differential ring resonator project
TRANSCRIPT
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RF MEMS Resonator
Junjun Huan
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Resonators for Timing and Frequency Control
• Quartz-crystal filters• Ceramic filters• SAW( surface acoustic wave) filters• Micromechanical filters
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Silicon MEMS Resonators
• Economic reasons• Substantial size and power reduction• Long term stability: crystalline material
with a uniform, regular atomic structure• On-chip building blocks • Conceived capable of implementing
virtually any signal processing function presently realizable via transistor circuits
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A micromachined, single-crystalsilicon, tunable resonator
• A fully integrated, single-crystal silicon (SCS) micromachined tunable resonator
• Natural resonant frequency of nominally 1 MHz • A room temperature quality factor approaching 10,000 in vacuu
m• Fully compatible with VLSI technology.
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A micromachined, single-crystalsilicon, tunable resonator
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A 12MHz Micromechanical Bulk Acoustic Mode Oscillator
• Longitudinal mode• Resonance frequency
12MHz• Q=180000• d=1µm
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Lame-mode Square Resonator
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Lame-mode Square Resonator
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Square-Extensional Mode SCS Micromechanical Resonator
• Resonance frequency around 13.1MHz• High quality factor: Q=130000• High power handling capability: current out
put imax≈ 160µA• Vibration mode: a square plate zooming in
and out thus preserving the original shape• T-type corner anchoring to minimize energ
y leak to the substrate
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Square-Extensional Mode SCS Micromechanical Resonator
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MIDIS Process• MIDIS: MEMS Integrated Design for Inertial Sensors by Teledyne D
ALSA Semiconductor Inc. (TDSI)• 3 single crystal silicon wafers• TSVs: In-Situ Doped Polysilicon (ISDP) and silicon dioxide
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Ring Resonator Model
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Design Variables