Akrib
is systems
V-69 / V-70
DGL XY SeriesXY dual linear guide cantilever stage
SpecificationsDGL XY
Dimension Drawing
Module Configuration
(mm) (Kg) (Kg) (mm) (mm)
AUM3-S2
AUM3-S3
AUM3-S4
AUM4-S2
AUM4-S3
AUM4-S4
Hard Stopper Position
DGL180 Top 200 - 300 Ref to Table 2 Ref to Table 3 Stroke + 4
Stroke + 4
Stroke + 20
Stroke + 20
Sensor PositionModel Axis
Effectiv Stroke Total Moving Mass Total MassMotor
DGL200 Bottom 200 - 600 A B
A = Table 2(Bottom axis) + Table 3 + 6.12 (Interface mass, Kg)
B = A + Table 4Direct drive,
zero cogging, zero backlash
linear motor
High accelerations and speeds
Smooth motion at low speeds
(low velocity ripple)
Precise homing through encoder
index pulse
Stages & System
s
SpecificationsDGL XY
Part NumberingDGL XY
Akrib
is systems
V-71 / V-72
Axis Moving Mass
Total mass for Bottom axis
Performance Parameter
Carriage size S2 S3 S4
Top Axis (Kg) 2 2.5 2.7
Bottom Axis (Kg) 2.4 3.1 3.4
Total mass for Top axis
Stroke/Top axis Mass (Kg) 200 300
Motor Coil size S2 17.04 20.44
Motor Coil size S3 18.26 22.94
Motor Coil size S4 20.74 23.24
Stroke/Bottom axis Mass (Kg) 200 300 400 500 600
Motor Coil size S2 16.4 19.8 22.3 25.7 29.1
Motor Coil size S3 18.9 22.3 24.9 28.3 31.7
Motor Coil size S4 20.1 22.6 26.1 29.5 32
Specification Parameter Unit
Repeatability (1µm resolution)
Repeatability (0.5µm resolution)
Repeatability (0.1µm resolution)
Repeatability (Analogue)
X-Y Orthogonality Arc-sec
DGL180
±3µm/25mm
NTE±10µm/300mm
±3µm/25mm
NTE±10µm/300mm
±3µm (40µm scale pitch)
±1.5µm (20µm scale pitch)
±1µm(20µm scale pitch)
±5 counts
10
µm
DGL200
±3µm (40µm scale pitch)
±1.5µm (20µm scale pitch)
±1µm(20µm scale pitch)
±5 counts
10
±3µm/25mm, NTE±10µ
m/300mm
±3µm/25mm, NTE±10µ
m/300mm
Straightness1
Flatness1
Motor ModelDGL180
module XY stack
Motor ModelDGL200
Bottom Axis Stroke300
Bottom Axis Motor ModelB1=AUM4-S-S2-J-H9D-V4B2=AUM4-S-S3-J-H9D-V4B3=AUM4-S-S4-J-H9D-V4
Motor Cable (m)1.0-5.0
Encoder Option (type)R22,R10
Cover OptionC
RailT,B,I
SFB-D20-300-B1-3.0-R2201-C-T-D18-300-T1-3.0-R2201-C-T
Top Axis Stroke300
Encoder Option (type)R22,R10
Cover OptionC
RailT,B,I
Motor Cable (m)1.0-5.0
Top Axis Motor ModelT1= AUM3-S-S2-J-H9D-V3T2= AUM3-S-S3-J-H9D-V3T3= AUM3-S-S4-J-H9D-V3
3
Available for 1 um only.3
Note:All measurement taken when module is mounted on a 5 micron flat granite table
Motor cable is the length of cable measured after the bottom axis carriage.1
Stages & System
s
Stages & System
s
Akrib
is systems
V-73 / V-74
DGL XY SeriesXY Dual Guide Stage with clean room cover
DimensionsDGL XY
Dimension Drawing
Mounting Holes for Customer
Direct drive, zero cogging, zero backlash
linear motor
High accelerations and speeds
Smooth motion at low speeds
(low velocity ripple)
Precise homing through encoder
index pulse
Clean Room strip cover
Note: Additional tapped/through holes are possible upon request.
Stages & System
s
SpecificationsDGL XY
Part NumberingDGL XY
Akrib
is systems
V-75 / V-76
Note: that granite mass is approx. 240Kg.
Module Configuration
Effective Stroke Moving Mass Total Mass Sensor Position Hard Stopper Position
(mm) (Kg) (Kg) (mm) (mm)
AUM4-S2 300 3.1 29 304 320
AUM4-S3 300 3.4 29 304 320
AUM4-S3 300 24.9 103 304 320
AUM4-S4 300 26.1 103 304 320
Model Axis Motor
DGL200
Top
Bottom
Performance Parameter
Specification Parameter Unit
Repeatability (1µm resolution)
Repeatability (0.5µm resolution)
Repeatability (0.1µm resolution)
X-Y Orthogonality
X-YOrthogonality Arc-sec
µm
DGCR 300 DGCRS 300
1Straightness1Flatness
±3µm/25mm, NTE±10µm/510mm
±3µm/25mm, NTE±10µm/300mm
±3µm (40µm scale pitch)
±1.5µm (20µm scale pitch)
±1µm(20µm scale pitch)
±5 counts
10
±3µm/25mm, NTE±10µm/610mm
±3µm/25mm, NTE±10µm/300mm
±3µm (40µm scale pitch)
±1.5µm (20µm scale pitch)
±1µm(20µm scale pitch)
±5 counts
10
Top Axis Motor ModelAUM4-S-S2AUM4-S-S3
module XY stack
Bottom Axis Motor ModelAUM4-S-S3 AUM4-S-S4
Sensor TypeJ,K
Hall OptionH9D
Motor Cable (m)1.0-5.0
Encoder Option (type)R22,R10
Stroke300
RailT,B,I
Cover OptionCR
Cover OptionCR
SFB-D20U4SS3-J-H9D-3.0-R2201-300-CR-T-D20U4SS2 -J-H9D-3.0-R22-0.1-300-CR-T
Sensor TypeJ,K
Encoder Option (type)R22,R10
Stroke300
RailT,B,I
Motor Cable (m)1.0-5.0
Hall OptionH9D
2
All measurement taken when module is mounted on a 5 micron flat granite table.1
Motor cable is the length of cable measured after the bottom axis carriage.
Available for 1 um only.3
2
Stages & System
s
Stages & System
s
Resolution 0.1,0.5,1.0
Akrib
is systems
V-77 / V-78
DGL XY SeriesXY Dual Guide Stage with bellow cover
DimensionsDGL XY
Dimension Drawing
Mounting Holes for Customer
Direct drive, no cogging,
zero backlash linear motor
High accelerationsand speeds
Smooth motion at low speeds
(low velocity ripple)
Precise homing through encoder index pulse
Full bellow cover
Note: Additional tapped/through holes are possible upon request.注
Stages & System
s
SpecificationsDGL XY
Part NumberingDGL XY
Akrib
is systems
V-79 / V-80
Effective Stroke
Note: that granite mass is approx. 260 Kg.
Effective Stroke Moving Mass Total Mass Sensor Position Hard Stopper Position
(mm) (Kg) (Kg) (mm) (mm)
AUM4-S2 300 3.1 29 304 320
AUM4-S3 300 3.4 29 304 320
AUM4-S3 300 24.9 103 304 320
AUM4-S4 300 26.1 103 304 320
Model Axis Motor
DGL200
Top
Bottom
Performance Parameter
Specification Parameter Unit
Repeatability (1µm resolution)
Repeatability (0.5µm resolution)
Repeatability (0.1µm resolution)
Repeatability (Analogue)
X-Y Orthogonality Arc-sec
µm
DGB300 DGBS300
1 Straightness
1 Flatness
±3µm (40µm scale pitch) ±3µm (40µm scale pitch)
±1.5µm (20µm scale pitch) ±1.5µm (20µm scale pitch)
±1µm(20µm scale pitch) ±1µm(20µm scale pitch)
±5 counts ±5 counts
10 10
±3µm/25mm, NTE±10µm/300mm
±3µm/25mm, NTE±10µm/300mm
±3µm/25mm, NTE±10µm/300mm
±3µm/25mm, NTE±10µm/300mm
Top Axis Motor ModelAUM4-S-S2AUM4-S-S3
module XY stack
Bottom AxisMotor ModelAUM4-S-S3 AUM4-S-S4
Sensor TypeJ,K
Hall OptionH9D
Motor Cable (m)1.0-5.0
Encoder Option (type)R22,R10
Stroke300
RailT,B,I
Cover OptionCR
Cover OptionC,R
SFB-D20U4SS3-J-H9D-3.0-R2201-300-B-T-D20U4SS2 -J-H9D-3.0-R2201-300-B-T
Sensor TypeJ,K
Encoder Option (type)R22,R10
Stroke300
RailT,B,I
Motor Cable (m)1.0-5.0
Hall OptionH9D
All measurement taken when module is mounted on a 5 micron flat granite table.1
Motor cable is the length of cable measured after the bottom axis carriage
Available for 1 um only.3
2
Stages & System
s
Stages & System
s