concerning of cross contamination on amc control presentation file(1).pdf · on amc control...

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Confidential, unpublished property of L&K. Do not duplicate or distribute© L&K Engineering Co., Ltd. 2009

Concerning of Concerning of Cross Contamination Cross Contamination on AMC Controlon AMC Control


WhatWhat’’s Concerning on AMCs Concerning on AMC？？

Exhaust / OA IntakeInteraction

Wind andWeather Characteristics

FAB Exterior

Online MonitoringOperation

Air Sampling as a baseAs Built

–Construction

Site SurveyWeather StudyAir SamplingCFD Simulation

Building Height EffectsChemical Filter Applications

Plan/Design

Required ConcerningStage

YieldYield

FAB Interior

Online Monitoring and Yield-Based TrendChemical Filter Applications

Operation

Air Sampling as a baseAs Built

Air Sampling for Tracing and as a baseConstruction

Tool Layout and Processes ReviewReview of Cleanroom Air Flow and Cross Contamination

Engineering JudgementCFD Aided Prediction

Review of Tool Partition

Plan/Design

Required ConcerningStage

2


WhatWhat’’s FAB Exterior Cross Contaminations FAB Exterior Cross Contamination？？

Interactions between Buildings and Wind /

Weather Characteristics


Example in Science ParkExample in Science Park

Higher release of stripper from TFT/LCD FABs, that is, DMSO and MEA

Summer Time

Winter Time

• DMSO → DMS → SO2

• MEA → NH3

Waste water treatment plant

3


Validation by CFD and Site Sampling/AnalysisValidation by CFD and Site Sampling/Analysis


Effects of Cross ContaminationEffects of Cross Contamination

From others

Acidic smell

Solvent smellInteractions between Buildings and Wind /

Weather Characteristics

Lost of defect, profit and reputation

4


WhatWhat’’s FAB Interior Cross Contaminations FAB Interior Cross Contamination？？

• Contamination between different processes, like Photo v.s. Wet, or Photo v.s. Diffusion….etc, due to special tool layout or w/wo isolation with air unbalance and mixing.

• Contamination between different tools, like outlet of vacuum pump v.s. process tools due to spreading of common return air shaft.

• Contamination between different sections inside the same tool itself due to bad air flow pattern control or ventilation design of tool.


Effects of Cross ContaminationEffects of Cross Contamination

Lost of defect, profit, throughput and health

無塵室回風道

Wet Etch

Stripper

Lens haze with MEA / Air-conditioner corrosion

Reticle haze

1

2

3

3

4 5

Films Defect

5


What are SolutionsWhat are Solutions？？• To identify potential risk

– Traditional monitoring approach– Database aided approach– OP-FTIR systematic monitoring / diagnosis

approach

• Protection by air washer system in MAU– Traditional air washer system– L&K mist air washer system– L&K fan type air washer system

• Protection by chemical filter in MAU


Traditional Traditional MMonitoring onitoring AApproachpproach

• Only point monitoring, coverage limited

• Specific instrument for specific gases

• High initial cost if all points are required as online or quasi-online; but off-line measurement gathering if multi-point monitoring required

6


Database Database AAided ided AApproachpproachAfter data gathering, how and what could you do ?

0

0.1

0.2

0.3

0.4

0.5

0.6

0.7

Concentration Range（μg/m3）

Rel

ativ

e C

ontri

butio

n

MAU Common Chamber

0

0.1

0.2

0.3

0.4

0.5

0.6

0.7

0.8


Rel

ativ

e C

ontri

butio

n

Photo Area

A database for comparison and benchmarking

0

0.05

0.1

0.15

0.2

0.25


Rel

ativ

e C

ontri

butio

n

Outside Air


Applications of Applications of OPOP--FTIRFTIR

• Line monitoring, wider coverage

• High diversity for gases detection with acceptable limit

• Real time monitoring available

SourceWind Direction

7


Why and How to Be SystematicWhy and How to Be Systematic？？Tool Exhaust Trace Gas LibraryDue to long term of tools’ local scrubber efficiency measurement, a tool exhaust trace gas library is already set up for different tools and processes.

Photo

Etch

Thin-film

Diffusion

Make-up air

Return Shaft Monitoring

OA Monitoring

Spectrum Analysis

Spectrum Analysis Concentration Comparison between OA and Return Shaft

Return Shaft>

OA

No

Contaminants come from outside air

Database Searching and Comparison

0

2

4

6

8

10

12

14

16

00:00 12:00 00:00 12:00 00:00 12:00 00:00 12:00 00:00

Time of Day

Con

cent

rati

on /

PPB

SIH4

Time History Data

Tool Operation

History

Identification of Suspected Tools

CF4SiF4

Portable FTIR to zero-in

Yes


Air Washer System in MAUAir Washer System in MAU

0.788/yr/CMH0.03108 W/CMH0.0139 W/CMHL&K Fan Type Air Washer

Total = 5.4kWFor 1 year 8760hrs47304 kWh costs﹩94608/yr

5HP @ 7.2m3/hrPower consumption @ 120000CMH：3.73kW

40Pa for air sidePower consumption @ 120000CMH：1.67kW

L&K Fan Type Air Washer

3.483/yr/CMH0.15542 W/CMH0.0434 W/CMHTraditional Air Washer

0.679/yr/CMH0.02487 W/CMH0.0139 W/CMHL&K Mist Type Air WasherBenchmark Reference

-

Nozzle Type

Electric Rate：NTD 2.0/kWh

-Fan Static Efficiency 80%-Calculation

Assumption


25HP @ 144m3/hrPower consumption @ 120000CMH：18.65kW


Traditional Air Washer


4HP @ 7.2m3/hrPower consumption @ 120000CMH：2.984kW


L&K Mist Type Air Washer

Operation CostPump Power Consumption (kW)

Air Side Energy Consumption (kW)

Picture Overview

ItemSystem

8


What Special for L&K Air WasherWhat Special for L&K Air Washer？？


Basic L&K Air Washer Performance Basic L&K Air Washer Performance

Air Washer Air Side Pressure Drop Curve

0

10

20

30

40

1 1.2 1.4 1.6 1.8 2 2.2 2.4

Packing Material Face Velocity (m/sec)

Air W

ashe

r Air

Side

Pre

ssur

e Dro

p (P

a)

Air Washer Saturation Efficiency

90

92

94

96

98

100

1 1.5 2 2.5

Packing Material Face Velocity (m/s)

Air W

ashe

r Sat

urtio

n Ef

ficien

cy (%

)

The basic air washer performance data of humidifying efficiency and air side pressure was measured and correlated as follows,

For conservative concern, a 90% saturation efficiency will be used for air washer design.

The air side pressure drop will be smaller than 40Pa at normal design conditions.

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Chemical Removal EfficiencyChemical Removal Efficiency

Type IIType I

33.342.286.1NO3−

321Row of Nozzles1.170.50.05Liquid/Gas Mass Ratio

80.831.297.9NH4+Alkali

91.183.794.7SO42−

—85.291.2NO2−

49.937.342.9Cl-—67.450.2F-

AcidChemical Removal

Efficiency (%)

Traditional Air WasherL&KAir

WasherSystem

Item


Patent No.No. 209075, M325160( Taiwan )No. 02242481.4,ZL200720000460.X ( China )

What Special for L&K Fan Type Air WasherWhat Special for L&K Fan Type Air Washer？？

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Chemical Removal EfficiencyChemical Removal Efficiency

DownstreamUpstream

ND68.2 -ND>94.8ND87.9 >95.9>92.3Removal Efficiency (％)ND46.67 NDNDNDND0.63 NDNDND146.9 0.79 ND8.52 ND5.17 1.92 0.81 MAU01

2008/10/06

MEANH4+Na+SO4

2-PO43-NO3

-NO2-Cl-F-Description

Unit: μg/m3

DownstreamUpstream

ND74.6 -ND>92.7>84.694.1 >99>92.2Removal Efficiency (％)ND50.71 21.94 NDNDND0.43 NDNDND199.49 13.94 ND6.03 0.38 7.29 8.45 0.80 MAU02

2008/10/06

MEANH4+Na+SO4

2-PO43-NO3


DownstreamUpstream

ND30.0 -94.2 ND>98.675.0 >96.4>92.3Removal Efficiency (％)ND12.36 ND0.69 NDND0.19 NDNDND17.65 0.82 11.95 ND5.70 0.77 2.87 1.07 MAU01

2008/11/03

MEANH4+Na+SO4

2-PO43-NO3


DownstreamUpstream

ND56.4 -93.4 ND65.5 >87.259.2 -Removal Efficiency (％)ND7.10 0.68 0.67 ND0.44 ND0.62 NDND16.29 0.43 10.20 ND1.29 0.96 1.51 NDMAU02

2008/11/03

MEANH4+Na+SO4

2-PO43-NO3



The Situation If Chemical Filter on FFU OnlyThe Situation If Chemical Filter on FFU Only

90% Removal Efficiency

20μg/m3 Inlet

11.3806μg/m3

10.9143μg/m3

1.0003μg/m3

9.8921μg/m3

9.8851μg/m3

MAU Outlet 0.2μg/m3

If outside air increases up to 200μg/m3 suddenly ﹖

The critical roomstill 1.0003μg/m3 ﹖

2.7374μg/m3

The concentration still fluctuates, even chemical filter has been installed

on critical room

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WhatWhat’’s the Solution s the Solution ﹖﹖Install Chemical Filter On MAU

﹖

What will you do if outside air continues keeping a low level ?

What will you do if outside air increases up but the chemical filter installed on MAU just reach the end life ?

And more, why do you lose the energy just for

unpredictable outside air ?


WhatWhat’’s the L&K Solution s the L&K Solution ﹖﹖

Damper 1

Damper 2

Damper 3

Monitor Point

A Ducted Chemical Filter Unit Ducted Chemical Filter Unit (DCFU)(DCFU) will be installed on the end of OA duct and three dampers operate the correct position via the information from the monitor point.

Chemical Filter

Patent No.

No. I295721( Taiwan, ROC )No. 200610087018.5(China)

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How Does It Work How Does It Work ﹖﹖

Damper 1

Damper 2

Damper 3

Monitor Point

Chemical Filter

Normal ConditionNormal Condition

OA concentration is lower than set point

Damper 1 → OpenOpenDamper 2 → CloseDamper 3 → CloseFan → Off



Damper 1

Damper 2

Damper 3

Monitor Point

Chemical Filter

Abnormal ConditionAbnormal Condition

OA concentration is higher than set point

Damper 1 → CloseDamper 2 → OpenOpenDamper 3 → CloseCloseFan → OnOn

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Damper 1

Damper 2

Damper 3

Monitor Point

Chemical Filter

Chemical Spill in CRChemical Spill in CR

Some accident of chemicals spilled in cleanroom

Damper 1 → OpenOpenDamper 2 → CloseDamper 3 → OpenOpenFan → OnOn


Case StudyCase Study

The difference of air volume distribution

and pressure drop are very small for w. and

wo DCFU.

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Conclusions (I)Conclusions (I)

Cross contamination is a prevalent phenomena in FAB exterior and interior.

It will bring losses to FAB operation accompanying the shrink of device critical dimension.

A new application of FTIR combined with process trace gas database is proposed for such new era of semiconductor manufacturing.

The application of air washer in MAU already becomes a standard requirement for semiconductor and TFT industry. And a new design concept of air washer also proposed for better chemical removal efficiency and lower power consumption.


Conclusions (II)Conclusions (II)

Finally, another patented concept of chemical filter applications in MAU is also proposed for economical and effective usage of chemical filters in MAU.

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Total Purity Environment ProviderTotal Purity Environment Provider全方位純淨生產環境的提供者全方位純淨生產環境的提供者

www.lkeng.com

concerning of cross contamination on amc control presentation file(1).pdf · on amc control...

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