digital integrated circuits© prentice hall 1995 devices the mos transistor

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Digital Integrated Circuits © Prentice Hall 1995 Devices Devices The MOS Transistor n+ n+ p-substrate Field-Oxyde (SiO 2 ) p+ stopper Polysilicon G ateO xyde Drain Source Gate Bulk Contact CRO SS-SEC TIO N ofNM O S Transistor

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Page 1: Digital Integrated Circuits© Prentice Hall 1995 Devices The MOS Transistor

Digital Integrated Circuits © Prentice Hall 1995DevicesDevices

The MOS Transistor

n+n+

p-substrate

Field-Oxyde

(SiO2)

p+ stopper

Polysilicon

Gate Oxyde

DrainSource

Gate

Bulk Contact

CROSS-SECTION of NMOS Transistor

Page 2: Digital Integrated Circuits© Prentice Hall 1995 Devices The MOS Transistor

Digital Integrated Circuits © Prentice Hall 1995DevicesDevices

Cross-Section of CMOS Technology

Page 3: Digital Integrated Circuits© Prentice Hall 1995 Devices The MOS Transistor

Digital Integrated Circuits © Prentice Hall 1995DevicesDevices

MOS transistors Types and Symbols

D

S

G

D

S

G

G

S

D D

S

G

NMOS Enhancement NMOS

PMOS

Depletion

Enhancement

B

NMOS withBulk Contact

Page 4: Digital Integrated Circuits© Prentice Hall 1995 Devices The MOS Transistor

Digital Integrated Circuits © Prentice Hall 1995DevicesDevices

Threshold Voltage: Concept

n+n+

p-substrate

DSG

B

VGS

+

-

Depletion

Region

n-channel

Page 5: Digital Integrated Circuits© Prentice Hall 1995 Devices The MOS Transistor

Digital Integrated Circuits © Prentice Hall 1995DevicesDevices

Current-Voltage Relations

n+n+

p-substrate

D

SG

B

VGS

xL

V(x) +–

VDS

ID

MOS transistor and its bias conditions

Page 6: Digital Integrated Circuits© Prentice Hall 1995 Devices The MOS Transistor

Digital Integrated Circuits © Prentice Hall 1995DevicesDevices

Current-Voltage Relations

Page 7: Digital Integrated Circuits© Prentice Hall 1995 Devices The MOS Transistor

Digital Integrated Circuits © Prentice Hall 1995DevicesDevices

Transistor in Saturation

n+n+

S

G

VGS

D

VDS > VGS - VT

VGS - VT+-

Page 8: Digital Integrated Circuits© Prentice Hall 1995 Devices The MOS Transistor

Digital Integrated Circuits © Prentice Hall 1995DevicesDevices

I-V Relation

0.0 1.0 2.0 3.0 4.0 5.0

VDS (V)

1

2

I D (

mA

)

0.0 1.0 2.0 3.0VGS (V)

0.010

0.020

÷ I

D

VT

SubthresholdCurrent

Triode Saturation

VGS = 5V

VGS = 3V

VGS = 4V

VGS = 2V

VGS = 1V

(a) ID as a function of VDS (b) ID as a function of VGS

(for VDS = 5V).

Sq

ua

re D

ep

end

en

ce

VDS = VGS-VT

NMOS Enhancement Transistor: W = 100 m, L = 20 m

Page 9: Digital Integrated Circuits© Prentice Hall 1995 Devices The MOS Transistor

Digital Integrated Circuits © Prentice Hall 1995DevicesDevices

A model for manual analysis

Page 10: Digital Integrated Circuits© Prentice Hall 1995 Devices The MOS Transistor

Digital Integrated Circuits © Prentice Hall 1995DevicesDevices

The Sub-Micron MOS Transistor

• Threshold Variations

• Parasitic Resistances

• Velocity Sauturation and Mobility Degradation

• Subthreshold Conduction

• Latchup

Page 11: Digital Integrated Circuits© Prentice Hall 1995 Devices The MOS Transistor

Digital Integrated Circuits © Prentice Hall 1995DevicesDevices

Threshold Variations

VT

L

Long-channel threshold Low VDS threshold

Threshold as a function of the length (for low VDS)

Drain-induced barrier lowering (for low L)

VDS

VT

Page 12: Digital Integrated Circuits© Prentice Hall 1995 Devices The MOS Transistor

Digital Integrated Circuits © Prentice Hall 1995DevicesDevices

Parasitic Resistances

W

LD

Drain

Draincontact

Polysilicon gate

DS

G

RS RD

VGS,eff

Page 13: Digital Integrated Circuits© Prentice Hall 1995 Devices The MOS Transistor

Digital Integrated Circuits © Prentice Hall 1995DevicesDevices

Velocity Saturation (1)

EV/m)Esat

n (c

m/s

ec)

sat = 107

Constant mobility (slope = )

constant velocity

EtV/m)

n (c

m2 /V

s)

n0

(b) Mobility degradation(a) Velocity saturation

0

700

250

Page 14: Digital Integrated Circuits© Prentice Hall 1995 Devices The MOS Transistor

Digital Integrated Circuits © Prentice Hall 1995DevicesDevices

Velocity Saturation (2)

VDS (V)

I D (

mA

)

Lin

ea

r D

ep

en

de

nc

e

VGS = 5

VGS = 4

VGS = 3

VGS = 2

VGS = 1

0.0 1.0 2.0 3.0 4.0 5.0

0.5

1.0

1.5

(a) ID as a function of VDS (b) ID as a function of VGS(for VDS = 5 V).

0.0 1.0 2.0 3.0VGS (V)

0

0.5

I D (

mA

)

Linear Dependence on VGS

Page 15: Digital Integrated Circuits© Prentice Hall 1995 Devices The MOS Transistor

Digital Integrated Circuits © Prentice Hall 1995DevicesDevices

Sub-Threshold Conduction

0.0 1.0 2.0 3.0VGS (V)

10 12

10 10

10 8

10 6

10 4

10 2

ln(I

D)

(A)

Subthreshold exponential region

Linear region

VT

Page 16: Digital Integrated Circuits© Prentice Hall 1995 Devices The MOS Transistor

Digital Integrated Circuits © Prentice Hall 1995DevicesDevices

Latchup

(a) Origin of latchup (b) Equivalent circuit

VDD

Rpsubs

Rnwell p-source

n-source

n+ n+p+ p+ p+ n+

p-substrateRpsubs

Rnwell

VDD

n-well

Page 17: Digital Integrated Circuits© Prentice Hall 1995 Devices The MOS Transistor

Digital Integrated Circuits © Prentice Hall 1995DevicesDevices

SPICE MODELS

Level 1: Long Channel Equations - Very Simple

Level 2: Physical Model - Includes VelocitySaturation and Threshold Variations

Level 3: Semi-Emperical - Based on curve fittingto measured devices

Level 4 (BSIM): Emperical - Simple and Popular

Page 18: Digital Integrated Circuits© Prentice Hall 1995 Devices The MOS Transistor

Digital Integrated Circuits © Prentice Hall 1995DevicesDevices

MAIN MOS SPICE PARAMETERS

Page 19: Digital Integrated Circuits© Prentice Hall 1995 Devices The MOS Transistor

Digital Integrated Circuits © Prentice Hall 1995DevicesDevices

SPICE Transistors Parameters

Page 20: Digital Integrated Circuits© Prentice Hall 1995 Devices The MOS Transistor

Digital Integrated Circuits © Prentice Hall 1995DevicesDevices

SPICE Parameters for Parasitics

Page 21: Digital Integrated Circuits© Prentice Hall 1995 Devices The MOS Transistor

Digital Integrated Circuits © Prentice Hall 1995DevicesDevices

Technology Evolution

Page 22: Digital Integrated Circuits© Prentice Hall 1995 Devices The MOS Transistor

Digital Integrated Circuits © Prentice Hall 1995DevicesDevices

The CMOS Inverter: A First Glance

VDD

Vin Vout

CL

Page 23: Digital Integrated Circuits© Prentice Hall 1995 Devices The MOS Transistor

Digital Integrated Circuits © Prentice Hall 1995DevicesDevices

VTC of Real Inverter

0.0 1.0 2.0 3.0 4.0 5.0Vin (V)

1.0

2.0

3.0

4.0

5.0

Vo

ut (V

)

VMNMH

NML

Page 24: Digital Integrated Circuits© Prentice Hall 1995 Devices The MOS Transistor

Digital Integrated Circuits © Prentice Hall 1995DevicesDevices

Dynamic Behavior of MOS Transistor

DS

G

B

CGDCGS

CSB CDBCGB

Page 25: Digital Integrated Circuits© Prentice Hall 1995 Devices The MOS Transistor

Digital Integrated Circuits © Prentice Hall 1995DevicesDevices

Delay Definitions

tpHL

tpLH

t

t

Vin

Vout

50%

50%

tr

10%

90%

tf

VDD VDD

VinVout

M1

M2

M3

M4Cdb2

Cdb1

Cgd12

Cw

Cg4

Cg3

Vout2

Fanout

Interconnect

VoutVin

CL

SimplifiedModel

Page 26: Digital Integrated Circuits© Prentice Hall 1995 Devices The MOS Transistor

Digital Integrated Circuits © Prentice Hall 1995DevicesDevices

CMOS Inverters

Polysilicon

InOut

Metal1

VDD

GND

PMOS

NMOS

1.2 m=2

Page 27: Digital Integrated Circuits© Prentice Hall 1995 Devices The MOS Transistor

Digital Integrated Circuits © Prentice Hall 1995DevicesDevices

Using Cascaded Buffers

C2C1

Ci

CL

1 u u2 uN-1

In Out

uopt = e

Page 28: Digital Integrated Circuits© Prentice Hall 1995 Devices The MOS Transistor

Digital Integrated Circuits © Prentice Hall 1995DevicesDevices

COMBINATIONAL LOGIC

Page 29: Digital Integrated Circuits© Prentice Hall 1995 Devices The MOS Transistor

Digital Integrated Circuits © Prentice Hall 1995DevicesDevices

Static CMOS

VDD

VSS

PUN

PDN

In1

In2

In3

F = G

In1

In2

In3

PUN and PDN are Dual Networks

PMOS Only

NMOS Only

Page 30: Digital Integrated Circuits© Prentice Hall 1995 Devices The MOS Transistor

Digital Integrated Circuits © Prentice Hall 1995DevicesDevices

Example Gate: NAND

Page 31: Digital Integrated Circuits© Prentice Hall 1995 Devices The MOS Transistor

Digital Integrated Circuits © Prentice Hall 1995DevicesDevices

4-input NAND Gate

Out

In1 In2 In3 In4

In3

In1

In2

In4

In1 In2 In3 In4

VDD

Out

GND

VDD

In1 In2 In3 In4

Vdd

GND

Out

Page 32: Digital Integrated Circuits© Prentice Hall 1995 Devices The MOS Transistor

Digital Integrated Circuits © Prentice Hall 1995DevicesDevices

Where Does Power Go in CMOS?

• Dynamic Power Consumption

• Short Circuit Currents

• Leakage

Charging and Discharging Capacitors

Short Circuit Path between Supply Rails during Switching

Leaking diodes and transistors

Page 33: Digital Integrated Circuits© Prentice Hall 1995 Devices The MOS Transistor

Digital Integrated Circuits © Prentice Hall 1995DevicesDevices

SEQUENTIAL LOGIC

Page 34: Digital Integrated Circuits© Prentice Hall 1995 Devices The MOS Transistor

Digital Integrated Circuits © Prentice Hall 1995DevicesDevices

Master-Slave Flip-Flop

S

R

Q

Q Q

QS

R

Q

Q

J

K

MASTER SLAVE

QJ

K Q

PRESET

CLEAR

SI

RI

Page 35: Digital Integrated Circuits© Prentice Hall 1995 Devices The MOS Transistor

Digital Integrated Circuits © Prentice Hall 1995DevicesDevices

The Ellmore Delay

Page 36: Digital Integrated Circuits© Prentice Hall 1995 Devices The MOS Transistor

Digital Integrated Circuits © Prentice Hall 1995DevicesDevices

The Clock Skew Problem

CL1 R1 CL2 R2 CL3 R3In Out

t’ t’’ t’’’

tl,min

tl,max

tr,min

tr,max

ti

Clock Edge Timing Depends upon Position

Clock Rates as High as 500 Mhz in CMOS!