Transcript
Page 1: Applied Materials Mirra 3400 Chemical Mechanical Polishing ......Polisher HCLU 425 30 th Street Suite 26 ~ Newport Beach, CA 92663 USA ~ Office:+1949.396.1395 ,QWHUHVWHG SDUWLHV PD\

425 30th Street Suite 26 Newport Beach, CA 92663 USA Office: +1 949.396.1395

Applied Materials Mirra 3400 Chemical Mechanical Polishing (CMP), 6"

38536

Applied Materials Mirra 3400 Chemical Mechanical Polishing (CMP), 6"- DIWO (Dry-in wet-out)- Silicon Oxide, Polyimide, a-Si- 208 V, 200 A, 45 kVA, Standby 6,5 kVA1996 Vintage

Page 2: Applied Materials Mirra 3400 Chemical Mechanical Polishing ......Polisher HCLU 425 30 th Street Suite 26 ~ Newport Beach, CA 92663 USA ~ Office:+1949.396.1395 ,QWHUHVWHG SDUWLHV PD\

425 30th Street Suite 26 Newport Beach, CA 92663 USA Office: +1 949.396.1395

Polisher Work Station

Page 3: Applied Materials Mirra 3400 Chemical Mechanical Polishing ......Polisher HCLU 425 30 th Street Suite 26 ~ Newport Beach, CA 92663 USA ~ Office:+1949.396.1395 ,QWHUHVWHG SDUWLHV PD\

425 30th Street Suite 26 Newport Beach, CA 92663 USA Office: +1 949.396.1395

Page 4: Applied Materials Mirra 3400 Chemical Mechanical Polishing ......Polisher HCLU 425 30 th Street Suite 26 ~ Newport Beach, CA 92663 USA ~ Office:+1949.396.1395 ,QWHUHVWHG SDUWLHV PD\

425 30th Street Suite 26 Newport Beach, CA 92663 USA Office: +1 949.396.1395

Polisher Robot Fabs Module

Page 5: Applied Materials Mirra 3400 Chemical Mechanical Polishing ......Polisher HCLU 425 30 th Street Suite 26 ~ Newport Beach, CA 92663 USA ~ Office:+1949.396.1395 ,QWHUHVWHG SDUWLHV PD\

425 30th Street Suite 26 Newport Beach, CA 92663 USA Office: +1 949.396.1395

Polisher

Page 6: Applied Materials Mirra 3400 Chemical Mechanical Polishing ......Polisher HCLU 425 30 th Street Suite 26 ~ Newport Beach, CA 92663 USA ~ Office:+1949.396.1395 ,QWHUHVWHG SDUWLHV PD\

425 30th Street Suite 26 Newport Beach, CA 92663 USA Office: +1 949.396.1395

Polisher Cover

Page 7: Applied Materials Mirra 3400 Chemical Mechanical Polishing ......Polisher HCLU 425 30 th Street Suite 26 ~ Newport Beach, CA 92663 USA ~ Office:+1949.396.1395 ,QWHUHVWHG SDUWLHV PD\

425 30th Street Suite 26 Newport Beach, CA 92663 USA Office: +1 949.396.1395

Polisher Spindel Head 1 and 2

Page 8: Applied Materials Mirra 3400 Chemical Mechanical Polishing ......Polisher HCLU 425 30 th Street Suite 26 ~ Newport Beach, CA 92663 USA ~ Office:+1949.396.1395 ,QWHUHVWHG SDUWLHV PD\

425 30th Street Suite 26 Newport Beach, CA 92663 USA Office: +1 949.396.1395

Polisher pl1 - Slurry Check

Page 9: Applied Materials Mirra 3400 Chemical Mechanical Polishing ......Polisher HCLU 425 30 th Street Suite 26 ~ Newport Beach, CA 92663 USA ~ Office:+1949.396.1395 ,QWHUHVWHG SDUWLHV PD\

425 30th Street Suite 26 Newport Beach, CA 92663 USA Office: +1 949.396.1395

Polisher / Head Over pl3

Page 10: Applied Materials Mirra 3400 Chemical Mechanical Polishing ......Polisher HCLU 425 30 th Street Suite 26 ~ Newport Beach, CA 92663 USA ~ Office:+1949.396.1395 ,QWHUHVWHG SDUWLHV PD\

425 30th Street Suite 26 Newport Beach, CA 92663 USA Office: +1 949.396.1395

Polisher HCLU

Page 11: Applied Materials Mirra 3400 Chemical Mechanical Polishing ......Polisher HCLU 425 30 th Street Suite 26 ~ Newport Beach, CA 92663 USA ~ Office:+1949.396.1395 ,QWHUHVWHG SDUWLHV PD\

425 30th Street Suite 26 Newport Beach, CA 92663 USA Office: +1 949.396.1395

Two heads Titan II included

Page 12: Applied Materials Mirra 3400 Chemical Mechanical Polishing ......Polisher HCLU 425 30 th Street Suite 26 ~ Newport Beach, CA 92663 USA ~ Office:+1949.396.1395 ,QWHUHVWHG SDUWLHV PD\

425 30th Street Suite 26 Newport Beach, CA 92663 USA Office: +1 949.396.1395

E-Rack

Page 13: Applied Materials Mirra 3400 Chemical Mechanical Polishing ......Polisher HCLU 425 30 th Street Suite 26 ~ Newport Beach, CA 92663 USA ~ Office:+1949.396.1395 ,QWHUHVWHG SDUWLHV PD\

425 30th Street Suite 26 Newport Beach, CA 92663 USA Office: +1 949.396.1395

E-Rack MEI Boards

Page 14: Applied Materials Mirra 3400 Chemical Mechanical Polishing ......Polisher HCLU 425 30 th Street Suite 26 ~ Newport Beach, CA 92663 USA ~ Office:+1949.396.1395 ,QWHUHVWHG SDUWLHV PD\

425 30th Street Suite 26 Newport Beach, CA 92663 USA Office: +1 949.396.1395

Polisher Intern Facility

Page 15: Applied Materials Mirra 3400 Chemical Mechanical Polishing ......Polisher HCLU 425 30 th Street Suite 26 ~ Newport Beach, CA 92663 USA ~ Office:+1949.396.1395 ,QWHUHVWHG SDUWLHV PD\

425 30th Street Suite 26 Newport Beach, CA 92663 USA Office: +1 949.396.1395


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