Highest Storage DensityThe RX family of automated, standalone reticle management systems feature an integrated pod buffer with separate manual and OHT SMIF I/O’s. The RX models vary in height, reticle and pod buffer capacity and can be integrated in any new or existing production line. Through the innovation combination of reticle and pod storage, the RX provides the highest storage density in a minimal footprint.

Advanced Reticle ProtectionThe reticles are safely stored within Tec-Cell modules (TCM). These modules are designed to store each reticle within a controlled ISO Class 1 micro environment, safe from ESD effects. To prevent the reticle from chemical contamination, the Tec-Cell module can be purged by nitrogen (N2) or extreme clean dry air (xCDA).

Progressive Reticle ManagementThe RX provides high throughput capability and assures quick reticle access. The integrated RSP150 buffer enables fast retrieval into already loaded empty pods, providing buffering to the OHT system. Throughputs are thus maintained and latency delays reduced, resulting in optimized stepper/scanner utilization.

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RX - High Density Reticle Stocker

Benefits

• N2/xCDA purge capability

• Tec-Celltechnology

• Integrated RSP150 buffer

• SeparateOHTandmanualports

• Field upgradable options

• Prolongsthereticlelifetime

RX-High Density Reticle Stocker

RX - High Density Reticle Stocker

Model Overview

Tool Overview

Note: Brooks Automation reserves the right to change or revise specifications and product design in connection with any feature of our product herein. Information herein is considered to be accurate based on available information at the time of printing

ModelPods in carousel

(unpurged)Pods in fixed shelf

(unpurged)Reticles stored in

TCMReticles max.

storage capacityTool height

w/AMC w/o AMCRXB

48 12 RSP 1536 15963.3m 3.1m

RXB w/slim FFU 3.14m 2.97m

RXHB48 15 RSP 1920 1983

3.77m 3.58m

RXHB w/slim FFU 3.61m 3.44m

RXXHB 48 20 RSP 2496 2564 4.42m 4.28m

RXF0 12 RSP 1920 1932

3.3m 3.1m

RXF w/slim FFU 3.14m 2.97m

RXHF0 15 RSP 2304 2319

3.77m 3.58m

RXHF w/slim FFU 3.61m 3.44m

RXXHF 0 20 RSP 2880 2900 4.42m 4.28m

Options

AMHS Load port (for RSP150)

• SEMI84 compliant optical I/O communication interface between tool load port and OHT system

• To avoid collision of OHT and operator, OHT ports are elevated.

Particle detection

system, (PDS)

• To automatically inspect particles on reticles, glass and pellicle side

• Detectability of particles: ≥ 10 µm (Effective Sphere Diameter)

• Repeatability

• Particles 10...20 µm ≥ 90% of particle count

• Particles > 20 µm ≥ 98% of particle count

• Auto-focus system for different pellicle heights of 2 to 8mm

Air Knife

• Particle blow-off on the fly with nozzles on glass and pellicle sides at the ID reading station/handover.

• An optional second air knife set can be located at the rotary unit. This enables a cleaning process in the event a reticle is rejected at PDS due to particles, independent of SMIF opener movements.

Reticle Rotary Unit (RRU)

• Rotation table to orient the reticle by 180° for different steppers.

• Reticle presence sensors

AMC filtering for handling area

• AMC filter package to add on the Fan Filter Unit (FFU)• Absorbs acids, bases and organic compounds

AMC filtering for reticle storage

modules

• AMC filter package on the purge inlet

• Absorbs acids, bases and organic compounds

Ionization for incoming

reticles

• Corona discharge ionization using xCDA mounted at SMIF opener for technology nodes greater than 100nm

• Additional shielding to allow use of this system for technology nodes greater than 30nm

• Alternative photon ionizer for technology notes greater than 10nm

CONTAMINATION CONTROL SOLUTIONS

Gas purifier

• Absorbs acids, bases, organic compounds and H2O

• Ensure quality of xCDA

• Optional break through sensor to detect filter life time

SECS/GEM interface

• Host communication software via HSMS interface

Label Printer

• Direct thermal transfer label printer (Zebra SL105 plus)• Prints 76mm/3” per second with a resolution of min. 300 dpi (12 dots/mm)• Prints clean room suitable labels which easily adhere to the reticle carriers and can be easily

removed with gloves.• Prints Code39, Interleaved 2 of 5, Code128, EAN-8, EAN-13, EAN 2 & 5, Code93, DataMatrix

Hand held scanner • Scanner linked to the keyboard to log on to the system and to read in reticle ID if required

Seismic isolation table • A third-party seismic isolation table is available.

GAS PURIFIER

BREAK THROUGHSENSOR

Layout:Required space for maintenance and extended repair actions

1. Exhaust box can be mounted under raised floor.

Note: If local space standards and guidelines require larger maintenance areas for safety purposes, these should be applied.

1

RX - High Density Reticle Stocker

BrooksAutomation,Inc.• 15 Elizabeth Drive •Chelmsford,MA01824U.S.A.•Tel:(978)262-2400•Fax:(978)262-2500•www.brooks.com

©2018BrooksAutomation,Inc.BrooksandtheBrookslogoareregisteredtrademarksofBrooksAutomation,Inc.Allothertrademarksarethepropertyoftheirrespectiveowners.

For more information, please contact your local Brooks Automation sales representative or visit www.brooks.com.

CONTAMINATION CONTROL SOLUTIONS

303156-en-USRevA02/19