12

Chapter 3. MOUNTING AND WIRING

WARNINGThe wieght of this device is 14 to 45kg, depending upon the model. Whenmoving or transporting this device, take the precaution of using appropriateequipment or handling with two or more persons. Careless lifting and fallingcould cause injury or damage.

CAUTIONDo not flush when this device is in the pipe. If foreign matter enters thisdevice it could cause equipment failure or errors in measurement.

To prevent leakage from the pipes, tighten bolts to the specified torque.Otherwise a leak could occur.

Purge and thoroughly clean the inside of pipes that is upstream anddownstream of this device to remove welding fumes and dust. Failure to doso might cause the flowmeter to break down due to entry of foreign matter.

Pipe size Inside diameter of gasket(Reference value)

50A 61mm

80A 90mm

100A 115mm

150A 167mm

Page 19: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

13

Chapter 3. MOUNTING AND WIRING

Flange connectionTighten the flange with bolts.

Tightening torque

(The value in parentheses

indicates reference.)

Handling Precautions• Tighten bolts diagonally and uniformly. If a leak remains after

tightening bolts, tighten the bolts little by little.

• Tighten bolts within the specified tightening torque.Otherwise, the bolts may be damaged.

• Do not forcibly insert the CML into the narrow space than the face-to-face dimension of flanges. Doing so might cause leak or damage.

• Take care so that the pipe inclination or pipe center line misalignmentdoes not occur.

Pipe inclination Pipe center line misalignment Pipe center line misalignment

Pipe size Torque Unit : N • m(kgf • cm)

50A 37 to 47 (378 to 480)

80A 26 to 36 (265 to 367)

100A 32 to 42 (327 to 429)

150A 64 to 74 (653 to 755)

Page 20: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

Wiring

Opening the terminal case Required item: Phillips-head screwdriver

(1) Loosen 4 screws on the terminal box (2) Dismount the terminal (3) Connect to each terminal.

using a philips-head screwdriver. box cover.

Wiring connection example

*1: Terminals No.17 and No.19 are connected with a shorting bar.

*2: In case of a counter with voltage input type, a pull-up resistor is needed.

P1, P2

GND

GND

Pulse output circuit

+5V

IN

Input circuit

Internal circuitGND

EV1, EV2,EV3

COM

Event output circuit

19

18

17

16

15

14

13

12

11

10

9

8

7

6

5

4

3

2

COM

EV1

P1

EV2

EV3

P2

I-

I+

RDB

SDB

SG

IN

AC N

AC L

SDA

RDA

GND

FG

1

Multi-voltage power supply85 to 264Vac50/60Hz

IN

DC power supply(30V max.)

30Vdc max. or250Vac max.

Connection to RS-485 communication(Terminating resistor is not providedfor the CML.)

250Ω resistor or 4 to 20mA input device

EV3 EV2 EV1

Input0V

Input0V

Pull-up resistorCounter(voltage input type)

Counter(no-voltageinput type)

*1

*2

14

Chapter 3. MOUNTING AND WIRING

CAUTIONBe sure the load connected to the output terminals does not exceed the ratedvalues given in the specifications. An excessive load could damage thisdevice.

After wiring and before turning the power on, be sure to check that the wiring,the polarity of the power supply, etc., are correct. Wiring error could causedamage or malfunction.

Page 21: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

15

Chapter 3. MOUNTING AND WIRING

Terminal layout

Handling Precautions• Connect each terminal securely using crimp type terminal lugs to ensure

firm contact area.

• Use crimp type terminal lugs applicable to M3.5 screw.

• Be sure that the tightening torque of terminal screw is less than 0.8N•m.

• Use the JIS C 3401 cables for control (CVV etc.) of less than 2.2mm dia.for the wiring except RS-485 communications.

• Use the twisted-pair shielded cables for the wiring of RS-485communications. Be sure to apply terminating resistors (150Ω 1/2W).

• The pulse output and input circuits are not insulated, and the GNDterminal and the GND internal circuit are connected.

• The 4 to 20mA instantaneous flowrate output is insulated.

• The COM for the event outputs and self-diagnostic output is commonlyused and is insulated from the internal circuit.

• Terminals No.17 and No.19 are connected with a shorting bar.

FUSE

I-EV2

I+

COMEVRDBSDBS.G.P2NL

POWER AC

EV1EV3RDASDAINP1GNDFG

WARNING

135791113151719

2468101214

Terminal Signal DescriptionNo. name1 I+ 4 to 20mA Instantaneous flowrate output (+)2 I- 4 to 20mA Instantaneous flowrate output (-)3 EV1 Instantaneous flowrate upper limit event4 EV2 Instantaneous flowrate lower limit event5 EV3 Self-diagnosis output6 COM Event output common7 RDA RS-485 communications8 RDB9 SDA

10 SDB11 IN Integrated count reset input12 SG RS-485 communications13 P1 Integrated pulse output 114 P2 Integrated pulse output 215 GND Integrated output, reset input common16 ACN Power17 Internal GND (wiring not required)18 ACL Power19 FG Earth (ground)

Page 22: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

Treatment on wiring connection portTwo methods in drawing out the wires are available.

• Cable connection: Use a cable of 6 to 12mm outside diameter when using a

water-proof gland.

• Conduit connection: For the connection of a flexible conduit, dismount the

water-proof gland and then directly connect the conduit.

The connection of conduit is recommended for the outdoor

use.

Three wiring connection ports are available.

When shipped from factory, the water-proof gland is assembled on only one top

location. When there are many wires, remove the plug, apply the attached water-

proof gland, and then draw out the wires.

Handling Precautions• The wiring connection port size is G1/2 female thread.

16

Chapter 3. MOUNTING AND WIRING

Page 23: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

Chapter 4. OPERATION

17

Flowrate displayThe display content is different according to the function setup.

In the default setting, the upper 5-digit LCD display indicates

the instantaneous flowrate, and the lower 9-digit LCD display indicates the

integrated flowrate.

Temperature and pressure displayWhen [S-02: Display mode] is set to 02 in the function setup, the pressure is

indicated by pressing the key, and the temperature is indicated by pressing the

key.

For the display mode setup,

Function setup item list (on page 19).This device has two kinds of setups: the function setup and the parameter setup.

Integrating display and integrated count resetting functionWhen [S-02: Display mode] is set to 0 1 or 02 in the function setup, the lower

display in the display and setting section indicates the integrated flowrate in

the range of 0 to 9999999.99 (unit: m3).

To reset the integrating count, connect the integrated count reset input signal

(terminal No. 11 IN) to the signal ground (terminal No. 15 GND).

Hold the integrated count reset input signal ON for 500ms or longer as shown in

the following figure:

Min. 500ms

ON

OFF

Page 24: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

18

Chapter 4. OPERATION

Function setup(1) When the display indicates the instantaneous flowrate value or integrated

flowrate value, press the and keys together for 3s or longer.

(2) The [ ] sign lights, and the function type is indicated in the instantaneous

flowrate display, and the setup content is indicated in the integrated flowrate

display.

At this moment, the lower 2 digits indicate the current setting value. Also, the

function type (number) blinks.

Display example

(3) Pressing the key moves the setup to the next mode number. Pressing the

key returns the setup to the previous mode number.

Pressing the key again while S-32 is displayed returns the display to S-0 1.

Pressing the key while S-0 1 is displayed moves the display to S-32.

(4) When the setup value has become the target mode number, press the key

while the value is blinking.

(5) The mode number is selected. The mode number lights, and the setup (number)

blinks.

(6) Press the or key to select the target setup value in the lower 2 digits of the

integrated flowrate display, and then press the key.

(7) The setup value is fixed and lights.

(8) When continuing the setup, press the key again and repeat the (3) to (7)

operations.

Handling Precautions• Pressing the key during (2) to (3), and (7) operations returns to

instantaneous flowrate display.

• Pressing the key during (5) to (6) operations returns the displaysection to (2) operation.

MODE

MODE

ENT

ENT

ENT

Setup completeSetting

(lights)

Function setup Normal mode display(Instantaneous andintegrated flowrate display)

S-02 S-02 S-02

01 01 01

ENT

MODE MODE

ENT

ENT

(blinks)

(blinks)(lights) (lights)

(lights)(lights)

(lights) (lights)(setting status) (setting status) (setting status)

MODE

Page 25: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

19

Chapter 4. OPERATION

Function setup item list

*1: For details of ON delay; Parameter setup item table (page 21).

*2: The gas type selection function enables the user to change the gas type to be used. When the gas type ischanged, the measurement flowrate range is changed due to the thermal diffusion coefficient difference.For the measurement flowrate range;

Gas type and flowrate range (page 3).

Handling Precautions• When [S-0 1: Key lock] is set to [0 1: Key lock enabled], the display and

setup of S-02 to S-32 are both disabled. Be sure that the display andsetup of the parameters P-0 1 to P- 16 are also disabled.

• When S-0 1 is returned to [00: Key lock disabled], the display and setup of allsetup items become to be enabled. Even if the operations of key lock enabledand disabled are repeated, the function and parameter setup data are kept.

Mode Function Setting Setup Factory Remarksvalue setting

S-01 Key lock 00 Key lock disabled 00 Other modes cannot be entered01 Key lock enabled in a key lock state.

S-02 Display mode 00 Only instantaneous flowrate displayed 01 Pressing the or key indicates the01 Instantaneous flowrate and temperature or pressure.

integrated flowrate displayed02 Instantaneous flowrate, integrated

flowrate, pressure and temperature displayed

S-04 Event 2 setting 00 Instantaneous flowrate lower limit event 00 When selecting the instantaneous (EV2) 01 Pressure decrease event flow rate lower limit event, set the

desired flow rate limit in parametersetup P-02. When selecting thepressure decrease event, set thedesired pressure limit in parametersetup P-12.

S-05 ON delay setting 00 Not used 00 EV1 is the instantaneous flowrate(EV1) *1 01 Used upper limit output.

S-06 ON delay setting 00 Not used 00 EV2 is the instantaneous flowrate(EV2) *1 01 Used lower limit output.

S-07 Event standby 00 Not used 00 Exclusive for EV2setting 01 Used

S-08 Gas type selection 00 Air / Nitrogen 00 The default setting is set to 0 1 :*2 01 Oxygen (01) Oxygen for the oxygen model.

02 Carbon dioxide 0 1 is selectable only for the oxygen 03 Argon04 Natural gas 13A (46MJ)05 Butane06 Propane09 Natural gas 13A (45MJ)

S-12 Low flow cut setting 00 Not used 01 Qmax means the maximum value in 01 Qmax X (1/1280) flowrate range.02 Qmax X (1/320)03 Qmax X (1/160)

S-14 Pulse weight 00 10L / pulse 02 Used for setting the integrated pulse01 100L / pulse output 1(P1). The pulse weight for02 1000L / pulse the integrated pulse output 2 (P2) is

fixed to 1L/pulse.5-15 Burnout selection 00 Downscale 00 The output value at the measurement

01 Upscale failure (E28 or E90 displayed) is set.At the downscale setting, the output isapprox.1.0mA. At the upscale setting,the output is the value set at P- 15 inthe parameter setup mode.

S-30 Station address 00 Communications function disabled 00 Communication function is disabled01 Station address when set at [00].to (hexadecimal) Set an address different from other7F slave stations.

S-31 Transmission speed 00 9600 bps 01 Set the transfer speed with the01 4800 bps connected devices.

S-32 Data format 00 8bits, even parity, 1 stop bit 01 Set the communication condition01 8bits, no parity, 2 stop bits with the connected devices.

Page 26: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

Parameter setupTo setup the parameter, the function setup has to be set to the parameter setup

enable setup.

(1) Be sure that S-0 1 is set to [00: Key lock disabled].

(2) To enter the parameter setup mode, hold the and keys together for 3s or

longer.

(3) In the parameter setup mode, [P-] is displayed. The parameter item is

indicated in the instantaneous flowrate display. The current setup value is

indicated in the integrated flowrate display. Also, the parameter item (number)

blinks.

Display example

(4) Pressing the key moves the setup to the next item. Pressing the key returns

the setup to the previous item.

(5) Pressing the key again while P-0 1 is displayed returns the display to P- 16.

Pressing the key again while P- 16 is displayed returns the display to P-0 1.

(6) Press the key to set at the target item is indicated.

(7) The parameter item lights, and the lowermost digit of the setup value blinks.

(8) If you press the key, the blinking cursor moves to the left.

(9) Pressing the or key increments or decrements the blinking digit value. To

change the setup value at each of these digits, use the or key.

(10)After setting to the target setup value, press the key.

(11)All digits of the setup value light. In this state, the setup value has not yet been

saved. Press the key again.

(12)The setup value is fixed, and the parameter item (number) blinks. If the setup

value is different from the current value, the setup value has been saved.

(13)To continue the setup, repeat the (3) to (12) operations.

Handling Precautions• Pressing the key during (2) to (5), and (11) operations returns to the

instantaneous flowrate display.

MODE

ENT

ENT

8.8.8.8. 8.8.8.8.MODE

MODE

ENT

ConfirmationSetup

completeSettingParametersetup

Return to normal display without saving(Instantaneous and integrated flowrate display)

P-02 P-02 P-02

0000 0070 0070

ENT

MODE

MODE

ENT ENT

ENT

(blinks)

(blinks)(lights)

(Fixed)

(lights)

(lights)(lights) P-02

0070

(blinks)

(lights)

Normal display(Instantaneous andintegrated flowratedisplay)

(lights) (lights) (lights) (lights)(setting status) (setting status) (setting status) (setting status)

MODE

Chapter 4. OPERATION

20

Page 27: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

21

Chapter 4. OPERATION

Parameter setup item table

P-0 1 :When the instantaneous flowrate exceeds the upper limit setting value, the

event turns ON.

When the instantaneous flowrate downs below the upper limit value, the event

turns OFF.

P-02 :When the instantaneous flowrate downs below the lower limit setting value, the

event turns ON.

When the instantaneous flowrate exceeds the lower limit value, the event turns

OFF.

P-03 :The conditions to turn the event OFF after the instantaneous flowrate exceeds

the upper limit value and then the event turns ON are set to the hysteresis.

[Event OFF conditions] = [Instantaneous flowrate upper limit value] - [EV1 hysteresis setting value]

ON

OFF

EV1

EV1 Hysteresis

Parameter Item Factory setting Description Remarks

P-0 1 Instantaneous flowrate 160(CML050) 0 to 9999m3/h Instantaneous flowrate upper limitupper limit value (EV1) 400(CML080) event is set.

650(CML100)1600(CML150)

P-02 Instantaneous flowrate 0 0 to 9999m3/h Instantaneous flowrate lower limitlower limit value (EV2) event is set.

Enabled when S-04 (Event 2setting) in the function setup isset to "00: Instantaneous flowrate lower limit event."

P-03 EV1 Hysteresis 0 0 to 100m3/h -

P-04 EV2 Hysteresis 1 0 to 100m3/h Applies to the event set in S-04or kPa (Event 2 setting) in the function

setup.

P-05 EV1 On delay 0 0 to 60 (s) -

P-06 EV2 On delay 0 0 to 60 (s) -

P-08 User setup gas 100.0 10.0 to 450.0% Multiply the measured amount conversion factor of the gas that is selected in

function setup S-08 (Gas typeselection) by the conversionfactor.

P- 1 1 Reference temperature 0 0 to 35°C -

P- 1 2 Pressure decrease event 0 0 to 1000kPa Sets the desired pressure for the setting value(EV2) pressure decrease event.

Enabled when S-04 (Event 2setting) in the function setup isset to "01: Pressure decreaseevent."

P- 15 Burnout value setting 125 0 to 125% "0%" corresponds to 4mA, and"100%" corresponds to 20mA.

P- 16 4 to 20mA output 0 0 to 9999m3/hspan setting

Page 28: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

P-04 :The conditions to turn the event OFF after the instantaneous flowrate fallsbelow the lower limit value and then the event turns ON are set to thehysteresis.[Event OFF conditions] = [EV2 setting value]+[EV2 hysteresis setting value]The EV2 setting value is either the instantaneous flow rate lower limit or thepressure decrease event lower limit, depending on the selection in functionsetup S-04.

P-05 :The event ON delay time after the instantaneous flowrate exceeds the upperlimit value is set.

P-06 :This determines the delay time before the event turns ON, after theinstantaneous flow rate falls below the preset lower limit (or after the pressuredecreases below the preset lower limit).

P-08 :Gas conversion factor is set when the gas other than the standard compatiblegases is used. When setting the conversion factor, contact the azbil Group.

P- 1 1 :When this setting is changed, the maximum measurement range and theindication flowrate range are changed from the flowrate range of factory settingwhich refers to 0˚C to the converted flowrate range at the setting temperature.The maximum value Q(t) can be calculated as follows where the maximumflowrate at 0˚C conversion is Qmax and the setting temperature is t(˚C):

Q(t)=Qmax x (273+t) / 273

P- 1 2 :This setting is enabled when S-04 (Event 2 setting) is set to "01: Pressuredecrease event." When the pressure falls below the value set here, the event isturned ON. When it increases above the lower limit, the event is turned OFF.

P- 15 :This setting is enabled when S- 15 (burnout selection) is set to [0 1: Upscale].

P- 16 :• When set to 0;

the maximum measurement flowrate which is defined by the condition ofS-08 (gas type selection) and P- 1 1 (reference temperature setting) isautomatically set as the 20mA flowrate.

• When set to 1 to 1/16 of maximum measurement value in air;the setting value is invalid. The output is the burnout output value.

• When set to 1/16 of maximum measurement value in air to 9999;the output is 20mA when the flowrate is equal to the setting value.The span is fixed even if the conversion temperature is changed.

Handling Precautions• When S-0 1 is set to [0 1] in the function setup, the display and setup ofP-0 1 to P- 16 are disabled. For the parameter setup, set S-0 1 to [00].

ON

OFF

EV2

EV2 Hysteresis

22

Chapter 4. OPERATION

Page 29: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

Chapter 5. TROUBLESHOOTING

23

Refer to the following table if trouble occurs:

*1 : If either of E21 or E23, or either of E22 or E24 has occurred, the measurement can be maintained by

backup function. If E21 or E23 occurs while the flow is stopped, there may have been a temporary reverse

flow. If so, the error is automatically fixed as soon as gas flows again in the correct direction. However, if

E21, E22, E23, or E24 is displayed for a long time, the cause may be sensor malfunction rather than reverse

flow. Continued measurement may be possible, but the degree of measurement accuracy given in the

specifications cannot be guaranteed in this situation. Contact the azbil Group and ask for repair.

*2 : If the instantaneous flowrate display shows minus value when E27 or E28 is displayed, there is a possibility

that the flow is reverse against the correct flow direction. In this case, check the flow direction.

If this is displayed when the flow direction is correct, the cause is sensor error.

Contact the azbil Group and ask for repair.

Observation RemedyNothing on • Make sure that the correct power voltage being applied and the polarity are correct.display • Make sure that the electric wires are connected.E21 The flow sensor 1 for low flowrate range becomes failure. *1E22 The flow sensor 1 for high flowrate range becomes failure. *1E23 The flow sensor 2 for low flowrate range becomes failure. *1E24 The flow sensor 2 for high flowrate range becomes failure. *1E25H Pressure sensor error, or the pressure has exceeded the operating pressure range.

If this error code is displayed within the allowable operating temperature range or operatingpressure range, the cause is sensor error.Contact the azbil Group and ask for repair.

E25L Pressure sensor error, or the pressure has fallen below the operating pressure range.If this error code is displayed within the allowable operating temperature range or operatingpressure range, the cause is sensor error.Contact the azbil Group and ask for repair.

E26H Temperature sensor error, or the gas temperature has exceeded 70°C.If this error code is displayed within the allowable operating temperature range or operatingpressure range, the cause is sensor error.Contact the azbil Group and ask for repair.

E26L Temperature sensor error, or the gas temperature has fallen below -30°C.If this error code is displayed within the allowable operating temperature range or operatingpressure range, the cause is sensor error.Contact the azbil Group and ask for repair.

E27 The flow sensor 1 or 2 for low flowrate range becomes failure. *2E28 The flow sensor 1 or 2 for high flowrate range becomes failure. *2E90 Memory data error

Contact the azbil Group and ask for repair.The display is Check the pipe for any gas leaks.other 0.0 eventhough theinstantaneousflowrate shouldbe zero.Flowrate • Check the piping for any gas leaks.deviates • Check the piping and connection ports are adhered with dirt, oil or other foreign matter.

If oil or dirt is adhering to these parts, contact the azbil Group and ask for repair.• Check the wiring is correct.• Check the gas flow does not vary widely within a few seconds, or does not greatly exceed the

measurement range.

Page 30: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

Chapter 6. SPECIFICATIONS

24

Specifications

Item DescriptionCML050 CML080 CML100 CML150

Applicable gas Air / Nitrogen, Natural gas 13A (LNG) *1, Propane *2, Carbon dioxide, Oxygen, Butane *3, ArgonNote; The gas must be a dry gas not containing corrosive component (chlorine, sulfur, acid, etc.), andmust also be a clean gas not containing dust or oil mist.

Flowrate range 160m3 / h (normal) 400m3 / h (normal) 650m3 / h (normal) 1600m3 / h (normal)(in air or nitrogen) "normal" refers to the volumetric flowrate (m3 /h) after converting to 0°C, 101.325kPa (atmospheric

pressure)Measurement accuracy ±3%RD 1.0≤ X <8.0 ±3%RD 2.5≤ X <20.0 ±3%RD 4.0≤ X <32.5 ±3%RD 10.0≤ X <80.0(Total accuracy includ- ±2%RD 8.0≤ X ≤160.0 ±2%RD 20.0≤ X ≤400.0 ±2%RD 32.5≤ X ≤650.0 ±2%RD 80.0≤ X ≤1600.0

ing repeatability, and differfrom flowrate Xm3/h Calibration reference at 23±3°C, atmospheric pressure.

Temperature characteristics 0.05%RD / °C (-25 to +60°C)Pressure characteristics 0.2%RD/0.1MPa (0.0 to 1.0MPa)Operating pressure range 0.0 to 1.0MPaPressure resistance 1.5MPaSampling cycle 160ms ±10%Instantaneous flowrate 4 to 20mAdc (Allowable load resistance 600Ω max.)output Burnout output : 1mA max., at downscale , 24.0mA max. at upscale.Event output SPST relay contact (3 points / common)(3 points) Contact rated: 250Vac / 30Vdc, 3A max. (resistive load)

Min. ON/OFFspecifications: 100µA, 100mVEvent Functions Setting range Hysterisis On delay EventNo. (fixed) time standbyEV1 Instantaneous flowrate 0 to 9999m3/h 0to 100m3/h 0 to 60s -

upper limit (Variable) (Variable)EV2 instantaneous flowrate 0 to 9999m3/h 0to 100m3/h 0 to 60s valid

lower limit (Variable)Pressure decrease 0 to 1000kPa 0 to 100kPaevent

EV3 self-diagnosis output Output when error occurs (EXX indicated).Integrated Pulse NPN open collector output rating: 30Vdc, 50mA max.pulse output 1 Pulse rate: 10L/pluse, 100L/pluse, 1000L/pluse (set by key operation)output (P1) Pulse frequency: 0.0003 to 60Hz Pulse width: 8.3 to 1000ms (50% duty fixed)(2 points) Pulse NPN open collector output rating: 30Vdc, 50mA max.

output 2 Pulse rate: 1L/pulse (fixed)(P2) Pulse frequency: 0.0003 to 601Hz Pulse width: 0.83 to 1000ms (50% duty fixed)

Integrated count reset Input type : No-voltage contact or open collectorinput (1 point) OFF terminal voltage: 3.5±1V

ON terminal current: approx. 2.5mA (flows from terminal)Allowable ON contact resistance: 500Ω max.Allowable OFF contact resistance: 5kΩ min.Allowable ON residual voltage: 0.8V max. (open collector input type)Allowable OFF leakage current: 0.8mA max. (open collector input type)

RS-485 communications Transmission line : 5-wire Communication distance : 300m max. Transmission speed: 9600/4800bpsCML can communicate dedicated for Azbil Corporation products (EST240Z, CMC10G, WEB100).

Display Flowrate Instantaneous flowrate : LCD 5 digitsdisplay Integrated flowrate : LCD 9 digitsInstantane- 0.0 to 216.6 0.0 to 541.5 0.0 to 880.0 0.0 to 2166.1ous flowrate The display range is the range that 1.2 times as large as the maximum flowrate range converted todisplay range standard temperature.integrated Display unit 0.01m3

flowrate Display range 0 to 9999999.99(7+2 digits)Data storage Integrated count data can be hold even though during power off.

Status display / / (Instantaneous / Integrated / Setting status)Switch Four photoelectric touch sensors switch(for setting of setup and parameter)Power supply Multi-voltage power supply 85 to 264Vac (The model of 24Vdc is provided as a special order)Power consumption 10VA max.Operating temperature -25 to +60°CrangeStorage temperature -30 to +70°CrangeOperating humidity 10 to 90%RH (without condensation)range

(Either ofthe twooutputs isselectable)

Page 31: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

Chapter 6. SPECIFICATIONS

25

*1: If natural gas 13A is selected, calibration is based on gases with the compositions shown below.

Natural gas that differs from the above may require a change in the factory setting or may not be measurable if it contains alarge amount of hydrogen. For such gases, contact the azbil Group.

*2: If propane is selected, calibration is based on a reference gas of 98% propane and 2% isobutane. Propane with a different compositionmay require a change in the factory settings. Contact the azbil Group.

*3: In the case of butane, calibration is based on a reference gas of 98% butane and 2% propane. Butane with a different composition mayrequire a change in the factory settings. Contact the azbil Group.

External dimensionsUnit : mm

EV3EV2EV1

m /h3

m3

100

270

254

16

65166

44 84

CML050

Item DescriptionCML050 CML080 CML100 CML150

Mounting direction Horizontal / vertical mounting (depend on the model number)Required straight pipe Upstream ; 5D Downstream ; 2D (the specifications when an elbow is installed at upstream side. Dlength means the pipe diameter.)

Connection rated JIS10K RF

Pipe size 50A(2B) 80A(3B) 100A(4B) 150A(6B)Body and gas contacting Body: SUS304 / SCS13A Case material: Aluminum alloyparts material O-ring material: Viton

Case coating Acrylic resin corrosion resistant coatingspecifications Coating color: Light beige (Munsell 4Y7.2/1.3)

Wiring connection port G1/2 female thread with a water-proof gland

Glass material Tempered glass: Thickness 5mm

Sealing IP65 (JIS C 0920 and IEC 60529 Water-proof and dust-proof structure on the assumption of outdoorinstallation)

Mass (kg) 14 24 29 45

S-08: Gas type Gas type Calorific value Methane Ethane Propane Butanesetting (as used by Azbil Corporation) (MJ) (%) (%) (%) (%)

04 City gas 13A(46MJ) 46.05 88 5.8 4.5 1.709 City gas 13A(45MJ) 45.00 88.9 6.8 3.1 1.2

Page 32: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

26

Chapter 6. SPECIFICATIONS

Note• The figure of CML080 / 100 / 150 shows that the glands are assembled to all 3

locations.

kPa

EV3

M O D E ENT

X 10l3

m

3m/h

EV1 EV2 CML

Meter FlowMass

166 65

400

330

44 84

CML150

kPa

EV3

M O D E ENT

X 10l3

m

3m/h

EV1 EV2 CML

Meter FlowMass

166 65

400

295

44 84

CML100

kPa

EV3

M O D E ENT

X 10l3

m

3m/h

EV1 EV2 CML

Meter FlowMass

166 65

340

285

44 84

CML080

Unit : mm

Page 33: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

27

Chapter 6. SPECIFICATIONS

Pressure loss (flowrate - pressure loss characteristics)

With built-in filter both on the upstream and downstreamThe graph below shows the data in air.

When using a gas other than air, multiply by the appropriate specific gravity below.

Example) When the inlet pressure of the CML150 is 700kPa, and the flow rate is1200m3/h(normal), the pressure loss for city gas 13A is calculated as follows:From the graph for 700kPa·(G) inlet pressure, the pressure loss is approx. 1.5kPawhen the flow rate is 1200m3/h(normal).Multiply this value by the specific gravity to get the result: 1.5kPa X 0.64 = 0.96kPa.

Specific gravity of each gas (when air is 1.0)

Argon 1.38

Carbon dioxide 1.53

City gas 13A (Methane 88%) 0.64

Methane 100% 0.56

Propane 100% 1.56

Butane 100% 2.08

200 400 600 8 0 00 1000 1200 1400 1600 1800 2000

0

4

2

6

8

12

10

14

16

18

20

Flowrate m3/h (normal)

Inlet pressure 50kPa • (G)

Pre

ssur

e lo

ss

kPa

CML050CML080CML100CML150

200 400 600 8 0 00 1000 1200 1400 1600 1800 2000

0

0.5

1

1.5

2

3

2.5

3.5

4

CML050CML080CML100CML150

Flowrate m3/h (normal)

Inlet pressure 700kPa • (G)

Pre

ssur

e lo

ss

kPa

200 400 600 8 0 00 1000 1200 1400 1600 1800 2000

0

0.5

1

1.5

2

3

2.5

4

3.5

4.5

5

CML050CML080CML100CML150

Flowrate m3/h (normal)

Inlet pressure 500kPa • (G)

Pre

ssur

e lo

ss

kPa

200 400 600 8 0 00 1000 1200 1400 1600 1800 2000

0

1

2

3

5

4

6

7

6

CML050CML080CML100CML150

Flowrate m3/h (normal)

Inlet pressure 300kPa • (G)

Pre

ssur

e lo

ss

kPa

Page 34: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

28

Chapter 6. SPECIFICATIONS

With buil-in filter on the upstream onlyThe graph below shows the data in air.

200 400 600 8 0 00 1000 1200 1400 1600 1800 2000

0

2

4

6

6

10

12

CML050CML080CML100CML150

Flowrate m3/h (normal)

Inlet pressure 50kPa • (G)

Pre

ssur

e lo

ss

kPa

200 400 600 8000 1000 1200 1400 1600 1800 2000

0

0.5

1

2

1.5

3

2.5

3.5

4

4.5

CML050CML080CML100CML150

Flowrate m3/h (normal)

Inlet pressure 300kPa • (G)

Pre

ssur

e lo

ss

kPa

200 400 600 8000 1000 1200 1400 1600 1800 2000

0

0.5

1

2

1.5

2.5

3

CML050CML080CML100CML150

Flowrate m3/h (normal)

Inlet pressure 500kPa • (G)

Pre

ssur

e lo

ss

kPa

200 400 600 8000 1000 1200 1400 1600 1800 2000

0

0.5

1

1.5

2.5

CML050CML080CML100CML150

2

Flowrate m3/h (normal)

Inlet pressure 700kPa • (G)

Pre

ssur

e lo

ss

kPa

Page 35: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

29

Without built-in filter both on the upstream and downstreamThe graph below shows the data in air.

When using a gas other than air, multiply by the appropriate specific gravity below.

Example) When the inlet pressure of the CML150 is 700kPa, and flow rate is 1000m3/h(normal),the pressure loss for city gas 13A is calculated as follows:From the graph for 700kPa·(G) inlet pressure, the pressure loss is approx. 0.18kPawhen the flow rate is 1000m3/h(normal). Multiply this value by the specific gravity to getthe result: 0.18kPa X 0.64 = 0.12kPa.

Chapter 6. SPECIFICATIONS

Specific gravity of each gas (when air is 1.0)

Argon 1.38

Carbon dioxide 1.53

City gas 13A (Methane 88%) 0.64

Methane 100% 0.56

Propane 100% 1.56

Butane 100% 2.08

200 400 6 0 0 8 0 00 1000 1200 1400 1600 1800 2000

0

0.5

1

1.5

2

2.5

3

3.5

CML050CML080CML100CML150

Flowrate m3/h (normal)

Inlet pressure 50kPa • (G)

Pre

ssur

e lo

ss

kPa

200 400 6 0 0 8 0 00 1000 1200 1400 1600 1800 2000

0

0.1

0.2

0.3

0.4

0.5

0.6

0.7

CML050CML080CML100CML150

Flowrate m3/h (normal)

Inlet pressure 700kPa • (G)

Pre

ssur

e lo

ss

kPa

200 400 6 0 0 8 0 00 1000 1200 1400 1600 1800 2000

0

0.1

0.2

0.3

0.5

0.4

0.6

0.8

0.7

0.9

1

CML050CML080CML100CML150

Flowrate m3/h (normal)

Inlet pressure 500kPa • (G)

Pre

ssur

e lo

ss

kPa

200 400 6 0 0 8 0 00 1000 1200 1400 1600 1800 2000

0

0.2

0.4

0.6

0.8

1

1.2

1.4

CML050CML080CML100CML150

Flowrate m3/h (normal)

Inlet pressure 300kPa • (G)

Pre

ssur

e lo

ss

kPa

Page 36: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

30

Filter FC type (Product of Kimmon Co.)

入 口

390

318.

5

324

755480275

8-23

240

280

150

190156346

Required roomfor maintenance:500 or more

155

120

4-19

8-19

506186 320

240

210 175

200

442172 270

8-19

185150

50A

80A

100A

150ARequired room for maintenance: 700 or more

Required roomfor maintenance:500 or more

Required roomfor maintenance:500 or more

φ

Chapter 6. SPECIFICATIONS

Unit: mm

Page 37: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

31

Spare filter element of FC type filter (Product of Azbil Corporation)

80394037-001 (50A)

80394038-001 (80A)

80394039-001 (100A)

80394040-001 (150A)

56+2 -0

+2 -0+2 -0

+2 -0

94

174

(162)6 6

Perforated metal

424

(406)9 9

160

248

6 6(244)

172

106

256

214

(202) 6

80132

6

Perforated metal

Perforated metal

Perforated metal

φ φφφ

φφ

φφ

Chapter 6. SPECIFICATIONS

Unit: mm

Page 38: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

FDSNC type (Product of Kimmon Co.)

32

Chapter 6. SPECIFICATIONS

80

250

200190

602

8080

319

604

240

230

370

210

210

666

300

544230

80

242

165 170

305

260

220

200

406.

426

7.5

Flow direction

Flow direction

Flow direction

Flow direction

50A

80A

100A

150A

φ

φφ

φ

Unit: mm

Page 39: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

33

Chapter 6. SPECIFICATIONS

MFF 300-L type

MFF 300-Y type

330

330

210

445

270

270

543

210

210

210

629

280

280

210

210

481

185

185

50A-JIS10K.SO.RF

(SS400)

80A-JIS10K.FF(SS400)

80A-JIS10K.FF(SS400)

100A-JIS10K.SO.RF(SS400)

100A-JIS10K.FF(SS400)

150A-JIS10K.SO.FF(SS400)

150A-JIS10K.SO.RF(SS400)

250

391

18018

0

155

155

50A-JIS10K.SO.RF(SS400)

100A

80A50A

150A

Mass: approx. 21kgMass: approx. 42kg

Mass: approx. 47kg Mass: approx. 90kg

370

250

155

367

280

720

714

445

530

569

210

494

330

480

185

330

50A-JIS10K.SO.RF(SS400)

80A-JIS10K.SO.RF(SS400)

100A-JIS10K.SO.RF(SS400)

80A50A

150A100A

Mass: approx. 22kg

Mass: approx. 44kg

Mass: approx. 50kg Mass: approx. 101kg

150A-JIS10K.SO.RF(SS400)

Unit: mm

Page 40: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section
Page 41: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

Revision History

Printed Manual Number Edition Revised pages Descriptiondate

Feb. 2004 CP-SP-1161E 1st Edition

Mar. 2006 2nd Edition Overall revision.

Nov. 2008 3rd Edition Overall revision. 3rd ed = 19th Jp ed.

Apr. 2012 4th Edition Company name changed.

Page 42: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

Terms and ConditionsWe would like to express our appreciation for your purchase and use of Azbil Corporation's products.You are required to acknowledge and agree upon the following terms and conditions for your purchase of Azbil Corporation'sproducts (field instruments, control valves, and control products), unless otherwise stated in any separate document,including, without limitation, estimation sheets, written agreements, catalogs, specifications and instruction manuals.

1. Warranty period and warranty scope1.1 Warranty period

Azbil Corporation's products shall be warranted for one (1) year from the date of your purchase of the saidproducts or the delivery of the said products to a place designated by you.

1.2 Warranty scopeIn the event that Azbil Corporation's products has any failure attributable to azbil during the aforementioned warrantyperiod, azbil shall, without charge, deliver a replacement for the said product to the place where you purchased, orrepair the said product and deliver it to the aforementioned place.Notwithstanding the foregoing, any failure falling under one of the following shall not be covered under this warranty:

(1) Failure caused by your improper use of Azbil Corporation's products(noncompliance with conditions, environment of use, precautions, etc. set forth in catalogs, specifications,instruction manuals, etc.);

(2) Failure caused for other reasons than Azbil Corporation's products;(3) Failure caused by any modification or repair made by any person other than azbil or azbil's

subcontractors;(4) Failure caused by your use of Azbil Corporation's products in a manner not conforming to the intended

usage of that product;(5) Failure that the state-of-the-art at the time of Azbil Corporation's shipment did not allow us to predict; or(6) Failure that arose from any reason not attributable to Azbil Corporation, including, without limitation, acts

of God, disasters, and actions taken by a third party.Please note that the term "warranty" as used herein refers to equipment-only-warranty, and Azbil Corporationshall not be liable for any damages, including direct, indirect, special, incidental or consequential damages inconnection with or arising out of Azbil Corporation's products.

2. Ascertainment of suitabilityYou are required to ascertain the suitability of Azbil Corporation's products in case of your use of the same withyour machinery, equipment, etc. (hereinafter referred to as "Equipment") on your own responsibility, taking thefollowing matters into consideration:

(1) Regulations and standards or laws that your Equipment is to comply with.(2) Examples of application described in any documents provided by Azbil Corporation are for your reference

purpose only, and you are required to check the functions and safety of your Equipment prior to your use.(3) Measures to be taken to secure the required level of the reliability and safety of your Equipment in your use

Although Azbil Corporation is constantly making efforts to improve the quality and reliability of AzbilCorporation's products, there exists a possibility that parts and machinery may break down.You are required to provide your Equipment with fool-proof design, fail-safe design, anti-flamepropagation design, safety design, or the like so that the said Equipment may satisfy the level of thereliability and safety required in your use, whereby preventing any occurrence of physical injuries, fires,significant damage, and so forth.

3. Precautions and restrictions on applicationAzbil Corporation's products other than those explicitly specified as applicable (e.g. azbil Limit Switch For NuclearEnergy) shall not be used in a nuclear energy controlled area (radiation controlled area).Any Azbil Corporation's products shall not be used for/with medical equipment.In addition,you are required to conduct a consultation with our sales representative and understand detail specifications,cautions for operation, and so forth by reference to catalogs, specifications, instruction manual , etc. in case thatyou intend to use Azbil Corporation's products for any purposes specified in (1) through (6) below.Moreover, you are required to provide your Equipment with fool-proof design, fail-safe design, anti-flamepropagation design and other designs of protection/safety circuit on your own responsibility to ensure thereliability and safety, whereby preventing problems caused by failure or nonconformity.

(1) For use under such conditions or in such environments as not stated in technical documents, includingcatalogs, specification, and instruction manuals

(2) For use of specific purposes, such as:* Nuclear energy/radiation related facilities

[For use outside nuclear energy controlled areas] [For use of Azbil Corporation's Limit Switch ForNuclear Energy]

* Machinery or equipment for space/sea bottom* Transportation equipment

[Railway, aircraft, vessels, vehicle equipment, etc.]* Antidisaster/crime-prevention equipment* Burning appliances* Electrothermal equipment* Amusement facilities

(3) Supply systems such as electricity/gas/water supply systems, large-scale communication systems, andtraffic/air traffic control systems requiring high reliability

(4) Facilities that are to comply with regulations of governmental/public agencies or specific industries(5) Machinery or equipment that may affect human lives, human bodies or properties(6) Other machinery or equipment equivalent to those set forth in items (1) to (5) above which require high

reliability and safety

Page 43: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

4. Precautions against long-term useUse of Azbil Corporation's products, including switches, which contain electronic components, over a prolongedperiod may degrade insulation or increase contact-resistance and may result in heat generation or any othersimilar problem causing such product or switch to develop safety hazards such as smoking, ignition, and electrification.Although acceleration of the above situation varies depending on the conditions or environment of use of theproducts, you are required not to use any Azbil Corporation's products for a period exceeding ten (10) yearsunless otherwise stated in specifications or instruction manuals.

5. Recommendation for renewalMechanical components, such as relays and switches, used for Azbil Corporation's products will reach the end oftheir life due to wear by repetitious open/close operations.In addition, electronic components such as electrolytic capacitors will reach the end of their life due to ageddeterioration based on the conditions or environment in which such electronic components are used.Although acceleration of the above situation varies depending on the conditions or environment of use, thenumber of open/close operations of relays, etc.as prescribed in specifications or instruction manuals, or depending on the design margin of your machine orequipment, you are required to renew any Azbil Corporation's products every 5 to 10 years unless otherwisespecified in specifications or instruction manuals.Field instruments (sensors such as pressure/flow/level sensors, regulating valves, etc.) will reach the end of theirlife due to aged deterioration of parts.For those parts that will reach the end of their life due to aged deterioration, recommended replacement cycles areprescribed. You are required to replace parts based on such recommended replacement cycles.

6. Other precautionsPrior to your use of Azbil Corporation's products, you are required to understand and comply with specifications(e.g., conditions and environment of use), precautions, warnings/cautions/notices as set forth in the technicaldocuments prepared for individual Azbil Corporation's products, such as catalogs, specifications, and instructionmanuals to ensure the quality, reliability, and safety of those products.

7. Changes to specificationsPlease note that the descriptions contained in any documents provided by Azbil Corporation are subject to changewithout notice for improvement or for any other reason.For inquires or information on specifications as you may need to check, please contact our branch offices or salesoffices, or your local sales agents.

8. Discontinuance of the supply of products/partsPlease note that the production of any Azbil Corporation's products may be discontinued without notice.For repairable products, we will, in principle, undertake repairs for five (5) years after the discontinuance of thoseproducts. In some cases, however, we cannot undertake such repairs for reasons, such as the absence of repairparts.For field instruments, we may not be able to undertake parts replacement for similar reasons.

Page 44: CML Series High-Flow Mass Flow Meter User's Manual · The CML Series gas mass flow meter uses µF (Micro Flow) sensor (hereinafter referred to as a µF sensor) as the sensing section

Specifications are subject to change without notice. (09)

1-12-2 Kawana, FujisawaKanagawa 251-8522 Japan

URL: http://www.azbil.com1st edition: Feb. 2004

4th edition: Apr. 2012 (F)