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2.830J / 6.780J / ESD.63J Control of Manufacturing Processes (SMA 6303) Spring 2008
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Control of Manufacturing
Processes
Subject 2.830/6.780/ESD.63 Spring 2008 Lecture #2
Semiconductor Process Variation
February 7, 2008
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http:2.830/6.780/ESD.63
Agenda The Semiconductor Fabrication Process
Manufacturing process control
Types of Variation in Microfabrication Defects vs. parametric variations Temporal variations: wafer to wafer (run to run)
Spatial variations: wafer, chip, and feature level
Preview of manufacturing control techniques Statistical detection/analysis of variations Characterization/modeling of processes & variation Process optimization & robust design Feedback control of process variation
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Semiconductor Fabrication Process, Part 1
R. J. Shutz, in Statistical Case Studies for Industrial Process Improvement, pp. 470-471, SIAM, 1997.Manufacturing Courtesy of the Society for Industrial and Applied Mathematics. Used with permission.
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Semiconductor Fabrication Process, Part 2
R. J. Shutz, in Statistical Case Studies for Industrial Process Improvement, pp. 470-471, SIAM, 1997.Manufacturing Courtesy of the Society for Industrial and Applied Mathematics. Used with permission.
4
Semiconductor Fabrication Process, Part 3
R. J. Shutz, in Statistical Case Studies for Industrial Process Improvement, pp. 470-471, SIAM, 1997.Manufacturing Courtesy of the Society for Industrial and Applied Mathematics. Used with permission.
5
Semiconductor Fabrication Process, Part 4
R. J. Shutz, in Statistical Case Studies for Industrial Process Improvement, pp. 470-471, SIAM, 1997.Manufacturing Courtesy of the Society for Industrial and Applied Mathematics. Used with permission.
6
(Semiconductor) Manufacturing
Process Control
Image removed due to copyright restrictions. Please see Fig. 26 in Boning, D. S., et al. A General Semiconductor Process Modeling Framework. IEEE Transactions on Semiconductor Manufacturing 5 (November 1992): 266-280.
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Agenda The Semiconductor Fabrication Process
Manufacturing process control
Types of Variation in Microfabrication Defects vs. parametric variations Temporal variations: wafer to wafer (run to run)
Spatial variations: wafer, chip, and feature level
Preview of manufacturing control techniques Statistical detection/analysis of variations Characterization/modeling of processes & variation Process optimization & robust design Feedback control of process variation
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Defect vs. Parametric Variation
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Yield & Variation from Defects Electrical test
measure shorts in test
structures for different spacings between patterned lines (at or
near the design rule or DR
feature size)
measure opens in other test
structures
Images removed due to copyright restrictions. Please see: Hess, Christopher. "Test Structures for Circuit Yield Assessment and Modeling." IEEE International Symposium on Quality Electronics Design, 2003.
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Temporal Variation
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Spatial Variation
Wafer scale Chip scale Feature scale
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Modeling of Processes
and Variation
Empirical modeling Physical modeling
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Process Optimization & Robust Design
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Image removed due to copyright restrictions. Please see Fig. 7 in Lakshminarayanan, S., et al. Design Rule Methodology to Improve the Manufacturability of the Copper CMP Process. Proceedings of the IEEE International Interconnect Technology Conference (2002): 99-101.
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Feedback Control of Variation
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EQUIPMENT MATERIALCONTROLLER
The General Process Control Problem Desired
MATERIAL ProductProduct
EQUIPMENTCONTROLLER
Equipment loop
Material loop
Process output loop
Control of Equipment:
Forces,
Velocities
Temperatures, ...
Control of Material
Strains
Stresses
Temperatures,
Pressures, ...
Control of Product:
Geometry
and
Properties
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Summary The Semiconductor Fabrication Process
Manufacturing process control
Types of Variation in Microfabrication Defects vs. parametric variations Temporal variations: wafer to wafer (run to run)
Spatial variations: wafer, chip, and feature level
Preview of manufacturing control techniques Statistical detection/analysis of variations Characterization/modeling of processes & variation Process optimization & robust design Feedback control of process variation
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Control of Manufacturing ProcessesAgenda(Semiconductor) Manufacturing Process ControlAgendaDefect vs. Parametric VariationYield & Variation from DefectsTemporal VariationSpatial VariationModeling of Processes and VariationProcess Optimization & Robust DesignFeedback Control of VariationThe General Process Control ProblemSummary