Download - Micro Electro Mechanical Systems Paper 1
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A paper presentation on
Micro electromechanicalsystems
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Micro electromechanicalsystems
MEMS is the integration of mechanical
elements, sensors, actuators, and
electronics onto a common silicon basethrough the use of micro fabrication
technology.
This technology has expanded from theconventional two-dimensional design of
chips to three-dimensional structures.
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Components of MEMS
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Components of MEMS
Micro electronics: It receives data, processes it, and makes
decisions.
The data received comes from the microsensors in the MEMS
Micro sensors:
These constantly gather data from thesurrounding environment and pass this
information on to the microelectronics forprocessing.
These sensors can monitor mechanical,thermal, biological, chemical, optical and
magnetic readings from the surroundingenvironment.
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Micro actuators: A micro actuator acts as a switch or a trigger
to activate an external device.
The actuators respond according to thedecision taken by micro electronics.
Micro structures:
Due to the increase in technology for micromachining, extremely small structures can bebuilt onto the surface of a chip. These tinystructures are called micro structures and areactually built right into the silicon of theMEMS .
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Major steps involved in IC fabrication:
Preparation of silicon substrate. Deposition of silicon dioxide layer.
Photolithographic process.
Fabrication of thin film components. Packaging.
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Fabrication of MEMS
The major methods are:
Surface micro machining
LIGA
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Surface micro machining
It is based on deposition and etching ofdifferent structural layers.
A substrate is chosen and layers are grown onthe top of the substrate.
Sacrificial layers are selectively etched byphotolithography involving wet etching or dryetching processes.
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LIGA
LIGA is an acronym for the German words
lithography, electroforming and molding
electroforming is the process of creating 3-
dimensional metal parts by using a carefully
controlled long duration electroplating process
Can withstand high temperatures and pressures
Ad
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Advantages
Miniaturization
Portability
High accuracy, precision and reliability systems integration on a single chip.
Reduced manufacturing cost and time
Improved performance and fast response time
Low power consumption
Easily maintained and replaced
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Applications
Communications
Bio technology
Consumer market
Industrial Market
Military
Inertial sensors
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Challenges
Experts and professionals are few in
number.
High initial investment Packaging becomes difficult as some
devices have to be in contact with their
environment.
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Conclusion
MEMS is an emerging technology which
will rapidly revolutionize all the fields in
the near future.
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Thank you
S. Santhosh Kumar
&
V. Sandhya
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