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    Nanoscale CMOS Technologies

    Opportunities and Challenges

    Trond Ytterdal

    Circuits and Systems Group

    Department of Electronics and Telecommunication

    Norwegian University of Science and Technology(NTNU)

    2006-2007: Sabbatical at UofT

    Room: BA5106

    [email protected]

    1 Trond Ytterdal, Department of Electronics and Telecommunication

    October 11, 2006

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    Outline

    Introduction

    How does transistor performance change as*

    Analog circuit performance

    How does analo circuit erformance chan e as

    technology is scaled down

    *

    2 Trond Ytterdal, Department of Electronics and Telecommunication

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    CMOS technology downscaling

    3m2m

    1.5m

    10

    [

    m]

    Data from INTEL

    ITRS Roadmap

    90nm

    0.18m

    . m0.5m

    0.35m

    45nm0.1

    rinted

    gatelengt

    18nm

    nm

    0.01

    1970 1975 1980 1985 1990 1995 2000 2005 2010 2015

    Year

    10

    1

    Vdd[V]

    0.1

    1970 1975 1980 1985 1990 1995 2000 2005 2010 2015

    Year

    3 Trond Ytterdal, Department of Electronics and Telecommunication

    Gate length divided by two approximately every 5 years

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    Transistor performance

    Transistor performance metrics for analog and RF

    Transconductance

    Intrinsic ain m s

    Capacitances

    Maximum o eratin fre uenc

    Efficiency (gm/Id)

    Linearity

    Noise

    Mismatch Gate leakage

    4 Trond Ytterdal, Department of Electronics and Telecommunication

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    Transconductance and intrinsic gain1.E-03

    1.E-05

    1.E-04

    .

    65 nm90 nm

    0.13 um

    0.18 um

    Transconductance is, for all practicalpurposes, independent of the

    technology node

    1.E-07

    1.E-06

    gm

    [S]

    seffoxd vVWcI

    =

    =

    or a ve oc y sa ura e c anne :

    1.E-09

    1.E-08

    1.E-10 1.E-09 1.E-08 1.E-07 1.E-06 1.E-05 1.E-04 1.E-03

    Minimum gate length, same W/L

    Vds = 1/2VDD1

    ; ox

    soxm

    LcLW

    Drain current [A]

    60

    70

    65 nm

    90 nm

    0.13 um

    Minimum gate length, same W/L

    Vds = 1/2VDD Intrinsic gain is reduced as

    sca enotoesm

    g

    30

    40

    50

    gm/gds

    0.18 um .

    65nm node the maximum intrinsic

    gain is reduced by more than 80%

    compared to the gain at the 0.18m

    10

    20

    node.

    5 Trond Ytterdal, Department of Electronics and Telecommunication

    0

    1.E-10 1.E-09 1.E-08 1.E-07 1.E-06 1.E-05 1.E-04 1.E-03

    Drain current [A]

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    Transistor capacitances

    1.0

    1.1Cgs Minimum gate length, same W/L ; Vds = 0

    0.7

    0.8

    0.9

    [fF]

    0.4

    0.5

    0.6

    pacitanc

    0.1

    0.20.3C

    a

    0.0

    90nm 0.13um 0.18um

    Capacitances extracted from NMOS having minimum

    drain and source areas for the given W/L (~3).

    6 Trond Ytterdal, Department of Electronics and Telecommunication

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    Maximum operating frequency

    The maximum speed of an amplifier is limited by the

    of a transistor:

    )(2 dbgdgsT

    CCC ++=

    1.0E+12 2.5E-04

    1.0E+10

    1.0E+11

    [

    Hz]

    65 nm

    90 nm0.13 um

    0.18 um

    -

    2.0E-04

    Minimum gate length, same W/L

    Vds = 1/2VDD

    1.0E+07

    1.0E+08

    1.0E+09

    m/(

    Cgs

    +Cdb

    )/2

    1.0E-04

    .

    Id[

    A]

    1.0E+05

    1.0E+06

    1.E-10 1.E-09 1.E-08 1.E-07 1.E-06 1.E-05 1.E-04 1.E-03

    Minimum gate length, same W/L

    Vds= 1/2VDD

    0.0E+00

    5.0E-05

    1.E+06 1.E+07 1.E+08 1.E+09 1.E+10 1.E+11

    130nm

    180nm

    7 Trond Ytterdal, Department of Electronics and Telecommunication

    ra n curren T

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    Potential speed improvement

    6.0

    potential improvement4.0

    5.0

    ento

    fscaling . .

    obtained compared to

    realization in a 0.18m3.0edimprove

    technology1.0

    .

    Potential

    sp

    Minimum gate length, same W/L ; Vds = 1/2VDD

    Speed potential normali zed to the 0.18m node.

    1.E-10 1.E-09 1.E-08 1.E-07 1.E-06 1.E-05 1.E-04 1.E-03

    Drain current [A]

    8 Trond Ytterdal, Department of Electronics and Telecommunication

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    Transistor efficiency (gm/ID)

    30

    3590nm

    0.13um

    0.18um

    Minimum gate length; W/L = 5; Vds = 1V

    20

    25

    1/V

    ]

    0.25um

    10

    15

    gm

    /ID

    5

    1.0E-12 1.0E-10 1.0E-08 1.0E-06 1.0E-04 1.0E-02

    Drain current [A]

    the buck) in weak inversion

    9 Trond Ytterdal, Department of Electronics and Telecommunication

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    Linearity (1)The Taylor expansion of the small signal drain current of a MOS transistorcan be written as:

    L+++= vavavgi 32 32

    L

    L++++ dsgdsgdsds vavavg dsds

    mm

    32

    32

    32

    L++++ dsgsggdsgsggdsgsgg

    sgsgsm

    vvavvavvadsmdsmdsm

    mbmb

    332 222

    2

    L

    L

    ++++

    ++++

    bsdsggbsdsggbsdsgg

    bsgsggbsgsggbsgsgg

    vvavvavva

    vvavvavva

    mbdsmbdsmbds

    mbmmbmmbm

    332 222

    2

    22

    Here, the coefficients are the higher order derivatives of the total drain

    L++ bsdsgsggg vvva mbdsm

    .

    2

    21

    2 dgI

    am

    =

    10 Trond Ytterdal, Department of Electronics and Telecommunication

    gs

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    Linearity (2)

    1.0E-05

    1.0E-04

    1.0E-03

    ]

    90nm

    0.13um

    0.18um

    Second order

    nonlinearity in

    1.0E-09

    1.0E-08

    1.0E-07

    . -

    |a2gds|

    [S/

    conductance (gds)

    increases as

    1.0E-12

    1.0E-11

    1.0E-10

    1.E-10 1.E-09 1.E-08 1.E-07 1.E-06 1.E-05 1.E-04 1.E-03

    ec no ogy s

    scaled down.

    1.0E-02

    90nm Second order

    1.0E-04

    . -

    m[

    S/V]

    .

    0.18umnon near y n

    transconductance

    almost

    1.0E-06

    . -

    a2 independent of

    technology

    11 Trond Ytterdal, Department of Electronics and Telecommunication

    . -

    1.0E-10 1.0E-09 1.0E-08 1.0E-07 1.0E-06 1.0E-05 1.0E-04 1.0E-03

    Id [A]

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    Noise

    Equivalent noise PSD (power spectral density) referred tothe gate of a transistor connected in a common-source

    configuration*:

    dependentprocess;42 K

    fWLc

    K

    g

    TkV

    oxmBng

    +

    =

    Channel noise

    Si-SiO2 interface noise

    Minimum in weak inversion for given current

    = inversionstrongin3/2n

    Traditionally [1], the following expression is used for

    12 Trond Ytterdal, Department of Electronics and Telecommunication

    *Transform valid up to a frequency ~gm/Cgd

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    Potential SNR (1)

    Thermal noise

    mBnd

    d

    gTkI

    I

    =

    4

    1

    2 100

    120

    dB]

    65nm

    90nm

    0.13um0.18um

    60

    80

    10-6Id2/Ind

    2)

    ecreases a owcurrent 2010log(

    Minimum gate length, same W/L ;Vds = 1V

    inversion for a given

    current

    1.E-09 1.E-08 1.E-07 1.E-06 1.E-05 1.E-04 1.E-03

    Drain current [A]

    13 Trond Ytterdal, Department of Electronics and Telecommunication

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    Potential SNR (2)

    Flicker noise

    22

    =

    mnd

    d

    g

    WLf

    I

    I

    75

    80

    [dB

    ]

    65nm

    90nm (L = 0.1um)

    0.13um0.18um

    d65

    70

    2/(Ind

    2Agate

    ))

    ecreases a owcurrent50

    5510lo

    g(I

    Minimum gate length, same W/L ; Vds = VDD/2

    inversion for a given

    current

    1.E-11 1.E-09 1.E-07 1.E-05 1.E-03

    Drain current [A]

    14 Trond Ytterdal, Department of Electronics and Telecommunication

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    Mismatch (1)

    Mismatch of two matched transistors identical by design

    can be characterized by:

    WL

    WLAVVVV VTTVTTTT

    //with/2/

    /)(with21

    ==+=

    ===

    AVTandA depends on process, layout and more

    Based on the quadratic MOS model, one can derive thefollowing well known formulas:

    Same gate voltage:

    2

    Same drain current:

    22

    +=

    VTd

    m

    d

    d

    I

    g

    I( ) 2

    += m

    dVTG

    gV

    15 Trond Ytterdal, Department of Electronics and Telecommunication

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    Mismatch (2)

    Mismatch per unit area decreases as technologiesare scaled down

    minoxVT LtA

    Gate area required for any given (VT)

    normalized to theLmin = 70nm

    1000

    From theory and ideal scaling:

    100 100earea

    n rea y AVT oes no sca e as

    fast asLmin

    m] 10

    Relative

    gat

    10

    AVT[

    m

    1

    0.01 0.1 1 10

    Minimum ate len th [m]

    1

    0.01 0.1 1 10

    16 Trond Ytterdal, Department of Electronics and Telecommunication

    Experimental Data from [2]

    Minimum gate length [m]

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    Gate leakage current (1)

    Gate current can NOT be neglected in scaled down

    technologies.

    Dominated by tunneling current => Relatively

    insensitive to device temperature.

    1.E-06

    1.E-05

    1.E-04

    90nm (simulated)0.13um0.13um (simulated)0.18um

    Minimum gate length,

    gate width = 100m

    IG

    VG 1.E-091.E-08

    1.E-07

    current[A]

    1.E-12

    1.E-11

    1.E-10

    Gate

    1.E-14

    1.E-13

    0 0.5 1 1.5 2

    Gate voltage [V]

    17 Trond Ytterdal, Department of Electronics and Telecommunication

    g-flavor technologies

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    Gate leakage current (2)G

    ig

    g

    Small signal equivalent

    circuit assuming low to

    ic itunnel

    and strong inversion

    ox gtunnel

    At a given frequency the impedance of the two branches have the

    same ma nitude and the currents i and i will be e ual in

    magnitude. This frequency is given by

    tunneloxgate gC =

    ox

    tunnelgate

    C

    gf

    =

    2

    1

    18 Trond Ytterdal, Department of Electronics and Telecommunication

    , c

    the tradit ional case.

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    fgate versus technology

    fgate is almost gate area 104

    90nmn epen en an an approx ma e

    expression is given in [3] as:

    )6.13(2 gsox Vt 100101

    1020.13m0.18m

    gsgga e

    Here,tox is the oxide thickness in 16 fgate

    [Hz

    ]

    -

    10-3

    10-2

    10-1

    g . and 0.51016 for PMOS.

    10-7

    10-610-5

    shown to the right for three

    different technologies. Veff[V]0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.4

    10-8

    19 Trond Ytterdal, Department of Electronics and Telecommunication

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    Analog circuit performance

    Analog and RF circuit performance metrics:

    Speed

    20 Trond Ytterdal, Department of Electronics and Telecommunication

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    FOM definition

    One commonly used Figure-of-merit (FOM)

    fDR

    PFOM

    =2

    Here,P is the power consumption,DR is the

    that can be processed by the circuit Small is GOOD.

    21 Trond Ytterdal, Department of Electronics and Telecommunication

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    Dynamic range (1)

    Here, we define the dynamic range (DR) as the ratio

    amplitudes.*

    If we assume that R is limited b noise on thelower side and the power supply voltage on the

    upper side, we can write

    rmsn

    DDv

    rmsn

    pp

    VV

    VVDR

    __ 22/ == (2)

    where, Vpp is the maximum peak-to-peak value of the

    signal, Vn_rms is the RMS noise voltage, v is thevo tage e c ency e ne y Vpp/VDD.

    22 Trond Ytterdal, Department of Electronics and Telecommunication

    *The ratio of squared amplitudes is also a common definition

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    Dynamic range (2)

    If we assume that matching limits DR on the lower

    ,

    2

    2/DDvpp

    V

    V

    V

    V

    DR

    == (3)

    where is a yield parameter and (Vos) is thecircuit.

    We observe for both 2 and 3 that DR scales with

    VDD and vFor the rest of the talk we assume that DR

    is limited by noise on the lower side

    23 Trond Ytterdal, Department of Electronics and Telecommunication

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    Signal-to-noise ratio (SNR)

    SNR is defined as the ratio of the signal power to

    . ,

    maximum SNR given by

    2_

    2_ 8

    )(

    8 rmsn

    DDv

    rmsn

    pp

    V

    V

    V

    VSNR

    == (4)

    If we compare (4) with (2), we see that

    SNRR = 2

    24 Trond Ytterdal, Department of Electronics and Telecommunication

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    SNR versus powerDD

    IDD voutVpp

    Cv

    Gm

    v

    VSS 1/f

    Power: CfVCfVVqfVIVppivppiDDiDDDDDD

    =

    =

    ==

    Here, i is the current efficiency of the transconductor and q/i is the charge

    SNR: SNRTk

    VV

    SNR B

    pp

    pp8

    8/ 22

    ==

    rans erre rom e power supp y n one per o an . e ave assume a SS=

    Only thermal noise is considered.

    Combining the two equations we get the power required per pole versus SNR:

    25 Trond Ytterdal, Department of Electronics and Telecommunication

    vi

    =Based on [1] and [4]

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    Theoretical FOM

    Rewriting (6) in terms of FOM:

    vi

    B

    vi

    B

    DRfSNRf =

    =

    2

    vi

    FOM

    =

    Ideal world (v = i = 1):(7)TkFOM Bi 4=

    Hence, one important question becomes:

    26 Trond Ytterdal, Department of Electronics and Telecommunication

    v

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    FOMs based on measurements

    FOMs calculated based on measured performance

    obtained using (7) due to one or more of the

    following: DR limited by distortion

    Additional noise sources (e.g. flicker noise)

    Clock power in switched-capacitor circuits Poor current efficiency of MOS transistors (it is even

    as epen en

    Parasitic capacitances

    Smaller mismatch => larger dimensions => larger

    parasitic capacitors

    27 Trond Ytterdal, Department of Electronics and Telecommunication

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    Reported FOMs for ADCs1.0E+14

    1997199819992000

    diss

    sENOB

    P

    F2FM=

    Phili s ISSCC04

    1.0E+13

    sions/J]

    200220032004Selection from Walden

    State-of-the-art 2004

    Balmell i ISSCC04

    Miyazaki ISSCC02

    Moyal ISSCC03

    1.0E+12

    FM[

    Conver

    nAD12110-18(03)

    Kwak (97)

    AD9245(03)

    Kelly, ISSCC01

    ,

    Philips ISSCC03

    Kulhalli ISSCC02

    Bjrnsen ESSCIRC05[5]

    gureofm

    erit

    nAD10120-13(03)

    Hernes ISSCC04

    1.0E+11Fi

    Siragusa ISSCC04

    1.0E+10

    Conversion Rate [Sample/s]1 MHz 10 MHz 100 MHz 1 GHz

    28 Trond Ytterdal, Department of Electronics and Telecommunication

    From [5]

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    Voltage efficiency (v) Assume that

    = 0.25

    0.30

    65nm

    90nm

    where Vdsat

    is the

    sapp

    0.15

    0.20

    t[V

    ]

    0.13um

    transistors

    0.050.10

    Vdsa

    v when we scale downtechnology, Vdsat must be

    0.00

    -0.6 -0.4 -0.2 0 0.2 0.4 0.6

    Ve [V]

    scaled down at the same

    rate as VDD.Not possible to scale

    Vdsat much lower than75mV

    v expected to decrease29 Trond Ytterdal, Department of Electronics and Telecommunication

    FOMdegrades

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    Current efficiency (i)Assuming CMOS implementation:

    The ain bandwidth GBW roduct of a sin le sta e OTA is iven b

    C

    gGBW m

    =2

    (8)

    Heregm is the transconductance of the input transistor and Cis the load

    capacitance.

    ,2_CTkV Brmsn =

    ,

    2

    2

    8

    )(

    DRTk

    VgGBW DDvm

    = (9)

    Hence, ifDR andgm is kept constant, the speed of the circuit decreases

    with the square of the supply voltage.

    30 Trond Ytterdal, Department of Electronics and Telecommunication

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    Scenario 1: Dividing VDD

    by 2

    while keeping GBWandDR:

    To keep it simple, assume that v does not change. From (9)

    we note that to keep GBWwhen supply voltage is reduced by

    m

    It is common to change the W/L ratio and the drain current by

    t e same re at ve amount n or er to eep effunc ange

    (adding devices in parallel). Hence, to increasegmby a factor

    of 4 bias current and W/L are increased b a factor of 4. If we

    assume that all stages of the amplifier are scaled in the same

    way, the current consumption will be increased by a factor of

    our. Power consumption doubles i decreases FOMdegrades

    31 Trond Ytterdal, Department of Electronics and TelecommunicationDownscaling will not help

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    Scenario 2: Increasing speed (1)

    while keeping DR and VDD:25

    30

    3590nm

    0.13um

    0.18um

    0.25um

    Minimum gate length; W/L = 5; Vds = 1V

    Assume that the frequency of

    the first non-dominant pole is10

    15

    20

    gm

    /ID

    [1/V]

    margin requirements forces a

    fixed ratio betweenfTand2.5E-04

    0

    5

    1.0E-12 1.0E-10 1.0E-08 1.0E-06 1.0E-04 1.0E-02

    Drain current [A]

    .

    Assume that the required1.5E-04

    2.0E-04

    Minimum gate length, same W/L

    Vds = 1/2VDD

    spee s suc a we ave o

    push the transistor deep into

    strong inversion. 5.0E-05

    1.0E-04Id[A]

    90nm

    130nm

    0.0E+00

    1.E+06 1.E+07 1.E+08 1.E+09 1.E+10 1.E+11

    fT[Hz]

    180nm

    i decreasesFOMde rades fTmax@90nm

    32 Trond Ytterdal, Department of Electronics and TelecommunicationDownscaling will probably help

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    Scenario 2: Increasing speed (2)

    Watch out for gain70

    increasing speed50

    60

    90 nm

    0.13 um

    0.18 um

    ,

    Vds = 1/2VDD

    If speed increase is

    obtained b increasin 2030g

    m/gds

    Veff, gain will decrease 010

    1.E-10 1.E-09 1.E-08 1.E-07 1.E-06 1.E-05 1.E-04 1.E-03

    i decreasesFOMdegrades

    Downscaling will not help

    33 Trond Ytterdal, Department of Electronics and Telecommunication

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    Maximizing FOM

    Some guidelines for maximizing FOMin nanoscaleCMOS circuits:

    Circuit level:

    Maximize v by using as low Veffas possible Identify fTmax in your technology. Stay well below this

    frequency to maximize i * se as g supp y vo age as poss e may e even

    higher than allowed by the foundry)

    Avoid high gain requirements (use, for example, gain

    calibration Go to interleaved architectures if speed requirements

    cause you to move dangerously close to fTmax*

    34 Trond Ytterdal, Department of Electronics and Telecommunication

    *

    or switch to a finer technology

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    List of symbols

    Parameter DescriptionAgate Gate area

    Parameter Description Mobility

    ox

    Cgs Gate-source capacitance

    Cgd Gate-drain capacitance

    T Absolute temperature

    tox Oxide thickness

    Cdb Drain-bulk capacitance

    cox Oxide capacitance per gate area

    VDD Supply voltage

    Vds Drain-source voltage

    ox x e capac ance

    f Frequency

    gm Transconductance

    eff gs T

    Vgs Gate-source voltage

    vs Saturation velocity

    gds Channel conductance

    Id Drain current

    VT Threshold voltage

    W Gate width

    B Bo tzmanns constant

    L Gate length

    L Minimum ate len th

    37 Trond Ytterdal, Department of Electronics and Telecommunication

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    References

    [1] E.A. Vittoz, Low Power Design: Ways to Approach the Limits, Solid-State Circuits Conference, 1994. Digest of Technical Papers. 41st ISSCC,

    . - , . .

    [2] K. Bult, Analog Design in Deep Sub-Micron CMOS, inProc. ESSCIRC

    2000, pp. 11-17.[3] A. Annema et al., Analog Circuits in Ultra-Deep-Submicron CMOS,

    IEEE J. of Solid-State Circuits, vol. 40, no. 1, Jan. 2005.

    . . , - -

    Analog Design, inAnalog Circuit Design, Editors R.S. van de Plaasche,W.M.C. Sansen, and J.H. Huijsing, Kluwer Academic Publishers, 1994.

    [5] J. Bjrnsen, . Moldsvor, T. Sther, T. Ytterdal, A 220mW 14b 40MSPS

    Gain Calibrated Pipelined ADC, inProc. European Solid-State Circuits

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    38 Trond Ytterdal, Department of Electronics and Telecommunication