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EMRP JRP IND62 –TIM: Use of on-board metrology
systems for area-scanning on machine tools
Author: doc. Ing. Vít Zelený, CSc. Co-authors: doc. Ing. Ivana Linkeová, Ph.D. Ing. Jakub Sýkora Pavel Skalník Jaromír Hynek
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Use of on-board metrology systems
for area-scanning on machine tools
May 18, 2016 Final workshop - PTB, Braunschweig, Germany
• CNC MACHINE TOOL
• FREEFORM STANDARD
• SCANING
• ON-BOARD METROLOGY
• INTERCOMPARISON
• En CRITERION
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Kinematic scheme of CMM and CNC machine tool
May 18, 2016 Final workshop - PTB, Braunschweig, Germany
MODEL OF CNC MACHINE TOOL • CNC MACHINE TOOL • FREEFORM STANDARD • SCANING • ON-BOARD METROLOGY
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Double-sine PTB freeform standard
May 18, 2016 Final workshop - PTB, Braunschweig, Germany
y
x
z
yxyxz sinsin,
MATHEMATICAL MODEL
CAD MODEL
• CNC MACHINE TOOL • FREEFORM STANDARD • SCANING • ON-BOARD METROLOGY
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CMI Hyperbolic paraboloid freeform standard
May 18, 2016 Final workshop - PTB, Braunschweig, Germany
yxyxz ,
MATHEMATICAL MODEL
CAD MODEL
• CNC MACHINE TOOL • FREEFORM STANDARD • SCANING • ON-BOARD METROLOGY
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Scanning
May 18, 2016 Final workshop - PTB, Braunschweig, Germany
CONTACT SCANNING (e.g. ZEISS PRISMO with active scanning probe VAST)
• CNC MACHINE TOOL • FREEFORM STANDARD • SCANING • ON-BOARD METROLOGY
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Scanning
May 18, 2016 Final workshop - PTB, Braunschweig, Germany
LASER SCANNING (e.g. based on autofocus)
• CNC MACHINE TOOL • FREEFORM STANDARD • SCANING • ON-BOARD METROLOGY
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Scanning
May 18, 2016 Final workshop - PTB, Braunschweig, Germany
LASER SCANNING (e.g. based on autofocus)
• CNC MACHINE TOOL • FREEFORM STANDARD • SCANING • ON-BOARD METROLOGY
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Scanning
May 18, 2016 Final workshop - PTB, Braunschweig, Germany
AREA SCANNING – PHOTOGRAMMETRY
VDI/VDE 2634 Part 2 - Optical 3-D measuring systems - Optical systems based on area scanning VDI/VDE 2634 Part 3 - VDI/VDE 2634 Part 3 Optical 3D-measuring systems - Multiple view systems based on area scanning
• CNC MACHINE TOOL • FREEFORM STANDARD • SCANING • ON-BOARD METROLOGY
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Scanning
May 18, 2016 Final workshop - PTB, Braunschweig, Germany
Fringe projection • CNC MACHINE TOOL • FREEFORM STANDARD • SCANING • ON-BOARD METROLOGY
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Scanning
May 18, 2016 Final workshop - PTB, Braunschweig, Germany
• CNC MACHINE TOOL • FREEFORM STANDARD • SCANING • ON-BOARD METROLOGY
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On board metrology – in-process control
May 18, 2016 Final workshop - PTB, Braunschweig, Germany
Productive Process PyramidTM (acc. Metrology solutions for productive process
control, Brochure of Renishaw)
In-process control is represented by active controls applied during metal cutting. The control is focused on inherent sources of errors caused during all machining processes, such as tool wear, part deflection and the impact of temperature and heat flows. The in-process control is carried out by on-machine probing module equipped by inspection cycles included in NC programs.
Demonstration – measurement of FF-MS on machine tool Deckel Maho DMU 50 with Renishaw probe OMP 400
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13 May 18, 2016 Final workshop - PTB, Braunschweig, Germany
Freeform
• WHY FREEFORM?
• WHY FREEFORM STANDARD?
• HOW TO USE FREEFORM STANDARD?
• INTERCOMPARISON
• En CRITERION
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14 May 18, 2016 Final workshop - PTB, Braunschweig, Germany
Basic geometrical elements
S(u,v)
v
u
x
y
z
xS
yS
zS
α
β
Plane Sphere
S(u,v)
zS
xS yS
x
y
z
α
β
u
v
𝑥2 + 𝑦2 = 𝑟2 𝑎𝑥 + 𝑏𝑦 + 𝑐𝑧 + 𝑑 = 0
Gauge block Step gauge
S(u,v)
zS
xS yS
x y
z
α
β
u
v
Cylinder
𝑥2 + 𝑦2 + 𝑧2 = 𝑟2
Hole bar Hole plate
Ball Ball bar
Ball plate
• WHY FREEFORM? • WHY FREEFORM
STANDARD? • HOW TO USE
FREEFORM STANDARD?
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15 May 18, 2016 Final workshop - PTB, Braunschweig, Germany
Cylinder as a basic
geometrical element
Cylinder as a freeform geometry (represented in NURBS)
𝑥2 + 𝑦2 = 𝑟2
Freeform shape (modified cylinder)
Freeform metrology – what is a freeform geometry?
• WHY FREEFORM? • WHY FREEFORM
STANDARD? • HOW TO USE
FREEFORM STANDARD?
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Freeform metrology – what is a freeform geometry?
May 18, 2016 Final workshop - PTB, Braunschweig, Germany
α
S(α, β)
β
y (α, β)
x (α, β)
z (α, β)
y β
α 0 u
v
x
z
O
FREE-FORM SURFACE 𝐒 𝑢, 𝑣 = 𝑥 𝑢, 𝑣 , 𝑦 𝑢, 𝑣 , 𝑧 𝑢, 𝑣
SURFACE POINT 𝐒 𝛼, 𝛽 = 𝑥 𝛼, 𝛽 , 𝑦 𝛼, 𝛽 , 𝑧 𝛼, 𝛽
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Freeform metrology
May 18, 2016 Final workshop - PTB, Braunschweig, Germany
FREE-FORM SURFACE
PARAMETRIC (u,v) AND CARTESIAN (x,y,z) COORDINATES
z
x
y
O 0 u
v
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Freeform material standard (FF-MS)
May 18, 2016 Final workshop - PTB, Braunschweig, Germany
Hyperbolic paraboloid
Mathematical model CAD model
Explicit equation 𝑧 𝑥, 𝑦 = 𝑝 + 𝑘 𝑥 − 𝑚 𝑦 − 𝑛 ,
where 𝑚, 𝑛, 𝑝 are Cartesan coordinates of vertex and 𝑘 is a shape coefficient
Exact NURBS representation
𝐒 𝑢, 𝑣 = 𝐏𝑖,𝑗𝑁𝑖,1 𝑢 𝑁𝑗,1 𝑣
1
𝑗=0
1
𝑖=0
,
where 𝐏𝑖,𝑗 are control points,
𝑁𝑖,1 𝑢 and 𝑁𝑗,1 𝑣 are linear B-spline basis
functions
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Freeform standard Hyperbolic paraboloid
May 18, 2016 Final workshop - PTB, Braunschweig, Germany
FF-MS Hyperbolic paraboloid
in procedures for ensuring reliable measurements on machine tools,
demonstration and integration focused on end-user needs
• HOW TO USE FREEFORM STANDARD?
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20 May 18, 2016 Final workshop - PTB, Braunschweig, Germany
En criterion in in-process measurement
FREEFORM MEASUREMENT UNCERTAINTY EVALUATION
𝐸𝑛 =𝑋𝑅 − 𝑋𝐿
𝑈𝑅2 + 𝑈𝐿
2, 𝐸𝑛 ≤ 1
𝑋𝑅 reference value
measured on CMM
𝑋𝐿 measured value on
a tested CNC machine
𝑈𝑅 reference measurement
uncertainty of CMM
𝑈𝐿 measurement uncertainty
of a tested CNC machine
𝑈𝐿 … UNKNOWN VALUE
𝑈𝐿 = ±𝑋𝑅 − 𝑋𝐿
2
𝐸𝑛2 − 𝑈𝑅
2,𝑋𝑅 − 𝑋𝐿
2
𝐸𝑛2 ≥ 𝑈𝑅
2.
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CALIBRATED FF-MS, CALIBRATED CAD
May 18, 2016 Final workshop - PTB, Braunschweig, Germany
PILOT MEASUREMENT
SIP CMM 5
PILOT LABORATORY SPECIFICATION
Measurement system
Tactile
Max. perm. error (0.5 + 0.8L) µm
Measurement
uncertainty 1.6 µm
Maximal
measurement
dimensions
Length 720 mm
Width 720 mm
Heigth: 550 mm
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Measurement of 3D line on machine tool
May 18, 2016 Final workshop - PTB, Braunschweig, Germany
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23 May 18, 2016 Final workshop - PTB, Braunschweig, Germany
MEASUREMET LAB 1.1
Measured standard HP PA
Output data format TXT Points along
curves and lines on
freeform surface
Evaluation SW Geomagic
Comparison method Bestfit alignment
against the CAD model
Measurand definition Deviation between the
actual and nominal
data, form error
Results
representation
Colour map of
deviations
Form error [-8.1, 6.8] µm
Average deviation
(one-sigma limits) 2.3, -2.2 µm
Standard deviation 2.8 µm
Reliable measurements on machine tools
HP PA
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24 May 18, 2016 Final workshop - PTB, Braunschweig, Germany
MEASUREMET LAB 1.1
Measurand XL Deviation of each measured point obtained by Measurement 1.1 from reference CAD model
Limits of evaluation Two-sigma limits
UR ± 1.6 µm
En criterion in in-process measurement
HP PA
𝑈𝐿 = ±3.7 𝜇m
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25 May 18, 2016 Final workshop - PTB, Braunschweig, Germany
Reliable measurements on machine tools
HP TIM HP TIM
Coordinate system determination
Curves on freeform surface measurement
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26 May 18, 2016 Final workshop - PTB, Braunschweig, Germany
MEASUREMET LAB 1.2
Measured standard HP TIM
Output data format TXT Points along
curves and lines on
freeform surface
Evaluation SW Geomagic
Comparison method Bestfit alignment
against the CAD model
Measurand definition Deviation between the
actual and nominal
data, form error
Results
representation
Colour map of
deviations
Form error [-24.7, 6.6] µm
Average deviation
(one-sigma limits) 1.6, -1.8
Standard deviation 2.8 µm
Reliable measurements on machine tools
HP TIM
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27 May 18, 2016 Final workshop - PTB, Braunschweig, Germany
MEASUREMET LAB 2.2
Measurand XL Deviation of each measured point obtained by Measurement 1.2 from reference CAD model
Limits of evaluation Two-sigma limits
UR ± 1.6 µm
En criterion in in-process measurement
HP TIM
𝑈𝐿 = ± 1.5 𝜇m
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Reliable measurements on machine tools
May 18, 2016 Final workshop - PTB, Braunschweig, Germany
LABORATORY 2
ATOS Triple Scan
LABORATORY 2 SPECIFICATION
Measurement system 3D optical
Maximal measurement
dimensions 170 x 130 - 810 x 610 mm²
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29 May 18, 2016 Final workshop - PTB, Braunschweig, Germany
MEASUREMET LAB 2
Measured standard HP PA
Output data format STL – 3D point cloud
Evaluation SW Geomagic
Comparison method Bestfit alignment
against the pilot data
Measurand definition Deviation between the
actual and pilot data
Results representation Colour map of
deviations
Form error [-6.5, 8.4] µm
Average deviation
(one-sigma limits) 1.2 µm, -1.3 µm
Standard deviation 1.6 µm
Reliable measurements on machine tools
HP PA
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30 May 18, 2016 Final workshop - PTB, Braunschweig, Germany
Reliable measurements on machine tools
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31 May 18, 2016 Final workshop - PTB, Braunschweig, Germany
MEASUREMET LAB 2
Measurand XL Deviation of point corresponding to SIP point obtained by Measurement 2 from reference CAD model
Limits of evaluation Two-sigma limits
UR ± 1.6 µm
En criterion in in-process measurement
HP PA
𝑈𝐿 = ±2.8 𝜇m
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Reliable measurements on machine tools
May 18, 2016 Final workshop - PTB, Braunschweig, Germany
LABORATORY 3
WERTH TOMOSCOPE HV 500
LABORATORY 3 SPECIFICATION
Measurement system
Multisensor + tactile scanning probe
Max. perm. error (4.5 + L/75) µm
Maximum X-ray
voltage 300 kV
Maximum X-ray
performance 300 W
Resolution (2048 × 2048) pix.
Sensor area (400 × 400) mm
Maximal
measurement
dimensions
Length 710 mm
Diameter 500 mm
Maximal workpiece
weight 75 kg
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33 May 18, 2016 Final workshop - PTB, Braunschweig, Germany
MEASUREMET LAB 3
Measured standard HP PA
Output data format STL – 3D point cloud
Evaluation SW Geomagic
Comparison method Bestfit alignment
against the pilot data
Measurand definition Deviation between
the actual and pilot
data
Results
representation
Colour map of
deviations
Form error [-7.6, 12.4] µm
Average deviation
(one-sigma limits) 1.8 µm, -1.6 µm
Standard deviation 2.2 µm
Reliable measurements on machine tools
HP PA
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34 May 18, 2016 Final workshop - PTB, Braunschweig, Germany
MEASUREMET LAB 3
Measurand XL Deviation of each calibrated point obtained by pilot tactile measurement from 3D point cloud obtained by Measurement 3
Limits of evaluation Two-sigma limits
UR ± 1.6 µm
En criterion in in-process measurement
HP PA
𝑈𝐿 = ±4.1 𝜇m
0
0,5
1
1,5
2
2,5
3
1 101 201 301 401 501 601 701 801
E n
Number of point
En criterion evaluation
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CALIBRATED FF-MS, CALIBRATED CAD
May 18, 2016 Final workshop - PTB, Braunschweig, Germany
Original mathematical CAD model
Primary measurement with respect to the original CAD
Original control mesh refinement
Input data for primary measurement definition
1st stage calibrated CAD model
Bicubic B-spline surface given by finer control mesh
where the theoretical control points are replaced
by measured points
2nd stage calibrated CAD model
Bilinear B-spline surface given by finer control mesh of 1st stage calibrated CAD
model where the theoretical control points are replaced
by measured points
Control mesh of 1st stage calibrated CAD model
refinement
Input data for secondary measurement definition
Secondary measurement with respect to the 1st stage
calibrated CAD model
2nd stage calibrated CAD model verification Input 1: set of 225 points independent on control mesh Reference CAD: 2nd stage calibrated CAD model Form error: [-1.2, 1.4] µm Input 2: set of 4644 points independent on control mesh Reference CAD: 2nd stage calibrated CAD model Form error: [-1.5, 1.4] µm
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36
VERIFICATION
May 18, 2016 Final workshop - PTB, Braunschweig, Germany
LABORATORY 5
ZEISS PRISMO
LABORATORY 5 SPECIFICATION
Measurement system
Active scanning probe VAST
Max. perm. error (1.0+L/330) µm
Maximal
measurement
dimensions
Length 1200 mm
Width 850 mm
Height 700 mm
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37 May 18, 2016 Final workshop - PTB, Braunschweig, Germany
MEASUREMET LAB 5
Measured standard HP TIM
Output data format TXT Points obtained by
scanning probe
Evaluation SW Geomagic
Comparison method Bestfit alignment
against the calibrated
CAD model
Measurand definition Deviation between the
actual and nominal
data, form error
Results
representation
Colour map of
deviations
Form error [-7.6, 2.6] µm
Average deviation
(one-sigma limits) ± 0.4 µm
Standard deviation 0.5 µm
Reliable measurements on machine tools
HP TIM
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38 May 18, 2016 Final workshop - PTB, Braunschweig, Germany
MEASUREMET LAB 5
Measurand XL Deviation of each measured point obtained by Measurement 5 from reference calibrated CAD model
Limits of evaluation Two-sigma limits
UR ± 1.6 µm
En criterion in in-process measurement
HP TIM
𝑈𝐿 = ±1.0 𝜇m
-0,008
-0,006
-0,004
-0,002
0
0,002
0,004
1
21
1
42
1
63
1
84
1
10
51
12
61
14
71
16
81
18
91
21
01
23
11
25
21
27
31
29
41
31
51
33
61
35
71
37
81
39
91
42
01
44
11
46
21
48
31
50
41
52
51
54
61
56
71
58
81
De
via
tio
n/ m
m
serial number of point
Deviations of Measurement 1.2 from calibrated CAD model HP TIM
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39
INTERCOMPARISON
May 18, 2016 Final workshop - PTB, Braunschweig, Germany
Meas.
technology
Measuring
machine Measurand Measuremen uncertainty
PILOT Tactile
on CMM SIP
Deviation of surface point from
reference model UL = ± 1.6 µm
LAB 1 Tactile on
CNC Resnishaw
Deviations of measured points from
CAD
UL = ± 3.7 µm
UL = ± 1.5 µm
LAB 2 Optical 3D
scanner
ATOS Triple
Scan Deviation of pilot data from STL UL = ± 2.8 µm
LAB 3 Laser scanner FARO Arm Deviation of pilot data from STL UL = ± 40 µm
LAB 4 Computer
tomography Werth CT Deviation of pilot data from STL UL = ± 4.1 µm
LAB 5
Tactile active
scanning
probe
ZEISS Deviations of measured points from
calibrated CAD UL = ± 1.0 µm
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