dietmar köther - · pdf filequality factor q effective ... rho+rgh+tan(delta) rho+rgh rho...

r.kulke, dokumente/DuPont/ring_resonators.ppt May-01

LTCC 1R. Kulke, W. Simon, A. Lauer, M. Rittweger, P. Waldow,S. Stringfellow, R. Powell, M. Harrison, J.-P. Bertinet

onon

presented by presented by Dietmar KötherDietmar Köther


LTCC 2

October 98 - September 01

Rapid Manufacture of Microwave and Power ModulesEuropean Brite Euram III Project (BE-97-4883)

Partner Country• Marconi-CL GB• SOREP-ERULEC F• IMST GER• HYWEL NL• TNO NL• NMRC IE

Partner Country• Marconi-CL GB• SOREP-ERULEC F• IMST GER• HYWEL NL• TNO NL• NMRC IE

RAMPRAMPRAMP


LTCC 3LTCC Test Tiles

Ferro A6M, Au FX30-025

Ferro A6M, Ag FX33-229

DuPont 951 AX, Ag 6145

DuPont 951 AX, Au 5743 post fire


LTCC 4Geometry Parameters1. Ferro A6M, Au FX30-025:

t = 10 – 12 µmh = 184 –190 µmw = 238 µµµµmRa = 0.4 µm

2. Ferro A6M, Ag FX33-229:t = 14 – 16 µmh = 184 –190 µmw = 237 µµµµmRa = 0.4 µm

3. DuPont 951 AX, Ag 6145: t = 22 – 24 µmh = 190 –195 µmw = 195 µµµµmRa = 0.4 µm

4. DuPont 951 AX, Au 5743 post fire:t = 10 – 12 µmh = 175 –180 µmw = 180 µµµµmRa = 0.4 µm

MS Line

GND Mesh

th

w

LTCC Cross Section


LTCC 5Measured Parameters + Results

DC-ConductivityS-Parameter or Spectrum up to 40 GHz (On-Wafer)

Substrate ThicknessMicrostrip Line Width and ThicknessVia Diameter and PositionConductor Diffusion into Substrate SurfaceCircuit Geometry (ring, gap, line length …)

Quality Factor Q Effective Permittivity εeff

of Microstrip Line Total Line Losses α

GeometryGeometry DC + RF ParametersDC + RF Parameters

Evaluation ResultsEvaluation Results


LTCC 6Formulas

Insertion Loss: S21

Attenuation: a21(f) = −20 log|S21(f)|

3dB-Bandwidth: 2∆fn = fn(l)– fn(u)

Loaded Quality: QL(fn) = fn / (2∆fn)

Unloaded Quality: Q(fn) = QL(fn) / [1-|S21(fn)|]

Effective Permittivity: εeff = (c0 n)2 / (πd fn)2

Total Line Losses: α = (27.288 fn √εeff) / (c0 Q) [dB/m]

n: resonance frequencyd: ring diameter


LTCC 7Measurement of |S21||S21| [dB]

-80

-70

-60

-50

-40

-30

-20

-10

0 5 10 15 20 25 30 35 40Frequency / GHz

f1

f2

f3f4

f5f6

f8f7

f10f9f12f11

f13

measured on Ferro Ag: gap = 50µm


LTCC 8QualityUnloaded Q

20

40

60

80

100

120

140

160

180

0 5 10 15 20 25 30 35 40Frequency / GHz

Q: Ferro AuQ: DuPont AgQ: DuPont AuQ: Ferro Ag

DuPont 951, Au: εr=7.8, h=180µm, w=180µm, t=10µm, ρ== 8 mΩ/square, RGH=0.4µm, tanδ=4.7x10-3; (post-fire)DuPont 951, Ag: εr=7.8, h=180µm, w=195µm, t=10µm, ρ== 3 mΩ/square, RGH=0.4µm, tanδ=4.7x10-3

Ferro A6-M, Au, εr=5.9, h=190µm, w=240µm, t=12µm, ρ==7 mΩ/square, RGH=0.4µm, tanδ=1.2x10-3

Ferro A6-M, Ag, εr=5.9, h=190µm, w=250µm, t=12µm, ρ== 5 mΩ/square, RGH=0.4µm, tanδ=1.2x10-3


LTCC 9Measured Line LossesLosses [dB/cm]

00.10.20.30.40.50.60.70.80.9

11.1

0 5 10 15 20 25 30 35 40Frequency / GHz

DuPont, AuDuPont, AgFerro, AuFerro, Ag

DuPont 951, Au: εr=7.8, h=180µm, w=180µm, t=10µm, ρ== 8 mΩ/square, RGH=0.4µm, tanδ=4.7x10-3; (post-fire)DuPont 951, Ag: εr=7.8, h=180µm, w=195µm, t=10µm, ρ== 3 mΩ/square, RGH=0.4µm, tanδ=4.7x10-3

Ferro A6-M, Au, εr=5.9, h=190µm, w=240µm, t=12µm, ρ==7 mΩ/square, RGH=0.4µm, tanδ=1.2x10-3

Ferro A6-M, Ag, εr=5.9, h=190µm, w=250µm, t=12µm, ρ== 5 mΩ/square, RGH=0.4µm, tanδ=1.2x10-3


LTCC 10Ferro A6M: LossesLosses [dB/cm]

0

0.1

0.2

0.3

0.4

0.5

0 5 10 15 20 25 30 35 40Frequency / GHz

Ferro, AuFerro, AgRho+RGH+Tan(delta)Rho+RGHRho

Simulation with LineCalc: w=238µµµµm, t=12µµµµm, ρρρρ/ρρρρAu=1.6, RGH=0.4µµµµm, tanδδδδ=1.2x10-3

Ferro A6Mεεεεr = 5.9h = 190µµµµmRGH = 0.4µµµµmtanδδδδ = 1.2x10-3

Agw = 237µµµµmt = 12µµµµmρρρρ===== 5 mΩΩΩΩ/sq.

Auw = 238µµµµmt = 12µµµµmρρρρ===== 7 mΩΩΩΩ/sq.

RhoRho

RghRgh

tantanδδδδδδδδ


LTCC 11DuPont 951: LossesLosses [dB/cm]

00.10.20.30.40.50.60.70.80.9

11.1

0 5 10 15 20 25 30 35 40Frequency / GHz

DuPont 951, AgDuPont 951, AuRho+RGH+Tan(delta)Rho+RGHRho

DuPont 951εεεεr = 7.8h = 180µµµµmt = 10µµµµmRGH=0.4µµµµmtanδδδδ=4.7x10-3

Simulation with LineCalc: w=180µµµµm, t=10µµµµm, ρρρρ/ρρρρAu=1.6, RGH=0.5µµµµm, tanδδδδ=5x10-3

Agw = 195µµµµmt = 10µµµµmρρρρ===== 3 mΩΩΩΩ/sq.

Au (post-fire)w = 180µµµµmt = 10µµµµmρρρρ===== 8 mΩΩΩΩ/sq.

RhoRho

RghRgh

tantanδδδδδδδδ


LTCC 12Effective Permittivity

1. Unexpected Measured Results2. Geometry Inspection: Diffused Top Conductor3. Full Wave Analysis (FDTD)

E-Field Distribution Influence on εeff and ZL

4. Libra Circuit Simulation without correction with correction

5. Comparison of Measured and Simulated Data

Correction approach of diffused or recessed top conductor


LTCC 13Conductor Cross-View

Dupont 951 / Ag 6145 Ferro A6M / Ag Fx33-229

Dupont 951 / Au 5743 Ferro A6M / Au Fx30-025

Silver Conductor

Gold Conductor

post

-fire

co-fi

re

co-fi

reco

-fire


LTCC 14FDTD-Simulations

E-Field Concentration

MS-Line Recessed MS-Line


LTCC 15FDTD-Simulations II

effective Permittivity

4

4.2

4.4

4.6

4.8

0 10 20 30 40 50Frequency / GHz

recessed

50% recessed

on topmeas. on Ferro Au

Line Impedance / ΩΩΩΩ

50

52

54

56

58

60

0 10 20 30 40 50Frequency / GHz

recessed

50% recessed

on top

0%

100%

50%

0%

100%

50%


LTCC 16Circuit Simulation with Libra


LTCC 17Ferro AG Ring-Resonator

0 10 20 30 40freq / GHz

0

-20

-40

-60

-80

-100

-120

|S12| / dB

MEAS: S12_G50SIM: S12_G50

with correction:εr = 6.25h = 167 µmw = 245 µmt = 15 µm

ZL = 48.3 ΩΩΩΩεεεεeff = 4.3

0 10 20 30 40freq / GHz

0

-20

-40

-60

-80

-100

-120

|S12| / dB

MEAS: S12_G50SIM: S12_G50

no correction:εr = 5.9h = 185 µmw = 245 µmt = 15 µm

ZL = 52.4 ΩΩΩΩεεεεeff = 4.1


LTCC 18εεεεeff: Measurement + Simulation

effective Permittivity

4.1

4.3

4.5

4.7

4.9

5.1

5.3

5.5

5.7

0 5 10 15 20 25 30 35 40Frequency / GHz

DuPont: measuredDuPont: sim. with correctionDuPont: simulationFerro: measuredFerro: sim. with correctionFerro: simulation

DuPont: εr = 7.8, Silvermeasured + simulated

simulated (no correction)

Ferro: εr = 5.9, Goldmeasured + simulated

simulated (no correction)


LTCC 19Outlook: LTCC RF-Benchmark

Conductors Vias Cavities

microstrip line

ground

stripline

ground

h = 130µm

h = 200µm

h = 200µm

h = 200µm

h = 130µm

h = 130µm

DuPont 951:εr = 7.8


LTCC 20TestlayoutX = 66 mmY = 66 mm

StriplineRing-

Resonators

Coupled Striplines

StriplineCalibration

Kid

Microstrip to Stripline

Transitions

X = 0Y = 0

Resolution Test Lines

MicrostripCalibration

Lines

MicostripRing-

Resonators

Conductivity Measurement


LTCC 21Conclusion

Test Procedure for LTCC RF-Evaluation;Resulting Parameters:• Quality Factor Q• Effective Permittivity εεεεeff

• Line Losses ααααCorrection Approach for Diffused Top ConductorsBenchmarking Activity has started


LTCC 22LTCCLTCC @@@@@@@@ IMST

Multilayer Library for LTCC-Elements (ADS)

Consulting: Material, Foundry, RF + Antennas

LTCC-Prototyping Capability

Evaluation and Characterization• Modules, Circuits and Antennas (GHz-Frequencies)

Introduction to Production

dietmar köther - · pdf filequality factor q effective ... rho+rgh+tan(delta) rho+rgh rho...

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