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APMC’04
Integrated Systems Laboratory
Simulation of Physical Semiconductor Devices under
Large and Small Signal Conditions
Bernhard Schmithusen, Andreas Schenk, Ivan Ruiz, Wolfgang Fichtner
Swiss Federal Institute of Technology ZurichDecember 2004
APMC’04
Integrated Systems Laboratory
Outline
(A) Physics-Based Analysis of a RF-Bipolar Transistor
• Simulation Frame• DC, AC, Noise, Large Signal Transient Analysis
(B) Harmonic Balance for Mixed-Mode Simulations
• HB Equation Solving Strategies• Examples
PN Diode, Varactor Frequency Doubler,MOSFET, Simple Bipolar
Conclusions
APMC’04
Integrated Systems Laboratory
RF-Bipolar
Physics-Based Characterizationof the Intrinsic RF-Bipolar Transistorand of Mixed-Mode Power Amplifier
Figures of Merit:
• DC: Early and Gummel Plots• Small Signal: S-Parameters, Power Gain,Current Gain
• Noise: Voltage and Current Noise Spectra• Large Signal: Distortion,Compression Point CP1dB, IP3
RF-Bipolar Structure (Segment)with Doping
APMC’04
Integrated Systems Laboratory
Simulation Frame
Transport:DD, TD, HD, QDD, MC, ...
Physical Description:Thermionic Emission, Tunneling,Gate Currents, Schrodinger,Optics, Physical Model Interface (PMI), ...
Computational Features:1D - 3D, Hetero Structures,DC Grid Adaptation,Mixed-Mode (HSPICE),Compact Model Interface (CMI)
Analysis:DC, Transient, AC, Noise
Drift-Diffusion Model
−∇ · (ε∇ψ) = q (p− n + C)
q∂n
∂t−∇ · jn = −q R
q∂p
∂t+∇ · jp = −q R
jn = q (Dn∇n− µnn∇ψ)
jp = −q (Dp∇p + µpp∇ψ)
and boundary conditions
d
dtq(r, u(t)) + f(r, u(t), w(t)) = 0
APMC’04
Integrated Systems Laboratory
RF-Bipolar: DC
0 1 2 3 4 5 6 7 8Collector voltage (V)
0e+00
1e-04
2e-04
3e-04
4e-04
Col
lect
or c
urre
nt (
A)
Ib=2.5µAIb=2.0µAIb=1.5µAIb=1.0µAIb=0.5µA
Early characteristics
0.2 0.4 0.6 0.8 1.0 1.2Base voltage (V)
10-14
10-13
10-12
10-11
10-10
10-9
10-8
10-7
10-6
10-5
10-4
10-3
10-2
Cur
rent
(A
)IbIc
Forward Gummel characteristics
Physical Effects:Bandgap Narrowing,Minority Diffusion Length,Saturation Velocity, Doping of Collector,Pre-Breakdown, ...
Grid Size NV = 6654
APMC’04
Integrated Systems Laboratory
AC Analysis
Linearization around DC Solution u0
[jωq′(u0) + f ′(u0)]U1 = −WU1 Phasors of Solution Variables
Results:• Y-Parameters• Locally Distributed Responseof Potential, Densities, and Current Densities
Computational Aspects
• Solve Linear System in C
• Requires Direct Linear Solver !
108
1010
−40
−30
−20
−10
0
10
20
30
|Sij|
[dB
]
S−parameters Vbe=0.9V Vce=2V
Frequency [Hz]
|s22||s12||s21||s11|
S-Parameters
APMC’04
Integrated Systems Laboratory
RF-Bipolar: Small Signal
Electron Current Hole Current
Local AC Current Densities (∣∣Re(J1)∣∣ )
APMC’04
Integrated Systems Laboratory
RF-Bipolar: Small Signal
10 20 300
5
10
15
20
25
30
35
Collector current [mA]
Gai
n [d
B]
VCE
=3V
f=1GHz
f=1.52GHzf=2.31GHz
f=3.51GHz
f=5.34GHzf=8.11GHz
108
109
1010
100
101
|h21| Vbe=0.9V Vce=2V
Frequency [Hz]
|h21
| [dB
]
108
109
1010
1011
−10
0
10
20
30
40
Frequency [Hz]
Gai
n [d
B]
Vce=2V Ic=1.45mA
MAG
|s21|2
MSG
APMC’04
Integrated Systems Laboratory
Noise Analysis
Shockley’s Impedance Field Method
Langevin Equation
L(D,u0)δu = s
Noise Voltage Spectral Density
SV,V (r, r′;ω) =
=∑α,β
∫
Ω
Γα(r, r1;ω)Kα,β(r1;ω)Γ∗β(r
′, r1;ω)d r1 +
+∑α,β
∫
X
Γα(r, r1;ω)Kjα,jβ(r1;ω) Γ
∗β(r
′, r1;ω)d r1
Diffusion Noise Source
Kjn,jn
(r) = 4q2n(r)µn(r)
106
107
108
109
1010
1011
1012
1013
frequency (Hz)
10−20
10−19
10−18
10−17
10−16
10−15
10−14
10−13
10−12
10−11
10−10
10−9
nois
e vo
ltage
spe
ctra
l den
sity
(V
2 /Hz) Sv(base)
Sv(collector)|Re Sv(base,collector)||Im Sv(base,collector)|
Noise Voltage Spectral Densities
of the Bipolar
APMC’04
Integrated Systems Laboratory
RF-Bipolar: Noise
Bias: VBE = 0.84 V, VCE = 2V, f = 10 GHz
+6.161e-36
+2.247e-31
+8.199e-27
+2.991e-22
+1.091e-17C2/(s*cm)eeDiffLNS
+5.973e-20
+6.426e-13
+6.866e-06
+7.335e+01
+7.837e+08V2s2/(C2*cm2)g2_GradPoEC
+0.000e+00
+9.555e-19
+1.826e-16
+3.490e-14
+6.670e-12V2s/cm3LNVSD
Diffusion Noise Source Square of Green’s Function Total Noise Spectral Densityfor Collector Node (Electrons) for Potential (Electrons) for Voltage at Collector Node
APMC’04
Integrated Systems Laboratory
RF-Bipolar: Large Signal Transient
−35 −30 −25 −20 −15 −10
−100
−80
−60
−40
−20
0
Psav
[dBm]
Plo
ad(f
k) [d
Bm
]
Fundamental2nd harmonic3rd harmonic
−18 −16 −14 −12 −10 −8
0
2
4
6
8
Psav
[dBm]
Plo
ad(f
0) [d
Bm
] 1dB
Simulation: RL = 22.5 kOhm, f = 1 GHz, Compression Point Reached
APMC’04
Integrated Systems Laboratory
Harmonic Balance (HB)
Periodic/Almost-Periodic Excitated Systems
Standard Method for RF Circuits
Optimization of RF Devices
Device Level HB
• Geometry and Materials• Physics-Based• No Quasistatic Assumption• Benefits: Faster in case of Widespread Time Constants, View Inside
• Bottlenecks: Memory Consumption, Time Consumption, Convergence, Aliasing
Time Domain:
d
dtq (r, x(t)) + f (r, x(t), w(t)) = 0
Fourier Ansatz (One-Tone):
x(t) =
H∑k=−H
Xk exp(jωkt)
HB Equation:
H(X) = ΩNΓq(·)Γ−1X + Γf(·)Γ−1X = 0
APMC’04
Integrated Systems Laboratory
DESSIS HB: Status of Implementation
(Under Development)
One-Tone HB for Mixed-Mode Simulations
Nonlinear Solving Strategies:
•Continuation of Amplitude, Frequency, Parameters, and Bias•Newton Algorithm– Direct Solver PARDISO
– Iterative Solver ILS: e.g. BiCGStab with Standard ILU Preconditioners
– BBP-GMRES(m,b): Block-Band-Preconditioned GMRES(m) withMemory-Free Jacobian
•H-Decoupled: Decoupling of Harmonics
Use of Densities or Quasi-Fermi Potentials
Problems: Memory, Time, Nonlinear Convergence, Linear Systems.
APMC’04
Integrated Systems Laboratory
HB: Iterative Linear Solvers
Krylow Subspace MethodsMatrix-Vector Products → Memory-Less Matrix
HB Equation
• BiCGStab with ILUT Preconditioner:Fails with Reasonable Thresholds
• Block-Band Preconditioned GMRES(m):– Fine for Small Amplitudes
– FFT per Matrix
– Preconditioning with Direct Solver
– Surprisingly Robust
– Local Solutions
Newton:[ΩΓqΓ−1 + ΓfΓ−1
]δU = −H(U)
Preconditioner:
P ≈ A
P−1Ax = P−1b
Block-Band Preconditioner:
ΓfΓ−1 ≈
A0,0 A1,1
A1,0 A1,1. . .
. . . . . . AH−1,H
AH,H−1 AH,H
APMC’04
Integrated Systems Laboratory
PN Diode: Harmonic Balance
0 0.2 0.4 0.6 0.8 1
x 10−3
0
0.5
1
1.5
2
Time [s]
Diode voltage f=1kHz
Vol
tage
[V]
0 0.2 0.4 0.6 0.8 1
x 10−3
−2
0
2
4
6
8
10x 10
−3
Time [s]
Cur
rent
[A]
Diode current f=1kHz
0 0.2 0.4 0.6 0.8 1
x 10−9
−1
0
1
2
3
Time [s]
Vol
tage
[V]
Diode voltage f=1GHz
0 0.2 0.4 0.6 0.8 1
x 10−9
−4
−2
0
2
4
6x 10
−3
Time [s]
Cur
rent
[A]
Diode current f=1GHz
APMC’04
Integrated Systems Laboratory
Varactor frequency doubler
HB Simulation:Voltage Source f = 1 GHz, H = 4, Grid Size NV = 478, Direct Solver.
Resources: 500 MB Memory, CPU Time 20 min.Convergence: Error Oscillations between Idler and Diode.
APMC’04
Integrated Systems Laboratory
Varactor frequency doubler
0 0.2 0.4 0.6 0.8 1
x 10−9
−0.03
−0.02
−0.01
0
0.01
0.02
0.03
Sou
rce
curr
ent [
A]
0 0.2 0.4 0.6 0.8 1
x 10−9
−6
−4
−2
0
2
4
6
x 10−4
Time [s]
Load
cur
rent
[A]
HBTransient
HBTransient
1 2 3 4−180
−160
−140
−120
−100
−80
−60
−40
−20
Frequency [GHz]
|Vlo
adk | [
dB]
DESSIS−HBADS−HB
Comparison HB-Transient Comparison DESSIS-HB vs. ADS-HB
APMC’04
Integrated Systems Laboratory
Simplified Bipolar
0.4 0.6 0.8 1 1.210
−15
10−10
10−5
100
Vbe [V]
Cur
rent
[A]
Gummel plot Vce=3V
IbIc
0 2 4 60
2
4
6
x 10−5
Vce [V]
Ic [A
]
Early plot
Ib=5.5µm
Ib=4.5µm
Ib=3.5µm
Ib=2.5µm
Ib=1.5µm
Ib=0.5µm
0 0.2 0.4 0.6 0.8 1
x 10−3
0.5
1
1.5
2
2.5x 10
−5
Time [s]
Ib [A
]
Base current f=1kHz
0 0.2 0.4 0.6 0.8 1
x 10−3
4
5
6
7
8
9
10x 10
−5
Time [s]
Ic [A
]
Collector current f=1kHz
Simulation
NV = 1191
APMC’04
Integrated Systems Laboratory
Simplified Bipolar: Harmonic Balance
0 2 4 6 8
x 10−6
2.6
2.7
2.8
2.9
3
Ib amplitude [A]
Fundamental current gain
|Ic1 |/|
Ib1 |
100MHz1kHz
−140 −130 −120 −110 −100−350
−300
−250
−200
−150
−100
−50
|Ib1| [dB]
|I ck | [dB
]
Compression characteristic
0 2 4 6 8−350
−300
−250
−200
−150
−100
−50
Harmonics
abs(
I ck ) [d
B]
Collector current f=1kHz
APMC’04
Integrated Systems Laboratory
Simplified Bipolar: Harmonic Balance
0 0.5 1 1.5 20
2e−3
4e−3
6e−3
8e−3
1e−2
Distance [µm]
|Φ1|
Ib0=0.174µA
ACHB
0 0.5 1 1.5 20
0.05
0.1
0.15
Ib0=2.653µA
Distance [µm]
|Φ1|
ACHB
0 0.5 1 1.5 20
0.1
0.2
0.3
0.4
Ib0=6.265µA
Distance [µm]
|Φ1|
ACHB
0 0.5 1 1.5 20
0.1
0.2
0.3
0.4
0.5
Ib0=7.5µA
Distance [µm]
|Φ1|
ACHB
APMC’04
Integrated Systems Laboratory
MOSFET
Simulation
0 1 2 3 4
0
2
4
6
8
10
x 10−4
Drain voltage [V]
Dra
in c
urre
nt [A
]
Output characteristics
0 0.2 0.4 0.6 0.8 1
x 10−3
0
2
4
6
8
10x 10
−4
Time [s]
Dra
in c
urre
nt [A
]
f=1kHz Vg=1.4V Vd=1.5V
−20 −15 −10 −5 0 5−180
−160
−140
−120
−100
−80
−60
|Idk | [
dB]
f=1kHz Vg=1.4V Vd=1.5V
Gate voltage [dB]0 0.5 1 1.5
−200
−100
0
100
200
Gate voltage [V]ar
g(Id
k ) [d
egre
es]
f=1kHz Vg=1.4V Vd=1.5V
APMC’04
Integrated Systems Laboratory
RF-Bipolar: Harmonic Balance
Failed !HB Simulations:
• Voltage or Current Source•With/Without NetworkObservations:
• Very Ill-Conditioned Linear Systems• ILUT Precondioner works only ”Direct”• Convergence only Linear• Large Voltage Amplitudes within Device → Accuracy Problem ?
Possible Reasons:
• Difficult Convergence already for DC• Very High Doping ?• Solution Singularities (Corners) ?• DFT of Positive Variables n, p > 0 ?
APMC’04
Integrated Systems Laboratory
Concluding Remarks
Simulation Platform DESSIS
• Suitable for Characterization of RF Devices
•Optimization of Central Devices in RF Building Blocks
Device/Mixed-Mode Harmonic Balance
•Requires Significant Improvement to Compete withTransient Simulations
•Main Bottleneck is Lack of Robustness in Convergence