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个人简历• 美国大学工程学学士、硕士、博士• 美国德州电子仪器公司芯片测试工程师,芯片生产工程师,开发部经理。
• 美国阿肯色大学电子工程学教授。• 发表论文 170多篇。• 完成多项研究项目,价值超过美金 1500万。
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个人简历
• 博士生导师,指导过 65位博士和硕士生。• 获得伦敦城市行业教育学会的“ CGIA”文凭。
• 写了关于开关电源技术方面的书一本,书名为“ Power Switching Converters”
• 美国电解化学协会委员。• 微电子封装研究所主任。
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Micro-Electro-Mechanical Devices
Simon S. Ang
Professor of Electrical EngineeringUniversity of Arkansas
USA
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What is Micro-Electromechanical Device or MEMs?
• Imagine machines so small they are imperceptible to the human eye.
• Imagine working machines with gears no bigger than a grain of pollen.
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What is MEMS?
• Micro-Electro-Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common substrate using micro-fabrication technology.
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MEMS Applications
• Air Bag Sensor - crash-bag deployment in automobile (accelerometer)
• Ink Jet Printer
• Bio-MEMS – Polymerase Chain Reactor (PCR) for DNA amplification and identification
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MEMS Accelerometer
Automotive -- Testing, Suspension, Air BagsAgricultural -- Harvesting shock & vibration, Production line monitoring
Manufacturing -- Testing, Production line monitoring, Shipping monitoringTransportation -- Rail-car sensing, Shipping monitoring, Testing
Down Hole Drilling -- Tilt/Attitude sensing, Machinery healthNASA -- Vibration Monitoring, Testing
(From Silicon Design Inc.,)
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A Portable PCR DeviceBiological Detection Technology for Counter –
Terrorism
(Lawrence Livermore Laboratory)
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Sandia’s Micro-Mirror
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Spider Mite on a Sandia’s Micro-Mirror
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Spider Mite Approaching a Sandia’s Micro-Gear Assembly
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Micro Spacecrafts
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Microthruster
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Microthruster
Microcombustion testing
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Microthruster
Microthruster firing sequence
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Basic Surface Micromachining Process Sequence
I. Deposit Sacrificial Layer
II. Pattern Sacrificial Layer
III. Deposit Mechanical Layer
IV. Pattern Mechanical Layer
V. Release Mechanical Layer
VI. Test Device
+V
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Microelectronic Fabrication
Photomask Fabricated Devices
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Processing Equipment
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Processing Equipment
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Processing Equipment
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Processing Equipment
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Processing Equipment
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Processing Equipment
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Processing Equipment
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Aluminum Wire Bonder
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Gold Wire Bonder
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Wire Bond Pull Tester
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Measurement Equipment
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Microelectronic Cleanroom Operation
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Microelectronic Cleanroom Operation
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Microelectronic Cleanroom Operation
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Microelectronic Cleanroom Operation
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Microelectronic Cleanroom Operation
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Microelectronic Cleanroom Operation
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Wire Bonding
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Microfluidic Devices
• Microfluidic devices are MEMS devices with micro-scale (10-6m) or nano-scale (10-9m) flow channels
• They come with valves, electrodes, heaters, and other features
• These microfluidic devices can be used as tiny chemical processing or reaction system, consuming only tiny amount of chemical – micro-TAS (micro total analysis system)
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Post-type Filter
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Comb-Type Filter
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Weir-type Filter
Glass cover
Silicon plate
Inlet Outlet
50µm
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Weir-type Filter
50µm
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Fluorescent Microscope
Cell Fluorescent labeled antibody Labeled cell
Labeling
Detection
In Chip Immunofluorescent Cell Detection
Glass cover
Silicon Plate
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Beads in the Microchannels
Deep channel (before filter chamber)
Shallow channel (After filter chamber)
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Confocal Images of Microchannel
Shallow channel
Deep Channel
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Fluent Simulations of Microfilter Chip
1μm weir gap
Flow rate=2 mm/s
3μm weir gap
Flow rate=2mm/s
6μm weir gap
Flow rate=2mm/s9μm weir gap
Flow rate=2mm/s
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Fluent Simulations of Microfilter Chip
50µm
1μm weir gap
Depth=30μmDepth=10μm
Depth=50μm
Flow rate=1mm/sFlow rate=0.5mm/s
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Labeling efficiency along the weir
0
10
20
30
40
50
0 20 40 60 80 100 120
Normalized S/N ratio
Dept
h of
Wei
r
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Trapping Efficiency
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Comparison with the conventional detection on slides
• On slides– 9 steps– Takes more than
1 h– Consumes 20µl
cells solution and 25 µl labeling reagent
• Within filter chip– 3 steps– Takes less than
0.5h– Consumes 2 µl
cells solution and labeling reagent
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Pillar-Type Microfludic Filter Chip
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Future work
• Next generation chip:– Comb-type chip– Multiplex
• Application in DNA array• Application in ELISA• Incorporate QD
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Other Related Work
• Quantum dot labeling
• Bacteria sensors
• Brain probes
• Recording integrated circuitries
• Microelectronics Packaging
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Quantum Dots Detection System
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Quantum Dots Labeling of C. parvum (red) and G. Lamblia (Green)
“Quantum Dots as a Novel Immunofluorescent Detection System for Cryptosporidium parvum and Giardia lamblia,” L. Zhu, S. Ang, & Wen-Tso Liu, in Applied and Environmental Microbiology.
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Interdigitated Electrode Sensor
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What is a Bio-Sensor?
• Biologically sensitive Material– Antibodies– Enzymes– DNA Probes
• Transducing Element/System– Electrochemical– Optical– mass
• Interfacing– Fluorescent– Chemiluminescent– Enzymatic substrate
Direct
Indirect
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E-coli Sensing Principle
Au Electrode
E. coli O157:H7 cells
Fe[(CN)6]3-/4-
Charge transfer is
blocked
Streptavidin Self
Assembled Monolayer
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E-coli cells on the surface of bio-sensor before washing away non-specific binding - 65 x 100 μm window size
1000 X Magnification
Scanning Electron Micrograph of E-Coli on Bio-Sensor
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Surface of Electrode (AFM)
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• Multi-site potential and chronoamperometry brain probes
Brain Sensors
Neural Signal Recording Electrodes
Nano Interdigitated Array Electrochemical Recording Electrode
Potential Electrode
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• A brain probe mounted and wire bonded on a circuit board carrier
Brain Sensors
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• SEM Photo of a multi-site potential and chrono-amperometry brain probe
Brain Sensors
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• SEM Photo of a multi-site potential and chrono-amperometry brain probe
Brain Sensors
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Silicon Microprobe Process Flow
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Silicon Microprobe Process Flow
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Brain Probe Recording in Rat’s Brain
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Extracellular Field Potentials in Olfactory Bulb of A Male Rat
Stainless steel microwires - 100µm diameter, enamel-insulated
16-site brain microprobe
A) Match in evoked potential amplitude and waveform across the four recording sites when occupying the same position in the olfactory bulb
B) Sharp reversal of polarity as each recording site across the mitral cell later, indicating that crosstalk between channels is minimal.
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Recording Integrated Circuit
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Microelectronic Packaging
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Microelectronic Packaging
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Microelectronic Packaging
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Microelectronic Packaging
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Microelectronic Packaging
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Thank You
Questions ?