Download - MEMS Design Flow
Design = Analysis + SynthesisAn architecture inspired by a pretzel
Top down flow: schematic based…
Fast but lower fidelity…
Process
Flow
ProcessDatabase
MaterialDatabase
ElementDatabase
Structural
Description
Netlist
iterative calculations
Design of experiments
Sensitivity Analysis
Monte Carlo Methods
Synthesis techniques
Synthesized Mask Layout
Design for Manufacture
Meshed model for 3D Verification
Bottom up design flow: 3D based
High Fidelity but slower…
Process
Description
Process
Flow
Process
Database
Material
Database
3D Model Simulation
Results
Mask
Set
3D Multiphysics
Multiphysics“Black box”
System Model
IntelliSuite: Best of both worlds
Accurate + Fast
Seamless integration of design flow…
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StructuralBehavioral
Physical Process level
Schematic capture
ComponentLibrary
LayoutProcess
Modeling
PhysicalExtraction
Ab Initio&
Process modeling
Synthesis &
Optimization
System ModelExtraction
3D Multiphysics engineBehavioral Multiphysics engine
Layout engineVerification engine
DRC engine
Design flow…
SynpleSchematic captureDesign Exploration
MEMS SynthLayout & 3D Synthesis
BlueprintPhysical Layout Floor planning
Tape OutDesign Rule Check
Clean RoomProcess PlanningProcess Simulation
HexpressoAutomated Meshing
System Model ExtractionCompact modeling
Fast field multiphysics3D FEA/BEA analysisDesign Verification
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Design Win
IntelliSuite Tool Chain
BlueprintPhysical designLayout/DRCTape Out
Clean RoomProcess flow designProcess debugProcess visualization
Fast FieldMultiphysics solversCoupled field analysisSystem model extraction
SynpleSchematic captureComponent basedDesign explorationMask and 3D synthesis
EDA LinkerLink to EDA toolsCadence, Mentor,Synopsys, Ansoft,Mathworks etc…
Open standards based exchange…
Physical layout GDS, DXF, CIF, GERBER, RS-247, EMK, HOLES
Structural and 3D IGES, SAT, VRML, GEOM, DXF, RAW (Voxel)
Process Sequence PowerPoint (PPT), PNG, JPEG, RAW
Analysis and mesh structureUNV, PAT, CDB, SAT (Ansoft, Ansys, ABAQUS, Patran, Nastran, Simulia), MATML (Material XML)
System and circuit levelVERILOG-A, VHDL-AMS, PSPICE, HSPICE, SIMETRIX, MATLAB/SIMULINK (MEX), TOUCHSTONE
Result files ASCII, CSV (Excel), Touchstone, PLT (Tecplot), ODB (Simulia)
A living design environment…
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