• Customer list includes more than 60% of the major semiconductor manufacturers worldwide.

• Fabworx robots and component products have been successfully installed in PVD, CVD, Etch and RTP departments in 150mm, 200mm and 300mm fabs.

Fabworx Solutions offers robots for Endura®, Centura® and Producer® applications:•Fabhp•Fabhp-ht for high-temperature processes such as Rapid Thermal Processing (RTP) and Epitaxal Layer (EPI)•Fabhp-hdp for extended reach tools•Fabhp-v•Fabpro•Fabhp-v 300•Fabhp-v 300 RTP•Fabht 300

Endura, Centura and Producer are registered trademarks of Applied Materials, Inc.

Fabworx robots have been engineered to:

•Reduce particles

•Eliminate scratching

•Increase repeatability

•Enhance tool throughput

•Generate greater return on investment

• Fabworx Solutions offers a line of OEM-compatible component products designed to improve the performance of your existing robots.

• 150/200mm components include:– Pivot assembly for HP®, HP+, HDP, VHP® or VHP+ robots

– HP®/HP+ hub assembly

– VHP® hub bearings

– Elbow assembly and elbow bearings for HP®, HP+, VHP® and VHP+ robots

– End effectors

• Thin Profile Moly Blades for Buffer Chamber

• Gravity Edge Hold™ (GEH) End Effector for Transfer Chamber

• 300mm components include:– Wrist upgrades for VHP® or XP® robot

– VHP® hub bearings

– End effectors with o-rings or Gravity Edge Hold™ technologyHP, VHP and XP are registered trademarks of Applied Materials, Inc.

• Snap-on cover eliminates inconsistencies in setup and increases bearing life.

• Enclosed bearings reduce particle escape and potential contamination of wafers.

• 2-bearing pivot assembly decreases future replacement costs as compared to 4-bearing OEM design.

• Durability of ceramic bearings and stainless steel races allow for 3+ years of use without replacement or repair.

• Tightness of x-style bearing reduces wrist droop.

• Includes a 2 year warranty.

• Available for AMAT HP®, HP+, VHP® and VHP+ 150mm and 200mm robots.

HP and VHP are registered trademarks of Applied Materials, Inc.

• Hybrid ceramic bearings increase product life span and reduce particles.

• Integral shields increase race stiffness and help retain lubricant to further reduce particles.

• Patented stainless steel hub spacers provide stiffness against twisting and distorting.

• Increased spring force keeps the hub assembly vertically aligned to ensure bearing stability and reduce robot droop.

• Upper and lower bearing spacers are pinned together to eliminate lateral motion during robot.

• Upper and lower motors are locked in place to eliminate motor jumping and twisting and improve repeatability.

• For 150mm and 200mm HP® and HP+ robots.

HP is a registered trademark of Applied Materials, Inc.

• Bearings consist of ceramic load-bearing balls with smaller stainless steel spacer balls for durability.

• Races are made from hardened 440 stainless steel to reduce wear and increase product life.

• Shields help to retain lubricant within the bearing to further reduce particle contamination.

• High-performance, long-life grease is compatible with high-vacuum environments and a wide range of process chemistries.

• Available for AMAT VHP® and Producer® 200mm and 300mm robots.

VHP and Producer are registered trademarks of Applied Materials, Inc.

• Features an improved shaft and bearing spring preload mechanism.

• Wave spring gives consistent and even force to the bearings, resulting in longer bearing life and decreased droop.

• Fixed spring cap eliminates tension adjustment and setup variability.

• Includes a 2 year warranty.

• Available for AMAT HP and HDP and robots.

• High-quality elbow bearings kits are available For HP+ and VHP+ robots.

OEM WRIST

FABWORX WRIST

• Designed to improve yield and productivity in Endura® and Centura® platforms.

• Patented interconnected stainless steel bands replace interlocking pivot gears, improving reliability and wafer placement repeatability.

• Preventive maintenance (PM) is eliminated.

• Ceramic bearings are used for long life and are enclosed to protect from process deposition and prevent particles from entering the process environment.

• Compatible with 300mm VHP® and XP® robots.

Centura, Endura, VHP, and XP are registered trademarks of Applied Materials, Inc.

• 150mm, 200mm and 300mm end effectors available

• Three replaceable perfluoroeslastomer o-rings provide exceptional coefficient of friction to eliminate wafer sliding and associated particles.

• O-rings are rated for process temperatures up to 485*C.

• Location of o-rings removes the topographical stress normally caused by wafer bowing when a wafer is supported by its outside diameter.

• Available in designs suitable for the buffer or transfer chamber.

• A variety of end effector materials are available, including stress-free 6061 aluminum, alumina-ceramic coatings, Titanium and molybdenum.

• Fabworx Solutions designs and manufactures yield and productivity improvement products for existing fab equipment.

• Our product roadmap is driven by our customer’s tool issues an we have developed efficient methodologies for working with them on new products.