ULTRAPOLFLAT POLISHING MACHINE
Delayering of Copper IC devicesDelayering of Copper IC devices
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ULTRAPOLFLAT POLISHING MACHINE
Delayering of Copper IC devicesDelayering of Copper IC devices
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Flat Polishing Machine ULTRAPOLadvaadva
ncence
Front Panel Access to All Parameters
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System offers ULTRA TEC’s signature ‘Quick Release’ Sample holder Cam-lock design and precise two circle angular adjustment. Precise Pressure Control is shown
Fine Pressure Control
Coarse Pressure Control
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Fast Amplitude Setting (Think ASAP-1 Analog system!)
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Fluid can run to drain or be recirculated, dependent on the process. The drip tray is removable for fast,
effective clean-up.
Faucet (plumbed in) Recirculating Pump
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A Choice of Polishing Pads and Films are available, in stock, to achieve Best Known
Techniques for all sample types
ULTRAPOLadvaadvancenceAngular Alignment with Angular Alignment with
ULTRACOLLIMATORULTRACOLLIMATOR
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ULTRAPOLadvaadvancenceAngular
Alignment
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Optically-enhanced Single Die ‘Stub’ holders (JEOL shown above) allow for convenient,
rapid transfer to a wide range of SEM’s, FIB’s
PROCESS CONDITIONS PROCESS CONDITIONS
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Sample Type: Cu Technology Bare DieStage Oscillation: 1Head Rotation Speed: 1Sample Load: 100g
Polishing Pad Type: Fiberpad (black)Lap Rotation Speed: 50 rpm
Abrasive Media: Blue Colloidal Silica
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Customer images taken by JEOL tungsten SEM (JEOL 6610LV). The images were taken on a single die sample
and show Cu metal structure after delayering
Mag= 500x
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Customer images taken by JEOL tungsten SEM (JEOL 6610LV). The images were taken on a
single die sample and show Cu metal structure after delayering
Mag= 2000x
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Further Close-up of Customer images showing Cu metal structure after delayering on ULTRAPOL
Advance
Mag= ~4000x
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Each Advance System is shipped with a case containing weights, holders and useful
accessories
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For less demanding, or lower specification requirements, ULTRAPOL Advance is also available
without the ULTRACOLLIMATOR. Supplied mechanical
gauges are used to calibrate the system.
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ULTRA TEC offers the widest range of sample holders
for precision polishing
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The Hot Plate Transfer Fixture provides a safe & convenient way to work with heated sample holders
ICisICis
Also Available for the Sample Preparation Lab Toolkit…
Materials Inspection SystemMaterials Inspection System
ULTRAPOL Advance ASAP-1® IPS
ICisICis Materials Inspection SystemMaterials Inspection System
ICis offers 3 imaging modes – NIR (for backside prep), Visible (for planar polish / x-sections) and UV (for maximum surface definition).
Full range of specialist objective lenses available.
ICisICis Materials Inspection SystemMaterials Inspection System
Illumination SourcesIllumination Sources
ICisICis Materials Inspection SystemMaterials Inspection System
ICisICis Materials Inspection SystemMaterials Inspection System
Backside (NIR) Imaging
Integrated algorithms enables stage motion positioning and direct readout of remaining Silicon Thickness. Windows 7 Version
now shipping.
Si Thickness Here
ICis Software is powered by FA Instruments
ULTRASPEC-III
SUMMARYULTRAPOL Advance enables…
Improved Parallel Polish / De-processLive ULTRACOLLIMATOR ModeFast, convenient and /accurate angular adjustment TO THE DIEFloating Head Control for unsurpassed polishing qualityThe Widest Range of Sample Holders
SUMMARYULTRA TEC provides…
Global Sales & Product SupportIn-stock Consumable products Application Knowledge Base In-house Design, Manufacture & TestOn-site Installation & TrainingApplications Lab for Product & process developmentMarket-leading customer portfolio
We look forward to working with you!
ULTRAPOL forms part of ULTRA TEC’sULTRAPOL forms part of ULTRA TEC’s
More Information More Information at:at:
www.ultratecusa.comwww.ultratecusa.com
ULTRAPOLFLAT POLISHING MACHINE
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