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Leak tests
G. Apeldoorn, P. Vankov
29.01.2004, NIKHEF
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Leak tests 29.01.2004
Tests are based on using:
AFS 1400 – Bidirectional Mass Flow Meter
Characteristics of AFS 1400:
- dynamic range: 0.03 – 400 sccm
-Fast response time: 150 ms
-Calibrated & Temperature compensated (for air & Nitrogen)
-Digital output signal (RS-232)
(http://www.sensirion.com)
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Leak tests 29.01.2004
Flowmeter
opened
F1: 1.023e-6 l/s
F2: -1.621e-7 l/s
F3: -1.391e-7 l/s
F4: 1.057e-7 l/s
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Leak tests 29.01.2004
Flowmeter
shorted
F1: 1.014e-6 l/s
F2: -1.441e-7 l/s
F3: -1.244e-7 l/s
F4: 8.529e-8 l/s
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Leak tests 29.01.2004
Flowmeter
Flowmeter
Temperatures
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Leak tests 29.01.2004
Connection in series
“Brooks” mass flow controller
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Leak tests 29.01.2004
Leak test of Module 5012 (5m prototype)
(N)
Flow meter
F1
Bubbler
(8 mbar)
closed
Module12
Steps:
0. Tap 2 is always closed.
1. Tap 1 is opened, gas is pumping the module in.
2. Tap 1 is closed, module is under 8 mbar overpressure, F1 is measuring.
Leakage criterion:
Leakage flow must be of the order (or less) of 1e-6 l/s.
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Leak tests 29.01.2004
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Leak tests 29.01.2004
Flow meter
F1
ModuleF2
Flow meter
straw
straw
straw
straw
outer
outer outer
outer
Gas
Gas volumes (straw/outer) separation
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Leak tests 29.01.2004
Gas volumes (straw/outer) separation
Flow meter
F1
ModuleF2
Flow meter
straw
straw
straw
straw
outer
outer outer
outer
Gas
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Leak tests 29.01.2004
How to proceed ?
-Better tubes & taps
-Atmospheric pressure & temperature monitoring
-Flow controller
-Nitrogen/Argon