control pc (operator control, data display, data logging, fiber interface to rack)
DESCRIPTION
PUMP PANEL. Micro Lynx Stepper Controller (x2). Relay Boards: LN2 Flow Control Air Valve Control Pump Power Pump Alarm Interlock. BLOWER. BLOWER. 2 nd Pump Stack (Future Upgrade). PUMP. PUMP. 480V 3P. 480V 3P. Locking Device Panel (PC104 Control Sys). Hi voltage power. - PowerPoint PPT PresentationTRANSCRIPT
Control PC
(Operator control, data display, data logging, fiber interface to rack) RGA
PC
ELECTRONICS RACK
Fiber Interface:1MB/sec streaming data out32 data lines in4 RS-232 ports
HP Meter
RS232-RS485 Converter
Thickness Monitor
RGA Controller
RelayMUX
SOURCEXFMR
INV PWR SUP
SRC PWR DIAG
PUMP PANEL
Relay Boards:LN2 Flow ControlAir Valve ControlPump PowerPump Alarm Interlock
Micro Lynx StepperController (x2)
Locking
Device
(x6)
Transformer
& Source
(x28)
Source Shutter
(x28)
Thickness
Sensor
Convectron
Locking
Device Panel
(PC104 Control Sys)
PUMP
BLOWER
PUMP
BLOWER 2nd Pump Stack(Future Upgrade)
Cryopanel
(x2)
RTD’s
LN2 Tank
119 gal vent
vent
Shutter Driver
RGA Head
Convectron
Ion Gauge
Convectron
Hi voltage power
Low voltage driver
Data
Air
LN2
480V 3P
Control
480V 3P
RS-232
480V
3P
480V 3P
480V 3P 4COND
RS-485 BUS
RS-485 BUS
RS-485 BUS
RS-485 BUS
RS-485 BUS
208V 3P PWM +/- 180V
To RS-485 BUS
V1
V5 MAN
V4 MOVV3 MOV
V2 AIR
V1 AIR
OPTICALFIBERS
RS-485 BUS
RS-485 BUS
BELL CARRIAGE480V 3P
480V 3P
