CONCENTRATION METER B32 PRODUCT INFORMATION

Concentration Meter B32 for

quaternary liquid TMAH+PR+CO3

CONTINUOUS IN-LINE MONITORING AND PROCESS CONTROL

INTRODUCTION

Rhosonics introduces the Concentration Meter

model B32. This smart and compact measuring

instrument can distinguish three components of

the quaternary liquid solution TMAH+C03+PR

which is formed after photoresist (PR) is dissolved

by Tetramethylammonium hydroxide (TMAH).

All concentrations are monitored real-time with

the highest accuracy, shown in weight percent

(wt%) on the B32 display and transferred via a

RS232/Modbus RTU signal for communication

with a PLC or control room.

The B32 analyser uses the combined data of

four different measurement technologies for

determination of the three concentrations.

Three technologies are integrated in the B32 and

the fourth is coming from a third-party device.

FEATURES AND BENEFITS

The B32 has many features. The most important

features and benefits are stated below.

• Real-time reading of three concentrations

• Extremely high accuracy up to ±0.0001wt%

• Easy commissioning (DCS independent)

• High stability due to reliable electronics

• High chemical resistance of wetted materials

• Easy installation (installed in four steps)

• Easy user interface

• Touch-sensitive buttons for lab gloves

• RS232/ Modbus RTU protocol

• Input for data of external UV device

• USB connection for data and system log

• Compact and maintenance friendly

modular design with electronics and liquid

parts separated

• No moving parts

UV DATA INPUT

USB INPUT

RS232 / Modbus

RTU

Features of the Concentration Meter B32

TMAH

CO3

PR

2. 377wt%

0. 216wt%

0.181wt%

Real-time monitoring

Concentration Meter B32

INDUSTRIES The B32 can be used in the following industries:

• Flat Panel Displays

• Any other industry where the quaternary

solution TMAH+PR+CO3 is used

Capacitive touch

buttons

INSTALLATION

The B32 consists of four components:

a wall panel, electrical box, sensor box and

communication box.

Installation can be done in four steps:

1. Mount wall panel onto a flat vertical surface

2. Make electrical connection with the wall panel

3. Click the three boxes onto the wall panel

4. Connect the process tube to the analyser

HOW DOES IT WORK?

The B32 measures three different physical

variables in one combined measurement cell.

An external UV measurement device is used for

a fourth variable.

The B32 uses the following measurements:

• Sound velocity

• Electrical conductivity

• Temperature

• UV (data input from an external device)

All variables are used to calculate and define the

concentrations TMAH, CO3 and PR. These

calculations are based on special algorithms

including corrections for the input of the third-

party UV measurement device.

ULTRASONIC MEASUREMENT

An ultrasonic transmitter generates a sound

wave in the tubular measurement cell which is

filled with the liquid. The sound wave

propagates itself over a fixed length of the tube

and is reflected on the other side of the tube.

The speed of sound is calculated from the total

length and time of flight through the liquid.

CALIBRATION MATRIX TMAH+CO3

TMAH + CO3 (at 26°C & 1 wt% PR)

110

85

60

35

10

1480 1505 1530 1555 1580

20

45

70

95

120

1500 1525 1550 1575 1600

Con

du

ctiv

ity(

mS/

cm)

Speed(m/s)

Ca libration matrix of TMAH+CO3+PR with X3= 0.2799981 at 27.5°C

©Rhosonics

Ultrasonic sound velocity measurement

Installation and replacement has never been so easy

Sender & receiver Transmitted wave Reflection

Distance

Cond. in (mS/cm)

Velocity of sound (m/s) CO3 TMAH

TYPICAL APPLICATION

The Concentration Meter B32 can be installed in

systems that are used for chemical supply in the

production process of LCD displays. For example

in a concentration management system.

In the developing process, a substrate can be

wet-chemical treated by TMAH. When the

substrate is treated, the solution of TMAH will

be polluted by dissolved photoresist (PR). The

quaternary liquid solution of TMAH+CO3+PR

will be formed and is collected in a tank.

During the process, the analyser is used to

show the real-time concentrations TMAH, CO3

and PR in wt%. The controlled process ensures

a chemical with the right concentrations.

Real-time determination of three components in a quaternary solution.

Concentrations in wt%

Process chamber

Carry out

Concentration management system

Buffer tank

P

TMAH+CO3+PR

P

TMAH

Concentration Meter B32

Measurement of the concentrations TMAH and CO3 in a concentration management system during the developing process in the FPD industry

PR

APPLICATIONS The Concentration Meter B32 can be used to determine the concentrations of the following three components real-time:

• TMAH (photoresist developer)

• CO3

• Dissolved photoresist (measured by a

third-party technology)

TMAH + CO3 + PR

TECHNICAL DATA

GENERAL SPECIFICATIONS

Process conditions

Max. pressure: 4 bar

Max. temperature: 50°C (122°F)

Wetted materials: Ceramics sensor and PVDF Optional: PFA

Electrical specifications

Power supply: 18 … 32 VDC, 8 Watt Optional: Power supply/converter for 90 … 240 VAC

Communication: Modbus RTU via RS232 protocol to DCS 4-20 mA input for third-party UV meter

Data logging: via USB memory stick

Ambient conditions

Ambient temperature:

5 … 60 °C (41…140°F)

Humidity: < 95% at 40°C (noncondensing)

Dimensions and weights

Weight: Approx. 6,9 kg

Housing materials: POM / Stainless steel

Housing dimensions: 292 (L) x 229 (W) x 141,5 mm (H)

Process connection: PVDF Flexible Tube Connector ⌀ 12x10 mm. Other sizes on request.

PERFORMANCE SPECIFICATIONS

Method:

Ultrasonic sound velocity Inductive electrical conductivity Temperature (input/connection for UV meter)

Range process temperature:

5 … 50 °C (41…122°F)

Readings: Concentration (wt%), Sound velocity (m/s), Conductivity (mS/cm), Temperature (°C)

Accuracy: Up to +/- 0.0001 wt% (= 1 ppm)

Decay time: < 1 to 60 s (adjustable)

Display: Monochrome display with RGB backlight

Operation: Capacitive touch buttons, Modbus, Computer.

CONCENTRATION METER

© 2019 Rhosonics | Specifications are subject to change without notice.

Input 4-20 mA (UV meter)

Liquid in

Liquid out

RS232 / Modbus RTU

MEASURING BEYOND LIMITS

Rhosonics is based in the Netherlands in Putten.

We design, produce and supply state-of-the-art

measuring instruments for virtually any industry.

The company cooperates with partners

worldwide to offer the best technology

solutions. We use craftmanship, capability and

creativity to create measurements beyond limits.

CONTACT US

We proudly meet the requirements

for the ISO9001 standard since 2010.

We work with a global network of specialized distributors. Please check our website for distributors in your specific region.

About us

Rhosonics Hoge Eng West 30, 3882 TR Putten, NL +31 341 – 37 00 73 info@rhosonics.com www.rhosonics.com

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