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Industrial Microscopes
CNC Video Measuring Systems
Measuring Microscopes
Autocollimators
Stereoscopic Zoom Microscopes
Digital Cameras for Microscopes
Industrial Equipment Catalog2007 Spring
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Catalog List
Catalog Title Models Included
CNC Video Measuring System NEXIV VMR NEXIV VMR-12072/Z120X/LU, VMR-10080/Z120X/LU, VMR-6555/Z120X/LU, VMR-H3030/Z120X, VMR-3020/Z120X/LU,VMR-1515/Z120X/LU
Automated Wafer Measuring System NEXIV VMR-3020 with Wafer Loader NWL860T
CNC Video Measuring System NEXIV VMR-K3040ZC NEXIV VMR-K3040ZC
Wafer Carrier Measuring System NEXIV VMR-C4540 VMR-C4540
CNC Video Measuring System iNEXIV VMA-2520 VMA-2520
Measuring Microscopes MM-400/800 Series MM-400, MM-800, E-MAX Series
Autocollimators 6B, 6D
FPD/LSI Inspection Microscopes ECLIPSE L300/L300D ECLIPSE L300, L300D
IC Inspection Microscopes ECLIPSE L200/L200D ECLIPSE L200, L200D
Automated IC Inspection Microscope ECLIPSE L200A ECLIPSE L200A
Industrial Microscopes ECLIPSE LV150/LV150A/LV100D/LV100DA ECLIPSE LV150/LV150A/LV100D/LV100DA LV Focusing Modules LV-IM/LV-IMA/LV-FM/LV-FMA LV Focusing Modules LV-IM/LV-IMA/LV-FM/LV-FMA
Universal Epi-Fluorescence Illuminators Universal Epi-Fluorescence Illuminators
Microscope Components for Reflected Light Applications EPI-U, LV-UEPI, L-EP150, IM-4/IM-3, CM-10, CM-20, CM-30
Inverted Metallurgical Microscopes EPIPHOT TME300U/TME200 EPIPHOT TME300U, TME200
Compact Inverted Microscope ECLIPSE MA100 ECLIPSE MA100
IC Inspection Wafer Loaders NWL-860/641 NWL-860 Series, NWL-641 Series
Multi-purpose Zoom Microscope MULTIZOOM AZ100 AZ100
Stereoscopic Zoom Microscope SMZ1500 SMZ1500
Stereoscopic Zoom Microscope SMZ1000/SMZ800 SMZ1000, SMZ800
Stereoscopic Zoom Microscopes SMZ645/SMZ660 SMZ645, SMZ660
Stereoscopic Zoom Microscope SMZ-1 SMZ-1
Stereoscopic Zoom Microscope SMZ-2 SMZ-2
Stereoscopic Zoom Microscope SM-5 SM-5
Digital Camera System for Microscopes Digital Sight Series Camera: DS-Fi1, DS-5Mc, DS-2Mv, DS-2MBW, DS-2MBWcController: DS-L2, DS-U2
High-definition Digital Camera for Microscopes DXM1200C DXM1200C
To request a catalog, please visit our website.http://www.nikon-instruments.jp/eng/
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CNC Video Measuring System NEXIV VMR-H3030/Z120X...................4
CNC Video Measuring System NEXIV VMR-12072/Z120X/LU..............4
CNC Video Measuring System NEXIV VMR-10080/Z120X/LU..............5
CNC Video Measuring System NEXIV VMR-6555/Z120X/LU................5
CNC Video Measuring System NEXIV VMR-3020/Z120X/LU................6
CNC Video Measuring System NEXIV VMR-1515/Z120X/LU................6
Application Software for VMR Series ...................................................7
Automated Wafer Measuring System—NEXIV VMR-3020 with Wafer
Loader NWL860T............................................................................7
CNC Video Measuring System NEXIV VMR-K3040ZC ..........................8
Wafer Carrier Measuring System NEXIV VMR-C4540 ..........................8
CNC Video Measuring System iNEXIV VMA-2520................................9
Application Software for VMA-2520.....................................................9
CNC Video Measuring System
Profile Projectors V-24B/V20B/V-12B Series .....................................10 Accessories for Profile Projectors ......................................................10
Profile Projectors
Measuring Microscopes MM-400—Basic Type .................................11
Measuring Microscopes MM-400/800—3-Axis Type.........................11
Measuring Microscopes MM-400/800—Motorized Type ...................12
Measuring Microscopes MM-400/800—Universal Type ....................12
Accessories for Measuring Microscopes............................................13
Common Accessories for Measuring Microscopes/
Profile Projectors..........................................................................14
Data Processing Software E-Max Series ............................................15
Data Processor DP-E1........................................................................15
Measuring Microscopes
Autocollimators and Accessories .......................................................16
Optical Flat/Optical Parallel .................................................................17
DIGIMICRO Heads/Head Accessories.................................................18
Autocollimators, Other Equipment and Accessories
LSI Inspection Microscope ECLIPSE L300.........................................19
FPD Inspection Microscope ECLIPSE L300D .....................................19
Automated IC Inspection Microscope ECLIPSE L200A ......................20
IC Inspection Microscopes ECLIPSE L200/L200D .............................20
Industrial Microscope ECLIPSE LV150/LV150A.................................21
Industrial Microscope ECLIPSE LV100DA..........................................22
Industrial Microscope ECLIPSE LV100D ............................................22
Polarizing Microscope ECLIPSE LV100 POL/50i POL ........................23
Focusing Units IM-4/IM-3 ..................................................................23
Universal Illuminators/Reflected Light Illuminators............................24
Filters .................................................................................................24
Accessories for ECLIPSE/OPTIPHOT Series .......................................25
Focusing Modules LV-IMA/LV-IM/LV-FMA/LV-FM.............................26
Interferometry Equipment TI/DI .........................................................27
Compact Reflected Microscope—CM Series......................................28
Objective Lenses ................................................................................29
Eyepiece Lenses .................................................................................30
Eyepiece/Objective-Related Accessories.............................................30
Inverted Metallurgical Microscopes
EPIPHOT TME300U/TME200 ........................................................31
Compact Inverted Microscope ECLIPSE MA100 ................................31
IC Inspection Wafer Loaders NWL-860 Series ...................................32
IC Inspection Wafer Loaders NWL641 Series.....................................32
Multi-purpose Zoom Microscope MULTIZOOM AZ100 ......................33
Industrial Microscopes
Stereoscopic Zoom Microscope SMZ1500 ........................................34
Stereoscopic Zoom Microscope SMZ1000 ........................................34
Stereoscopic Zoom Microscope SMZ800 ..........................................35
Stereoscopic Zoom Microscopes SMZ645/SMZ660 ..........................35
Stereoscopic Zoom Microscope SMZ-1 ESD .....................................36
Stereoscopic Zoom Microscope SMZ-2 .............................................36
Stereoscopic Zoom Microscope SM-5 ...............................................37
Accessories for Stereoscopic Microscopes........................................38
Stereoscopic Zoom Microscopes
Digital Cameras for Microscopes—Digital Sight Series .....................41
High-definition Digital Camera for Microscopes—DXM1200C...........41
Film-type Photomicrographic System H-III ........................................42
CCTV System Diagram .......................................................................43
Digital Cameras for Microscopes/Image-related Products
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Ultrahigh-precision Type CNC Video Measuring System NEXIV VMR-H3030/H3030 Z120X
Type 1 Optical magnification 0.5 x 1 x 2 x 4 x 7.5 xTotal magnification 20 x 40 x 80 x 160 x 300 xField of view 9.33 x 7 4.67 x 3.5 2.33 x 1.75 1.165 x 0.875 0.622 x 0.467
Type 2 Optical magnification 1 x 2 x 4 x 8 x 15 xTotal magnification 40 x 80 x 160 x 320 x 600 xField of view 4.67 x 3.5 2.33 x 1.75 1.165 x 0.875 0.582 x 0.437 0.311 x 0.233
Type 3 Optical magnification 2 x 4 x 8 x 16 x 30 xTotal magnification 80 x 160 x 320 x 640 x 1200 xField of view 2.33 x 1.75 1.165 x 0.875 0.582 x 0.437 0.291 x 0.218 0.155 x 0.117
Magnification and field of view (mm)
Optical magnification 1 x 2 x 4 x 7.5 xTotal magnification 40 x 80 x 160 x 300 xField of view 4.67 x 3.5 2.33 x 1.75 1.165 x 0.875 0.622 x 0.467
Optical magnification 16 x 32 x 64 x 120 xTotal magnification 640 x 1280 x 2560 x 4800 xField of view 0.291 x 0.218 0.146 x 0.109 0.073 x 0.055 0.039 x 0.029
Magnification and field of view (mm)
NEXIV VMR-H3030With ultrahigh precision and versatility, this model can serve as the masterinstrument in your laboratory. Ideal for high-precision dies and molds.
Maximum measuring range: 300 x 300mm
* Total magnifications listed above represent those on the monitor screen when a 19" TFT monitor is setto the SXGA (1280 x 1024 pixels) mode.
* Total magnifications listed above represent those on the monitor screen when a 19" TFT monitor is setto the SXGA (1280 x 1024 pixels) mode.
* 1-7.5x with low magnification objective lens, 16-120x with high magnification objective lens.
Model VMR-H3030 Z120X VMR-H3030Stroke (X x Y x Z)
With max. magnification 300 x 300 x 150mmmodule (high mag. lens)With max. magnification 250 x 300 x 150mm —module (low mag. lens)
Minimum readout 0.01µmMaximum workpiece weight 30kgMeasuring accuracy U1X, U1Y 0.6+2L/1000µm (with a workpiece max. 10kg)
U2XY 0.9+3L/1000µm (with a workpiece max. 10kg)Z-axis (L: Length in mm < W.D.) 0.9+L/150µmCamera B&W 1/3 in. CCD (progressive scan), color 1/3 in. CCD (option)Working distance High mag. objective lens: 9.8mm 50mm
Low mag. objective lens: 32mmMagnification/Field of view See tables at leftAuto focus TTL laser AF and Vision AFIlluminator Episcopic, diascopic (with high mag. Diascopic, episcopic, 8-segment LED
head only), darkfield illuminator ring light CYN-E1 (inner ring/outer ring)Power source AC 100V ±10%, 50/60 HzPower consumption Max. 7ADimensions (W x D x H) & weight
Main unit only 1000 x 1230 x 1900mm, approx. 450kgMain unit & table 690 x 730 x 1725mm, approx. 570kgController 250 x 550 x 500mm, approx. 31kg
Footprint (W x D) 2400 x 1400mm
Specifications
For details, see the corresponding catalog. (Catalog list on page 2)
NEXIV VMR-H3030 Z120XWith an ultrahigh-precision stage and maximum magnification module, thismodel can measure fine workpieces with ultrahigh accuracy (e.g., criticaldimensions on patterned masks and bump heights).
Maximum measuring range: 300 x 300mm
CNC Video Measuring System NEXIV VMR-12072/12072 Z120X/12070 LU
Type 1 Optical magnification 0.5 x 1 x 2 x 4 x 7.5 xTotal magnification 20 x 40 x 80 x 160 x 300 xField of view 9.33 x 7 4.67 x 3.5 2.33 x 1.75 1.165 x 0.875 0.622 x 0.467
Type 2 Optical magnification 1 x 2 x 4 x 8 x 15 xTotal magnification 40 x 80 x 160 x 320 x 600 xField of view 4.67 x 3.5 2.33 x 1.75 1.165 x 0.875 0.582 x 0.437 0.311 x 0.233
Type 3 Optical magnification 2 x 4 x 8 x 16 x 30 xTotal magnification 80 x 160 x 320 x 640 x 1200 xField of view 2.33 x 1.75 1.165 x 0.875 0.582 x 0.437 0.291 x 0.218 0.155 x 0.117
Magnification and field of view (mm)
Optical magnification 1 x 2 x 4 x 7.5 xTotal magnification 40 x 80 x 160 x 300 xField of view 4.67 x 3.5 2.33 x 1.75 1.165 x 0.875 0.622 x 0.467
Optical magnification 16 x 32 x 64 x 120 xTotal magnification 640 x 1280 x 2560 x 4800 xField of view 0.291 x 0.218 0.146 x 0.109 0.073 x 0.055 0.039 x 0.029
Magnification and field of view (mm)
NEXIV VMR-12072Ultralong 1200 x 720mm stage stroke exhibits full strength in the high-precisionmeasurement of large substrates and LCD parts.
Maximum measuring range: 1200 x 720mm
NEXIV VMR-12072 Z120XUltralong 1200 x 720mm stage stroke and a 120x optical zoom permitmeasurement of line widths of large FPDs (flat-panel displays) and related devices.
Maximum measuring range: 1200 x 720mm
NEXIV VMR-12072 LUWith universal illuminator and motorized nosepiece, the LU model supportsbrightfield, darkfield, DIC and simple polarizing applications, and is perfect formeasurement and observation of large FPDs and related devices.
Specifications
* Total magnifications listed above represent those on the monitor screen when a 19" TFT monitor is setto the SXGA (1280 x 1024 pixels) mode.
* Total magnifications listed above represent those on the monitor screen when a 19" TFT monitor is setto the SXGA (1280 x 1024 pixels) mode.
* 1-7.5x with low-magnification objective lens, 16-120x with high-magnification objective lens.
Model VMR-12072 Z120X VMR-12072 VMR-12072 LUStroke (XxYxZ)
With max. magnification 1200 x 720 x 150mmmodule (high mag. lens)With max. magnification 1150 x 720 x 150mm —module (low mag. lens)
Minimum readout 0.1µmMaximum workpiece weight 40kgMeasuring accuracy U1X, U1Y 2.2 + 4L/1000µm (workpiece max. 40kg)
U2XY 3.2 + 4L/1000µm (workpiece max. 40kg)Z-axis (L: Length in mm < W.D.) 1.5 + L/150µmCamera B&W 1/3-in. CCD (progressive scan) B&W 1/3-in. CCD (progressive scan), Color 1/3-in. CCD (option)Working distance High mag. objective lens: 9.8mm 50mm Depends on objective lens
Low mag. objective lens: 32mmMagnification vs field of view See tables at left Depends on objective lensAuto focus TTL Laser AF and Vision AF Vision AFIllumination Episcopic, diascopic (with high mag. Diascopic, episcopic, 8-segment LED Diascopic, episcopic
head only), darkfield illuminator ring illumination (inner ring/outer ring) (brightfield or darkfield)Power source AC100V±10%, 50/60 HzPower consumption Max. 15A Max. 13A Dimensions (W x D x H) & weight
Main unit & table 1734 x 2200 x 1750mm, approx. 1600kgController 250 x 550 x 500mm, approx. 31kg
Footprint (W x D) 2800 x 2500mm
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CNC Video Measuring System NEXIV VMR-10080/10080 Z120X/10080 LU
Type 1 Optical magnification 0.5 x 1 x 2 x 4 x 7.5 xTotal magnification 20 x 40 x 80 x 160 x 300 xField of view 9.33 x 7 4.67 x 3.5 2.33 x 1.75 1.165 x 0.875 0.622 x 0.467
Type 2 Optical magnification 1 x 2 x 4 x 8 x 15 xTotal magnification 40 x 80 x 160 x 320 x 600 xField of view 4.67 x 3.5 2.33 x 1.75 1.165 x 0.875 0.582 x 0.437 0.311 x 0.233
Type 3 Optical magnification 2 x 4 x 8 x 16 x 30 xTotal magnification 80 x 160 x 320 x 640 x 1200 xField of view 2.33 x 1.75 1.165 x 0.875 0.582 x 0.437 0.291 x 0.218 0.155 x 0.117
Magnification and field of view (mm)
Optical magnification 1 x 2 x 4 x 7.5 xTotal magnification 40 x 80 x 160 x 300 xField of view 4.67 x 3.5 2.33 x 1.75 1.165 x 0.875 0.622 x 0.467
Optical magnification 16 x 32 x 64 x 120 xTotal magnification 640 x 1280 x 2560 x 4800 xField of view 0.291 x 0.218 0.146 x 0.109 0.073 x 0.055 0.039 x 0.029
Magnification and field of view (mm)
Model VMR-10080 Z120X VMR-10080 VMR-10080 LUStroke (X x Y x Z)
With max. magnification 1000 x 800 x 150mmmodule (high mag. lens)With max. magnification 950 x 800 x 150mm — module (low mag. lens)
Minimum readout 0.1µmMaximum workpiece weight 40kgMeasuring accuracy U1X, U1Y 2+4L/1000µm (with a workpiece max. 40kg)
U2XY 3+4L/1000µm (with a workpiece max. 40kg)Z-axis (L: Length in mm < W.D.) 1.5+L/150µmCamera B&W 1/3-in. CCD (progressive scan) B&W 1/3-in. CCD (progressive scan), Color 1/3-in. CCD (option)Working distance High mag. objective lens: 9.8mm 50mm Depends on objective lens
Low mag. objective lens: 32mmMagnification/Field of view See tables at left Depends on objective lensAuto focus TTL laser AF and Vision AF Vision AFIlluminator Episcopic, diascopic (with high mag. Diascopic, episcopic, 8-segment LED Diascopic, episcopic
head only), darkfield illuminator ring light CYN-E1 (inner ring/outer ring) (brightfield or darkfield)Power source AC 100V ±10%, 50/60 HzPower consumption Max. 15A Max. 13ADimensions (W x D x H) & weight
Main unit only —Main unit & table 1530 x 2200 x 1750mm, approx. 1500kg Controller 250 x 550 x 500mm, approx. 31kg
Footprint (W x D) 2800 x 2500mm
NEXIV VMR-10080Long 1000 x 800mm stage stroke enables maximum performance in the measurement of large-size LCDs and other workpieces.
Maximum measuring range: 1000 x 800mm
NEXIV VMR-10080 Z120XThis model achieves ultrahigh magnification measurements with a long 1000 x800mm stage stroke, making it ideal for measuring minute linewidths of large-size display panels.
Maximum measuring range: 1000 x 800mm
Specifications
For details, see the corresponding catalog. (Catalog list on page 2) It is possible to attach an optical unit for metallurgical microscopes (except maximummagnification module type).
* Total magnifications listed above represent those on the monitor screen when a 19" TFT monitor is setto the SXGA (1280 x 1024 pixels) mode.
* Total magnifications listed above represent those on the monitor screen when a 19" TFT monitor is setto the SXGA (1280 x 1024 pixels) mode.
* 1-7.5x with low-magnification objective lens, 16-120x with high-magnification objective lens.
NEXIV VMR-10080 LUWith universal illuminator and motorized nosepiece, the LU model supportsbrightfield, darkfield, DIC and simple polarizing applications, and is perfect formeasurement and observation of large displays.
CNC Video Measuring System NEXIV VMR-6555/6555 Z120X/6555 LU
NEXIV VMR-6555This model enables high-speed measurement with a large stroke stage. Optimal for measurements of PCB patterns and external dimensions of adisplay panel. You can save on inspection costs by measuring a number of small parts at one time after placing them together on the stage.
Maximum measuring range: 650 x 550mm
Type 1 Optical magnification 0.5 x 1 x 2 x 4 x 7.5 xTotal magnification 20 x 40 x 80 x 160 x 300 xField of view 9.33 x 7 4.67 x 3.5 2.33 x 1.75 1.165 x 0.875 0.622 x 0.467
Type 2 Optical magnification 1 x 2 x 4 x 8 x 15 xTotal magnification 40 x 80 x 160 x 320 x 600 xField of view 4.67 x 3.5 2.33 x 1.75 1.165 x 0.875 0.582 x 0.437 0.311 x 0.233
Type 3 Optical magnification 2 x 4 x 8 x 16 x 30 xTotal magnification 80 x 160 x 320 x 640 x 1200 xField of view 2.33 x 1.75 1.165 x 0.875 0.582 x 0.437 0.291 x 0.218 0.155 x 0.117
Magnification and field of view (mm)
Optical magnification 1 x 2 x 4 x 7.5 xTotal magnification 40 x 80 x 160 x 300 xField of view 4.67 x 3.5 2.33 x 1.75 1.165 x 0.875 0.622 x 0.467
Optical magnification 16 x 32 x 64 x 120 xTotal magnification 640 x 1280 x 2560 x 4800 xField of view 0.291 x 0.218 0.146 x 0.109 0.073 x 0.055 0.039 x 0.029
Magnification and field of view (mm)
NEXIV VMR-6555 Z120XAmazing 120x zoom combined with a big stage enables ultrahigh magnificationmeasurements on big workpieces. Ideal for measuring high-density PCBs andtheir masks.
Maximum measuring range: 650 x 550mm
NEXIV VMR-6555 LUWith universal illuminator and motorized nosepiece, the LU model supportsbrightfield, darkfield, DIC and simple polarizing applications, and is best suitedfor measurement and observation of display panels.
Model VMR-6555 Z120X VMR-6555 VMR-6555 LUStroke (X x Y x Z)
With max. magnification 650 x 550 x 150mmmodule (high mag. lens)With max. magnification 600 x 550 x 150mm —module (low mag. lens)
Minimum readout 0.1µmMaximum workpiece weight 30kgMeasuring accuracy U1X, U1Y 1.5+2.5L/1000µm (with a workpiece max. 30kg)
U2XY 2.5+2.5L/1000µm (with a workpiece max. 30kg)Z-axis (L: Length in mm < W.D.) 1.5+L/150µmCamera B&W 1/3-in. CCD (progressive scan) B&W 1/3-in. CCD (progressive scan), Color 1/3-in. CCD (option)Working distance High mag. objective lens: 9.8mm 50mm Depends on objective lens
Low mag. objective lens: 32mmMagnification/Field of view See tables at left Depends on objective lensAuto focus TTL laser AF and Vision AF Vision AFIlluminator Episcopic, diascopic (with high mag. Diascopic, episcopic, 8-segment LED Diascopic, episcopic
head only), darkfield illuminator ring light CYN-E1 (inner ring/outer ring) (brightfield or darkfield)Power source AC 100V ±10%, 50/60 HzPower consumption Max. 15A Max. 13ADimensions (W x D x H) & weight
Main unit only —Main unit & table 1220 x 1680 x 1750mm, approx. 600kgController 250 x 550 x 500mm, approx. 31kg
Footprint (W x D) 2400 x 2000mm
Specifications
For details, see the corresponding catalog. (Catalog list on page 2)It is possible to attach an optical unit for metallurgical microscopes (except maximummagnification module type).
* Total magnifications listed above represent those on the monitor screen when a 19" TFT monitor is setto the SXGA (1280 x 1024 pixels) mode.
* Total magnifications listed above represent those on the monitor screen when a 19" TFT monitor is setto the SXGA (1280 x 1024 pixels) mode.
* 1-7.5x with low magnification objective lens, 16-120x with high magnification objective lens.
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CNC Video Measuring System NEXIV VMR-3020/3020 Z120X/3020 LU
NEXIV VMR-3020The standard model of the NEXIV VMR series. It handles a variety of measurement tasks, including those for mechanical parts, molded parts,stamped parts and various other workpieces.
Maximum measuring range: 300 x 200mm
Type 1 Optical magnification 0.5 x 1 x 2 x 4 x 7.5 xTotal magnification 20 x 40 x 80 x 160 x 300 xField of view 9.33 x 7 4.67 x 3.5 2.33 x 1.75 1.165 x 0.875 0.622 x 0.467
Type 2 Optical magnification 1 x 2 x 4 x 8 x 15 xTotal magnification 40 x 80 x 160 x 320 x 600 xField of view 4.67 x 3.5 2.33 x 1.75 1.165 x 0.875 0.582 x 0.437 0.311 x 0.233
Type 3 Optical magnification 2 x 4 x 8 x 16 x 30 xTotal magnification 80 x 160 x 320 x 640 x 1200 xField of view 2.33 x 1.75 1.165 x 0.875 0.582 x 0.437 0.291 x 0.218 0.155 x 0.117
Magnification and field of view (mm)
Optical magnification 1 x 2 x 4 x 7.5 xTotal magnification 40 x 80 x 160 x 300 xField of view 4.67 x 3.5 2.33 x 1.75 1.165 x 0.875 0.622 x 0.467
Optical magnification 16 x 32 x 64 x 120 xTotal magnification 640 x 1280 x 2560 x 4800 xField of view 0.291 x 0.218 0.146 x 0.109 0.073 x 0.055 0.039 x 0.029
Magnification and field of view (mm)
NEXIV VMR-3020 Z120XIts maximum magnification module achieves measurements of fineworkpieces. Perfect for measurements of topical MEMS parts,high-density PCBs and semiconductor packages.
Maximum measuring range: 300x 200mm
NEXIV VMR-3020 LUWith universal illuminator and motorized nosepiece, the LU model supportsbrightfield, darkfield, DIC and simple polarizing applications, and is perfectfor measurement and observation of small LCDs, organic EL panels, and ICs.
Model VMR-3020 Z120X VMR-3020 VMR-3020 LUStroke (X x Y x Z)
With max. magnification 300 x 7200 x 7150mmmodule (high mag. lens)With max. magnification 250 x 7200 x 7150mm —module (low mag. lens)
Minimum readout 0.1µmMaximum workpiece weight 20kgMeasuring accuracy U1X, U1Y 1.5+4L/1000µm (with a workpiece max. 5kg)
U2XY 2.5+4L/1000µm (with a workpiece max. 5kg)Z-axis (L: Length in mm < W.D.) 1.5+L/150µmCamera B&W 1/3 in. CCD (progressive scan), color 1/3 in. CCD (option)Working distance High mag. objective lens: 9.8mm 50mm Depends on objective lens
Low mag. objective lens: 32mmMagnification/Field of view See tables at left Depends on objective lensAuto focus TTL laser AF and Vision AF Vision AFIlluminator Episcopic, diascopic (with high mag. Diascopic, episcopic, 8-segment LED Diascopic, episcopic
head only), darkfield illuminator ring light CYN-E1 (inner ring/outer ring) (brightfield or darkfield)Power source AC 100V ±10%, 50/60 HzPower consumption Max. 13A Max. 11ADimensions (W x D x H) & weight
Main unit only 625 x 728 x 1195mm, approx. 200kgMain unit & table 690 x 730 x 1725mm, approx. 240kgController 250 x 7550 x 7500mm, approx. 31kg
Footprint (W x D) 2100 x 71100mm
Specifications
For details, see the corresponding catalog. (Catalog list on page 2) It is possible to attach an optical unit for metallurgical microscopes (except maximummagnification module type).
* Total magnifications listed above represent those on the monitor screen when a 19" TFT monitor is setto the SXGA (1280 x 1024 pixels) mode.
* Total magnifications listed above represent those on the monitor screen when a 19" TFT monitor is setto the SXGA (1280 x 1024 pixels) mode.
* 1-7.5x with low magnification objective lens, 16-120x with high magnification objective lens.
CNC Video Measuring System NEXIV VMR-1515/1515 Z120X/1515 LU
NEXIV VMR-1515This affordably priced, small stroke NEXIV VMR series model is widely used for measuring small electronic parts, molded and stamped parts.
Maximum measuring range: 150 x 150mm
Type 1 Optical magnification 0.5 x 1 x 2 x 4 x 7.5 xTotal magnification 20 x 40 x 80 x 160 x 300 xField of view 9.33 x 7 4.67 x 3.5 2.33 x 1.75 1.165 x 0.875 0.622 x 0.467
Type 2 Optical magnification 1 x 2 x 4 x 8 x 15 xTotal magnification 40 x 80 x 160 x 320 x 600 xField of view 4.67 x 3.5 2.33 x 1.75 1.165 x 0.875 0.582 x 0.437 0.311 x 0.233
Type 3 Optical magnification 2 x 4 x 8 x 16 x 30 xTotal magnification 80 x 160 x 320 x 640 x 1200 xField of view 2.33 x 1.75 1.165 x 0.875 0.582 x 0.437 0.291 x 0.218 0.155 x 0.117
Magnification and field of view (mm)
Optical magnification 1 x 2 x 4 x 7.5 xTotal magnification 40 x 80 x 160 x 300 xField of view 4.67 x 3.5 2.33 x 1.75 1.165 x 0.875 0.622 x 0.467
Optical magnification 16 x 32 x 64 x 120 xTotal magnification 640 x 1280 x 2560 x 4800 xField of view 0.291 x 0.218 0.146 x 0.109 0.073 x 0.055 0.039 x 0.029
Magnification and field of view (mm)
NEXIV VMR-1515 Z120XWith 120x optical zoom, this model is perfect for observation and measurementof small high-density PCBs, precision dies and molds, and MEMS parts.
Maximum measuring range: 150 x 150mm
NEXIV VMR-1515 LUWith universal illuminator and motorized nosepiece, the LU model supportsbrightfield, darkfield, DIC and simple polarizing applications, and is perfectfor measurement and observation of small LCDs, organic EL panels, and ICs.
Model VMR-1515 Z120X VMR-1515 VMR-1515 LUStroke (X x Y x Z)
With max. magnification 150 x 150 x 150mmmodule (high mag. lens)With max. magnification 100 x 150 x 150mm —module (low mag. lens)
Minimum readout 0.1µmMaximum workpiece weight 20kgMeasuring accuracy U1X, U1Y 1.5 + 4L/1000µm (workpiece max. 5kg)
U2XY 2.5 + 4L/1000µm (workpiece max. 5kg)Z-axis (L: Length in mm < W.D.) 11.5 + L/150µmCamera B&W 1/3-in. CCD (progressive scan) B&W 1/3-in. CCD (progressive scan), Color 1/3-in. CCD (option)Working distance High mag. objective lens: 9.8mm 50mm Depends on objective lens
Low mag. objective lens: 32mmMagnification/Field of view See tables at left Depends on objective lensAuto focus TTL Laser AF and Vision AF Vision AFIlluminator Episcopic, diascopic (with high mag. Diascopic, episcopic, 8-segment LED Diascopic, episcopic
head only), darkfield illuminator ring illumination (inner ring/outer ring) (brightfield or darkfield) Power source AC100V±10%, 50/60HzPower consumption Max. 15A Max. 13A Dimensions (W x D x H) & weight
Main unit only 512 x 703 x 1200mm, approx. 180kgMain unit & table 690 x 730 x 1725mm, approx. 220kgController 250 x 550 x 500mm, approx. 31kg
Footprint (W x D) 2100 x 1100mm
Specifications
For details, see the corresponding catalog. (Catalog list on page 2) It is possible to attach an optical unit for metallurgical microscopes (except maximummagnification module type).
* Total magnifications listed above represent those on the monitor screen when a 19" TFT monitor is setto the SXGA (1280 x 1024 pixels) mode.
* Total magnifications listed above represent those on the monitor screen when a 19" TFT monitor is setto the SXGA (1280 x 1024 pixels) mode.
* 1-7.5x with low magnification objective lens, 16-120x with high magnification objective lens.
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Application Software for VMR Series
Report generating program: VMR ReportGeneratorThis software is fully compatible with the NEXIV VMR AutoMeasuresoftware and enables the quick generation of inspection results sheets invarious report forms including user-designed forms. Users can evencustomize the program for easier use by making macro scripts.
Operating environment: Windows®Excel2000/XPMemory space: 64MB or more
An example of macro scripts writtenby users: In order to input manuallythe data measured by otherinstruments and compile them intoone complete report, the macroautomatically makes cell blanks anddisplays them in sky blue and amessage prompts manual inputs.
3D surface analysis program: NEXIVBird's-Eye ViewRunning on OriginTM, thisprogram allows dataobtained using the ScanMeasure feature providedwith TTL Laser AF to beplotted in a 3-dimensionalformat. After that, 3-dimensional shape analysisand 2-dimensional cross-section shape analysis canbe performed.
Note: OriginTM is software
developed by OriginLab® Corporation.
Gear evaluation softwareThis software providesevaluations on variousparameters of themeasured workpiece,including pitch deviations,tooth space runout, basetangent length, and dimensionoverpin, based on industrialstandards.
Surface analysis software: D-SURFThis software not only draws3D graphics of a minusculeworkpiece surface measuredby the NEXIV system, but italso provides variousanalyses such as thecalculation of variousevaluation values.
Automated Wafer Measuring System—NEXIV VMR-3020 with Wafer Loader NWL860T
VMR-3020+NWL860T
Compatible wafer size ø150mm/200mm (SEMI/JEIDA compliant, silicon)
Standard wafer carriers Entegris® 150mm: PA152-60MB, 200mm: 192-80M
200mm: 192-80M
Processing speed per carrier 8 minutes + NEXIV’s measurement time
(Continuous transfer of 25 wafers)
Orientation flat/notch detection Non-contact, transmitted-type sensor
Wafer transfer/chuck Vacuum chuck, mechanical transfer
Main unit dimensions 1700 x 960 x 1735mm
(excluding PC rack)
Footprint (excluding areas for 2750 x 1100mm
operation and maintenance)
Main unit weight Approx. 370kg
Requirements Electricity AC100V±10%, 50/60Hz, Max. 11.5A
Vacuum –800hPa(–600mmHg), 10NI/min
Specifications
With a wafer loading/unloading system, this system measures the wholecontents of a wafer carrier automatically.
Compatible wafer size: ø200mm/ø150mm
For details, see the corresponding catalog. (Catalog list on page 2)
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VMR-K3040ZC
300mm Wafer Loader NWT-3000
CNC Video Measuring System NEXIV VMR-K3040ZC
NEXIV VMR-K3040ZC Nikon’s original confocal optical system works brilliantly to measure thethickness of resists and similar films by detecting their top and bottom surfaces.This enables the fastest and most precise three-dimensional evaluation ever ofcutting-edge packages. A multi-detect head incorporating an LFC optical systemand two-dimensional zoom optics allows both 2D and 3D measurements in thesame field of view.
ObjectivesMagnification 1.5x 3x 7.5xW.D. 24mm 24mm 5mmConfocal optics (Area height measurement) Maximum scan height 1mm 1mm 1mmField of view 8 x 6mm 4 x 3mm 1.6 x 1.2mmMeasuring accuracy (2�) 0.6µm 0.35µm 0.25µmScanning time 1.5 sec./FOVCamera 2 million pixels (1600 x 1200)Brightfield optics (2D measurement)Magnification changing method Motorized 5-stage zoom (magnification ratio 15x)Field of view 8 x 6mm 4 x 3mm 1.6 x 1.2mm
to 0.53 x 0.4mm to 0.27 x 0.2mm to 0.11 x 0.08mmIllumination Diascopic, Coaxial epi-fl, Oblique LEDAuto focus TTL Laser AFMain bodyStroke (X, Y, Z) 300 x 400 x 150 mmGuaranteed loading capacity 20 kg (including workpiece holder)Measuring accuracy U1X/Y 1.5 + 4L/1000µm
U2XY 2.5 + 4L/1000µmZ-axis (L: Length in mm < W.D.) 1.5 + 4/1000µmMain unit/operation rack weight Approx. 900 kg / 250 kg (standard set)Power source/power consumption AC 100 to 240 V ±10% 50/60 Hz / 13 A to 6.5 AOperating condition Temperature 20˚C±0.5K / Humidity 70% or lessAcquired standard CE marking (low voltage/EMC/laser)
Specifications
VMR-C4540
Compatible carries SEMI-compliant 300mm wafer carriers, 200mm wafer (FOUP, FOSB, OC) carriers (with dedicated adapter)
Stroke Measuring head (X x Y x Z) 480 x 180 x 400mm
Rotary table 360˚ (in 90˚ increments)
Minimum readout 0.1µm
Head travel speed XZ axis: 200mm/s, Y axis: 50mm/s (max.)
Kinematic plate rotation speed 90˚/2 sec.
Camera B&W 1/2-in. CCD
Optical magnification 0.27 to 2.74x (5-step 10x zoom)
Field of view 20 x 16mm to 2.0 x 1.6mm
Max. workpiece weight 15kg
Measuring accuracy (10 + 10L/1000) µm (L = measuring length in mm)
Repeatability (2�) 2µm
Illuminator Episcopic, diascopic, darkfield
Auto focus Laser AF, Vision AF
Power source AC100-120V ±10%, 50/60 Hz
Power consumption (approx.) AC100-120V: 13A (main unit), 9A (PC)AC200-240V: 7A (main unit), 5A (PC)
Dimensions 1400 x 1739 x 2530mm
Weight Approx. 1400kg
OS Windows® XP
Monitor 19-in. TFT
Specifications
Wafer Carrier Measuring System NEXIV VMR-C4540
Non-contact, fully automatic measurement provides outstanding throughput.Perfect for measuring FOUP and FOSB.
Compatible carrier size: ø300mm/ø200mm
NEXIV VMR-C4540
For details, see the corresponding catalog. (Catalog list on page 2)
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CNC Video Measuring System iNEXIV VMA-2520
Optical magnification 0.35x 0.6x 1x 1.8x 3.5x
Total magnification 14x 24x 40x 73x 141x
Field of view (mm) 13.3 x 10 7.8 x 5.8 4.7 x 3.5 2.6 x 1.9 1.33 x 1
Magnification and field of view (mm)
iNEXIV VMA-2520This entry-level, low-magnification model with a compact, lightweight designoffers the functionality and image processing capability of the NEXIV VMRseries. The long 200mm Z-axis stroke, 73.5mm working distance and 250mmx 200mm XY stroke enable easy Z-axis measurement of 3D parts with unevensurfaces, including mechanical parts, plastic injection molding parts andmedical devices.
* Total magnifications listed above represent those on the monitor screen when a 19" TFT monitor is setto the SXGA (1280 x 1024 pixels) mode.
Stroke (X x Y x Z) 250 x 200 x 200mm (10"x 8" x 8")
Minimum readout 0.1µm
Maximum workpiece weight 15kg (up to 5kg accuracy guaranteed)
MPE XY MPEE1: 2+8L/1000µm (workpiece weight less than 5kg)XY MPEE2: 3+8L/1000µmZ MPEE1: 3+L/50µm
Camera 1/3-in. 3CCD colorProgressive scan (B/W optional)
Working distance 73.5mm (63mm with optional Laser AF)
Magnification/F.O.V. See the above table
Auto focus Vision AF and optional Laser AF
Illuminator Diascopic, episcopic, 8-segment LED ring illumination
Power source 100V-240V, 50/60Hz
Power consumption 5A-2.5A(excluding power consumption of host computer and its peripherals)
Dimensions (W x D x H) & weight
Main body 565 x 690 x 740mm (minimum height), 72kg
Main body, table and controller 650 x 700 x 1360mm, 123kg
Controller 145 x 400 x 390mm, 13kg
Footprint (W x D) 2000 x 1000mm (including table, tower type PC and PC rack)
Specifications
Application Software for VMA-2520
Imaging documentation program: NEXIVEDF/Stitching ExpressThis optional software makesEDF—Extended Depth of Field—images by extracting focused pixelinformation from multiple capturedimages in Z-axis direction. Also, itgenerates 2D stitching images fromdifferent FOV images captured withCNC XY stagemotion, making awide FOVobservationpossible. Bothfunctionscontribute toimagedocumentation.
Two-dimensional profile shape analysisprogram: iNEXIV VMA Profiler/CAD ReaderiNEXIV VMA Profiler makesit possible to measure andjudge 2-dimensional profileshapes in a workpiece thatcannot be measured in thenormal geometric mode. Nowmore accurate quantitativemeasurements can be takenthan with the chartcomparison method usingprofile projectors and/orconventional measuringmicroscopes. With the iNEXIV VMA CAD Reader nominal shape datacan be created from CAD data in the DXF/IGES file format.
CAD interface off-line teaching support program: iNEXIV VMAVirtual AutoMeasureThis program enables CAD data to be read into the Virtual Video Window on a separate computer,allowing the operator to use iNEXIV’s teaching program with the same operational procedures as on theonline computer. This eliminates the necessity of using an actual workpiece during teaching sessions andlets the iNEXIV VMA system concentrate on automatic measurement for increased productivity. Thesoftware imports IGES, DXF, DMIS, NC files, Gerber, and so on.
EDF (ExtendedDepth of Field)
2D image stitching
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Profile Projectors V-24B/V-20B/V-12B Series
Profile Projectors are inspection instruments that enlarge and project the workpiece onto the screen withperfect magnification accuracy. And when combined with a precision stage or data processing unit orsimilar device, they can observe and measure the shape and dimensions of the workpiece. Theseprojectors are ideal for measuring and inspection of high-precision parts, dies, and the like used in theautomobile, machine tool, electronic parts, and other industries.
Maximum workpiece size: 250 x 150mm
Magnification range: 5-500x (Depending on projection lens)
V-24BLarge effective screen diameter of 600mm. Superior magnification accuracy ideal formeasurement and inspection of profiles, surface conditions and other aspects of alarge workpiece.
Model V-24B V-20B
Screen ø600mm rotatable screen; 360˚ rotatable ø500mm rotatable screen; provided with digital protractor fine rotation knob; 360˚ rotatable (with digital reading to 1 minute of arc) (with digital reading to 1 minute of arc)
Projection lens 5x, 10x, 20x, 50x, 100x (all parfocal lenses); 3-lens turret mount 5x, 10x, 20x, 50x, 100x (all parfocal lenses); 3-lens turret mount
Magnification accuracy ±0.05% for contour illumination, ±0.075% for surface illumination ±0.1% for contour illumination, ±0.15% for surface illumination
Stage 9V stage directly mountable, vertical move: motorized 10 x 6 stage directly mountable; 8 x 6, 6 x 4, 4 x 4, 03L; 2 x 2 stage mountable via adapter(stepless gear, gear ratio: 10:1)
Max. workpiece height 250mm 150mm (10 x 6: 120mm)
Power source AV 100V (50/60Hz), power consumption: approx. 450VA AV 100V/120V (50/60Hz), power consumption: approx. 340VA
Dimensions and weight 1180 (W) x 1100 (D) x 1900 (H) mm 570(W) x 615(D) x 1900(H)mm(1700 (D) x 1900 (H) with hood), approx. 800kg (1200 (D) x 2000 (H) with hood), approx. 260kg
Specifications
V-12B Series
V-12BDC V-12BD V-12BSC V-12BS
Screen ø305mm rotatable screen; etched center crossline; provided with ø305mm fixed screen; etched center crosslinedigital protractor fine rotation knob; 360° rotatable
(with digital reading to 1 minute of arc)
Counter Built-in — Built-in —
Projection lens 5x, 10x, 20x, 50x, 100x,200x, 500x (all parfocal lenses); 3-lens turret mount
Magnification accuracy ±0.1% for contour illumination, ±0.15% for surface illumination
Stage 10 x 6, 8 x 6, 6 x 4, 4 x 4,O3L, 2 x 2 stages directly mountable
Max. workpiece height 100mm (10 x 6: 70mm)
Power source AV 100V/120V (50/60Hz), power consumption: approx. 340VA
Dimensions and weight 410(W) x 650(D) x 938-1038(H)mm, (693 (D) x 970 to 1070(H) with hood), approx. 80kg
For details, see the corresponding catalog. (Catalog list on page 2)
Accessories for Profile Projectors
V-24B-Specific 9V StageSurface area .................................610 (X) x 290 (Y)mmCross travel..................................225 (X) x 100 (Y)mmMinimum readout........................0.0005mm (Linear encoder)Tool mounting groove.................DovetailLoading capacity .........................30kg
Retrofit Counter/DP Unit (Counter display is optional)
Used to connect a 2-axis counter to the profileprojectors V-24B, 12BD, 12BS. This unit is alsonecessary in configuration with the DP-E1 dataprocessor.
Sliding Stage (Exclusive for profile projectors V-20B/V, 12B)
Stage surface diameter .......................180mmStage glass diameter...........................107mmMeasuring range.................................Observable 30mm in diameterRotation angle ....................................360˚ (no increments)Max. workpiece weight......................5kgWeight................................................Approx. 10kg
Glass Scale SetUsed to check the magnifying accuracy of the projector being used.• Standard scale (50mm) =
1mm/increments (accuracy ±[3+7L/1000] µm)
• Reading scale (300mm) =0.1mm/increments (accuracy ±[6+L/50] µm)
• Magnification = 6x
Glass Reading ScaleUsed to measure projection images onthe screen. 200mm and 300mm scales—both in 0.5mm increments—areavailable.Accuracy: ± (15+L/20)µm
V-12BDC
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Measuring Microscopes MM-400—Basic Type
These models boast high cost performance in a compact body, with a wide travel range of150(X) x 100(Y) x 150(Z)mm. The optical head and stage are selectable to suit your use.
Maximum workpiece size: 150 x 100mm (MM-400 + 6x4 stage)
Magnification range: 10-1000x (Depending on combination of eyepiece and objective lenses)
Model MM-400/M MM-400/T
Z-axis movement Manual (dual side coarse/fine focus knob)
Optical head Erect image monocular; inclined 30° from horizontal Erect image trinocular; inclined 25° from horizontal
Eyepiece Dedicated 10x (Field No. 20) CFWN 10x (Field No. 20)
Objective Measuring microscope objectives: 1x (W.D.; 79mm), 3x (W.D.; 75mm), 5x (W.D.; 64mm), 10x (W.D.; 49mm), 20x (W.D.; 20mm), 50x (W.D.; 15mm), 100x (W.D.; 4mm)
Stage 6x4, 4x4, 2x2
Light source Diascopic LED diascopic illuminator (standard), 12V-50W halogen light source (option)*
Episcopic Monocular LED episcopic illuminator LED episcopic illuminator
Max. workpiece height 150mm
Dimensions (W x D x H)/weight 300 x 600 x 638mm/approx. 50kg
Specifications
*TE2-PS100W power supply and MM-LH50PC are required.
MM-400/T MM-400/M
Measuring Microscopes MM-400/800—3-Axis Type
These models come with focus knobs on both side andincorporate a built-in Z-axis scale. A trinocular opticalFA head or trinocular optical head is selectableaccording to use.
MM-400/LT
MM-800/LFA
Model MM-400/L MM-800/L
Z-axis movement Manual (dual side coarse/fine focus knob)
Optical head Erect image FA; erect image trinocular, inclined 25° from horizontal
Eyepiece CFWN 10x (Field No. 20)
Objective Measuring microscope objectives: 1x (W.D.; 79mm), 3x (W.D.; 75mm), 5x (W.D.; 64mm), 10x (W.D.; 49mm), 20x (W.D.; 20mm), 50x (W.D.; 15mm), 100x (W.D.; 4mm)
Stage*1 6x4, 4x4, O3L, 2x2 12x8, 10x6, 8x6, 6x4, 4x4, O3L, 2x2
Light source Diascopic LED diascopic illuminator (standard), 12V-50W halogen light source (option)*2
Episcopic LED episcopic illuminator
Max. workpiece height 150mm 200mm
Dimensions (W x D x H)/weight 300 x 600 x 638mm/approx. 50kg 380 x 735 x 725mm/approx. 65kg
Specifications
*1 A stage adapter is required to mount 8x6, 6x4, O3L or 2x2 stages onto the MM-800.*2 TE2-PS100W power supply and MM-LH50PC are required.For details, see the corresponding catalog. (Catalog list on page 2)
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Measuring Microscopes MM-400/800—Universal Type
An autofocus unit dedicated to the universal type microscope is now available,making it possible to perform Z-axis measurement with greater precision.High NA, low flare CFI60 optics and ample illuminator selection support themeasurement of workpieces of different geometries. Motorized control of theilluminator is available. Beside brightfield, darkfield, simple polarizing andDIC, epi-fluorescence observation is also possible.
Maximum workpiece size: 300 x 200mm (MM-800 + 12x8 stage)150 x 100mm (MM-400 + 6x4 stage)
Magnification range: 50-1000x (Depending on combination ofeyepiece and objective lenses)
Model MM-400/U MM-400/LU MM-800/LU MM-400/LMU MM-800/LMU
Z-axis movement Manual (dual side coarse/fine focus knob) Motorized (max. speed: 10mm/sec)
Optical head Y-TB binocular eyepiece tube, LV-TI3 trinocular eyepiece tube, LV-TT2 tilting trinocular eyepiece tube (with built-in reticle)
Eyepiece CFI10x (Field No. 22), CFI10x CM (Field No. 22)
Objective CFI60 LU Plan Fluor EPI series, CFI60 LU Plan Fluor BD series, CFI60 L Plan EPI CR series
Stage*1 6x4, 4x4, O3L, 2x2 12x8, 10x6, 8x6, 6x4, 6x4, 4x4, O3L, 2x2 12x8, 10x6, 8x6, 6x4,
4x4, O3L, 2x2 4x4, O3L, 2x2
Light source Diascopic LED diascopic illuminator (standard), 12V-50W halogen light source (option)*2
Episcopic White LED illuminator LV-EPI LED, Motorized universal epi-illuminator LV-U EPI2A*2, Universal epi-illuminator LV-U EPI2*2,
Universal epi-illuminator U-EPI*2, Universal epi-illuminator with Focusing Aid LV-U EPI FA
Max. workpiece height 150mm 200mm 150mm 200mm
Dimensions (W x D x H)/weight 300 x 600 x 638mm/approx. 50kg 380 x 735 x 725mm/approx. 65kg 300 x 600 x 638mm/approx.50kg 380 x 735 x 725mm/approx. 65kg
Specifications
*1 A stage adapter is required to mount 8x6, 6x4, O3L or 2x2 stages onto the MM-800. *2 TE2-PS100W power supply and MM-LH50PC are required.For details, see the corresponding catalog. (Catalog list on page 2)
MM-800/LMU
MM-800/LU
Measuring Microscopes MM-400/800—Motorized Type
The motorized Z-axis control simplifies operation andensures precise movement, reducing stress on the part ofthe operator. Use of the microscope with a trinocularoptical FA head will reduce Z-axis measurement errorsdown to a minimum.
Model MM-400/LM MM-800/LM
Z-axis movement Motorized (max. speed: 10mm/sec)
Optical head Erect image FA; erect image trinocular, inclined 25° from horizontal
Eyepiece CFWN 10x (Field No. 20)
Objective Measuring microscope objectives: 1x (W.D.; 79mm), 3x (W.D.; 75mm), 5x (W.D.; 64mm), 10x (W.D.; 49mm), 20x (W.D.; 20mm), 50x (W.D.; 15mm), 100x (W.D.; 4mm)
Stage*1 6x4, 4x4, O3L, 2x2 12x8, 10x6, 8x6, 6x4, 4x4, O3L, 2x2
Light source Diascopic LED diascopic illuminator (standard), 12V-50W halogen light source (option)*2
Episcopic LED episcopic illuminator
Max. workpiece height 150mm 200mm
Dimensions (W x D x H)/weight 300 x 600 x 638mm/approx. 50kg 380 x 735 x 725mm/approx. 65kg
Specifications
*1 A stage adapter is required to mount 8x6, 6x4, O3L or 2x2 stages onto the MM-800.*2 TE2-PS100W power supply and MM-LH50PC are required.For details, see the corresponding catalog. (Catalog list on page 2)
MM-800/LMFA
MM-400/LMFA
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Accessories for Measuring Microscopes
Digital Camera for Microscopes—Digital Sight SeriesThese improved digital cameras for microscopes enables easier capture and storage of more beautiful images. (Compatible with allNikon measuring microscopes except the MM-400/M.)
1-Minute Reading Eyepiece (compatible with all models except U type)
The viewfield includes crosshairs and 60° lines, and angle indexes thatcan be read by appropriate microscopes. The measuring range is 360°.
10-Minute Reading Eyepiece(compatible with all models except U type)
The viewfield includes crosshairs and angle indexes, and when theknurled ring at the lower section of the eyepiece tube is turned, thecrosshairs and the vernier both rotate up to 180°.
TemplatesThe following templates are available to facilitate profile comparisonand measurements. All are designed for 3x objectives.
• Standard angle templates (Standard equipment)• Concentric; diameter 0.2-4.6**Cannot be attached to monocular type
Dedicated Objective lenses for MeasuringMicroscopes 1x, 3x, 5x, 10x, 20x, 50x, 100x(compatible with all models except U type)
Magnification 1 x 3 x 5 x 10 x 20 x 50 x 100 x
W. D. (mm) 79 75 64 49 20 15 4
Standard Digital Cameras:
• Digital Sight DS-Fi1-L2
• Digital Sight DS-Fi1-U2
• Digital Sight DS-2Mv-L2
• Digital Sight DS-2Mv-U2
For details, see the corresponding catalog. (Catalog list on page 2)
8-Segment LED Ring Light CYN-E1This illuminator has been developed for observing and/or measuringplastic mold parts, drills, etc. with the 1x, 3x, 5x and 10x objectivelenses of Nikon’s measuring microscopes.Thanks to two features, a wide 30-degree angle of illumination from theoptical axis and a selection of optimum direction of illumination fromeight directions, it is now possible to clearly see the edges of plasticmold parts and drills, something that was not possible with a top light orconventional ring illuminator with a small angle and no directionselector. This illuminator can also replace a bifurcated fiber optics illuminator,eliminating the need to adjust the position of fibers by hand at eachmeasurement and/or observation. The long-life and low-power-consuming LED light source reduces running costs compared to thoseof a halogen light source. Moreover, the illuminator can be controlledby E-max V type software, and it can also be attached to Nikonstereoscopic microscopes with an optional adapter ring.
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Common Accessories for Measuring Microscopes/Profile Projectors
Type Surface area (mm) Stage glass Crosswide travel Reading method Min. reading Stage top Tool Loading Weight
dimensions (mm) (mm) (mm) installation capacity (kg) (kg)
12 x 8 500 x 350 330 x 230 300 x 200 Linear encoder 0.0001 — M6 (screw) 20 Approx. 75
10 x 6 450 x 286 305 x 190 250 x 150 Linear encoder 0.0001 — M6 (screw) 20 Approx. 50
8 x 6 400 x 280 245 x 192 200 x 150 Linear encoder 0.0001 — M6 (screw) 15 Approx. 36
6 x 4 350 x 240 204 x 145 150 x 100 Linear encoder 0.0001 — M6 (screw) 10 Approx. 27
4 x 4 285 x 240 170 x 145 100 x 100 Linear encoder 0.0001 — M6 (screw) 6 Approx. 23
O3L 285 x 192 170 x 120 100 x 50 Linear encoder 0.0001 — Dovetail 5 Approx. 15
2 x 2 195 x 192 107 50 x 50 Linear encoder 0.0001 360˚ M6 (screw) 5 Approx. 13
Stage Specifications
Rotating table Table diameter Glass insert diameter Rotation range Tool installation Weight
C 204mm 165mm 360° (uncalibrated) Screw hole 6-M6 Approx. 5kg
D 282mm 262mm 360° (uncalibrated) Screw hole 6-M6 Approx. 8kg
A2 160mm 107mm 360° (2’ reading) T-groove/Screw hole 6-M6 Approx. 4kg
StagesUse in combination with measuring microscope/profile projectors. The workpiece is loaded on a stage and is moved in the X/Y direction and itstravel distance is read. Stages equipped with linear encoder can be connected to a data processing system or printer and display travel distancesdigitally to enable fast and easy measuring.
Rotating TableUsed to rotate the workpiece and align it in the direction to which the stage moves.
3-axis/2-axis CountersCan be mounted on either side of the microscope and display stage axes in increments of 1mm, 0.1mm, or 0.01mm (switchable).
Remote SwitchEnables reset and SEND remote control of counter.
Stage Adapter SThis adapter is used to mount a stage other than the 10 x 6 Stage to theV-20B profile projector.
XY Reset SwitchLocated within easy reach for quick reset.
Tilting Center FixturesUsed to hold machined workpieces. Type A2 can be mounted directly tothe Rotating Table Type 2, and Type B to the 9V Stage.
Standard 300mm Scale Gauges stage travel accuracy up to 300mm. Both 10mm-interval sensorpatterns and calibrations are provided. Made of low head-expansionglass, for minimizing the influence of heat.Accuracy: Within 1µm against compensation values. (Accuracy scaleprovided)
V-Block Fixture (for the 9V or 03L Stage)Used to hold pole-shaped workpieces horizontally. These pieces aredifficult to hold with a tilting center fixture. Weighs approximately 1kg.
Diameter capacity Height of center
Lower groove 5 to 16mm 33 to 41mm
Upper groove 13 to 25mm 39 to 47mm
Max. workpiece diameter Center height Tilting angle Weight
and length when held level (in 1˚ increment)
A2 ø68 x 120mm 45mm 10˚ Approx. 2.2kg
B ø100 x 250mm 100mm 15˚ Approx. 6kg
A2 B
9V — �
10 x 6 — —
8 x 6 — —
6 x 4 �*1 —
A2 B
4 x 4 �*1 —
2 x 2 � —
O3L �*2 —
*Accuracy: 3+L/50µm (L: measurement length), excluding O3L.
*1. In conjunction with Rotating Table Type 3. *2. In conjunction with Goniometer Type 2.
Compatible Stages
Y-axis X-axis
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Data Processor DP-E1The DP-E1 houses a 320 x 240 pixels LCD display in a compact body, facilitating reading anduse. In a seamless interface that comprises measuring microscope and profile projector, itstreamlines the calculation of measurement results and data processing tasks.
• Compact body with built-in counter display—easy to read and use.• Measurement code buttons and result list help facilitate operation—easy
measurements even for novices. • Teaching files and measurement results can be saved in a USB memory stick to be
used anywhere.
Digital Printer DPU-414Prints out measurement results.
Inspection Result Sheet Generation System
VMR Report GeneratorInspection result sheet generation software that rationalizes and reducesinspecting processes.Enables speedy creation of various format result sheets. Can be used onMicrosoft Excel, and can be used simultaneously with macro program. OS: Windows® Excel 2000/XPMemory: 64MB or more* This software is developed by Nippon Filcon Co. Ltd.
Foot SwitchUsed to send load-and-go commands to the DP-303, DP-202, and DPU-414. Frees both hands to enhance measurement efficiency.
Accessories for Measurement Support/Data Processing
Common Accessories for Measuring Microscopes/Profile Projectors
D set DS set
Data processing � �
Navigation during replay � �
Live video monitoring — �
Chart measuring — �
Automated video edge detection — �
Functions provided by each set:
D set DS set
Profile projector � —
Measuring microscope � �*
Compatible measuring instruments for each set:
* Trinocular eyepiece tube type.* I-set, which is compatible with stereoscopic microscopes and metallurgical microscopes, is also
available.
Data Processing Software E-Max SeriesThe ideal combination of Nikon measuring microscope and digitalcamera, the E-Max series comprehensively supports high-definitiondigital imaging and measurement. E-Max can also comfortably combinea Nikon measuring microscope with a profile projector to simplify theuse of a wealth of advanced measurement/processing functions, rangingfrom 2D data processing and image measurement to data storage.
E-Max DS Set + MM-400 Measuring Microscope
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Autocollimators
Autocollimators 6B/6D
Specifications
6B/6D
Telescope magnification 38x
Objective effective diameter 70mm
Objective focal length 700mm
Measuring range 30’ (horizontal/vertical 2 axes)
Minimum readout 0.5
Readout method Adjustment in view field and reading on micrometers
Measuring accuracy Measurement area. Within 5 , 0.5 ; Within 30 , 1
Field of view 6B: Brightfield; 6D: Darkfield
Light source 6V-15W special electric bulb
Power supply AC 100V, 50/60 Hz
Dimensions Mirror barrel diameter: 68mm; Total length: approx. 490mm
Weight (main unit + table) Approx. 30kg (incl. stand)
Autocollimator Accessories
Autocollimator Mirror BReflective surface effective diameter: 70mmMirror feet interval: 100mmPermanent magnet: removableHandle: provided with On/Off switch
Autocollimator Mirror DReflective surface effective diameter: 42mmMirror feet interval: 100mm
Autocollimator Mirror COuter diameter: 30mmThickness: 12mmParallelism: 2"
8-Plane MirrorGuaranteed accuracy: 1" to corrected valueOuter diameter: 117mmCenter hole diameter: 20mmThickness: 46mm
12-Plane MirrorGuaranteed accuracy: 1" to corrected valueOuter diameter: 117mmCenter hole diameter: 20mmThickness: 46mm
Pentagonal PrismGuaranteed accuracy*: 2Dimensions: 65 x 65 x 45mm*Optical right-angleness
Mirror AdapterFor Autocollimators 6B and 6D.*The field of view on the monitor is narrower than that through theeyepiece. (Measurement range 20’ on a 2/3-in. CCD)
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Optical Flat/Optical Parallel
Optical FlatThe optical flat is a glass disk, whose one surface is precisely finishedflat and mirror smooth. It is used to check the flatness level of a surfaceprovided with mirror-smooth finish. Flatness level can be measured byobserving interference fringes by placing the optical flat in contact withthe workpiece. It is idea for measuring surfaces in block gauges,micrometers and snatch gauges.
Optical ParallelBoth planes of the optical parallel have been precisely finished flat andparallel. It is used to check the flatness and parallel levels of aworkpiece by observing interference fringes by placing the opticalparallel in contact with the workpiece.
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Specifications
Diameter Glass (ø60mm) Glass (ø130mm)
Thickness 15mm 27mm
Flatness level 0.1µm 0.1µm
Specifications
Diameter 30mm
Thickness 12mm, 12.12mm, 12.25mm, 12.37mm
Flatness level 0.1µm or less
Parallel level 0.2µm or less
Optical flats and parallels with greater precision are available by custom order.
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DIGIMICRO Head Accessories
DIGIMICRO
DIGIMICRO Head MF-1001
Printer MF-9PWConnected to the MFC-101 or TC-101counter, it performs with a few keystrokes not only printing, but alsostatistical calculation, accept/rejectjudgment, and histogram generation,enhancing efficiency in dataprocessing.
Measurement Attachments
MF-1001 + MFC-101 Counter + MS-21
MF-501 + TC-101 Counter + MS-11C
Specifications
Main unit + counter MF-1001+MFC-101 MF-1001+TC-101
Measurement range 0-100mm
Minimum readout 0.1µm, switchable to 0.01µm, switchable to 5µm, 1µm,
0.5µm or 1µm 0.1µm, or 0.05µm
Accuracy (20˚C) 3µm
Response speed 500mm/sec. or less
Measuring force Down direction 1.225 to 1.813N (variable to approx. 0.441N)
Lateral direction 0.637 to 1.225N
External output RS-232C, Dedicated printer output
Operating temperature 0 to +40˚C
Weight Approx. 610g
DIGIMICRO Head MF-501/MH-15M
Specifications
Main unit + counter MF-501+MFC-101 MF-501+TC-101 MH-15M+TC-101
Measurement range 0-50mm 0-15mm
Minimum readout 0.1µm, switchable to 0.01µm, switchable to 5µm, 1µm,
0.5µm or 1µm 0.1µm, or 0.05µm
Accuracy (20˚C) 1µm 0.7µm
Response speed 500mm/sec. or less
100mm/sec. or less
Measuring force Down direction 1.127 to 1.617N Up direction 0.245N,
(variable to approx. 0.294N) Down direction 0.637N,
Lateral direction 0.637 to 1.225N Lateral direction 0.441N
*With lifting release
External output RS-232C, Dedicated printer output
Operating temperature 0 to +40˚C
Weight Approx. 460g Approx. 140g
Specifications
Measurement Stands
MS-11C MS-21 MS-31G* MS-4G MS-5C
Platform material Ceramics Steel Granite Granite Ceramics
Stage size 110 x 110mm 150 x 150mm 120 x 180mm 400 x 300mm ø100mm
Weight 6.3kg 18.4kg 6.0kg 36kg 11kg
Standardmeasurementattachment
Pin attachment
Flat attachment
Plastic attachment Off-centerattachment
Roller attachment*It is also possible to measure workpieces by placing them on a large platform with its lower
surface as its reference plane.
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LSI Inspection Microscope ECLIPSE L300
ECLIPSE L300 (Episcopic Illumination Type)Utilizes the CFI60 optical system—a fusion of Nikon’s renowned CF design and infinity optics. CFI60 achievesnew levels of brightness, contrast and operability, providing support to advanced inspections of large-size wafers.
Maximum workpiece size: ø300mm
Magnification range: 15-2000x (Depending on combination of eyepiece and objective lenses)
Main body Power source: 12V-100W illuminator power source built in; power source for motorized control built in
Focusing mechanism: Stroke 29mm
Coarse: 12.7mm/rotation (torque adjustable, with refocusing mechanism)
Fine: 0.1mm/rotation (in 1µm increments)
Control: Nosepiece rotation, Light intensity control, Aperture diaphragmopen/close
Nosepiece: Motorized universal sextuple nosepiece
(with centering mechanism and DIC prism slot)
Episcopic 12V-100 halogen lamp illuminatorilluminator Motorized aperture diaphragm (centerable)
Field diaphragm (fixed, with focus target)Pinhole slider (option) mountableø25mm filters (NCB11, ND16, ND4) mountablePolarizer/analyzer mountableOne epi filter cube (V, BV, B, G) mountable
Eyepiece tube L2-TT2 ultrawidefield erect-image tilting trinocular eyepiece tube (tilt angle: 0-30-): F.O.V. 22/25; Beamsplit ratio 100 : 0 / 20 : 80L2-TT ultrawidefield erect-image tilting trinocular eyepiece tube (tilt angle: 0-30-): F.O.V. 22/25; Beamsplit ratio 100 : 0 / 0 : 100YM-T12 erect-image trinocular eyepiece tube: F.O.V. 22/25; Beamsplit ratio100 : 0 / 0 : 100
Stage 14 x 12 stage: Stroke 354 x 302 mm (diascopic illumination observation range:354 x 268 mm)Coarse/fine-movement changeover possibleFixed-position X-Y fine-movement control
Eyepieces CFI eyepiece lens series
Objectives CFI LU/L Plan series
Specifications
L300-TT2-DIC (halogen illuminator)For details, see the corresponding catalog. (Catalog list on page 2)
FPD Inspection Microscope ECLIPSE L300D
ECLIPSE L300D (Diascopic/Episcopic Illumination Type)Utilizes the CFI60 optical system—a fusion of Nikon’s renowned CF design and infinity optics. CFI60 achievesnew levels of brightness, contrast and operability, providing support to advanced inspections of large-size LCDs.
Maximum workpiece size: 17-inch FPD
Stage stroke: 354 x 302 mm (diascopic illumination range 354 x 268mm)
Magnification range: 15-2000x (Depending on combination of eyepiece and objective lenses)
L300D-TT2-DIC
Main body Power source: 12V-100W illuminator power source built in; power source formotorized control built in
Focusing mechanism: Stroke 29mmCoarse: 12.7mm/rotation (torque adjustable, with refocusing mechanism)Fine: 0.1mm/rotation (in 1µm increments) Control: Nosepiece rotation, Light intensity control, Aperture diaphragm
open/close, Diascopic/episcopic illumination switchingNosepiece: Motorized universal sextuple nosepiece(with centering mechanism and DIC prism slot)
Episcopic 12V-100 halogen lamp illuminatorilluminator Motorized aperture diaphragm (centerable)
Field diaphragm (fixed, with focus target)Pinhole slider (option) mountableø25mm filters (NCB11, ND16, ND4) mountablePolarizer/analyzer mountableOne epi filter cube (V, BV, B, G) mountable
Diascopic 12V-100 halogen lamp illuminatorilluminator Aperture diaphragm, Field diaphragm (centerable)
ø45mm filters (NCB11, NDA, NDB) mountablePolarizer mountableLWD condenser built in (with up/down movement mechanism)
Eyepiece tube L2-TT2 ultrawidefield erect-image tilting trinocular eyepiece tube (tilt angle: 0-30˚): F.O.V. 22/25; Beamsplit ratio 100 : 0 / 20 : 80L2-TT ultrawidefield erect-image tilting trinocular eyepiece tube (tilt angle: 0-30˚): F.O.V. 22/25; Beamsplit ratio 100 : 0 / 0 : 100YM-T12 erect-image trinocular eyepiece tube: F.O.V. 22/25; Beamsplit ratio100 : 0 / 0 : 100
Stage 14 x 12 stage: Stroke 354 x 302 mm (diascopic illumination observation range:354 x 268 mm)Coarse/fine-movement changeover possibleFixed-position X-Y fine-movement control
Eyepieces CFI eyepiece lens seriesObjectives CFI LU/L Plan series
Specifications
For details, see the corresponding catalog. (Catalog list on page 2)
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L200A-TT-M-DIC
Automated IC Inspection Microscope ECLIPSE L200A
With motorized control of major sections, including focus, aperture,brightfield-darkfield switching and lamp intensity, the L200A can beideally configured with wafer loaders to provide macro inspection ofwafers, meeting the stringent requirements of the latest semiconductorfabs.
Maximum workpiece size: ø200mm
Magnification range: 50-2000x (Depending on combination ofeyepiece and objective lenses)
Main body 12V-100W illuminator power source built in, Remote controller provided
Focusing mechanism: Stroke 29mm, ALF (Auto Link Focusing system) equipped
Control mechanism: Nosepiece rotation, Light intensity control, Aperture
diaphragm open/close, Z-axis control, Optical path switching
Nosepiece: Motorized sextuple universal nosepiece
AF unit can be mounted (optional)
Episcope 12V-100W halogen lamp light source, Motorized aperture diaphragm (centerable),
illuminator Fixed field diaphragm (with focus target), Motorized optical path switching (BF/DF),
(built-in) Pinhole slider (optional) mountable, four ø25mm filters (NCB11, ND16, ND4)
mountable, Motorized DIC unit (optional) mountable
Eyepiece tube L2-TT2 ultrawidefield erect-image tilting trinocular eyepiece tube (tilt angle: 0-30°):
F.O.V. 22/25; Beamsplit ratio 100 : 0 / 20 : 80
L2-TT ultrawidefield erect-image tilting trinocular eyepiece tube (tilt angle: 0-30°):
F.O.V. 22/25; Beamsplit ratio 100 : 0 / 0 : 100
LV-TI3 Trinocular (erect image, F.O.V. 22/25)
Stage 8 x 8 Stage, Stroke: 205 x 205mm, Coarse/fine switching, Fixed fine control
position
Eyepiece CFI eyepiece lens series
Objective CFI LU/L Plan series
For details, see the corresponding catalog. (Catalog list on page 2)
Specifications
IC Inspection Microscopes ECLIPSE L200/L200D
Nikon uses CFI60 infinity optics in its IC inspection microscopes to produce images of thehighest possible contrast and minimum flare.
ECLIPSE L200 (Episcopic illumination type)Maximum workpiece size: ø200mm
Magnification range: 15-2000x (Depending on combination of eyepiece andobjective lenses)
ECLIPSE L200D (Diascopic/Episcopic illumination type)Stroke: 205 x 205mm (Depending on Diascopic illumination range: 150 x 150mm)
Magnification range: 15-2000x (Depending on combination of eyepiece andobjective lenses)
Focusing mechanism Stroke: 29mm, Coarse: 12.7mm/rotation (torque adjustable, refocusing
mechanism provided), Fine: 0.1mm/rotation, Scale: 1µm, Max. workpiece
height: 13mm (22mm with stage glass)
Nosepiece: Motorized sextuple universal nosepiece, DIC attachment slot
provided
Episcope illuminator (built-in) 12V-100W halogen lamp light source, Motorized aperture diaphragm
(centerable), Fixed field diaphragm (with focus target), Pinhole slider (optional)
mountable, four ø25mm filters (NCB11, ND16, ND4) mountable,
Polarizer/Analyzer mountable
Diascopic illuminator 12V-100W halogen lamp light source, Aperture diaphragm, two ø25mm filters
(L200D only) (built-in) (NCB11, ND4) mountable, LWD condenser built in
Eyepiece tube L2-TT2 ultrawidefield erect-image tilting trinocular eyepiece tube (tilt angle: 0-
30°): F.O.V. 22/25; Beamsplit ratio 100 : 0 / 20 : 80
L2-TT ultrawidefield erect-image tilting trinocular eyepiece tube (tilt angle: 0-
30°): F.O.V. 22/25; Beamsplit ratio 100 : 0 / 0 : 100
LV-TI3 Trinocular (erect image, F.O.V. 22/25)
Stage 8 x 8 Stage, Stroke: 205 x 205mm (Diascopic observation range: 150 x
150mm), Coarse/fine switching, Fixed fine control position
Objective CFI LU/L Plan series
Specifications
L200-TT-DIC
For details, see the corresponding catalog. (Catalog list on page 2)
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Industrial Microscope ECLIPSE LV150/LV150A
ECLIPSE LV150 (Manual nosepiece type)ECLIPSE LV150A (Motorized nosepiece type)The ECLIPSE LV Series realizes groundbreaking versatility based on a new conceptmodule design. This ECLIPSE LV150/LV150A is a new industrial-use microscopethat flexibly responds to observation needs in development, quality management, andinspecting manufacturing processes.
Main body Baseless type (spacer insertable between arm and stand); Max. sample height 47mm (whenconfigured with 3x2 stage/6x4 stage), 82mm with column riser, 116.5mm with Suruga Seiki B23-60CR; 12V-50W brightness control built in transformer
Focusing mechanism Coaxial coarse/fine focus knob, left: coarse/fine, right: fine; Stroke 40mm, coarse 14.0mm/rotation(torque adjustable, with refocusing mechanism), fine focusing 0.1mm/rotation (1mm/increments)
Nosepiece C-N6 Nosepiece (brightfield, sextuple), L-NBD5 Nosepiece (bright/darkfield quintuple, with flareprevention), L-NU5 Nosepiece (universal quintuple, with flare prevention), LV-NU5A Nosepiece(for LV150A, high-durability motorized universal quintuple, with flare prevention)
Episcopic illuminator 12V-50W high-intensity halogen lamp; Field (centerable) and aperture diaphragms synchronized LV-U EPI with B/D changeover; ø25mm filter (NCB11, ND16, ND4) insertable; Polarizer/analyzer insertable
Episcopic illuminator 12V-50W high-intensity halogen lamp; Precentered mercury-fiber illuminator “Intensilight” LV-U EPI2 (with brightness control, no centering necessary) mountable; Centerable field and aperture
diaphragms synchronized with B/D changeover; ø25mm filter (NCB11, ND16, ND4) insertable;Polarizer/analyzer/l plate insertable, excitation balancer insertable
Eyepiece tube LV-TI3 Trinocular (erect image, F.O.V. 22/25), LV-TT2 Tilting Trinocular (erect image, F.O.V.22/25), Y-TF2 Trinocular (inverted image, F.O.V. 22/25), Y-TT2 Trinocular (inverted image, F.O.V.22/25)
Stage LV-S32 3x2 Stage (stroke: 75x50 mm including glass plate), ESD-applied (excluding glass plate)LV-S64 6x4 Stage (stroke: 150x100 mm including glass plate), ESD-applied (excluding glassplate)LV-S6 6x6 Stage (stroke: 150x150 mm; only for episcopic illumination)
Eyepiece CFI eyepiece series
Objective lens CFI60 series
Electrostatic decay time 1000-10V, within 0.2 sec.
Power consumption 1.2A/75W
Weight (main body) Approx. 8.6kg (LV150), approx. 8.7kg (LV150A)
Specifications
For details, see the corresponding catalog. (Catalog list on page 2)
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Industrial Microscope ECLIPSE LV100D
ECLIPSE LV100D (Episcopic/Diascopic Illumination Type)The LV100D is an episcopic/diascopic illumination metallurgical microscope that based on the CFI60 infinity optics. This microscope providespowerful support for top-notch inspections in a broad array of applications such as semiconductors, magnetic heads, LCDs.
Max. sample size: 150 x 100mm
Magnification range: 15–3000x (Depending on the combination of eyepiece and objective lenses)
Main body Baseless type (spacer insertable between arm and stand); Max. sample height 29mm, 64mm withcolumn riser; 12V-50W brightness control built in transformer
Focusing section Coaxial coarse/fine focus knob, left: coarse/fine, right: fine; Stroke 30mm, coarse 14.0mm/rotation(torque adjustable, with refocusing mechanism), fine focusing 0.1mm/rotation (1mm/increments)
Nosepiece C-N6 Nosepiece (brightfield, sextuple), L-NBD5 Nosepiece (bright/darkfield quintuple, with flareprevention), L-NU5 Nosepiece (universal quintuple, with flare prevention)
Episcopic illuminator 12V-50W high-intensity halogen lamp; Field (centerable) and aperture diaphragms synchronized LV-U EPI with B/D changeover; ø25mm filter (NCB11, ND16, ND4) insertable; Polarizer/analyzer insertable
Episcopic illuminator 12V-50W high-intensity halogen lamp; Precentered mercury-fiber illuminator “Intensilight”mountable; Centerable field and aperture diaphragms synchronized with B/D changeover; ø25mmfilter (NCB11, ND16, ND4) insertable; Polarizer/analyzer/l plate insertable, excitation balancerinsertable
Diascopic illuminator 12V-50W high-intensity halogen lamp; Field (centerable) and aperture diaphragms synchronizedwith B/D changeover; Filters (ND8, NCB11) insertable
Eyepiece tube LV-TI3 Trinocular (erect image, F.O.V. 22/25), LV-TT2 Tilting Trinocular (erect image, F.O.V.22/25), Y-TF2 Trinocular (inverted image, F.O.V. 22/25), Y-TT2 Trinocular (inverted image, F.O.V.22/25)
Stage LV-S32 3x2 Stage (stroke: 75x50 mm including glass plate) LV-S64 6x4 Stage (stroke: 150x100 mm including glass plate)
Eyepiece CFI eyepiece series
Objective lens CFI60 series
Electrostatic decay time 1000-10V, within 0.2 sec.
Power consumption 1.2A/75W
Weight (main body) Approx. 9.4kg
Specifications
Industrial Microscope ECLIPSE LV100DA
A motorized system that optimizes image capturing conditions—LV100DAAmong performance requirements demanded of a microscope, those associated with digital imaging—digital image capture, analysis, and databaseformation—are growing faster than ever before. The LV100DA motorized system squarely addresses these demands and now comes equipped with amechanism that automatically optimizes observation technique and illumination—and these settings can be quantitatively controlled from external devices.
Maximum workpiece size: 150 x 100mm
Magnification range: 15-3000x (depends on the combination of eyepiece and objectives)
Main body Baseless type (column riser insertable between arm and stand); Max. sample height 29mm (with LV-S32 3x2 Stageor LV-S64 6x4 Stage), 64mm with column riser; 12V-50W brightness control built-in transformer
Focusing mechanism Coaxial coarse/fine focus knob, left: coarse/fine, right: fine; Stroke 30mm, coarse 14.0mm/rotation (torque adjustable,with refocusing mechanism), fine focusing 0.1mm/rotation (1mm/increments)
Interface Motorized nosepiece: LV-NU5A Nosepiece, LV-NU5AC Nosepiece (with centering mechanism)Episcopic illuminator: LV-UEPI2A, Precentered mercury-fiber illuminator “Intensilight”
Nosepiece LV-NU5A Nosepiece (high-durability motorized universal quintuple, with flare prevention mechanism)LV-NU5AC Nosepiece (high-durability motorized universal quintuple, with flare prevention and centeringmechanisms)
Episcopic illuminator 12V-50W high-intensity halogen lamp; Precentered mercury-fiber illuminator “Intensilight”; Motorized operation/control ofillumination changeover turret; Motorized aperture diaphragm (centerable, automatically optimized for the selectedobjective)/field diaphragm (centerable) synchronized with B/D changeover; ø25mm filter (NCB11, ND16, ND4)insertable; Polarizer/analyzer/l plate insertable, excitation balancer insertable
Diascopic illuminator 12V-50W high-intensity halogen lamp; Field (centerable) and aperture diaphragms; Built-n filters (ND8, NCB11)
Condenser LWD Achromat, Sliding Achromat 2-100x, C-C Abbe, C-C Achromat, Darkfield (dry)
Eyepiece tube LV-TI3 Trinocular (erect image, F.O.V. 22/25), LV-TT2 Tilting Trinocular (erect image, F.O.V. 22/25), Y-TF2Trinocular (inverted image, F.O.V. 22/25), Y-TT2 Trinocular (inverted image, F.O.V. 22/25)
Stage LV-S32 3x2 Stage (stroke: 75x50 mm including glass plate)
LV-S64 6x4 Stage (stroke: 150x100 mm including glass plate)
Eyepiece CFI eyepiece series
Objective lens CFI60 series
Electrostatic decay time 1000-10V, within 0.2 sec.
Power consumption 1.2A/90W
Weight (main body) Approx. 9.9kg
Specifications
For details, see the corresponding catalog. (Catalog list on page 2)
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Polarizing Microscopes ECLIPSE LV100 POL/50i POL
The base of the ECLIPSE-series polarizing microscopes hasbeen reengineered to further improve the lineup’s alreadyreputed optics, durability and ease of operation.
ECLIPSE LV100 POL Magnification range: 40-2000x(Depending on combination of eyepiece andobjective lenses)
ECLIPSE 50i POLMagnification range: 40-2000x(Depending on combination of eyepiece andobjective lenses)
Model ECLIPSE LV100 POL ECLIPSE 50i POL
Focusing Coaxial coarse/fine focus knob; Focus Coaxial coarse/fine focus knob; Focusstroke: 30mm; Coarse: 14mm per stroke: 30mm; Coarse: 13.8mm perrotation; Fine: 0.1mm; Minimum reading: rotation; Fine: 0.1mm; Minimum reading: in 1mm increments in 1mm increments
Nosepiece Reversed centering quintuple nosepiece (detachable); DIN slot
Episcopic illuminator LV-UEPI Universal Epi-illuminator
12V-50W illumination transformer, built-in Requires external power supply (TE2-PS100W)
Diascopic illuminator New illuminator (Brighter than a 100W lamp)12V-50W halogen lamp 6V-30W halogen lamp (HK type)(Newly developed LV-HL50W)12V-50W DC transformer, built-in 6V-30W transformer, built-inPrecentered lamphouse with back mirrorDiascopic/Episcopic changeover switchFly-eye lens, built-in Diffusers, built-inND8, NCB11 filters insert/remove ND8 filter insert/remove
Eyepiece tube P-TT2 Trinocular Tube for polarizing microscopy; P-TB Binocular Tube for polarizingmicroscopy
Intermediate tube Analyzer insert/remove; Conoscopic/Orthoscopic observations switchable;Plate/compensator slot; Built-in focusable Bertrand lens, removable from optical path
Stage Top-grade dedicated circular graduated stage Dedicated circular graduated stage
Analyzer 360˚ rotary dial; Minimum reading angle 0.1˚
Polarizer Fixed to the bottom of the condenser holder; P-T polarizer fixed to the bottom of thewith scale condenser
Condenser Dedicated strain-free swing-out, P Achromat (N.A. 0.9)
Eyepiece CFI 10x (F.O.V. 22mm), CFI 10xM (F.O.V. 22mm), CFI 10xCM (F.O.V. 22mm)
Objectives CFI P Achromat 4x, 10x, 20x, 40x, 100x CFI Plan Fluor 4x, 10x, 20x, 40x, 100xHCFI LU Plan Fluor Epi P 5x, 10x, 20x, 50x, 100x
Specifications
Focusing Units IM-4/IM-3
Z-axis stroke 30mm
Coarse focusing 5.2mm/rotation
Fine focusing 0.1mm/rotation
Minimum fine scale 1µm
Arm max. loading weight 4kg
Expandable to 10kg (IM-4)/8kg (IM-3) by adding a balancer
Distance to the mounting surface 141mm (from objective’s optical axis)
Specifications
IM-4• Accepts the CFI60 compliant LV-UEPI Universal Epi-illuminator
ESD, LV-EPILED White LED Illuminator and motorized nosepiece.• High durability and large loading ability.
IM-3• Accepts the EPI-U universal epi-illuminator and motorized nosepiece,
which support the CF Infinity Corrected optical system.• High durability and large loading ability.
Combination example of IM-3
Combination example of IM-4
For details, see the corresponding catalog. (Catalog list on page 2)
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Universal Illuminators/Reflected Light Illuminators
Filters
Model Universal Epi-illuminator LV-UEPI LV-UEPI 2A LV-UEPI2 LV-EPILED
Illuminator Brightfield, darkfield, Normarski DIC, Brightfield, darkfield, Normarski Brightfield, darkfield, Normarski Brightfield
qualitative polarizing DIC, qualitative polarizing, DIC, qualitative polarizing,
Epi-fluorescence (motorized Epi-fluorescence
illumination changeover turret)
Field diaphragm Centerable —
Aperture diaphragm 1.5x magnification, centerable 1.64x magnification 1.5x magnification, centerable 1.5x magnification, centerable —
Pinhole diaphragm Attachable to aperture diaphragm, — — — —
centerable
Light source 12V-50W/12V-100W halogen 12V-50W halogen illuminator 12V100W halogen illuminator 12V-50W halogen illuminator White LED illuminator
illuminator, Metal halide illuminator, Precentered mercury-fiber Precentered mercury-fiber
Hg/Xe high-intensity illuminator illuminator “Intensilight” illuminator “Intensilight”
Specifications
For details, see the corresponding catalog. (Catalog list on page 2)
Items Remarks
Test platesA 300 pcs/mm Class 1
B 600 pcs/mm Class 2
ND2ø45mm
For controlling ø25mmReduce light quantities by half
brightness ND16
ø45mm Reduce light quantities to 1/16.
(neutral density) ø25mm For diascopic illumination with OPTIPHOT
ND32 ø25mm Reduce light quantities to 1/32.
Items Remarks
For color temp.NCB11
ø45mmFor color photography
compensation ø25mm
For higher
GX1 ø45mm For B/W photography
contrast (green) GIFø45mm For DIC
ø25mm For B/W photography
For light Lemon skin
ø45mmDiffuser
dispersion ø25mm
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LV-UEPI Universal Epi-illuminator ESD with12V-50W halogenlamphouse
LV-EPILED White LEDIlluminator
LV-UEPI2 Universal Epi-illuminator with 12V-50Whalogen lamphouse
LV-UEPI2A MotorizedUniversal-Epi-illuminator 2with 12V-50W halogenlamphouse
Universal Epi-illuminator
with 12V-50W halogen
lamphouse
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Accessories for ECLIPSE/OPTIPHOT Series
Eyepiece tubes Image F.O.V. Inclination Beam split ratio Adjustable
(eyepiece: photo) interpupillary
distance
Ultra-wide tilting trinocular tube UWTT Erect 25 10-30˚ 100: 0, 20: 80 51-80mm
Tilting trinocular tube TT Erect 20 10-30˚ 100: 0, 20: 80 51-80mm
Trinocular tube TI Erect 20 20˚ 100: 0, 0: 100 51-75mm
Tilting binocular tube BT Erect 20 10-30˚ — 51-80mm
Binocular tube TI Inverted 20 30˚ — 51-75mm
For OPTIPHOT Series
Model Eyepiece tubes Image F.O.V. Sleeve Beam-split ratio ISO
diameter (eyepiece: photo) photo port
LV-TT2 Tilting trinocular tube Erect 22/25 30mm 100: 0, 20: 80 Option
LV-TI3 Trinocular tube Erect 22/25 30mm 100: 0, 0: 100 Option
Y-TF2 Trinocular tube “F” UW Inverted 22/25 30mm 100: 0, 0: 100 Option
Y-TT2 Trinocular tube “T” UW Inverted 22/25 30mm 100: 0, 0: 100, 20: 80 Option
C-TE Ergonomic binocular tube EX Inverted 22 30mm — —
Y-TB Binocular tube B Inverted 22 30mm — —
L2-TT2 Ultra-wide tilting trinocular tube Erect 22/25 30mm 100: 0, 20: 80 Detachable
L2-TT2 (ESD-applied)
L2-TT Ultra-wide tilting trinocular tube L2-TT Erect 22/25 30mm 100: 0, 0: 100 Detachable
For ECLIPSE Series
For OPTIPHOT seriesFor ECLIPSE series
TT
BT
BI TI
UWTT
Eyepiece Tubes
Stage Holders
ECLIPSE Stages
Wafer holders for OPTIPHOT: 200mm, 150mm, 125mm, 100mm,150mm holder frameWafer holders for ECLIPSE L200 series: 200mm, 150mmWafer holders for ECLIPSE LV150 series: 150mm
Mask holders150mm, 125mm(Use 6-inch holder frame with 8 x 8 stage for ECLIPSEL200 series and OPTIPHOT 200.)
For ECLIPSE L300 series 14 x 12 Stage (Cross travel: 354 x302mm; ESD-applied)
For ECLIPSE L200 series 8 x 8 Stage (Cross travel: 205 x205mm)
For ECLIPSE LV series LV-S6 6 x 6 Stage (Cross travel: 150 x150mm, ESD-applied)
For ECLIPSE LV series LV-S32 3 x 2 Stage (Cross travel: 75 x50mm, ESD-applied, except glassplate)
For ECLIPSE LV series LV-S64 6 x 4 Stage (Cross travel: 150x 100mm, ESD-applied, except glassplate)
LV-TT2
Y-TT2Y-TF2
LV-TI3
L2-TT/L2-TT2
Y-TB C-TE
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Focusing Modules
LV-IMA (motorized)/LV-IM (manual)/LV-FMA (motorized)/LV-FM (manual)Four types of new focusing modules are available.• For incorporation into system:
LV-IMA IM Module A (motorized)LV-IM IM Module (manual)
• For incorporation into microscope:LV-FMA FM Module A (motorized)LV-FM FM Module (manual)
The new offerings complement Nikon’s rich variety of modular units—such as the LV-UEPI2A Motorized Universal Illuminator, LV-NU5AMotorized Universal Nosepiece, LV-NU5AC Motorized Universal Nosepiece with centering mechanism, and LV-ECON E Controller—to give yougreater flexibility in configuring a system best suited to your purpose.
Main body LV-IMA IM Module/LV-FMA FM Module A (motorized)Motorized nosepiece up/down section: stroke 20mm, resolving power 0.025µm, max. speed 2.5mm/sec. (resolving power 0.05µm)LV-IM IM Module/IV-FM FM Module (manual)Coarse/fine focus knob: stroke 30mm, coarse 5.2mm/rotation, fine 0.1mm/rotation (in 1mm increments)
Nosepiece C-N6 Nosepiece (brightfield, sextuple), L-NBD5 Nosepiece (bright/darkfield quintuple, with flare prevention), L-NU5 Nosepiece (universal quintuple, with flare prevention), LV-NU5A Nosepiece (high-durability motorized universal quintuple, with flare prevention), LV-NU5AC Nosepiece (high-durability motorized universal quintuple, with flare preventionand centering mechanism)
Episcopic illuminator 12V-50W high-intensity halogen lamp; Field (centerable) and aperture diaphragms synchronized with B/D changeover; ø25mm filter (NCB11, ND16, ND4) insertable; LV-UEPI Polarizer/analyzer insertable
Episcopic illuminator 12V-50W high-intensity halogen lamp; Precentered mercury-fiber illuminator “Intensilight”; Centerable field and aperture diaphragms synchronized with B/D changeover; LV-UEPI2 ø25mm filter (NCB11, ND16, ND4) insertable; 2 epi-filter cubes insertable; Polarizer/analyzer/� plate insertable, excitation balancer insertable
Episcopic illuminator 12V-50W high-intensity halogen lamp; Precentered mercury-fiber illuminator “Intensilight”; Motorized operation/control of illumination changeover turret;LV-UEPI2A Motorized aperture diaphragm (centerable, automatically optimized for selected objective)/field diaphragm (centerable) synchronized with B/D changeover; ø25mm filter
(NCB11, ND16, ND4) insertable; 2 epi-filter cubes insertable; Polarizer/analyzer/� plate insertable, excitation balancer insertable
Eyepiece tube LV-TI3 Trinocular (erect image, F.O.V. 22/25), LV-TT2 Tilting Trinocular (erect image, F.O.V. 22/25), Y-TF2 Trinocular (inverted image, F.O.V 22/25), Y-TT2 Trinocular (invertedimage, F.O.V 22/25), TV tube lens unit 0.5x, 1x
Eyepiece CFI eyepiece series
Objective lens CFI60 series
Electrostatic decay time 1000-10V, within 0.2 sec.
Weight (main body) LV-IMA: approx. 3.7kg, LV-IM: approx. 3.5kg, LV-FMA: approx. 6.0kg, LV-FM: approx. 5.8kg,
SpecificationsLV-IMA (motorized)/LV-IM (manual)/ LV-FMA (motorized)/LV-FM (manual)
Interface Motorized nosepiece: LV-NU5A, LV-NU5AC (with centering mechanism)Episcopic illuminator: LV-UEPI2A, LV-EPILED, Precentered mercury-fiber illuminator “Intensilight”Motorized focusing module: LV-IMA, LV-FMAHalogen lamphouse (powered by TE2-PS 100W power source): LV-LH50PC PC (USB1.1) *Software Development Kit (SDK) is available.
LV-ECON Controller
LV-IMA IM Module A(motorized)
LV-FMA FM Module A(motorized)
LV-FM FM Module(manual)
LV-IM IM Module(manual)
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Interferometry Equipment TI/DI
Eyepieces CFI 10x (F.O.V. 22), CFI UW 10x (F.O.V. 25)
CFN Filar Micrometer Eyepiece 10xA (used with ME600 UW adapter)
Objectives CF Plan EPI DI10x, 20x, 50x, CF Plan EPI TI 2.5x, 5x
Illuminator 12V-100W halogen lamp
Interference filter ø25mm (for 100W illumination)
Stage Tilting stage (used with YM tilting stage adapter)
Measurement range 0.05 to 2µm
Specifications Configurations
Standard (wide field) Ultra-wide field
10/20/50x Set 10/20/50x Set
Objectives CF Plan EPI TI 2.5x *2
CF Plan EPI TI 5x *2
CF Plan EPI DI 10x � �
CF Plan EPI DI 20x � �
CF Plan EPI DI 50x � �
Eyepieces CFI 10x (2) �
CFI UW 10x (2) �
Interference filter ø25mm (no frame) � �
CFN filar micrometer eyepiece 10xA � �
UW adapter (exclusively for ME600L) � �
YM tilting stage adapter � �
Configurations
Items
*1 Only TI objectives are usable with the LV150 Series.
*2 Used with YM TI objective adapter.
The Michaelson (TI) and Mirau (DI) types are available. Configuredwith the LV-UEPI Universal Epi-illuminator ESD, these interferometryunits can check minute unevenness of a sample surface by observing thechange in light intensity, interference colors or fringes throughmicrometer eyepieces or cameras. Because measurements are takencompletely non-contact, it eliminates the danger of damaging the
sample surface. Also, as interference fringes can be seen with whitelight, 0-level black or white interference fringes can be used as a basefor deciding fringe numbers.• Can also be used for ultra-wide field (F.O.V. 25) applications in
addition to standard field of view (F.O.V. 22).
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Compact Reflected Microscopes—CM Series
Model CM-5A CM-10A/CM-10L CM-20A/CM-20L CM-30A/CM-30L CM-70L
Camera mount C-mount (ENG-mount possible with option) C-mount
Tube lens magnification — 1x 0.5x 1x 0.4x/1x
Compatible objectives Objectives for measuring microscopes CFI Plan EPI objectives/CFI60 objectives
Illuminator system Koehler illumination (high-grade telecentric illuminator)
Attachment points 3 4 3
Dimensions (W x D x H) 40 x 40 x 186.5mm 40 x 40 x 224.5mm 40 x 40 x 125.5mm 40 x 40 x 107.3mm 40 x 117 x 156.1mm
Weight (Approx.) 410g 440g 290g 400g 690g
Specifications
For details, see the corresponding catalog. (Catalog list on page 2)
Compact and lightweight, best-selling mount-type microscopesThese microscopes boast high cost performance and take advantage ofthe excellent performance of Nikon’s industry-proven microscopeobjectives. They are mounted onto equipment that requires high-precision image processing or high-definition alignment, to serve assensors in manufacturing lines.The L Type that is compatible with CFI60 objectives is newly available,as are interchangeable parts for 8mm light guides (standard equipment).
The direction of the light guide fixing screw can be changed to thedesired direction by the user.Nikon welcomes consultation from users regarding the mounting ofthese microscopes on equipment, or other matters.
CM-10A/CM-10L
4-M4 depth 5
(installation screw)
Sample side
C-mount port
Imageformation
planeC-mount
Fiber insertion hole
4-M4 depth 5
(installation screw)
CM-20A/CM-20L
4-M4 depth 5
(installation screw)
C-mount
Imageformation
planeC-mount port
Sample side
Fiber insertion hole
4-M4 depth 5
(installation screw)
CM-30A/CM-30L
4-M4 depth 5
(installation screw)
C-mount
Imageformation
planeC-mount port
Sample side
CM-5A
4-M4 depth 5
(installation screw)
Fiber insertion hole
CM-70LC-mount
4-M4 depth 5
(installation screw)
Image formationplane (0.4x)
C-mount port
4-M4 depth 5
(installation screw)
Fiber insertion hole
Sampleside
Image formationplane (1x)
C-mount
Imageformation
planeC-mount port
Sample side
C-mount
4-M4 depth 5
(installation screw)
Fiber insertion hole
4-M4 depth 5
(installation screw)
Unit: mm
Fiber light Guide
ø8 Light guide adapter
ø21
ø8
(light guide installation hole)26.3
10
25
25(15) (10)
ø15
ø20
ø7 ø1033
10
ø5 fiber handle
Setting screw allowanceCM sideFiber transformer side
Length of fiber guide: 1m/1.5m/2m/5m. Custom lengths are also available.
CM
-10A
: 45
CM
-10L
: 60
(sam
e fo
cal l
engt
h)
126
(sam
e fo
cal l
engt
h)
CM
-30A
: 45
CM
-30L
: 60
(sam
e fo
cal l
engt
h)
CM
-20A
: 45
CM
-20L
: 60
(sam
e fo
cal l
engt
h)
60
(sam
e fo
cal l
engt
h)
Objective port
Objective port
Objective port
Objective port
Objective port
Dimensional Diagram
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Type Magnification N.A. W.D. (mm)
CFI L Plan Epi 2.5x 0.075 8.8
CFI LU Plan Fluor Epi 5x 0.15 23.5
10x 0.30 17.3
20x 0.45 4.5
50x 0.80 1.0
100x 0.90 1.0
CFI LU Plan Apo Epi 100x 0.95 0.4
150x 0.95 0.3
CFI L Plan Apo Epi WI 150x 1.25 0.25
CFI LU Plan Epi ELWD 20x 0.40 13.0
50x 0.55 10.1
100x 0.80 3.5
CFI L Plan Epi SLWD 20x 0.35 24.0
50x 0.45 17.0
100x 0.70 6.5
CFI L Plan Epi CR (with coverglass 20x 0.45 10.0 to 10.9correction 0-1.2mm)
(with coverglass 50x 0.7 3.0 to 3.9correction 0-1.2mm)
(with coverglass 100x 0.85 0.85 to 1.2correction 0-0.7mm)
(with coverglass 100x 0.85 0.95 to 1.3correction 0.6-1.3mm)
CFI LU Plan Fluor BD 5x 0.15 18.0
10x 0.30 15.0
20x 0.45 4.5
50x 0.80 1.0
100x 0.90 1.0
CFI LU Plan BD ELWD 20x 0.40 13.0
50x 0.55 9.8
100x 0.80 3.5
CFI LU Plan Apo BD 100x 0.90 0.51
150x 0.90 0.42
CFI LU Epi P 5x 0.15 23.5
10x 0.30 17.3
20x 0.45 4.5
50x 0.80 1.0
100x 0.90 1.0
CFI60 Objectives
Objective Lenses
CFI Objectives
Type Magnification N.A. W.D. (mm)
CF M Plan 5x *2 0.10 20.0
10x *2 0.25 9.0
CF M Plan DIC 10x *2 0.25 9.0
CF M Plan Apo 150x *2 0.95 0.2
CF M Plan LWD 20x *2 0.40 6.0
CF M Plan SLWD 100x *2 0.75 4.7
Brig
ht/d
arkf
ield
type
Longw
orking
distan
cetyp
e
Brigh
t/dar
kfield
type
Brig
htfie
ldty
peB
right
/dar
kfie
ldty
peP
olar
izin
gty
pe
Type Mag. N.A. W.D. (mm)
CF E Plan EPI 5x 0.10 20.0
10x 0.25 12.5
20x 0.40 3.8
50x 0.75 0.48
100x 0.90 0.23
CF Plan EPI Achromat 1.5x *1 0.045 3.6
2.5x 0.075 8.8
5x 0.13 22.5
10xA 0.3 16.5
20x 0.46 3.1
50x 0.8 0.54
100xA 0.95 0.3
CF Plan EPI Apochromat 50x 0.95 0.35A
100x 0.95 0.32
150xA 0.95 0.2
200x 0.95 0.2
CF E Plan BD 5x 0.1 12.0
10x 0.25 7.0
20x 0.4 3.1
50x 0.75 0.54
100x 0.9 0.34
CF Plan BD Achromat 5x 0.13 10.0
10xA 0.3 6.5
20x 0.46 3.1
40x 0.65 1.0
50x 0.8 0.54
100xA 0.9 0.39
CF Plan BD Apochromat 50x 0.9 0.42
100x 0.9 0.4
150x 0.9 0.29
200x 0.9 0.3
CF Plan BD DIC 5x 0.13 10.0
10xA 0.3 6.5
20xA 0.46 3.1
50x 0.8 0.54
100xA 0.9 0.39
CF Plan EPI ELWD 20xA 0.4 11.0
50x 0.55 8.7
100x 0.8 2.0
CF Plan EPI SLWD 10x 0.21 20.3
20xA 0.35 20.5
50xA 0.45 13.8
100x 0.73 4.7
CF Plan BD ELWD 20x 0.4 11.0
50x 0.55 8.2
100x 0.8 2.0
CF Plan BD ELWD DIC 20x 0.4 11.0
50x 0.55 8.2
100x 0.8 2.0
CF Plan EPI DI for interferometry 10xA 0.3 7.4
20x 0.4 4.7
50x 0.55 3.4
CF Plan EPI TI for interferometry 2.5x 0.075 10.3
5x 0.13 9.3
CF Plan LCD CR for inspecting LCDs 20x 0.4 10.11-10.54
(With cover glass correction 0.6-1.2mm) 50x 0.55 7.71-8.15
100x 0.8 1.10-1.12
Brig
htfie
ldty
peB
right
/dar
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ldty
peLo
ngw
orki
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stan
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peS
peci
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ety
pe
*1 Use in conjunction with analyzers and polarizers. Some peripheral parts cannot be covered withwidefield-type eyepiece lenses having more than 20 F.O.V.
*2 The production of this product has been discontinued and only objectives in inventories areavailable for purchase.
CF Objectives
The CFI60 system combines the CF design with infinity optics, whileadopting a wide 60mm parfocal distance for their objectives. The result:longer working distances and high N.A.’s, with crisp and clear imagesthat offer high contrast yet minimal flare.
The ideal optical system combines Nikon’s renowned CF optics withinfinity optics. In a major breakthrough, flare is dramatically reducedfor better resolution and increased sharpness.
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Eyepiece Lenses
Type Name/Mag. F.O.V. Focal length (mm) Remarks
CFWN 10x 20 25Diopter adjustable from –8 to +5. ø21mm micrometer insertable.
High eye-point/widefieldCFWN 15x 14 16.7
CFWN 10xM 20 25 Photomask included. Diopter adjustable from –7 to+4.
CFWN 10xCM 20 25 Crosshairs and micrometers included. Diopter adjustable from –7 to +4.
CFI UW 10x 25 25 Diopter adjustable from –8 to +5. For OPTIPHOT and ECLPISE L300, L200, L150 series and
High eye-point/ultra-widefield ME600L. For CF Infinity optics.
(For Optiphot, Epiphot) CFI UW 10xM 25 25 Diopter adjustable from –8 to +5. Photomask included. For OPTIPHOT and ECLIPSE L300,
L200, L150 series and ME600L. For CF Infinity optics.
CFI 10x 22 25 Diopter adjustable from –8 to +5.
High eye-point/ultra-widefield CFI 10xM 22 25 Diopter adjustable from –8 to +5. Photomask included.
(For ECLIPSE series) L-W10xESD 22 25 ESD-applied
CFI 12.5x 16 20 Diopter adjustable from –7 to +4.
CFI 15x 14.5 16.7 Diopter adjustable from –8 to +5.
CFI 10xCM 22 25 Diopter adjustable from –8 to +5. Crosshairs and micrometers included.
PL 2x 21.6 78.5
PL 2.5xN 18 66.4
PL 4x 11.8 35
Photomicrography projection lens PL 5x 9.4 28.5
PLI 2.5x 18 66.4
PLI 4x 11.8 35 For FX-III series photomicrographic systems.
PLI 5x 9.4 28.5
CF/CFI Eyepieces
Eyepiece/Objective-Related Accessories
Eyepiece MicrometerConfigured with an objective micrometer, this accessory is usedprimarily to check objective magnifications. Calibrated in hundredths of10 millimeters.
This accessory is used to measure the sample size by combining it withobjectives of 10x to 100x magnifications.
Objective MicrometerConfigured with an eyepiece micrometer, this accessory is used tocheck objective magnifications. Calibrated in hundredths of amillimeter.
CFN Filar Micrometer Eyepiece 10xA
Main scale 0.1mm/calibration; Stroke: 10mm
Sub scale 0.01mm/calibration
* UW eyepiece tube adapter is an option.
Plotting Objective MicrometerCalibrated in 0.01mm grids.
0 10 20 30 40 50 60 70 80 90 100
10 : 100
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Inverted Metallurgical Microscopes EPIPHOT TME300U/TME200
Inverted microscopes have the following benefits over uprightmicroscopes:1. Not necessary to move the stage while changing workpieces.2. Can easily measure large workpieces because there is no limitation
on the height of the workpiece.
EPIPHOT TME300UMagnification range: 12-6000x (Depending on combination of
eyepiece and objective lenses)
EPIPHOT TME200Magnification range: 15-3000x (Depending on combination of
eyepiece and objective lenses)
TME300U-BD
TME200-BD
Model TME300U TME200
Focusing Stroke: 4mm, Coarse: 4mm/rotation, Fine: 0.1mm/rotation,
system Scale: 1µm
Light distribution Observation: side port = 100:0/20:80
Observation: photo = 100:0/20:80
35mm: large format = 100:0/0:100—
Intermediate 0.8-2x zooming (stops with a click
magnification at 1.0x, 1.25x, 1.5x)—
Scale 5/10/10/20/50/100x scale for objective lens, Grain reticle (Austenite reticles
No. 1-8 and Grid: 0.5mm steps, 20 for horizontal/vertical each), imprinted at
primary image plane
Nosepiece Quintuple brightfield nosepiece, Brightfield/darkfield nosepiece, Universal
nosepiece
Illuminator 12V-100W halogen lamp (standard), 12V-50W halogen lamp, Hg/Xe lamp
Eyepiece tube Dedicated binocular eyepiece Binocular Tube X2B, Trinocular
tube Tube X2T
Stage Rectangular stage with universal joint, Cross travel: 70mm x 50mm
Photomicrography
Eyepieces CFWN 10x (F.O.V. 20)
CFWN 10xEPM (F.O.V. 20) —
Objectives CF IC EPI Plan, CF IC EPI E Plan, CF IC BD E Plan, CF IC BD Plan, CF IC
BD Plan DIC
Specifications
For details, see the corresponding catalog. (Catalog list on page 2)
Built-in (Auto, 60% integrated
average, control box stands alone
from main body), 35mm/large format
selectable
FX-III series photomicrographic
system can be mounted via
trinocular eyepiece tube
Compact Inverted Microscope ECLIPSE MA100
The ECLIPSE MA100 is a compact-size inverted microscope speciallydesigned for reflected illumination. This instrument was developed forbrightfield observation and simple polarizing observation. Thanks to itscompact, durable design and simple operation in addition to its high-contrast observation and image capture, it is excellent formetallographic and electronic components as well as use at product sitesin the materials field and quality control departments.
Magnification range: 25-2250x (Depending on combination ofeyepiece and objective lenses)
Optics CFI60 optics (EPI series)
Observation image Upright back image
Observation method Brightfield and simple polarizing (when using MA-P/A Simple
Polarizing Set)
Focusing section Vertical action revolver (fixed stage)
Single-axis coarse/fine adjustment handle with 8.5mm stroke (coarse
adjustment of 37.7mm per turn, fine adjustment of 0.2mm per turn)
Nosepiece Brightfield 5-position nosepiece
Stage MA-SP Plain 170 x 230mm (includes two holders for acrylic samples, ø30mm
Stage aperture, crescent aperture)
Can be combined with MA-SRSH1 Universal Specimen Holder or
MA-SH3 Specimen Holder 3
TI-SM Mechanical 126 x 80mm stroke; handle can be attached on the right or left side
Stage CH of the stage
Can be combined with MA-SH1 Specimen Holder 1, or MA-SH2
Specimen Holder 2 or C-HU Universal Holder
MA-SR 50 x 50mm stroke (includes two sample holders with ø20mm and
Rectangular Stage ø40mm apertures) and handle fixed on right side
Can be combined with MA-SRSH1 Universal Specimen Holder or
MA-SH3 Specimen Holder 3
Illuminator Internal power supply 6V 30W Halogen Lamp (long-life type)
Built-in condenser (lever operated), ø25mm filter (includes NCB11
and ND4) can be inserted
Eyepiece tube Built-in mirror type, 45 depression angle and 50mm to 70mm
interpupillary adjustment
Max. power consumption 96VA
Dimensions (W x D x H) 228 x 663 x 382mm
Weight Approx. 9kg
Specifications
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NWL860TMB/TMB-SP/INX-TMB/TM/T
Wafer size ø150mm to 200mm (conforms to both SEMI and JEIDA)*
Wafer cassette Fluoroware® PA182-60MB, PA192-80M type (holds 25 or 26 wafers)
Inspection mode 1. Micro inspection, 2. Pattern-side macro inspection, 3. Backside
periphery macro inspection, 4. Backside center macro inspection
(1-4 with TMB, 1-2 with TM, 1 with T series)
Orientation flat/notch detection By non-contact/transmitted-type sensor. Wafer angle before and after
inspection can be specified in 90˚ increments
Stage Dedicated stage (rotatable 360˚; with vacuum chuck)
Compatible microscopes Nikon ECLIPSE L200A/L200
Dimensions Main unit (INX series) 535 x 625 x 360mm/786 x 752 x 442mm (INX series)
Footprint (W x D) (with IC Inspection Microscope): 900 x 620mm/1450 x 800mm
(INX series)
Weight Approx. 50/60kg (INX series)
IC Inspection Wafer Loaders NWL-860 Series
NWL860TMB/TMB-SP/INX-TMB/TM/TA wide variety of models are available, including those for backside macro inspections,dedicated macro inspections, a model with a stainless-steel body, and another with anSMIF elevator.
Specifications
* For INX series, a ø150mm type and a ø200mm type are separately available.
Class-1 laser equipment
For details, see the corresponding catalog. (Catalog list on page 2)
NWL860INX-TMB+ECLIPSE L200
NWL860TMB-SP+ECLIPSE L200
IC Inspection Wafer Loaders NWL641 Series
NWL641M/641
Model NWL641M NWL6411
Wafer size
Wafer cassette Fluoroware® H-BAR type (holds 25 wafers)
Inspection mode Micro inspection, Micro inspection
Pattern-side macro inspection
Orientation flat/notch
detection
Stage
Compatible microscopes Nikon ECLIPSE LV150A/LV150/L150A/L150
Dimensions
Main body (W x D x H) 266 x 685 x 245mm 246 x 655 x 245mm
Table (W x D) 598 x 730mm
Weight Approx. 23.5kg Approx. 21.0kg
Specifications
Class-1 laser equipment (Output 40µW, Wavelength 780nm)
For details, see the corresponding catalog. (Catalog list on page 2)
NWL641M
By non-contact/transmitted-type sensor. Wafer angle before and after inspection can be
specified in 90˚ increments
Dedicated stage (rotatable 360˚; with vacuum chuck)
ø100mm to 150mm (conforms to both SEMI and JEIDA)
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Multi-purpose Zoom Microscope MULTIZOOM AZ100
This multi-purpose zoom microscope has the combined advantages of astereoscopic microscope with a wide field of view and a long workingdistance, and an industrial microscope boasting high-resolution images.It enables on-axis observation and image capture in the macro regionand allows a wide array of observation methods suited to specificsamples and applications. It offers Nomarski DIC and fluorescenceobservation with episcopic illumination, oblique illumination, andsimple polarizing observation with diascopic illumination. It alsoprovides for simultaneous mounting of diascopic DIC and epi-fluorescence attachments.
Magnification range: 5-400x (Depending on combination ofeyepiece and objective lenses)
Total magnification 5-400x (Depending on eyepiece and objective used)
(When coaxial episcopic illuminator is attached: 6.25-500x)
Zoom range 1-8x (zoom ratio: 8:1)
Eyepiece tubes AZ-TE100 Ergonomic Trinocular Tube 100 (beamsplit ratio
100:0/0:100, 0.6x reduction optics built into photo port)
AZ-TE80 Ergonomic Trinocular Tube 80 (beamsplit ratio
100:0/20:80, 0.6x reduction optics built into photo port)
AZ-TP DSC Tube 0.6x (direct tube type, 0.6x reduction optics built
in)
Eyepiece inclination 0-30° (eyepiece tube AZ-TE100/AZ-TE80)
Interpupillary distance 50 to 75mm (eyepiece tube AZ-TE100/AZ-TE80)
adjustment
Eyepiece AZ-W 10x (F.O.V. 22)
Focus mount adapters AZ-FM AZ Focusing Mount Adapter (for AZ stand)
AZ-SMZ SMZ Focusing Mount Adapter (for SMZ stand)
AZ-LV LV Focusing Mount Adapter (for LV-IMA/LV-IM)
Stands AZ-STE Episcopic Stand/AZ-STD Diascopic Stand: (Focus mount
section: focusing stroke, 85mm; coarse, 18.5mm/rotation; fine,
3.27mm/rotation
Stage focus section: focusing stroke, 10mm; coarse,
37.7mm/rotation ; fine, 0.27mm/rotation)
C-PS160 Plain Stand, C-BD Diascopic Bright/Darkfield Stand
Stages AZ-STGE EPI Stage (150 x 150mm stroke)
AZ-STGD DIA Stage (150 x 100mm stroke)
Objective lens mounts AZ-NP3 Triple Nosepiece
AZ-NPS Single Nosepiece
AZ-FLDIC FL-DIC Prism Holder (when simultaneously mounting epi-
fluorescence and diascopic DIC attachments)
Objectives AZ-Plan Apo 0.5x (NA: 0.05/W.D. 54mm)
AZ-Plan Apo 1x (NA: 0.1/W.D. 35mm)
AZ-Plan Fluor 2x (NA: 0.2/W.D. 45mm)
AZ-Plan Apo 4x (NA: 0.4/W.D. 20mm)
AZ-Plan Fluor 5x (NA: 0.5/W.D. 15mm)
Illuminators AZ-ICI Coaxial Episcopic Illuminator (C-FI115/230 Fiber Illuminator:
12V 100W halogen lamp); device magnification: 1.25x
AZ-LED LED Ring Illuminator
C-FID Plastic Fiber Optics Bifurcated Illuminator (C-FI115/230 Fiber
Illuminator: 12V 100W halogen lamp)
Light source for epi- C-HGFI HG Precentered Fiber Illuminator (130W mercury lamp),
fluorescence observation C-HGFIE HG Precentered Fiber Illuminator (motorized, 130W
mercury lamp)
Lamphouse HMX-4B (100W mercury lamp)
Observation methods Reflected light: coaxial illumination, Nomarski DIC, fluorescence (up
to four filter cubes are mountable), and LED illumination observation
Transmitted light: brightfield, Nomarski DIC, simple polarizing, and
oblique illumination observation
Weight Coaxial illumination configuration: 26kg, epi-fluorescence +
diascopic DIC configuration: 28kg
Specifications
34
Stereoscopic Zoom Microscope SMZ1500
The SMZ1500 represents a new-century standard for stereoscopic zoommicroscopes created by Nikon after a total review of specifications andperformances from the bottom up and the application of Nikon’sindustry-leading optical technologies.
Magnification range: 3.75-540x (Depending on combinationof eyepiece and objective lenses)
Optical system Parallel-optics zoom system
Total magnification 3.75-540x (Depending on eyepiece and objective used)
(When coaxial episcopic illuminator is attached: 5.6-
506x)
Eyepiece inclination 20˚ (Standard Binocular and Low-Eye-level Binocular),
0˚-30˚ (Tilting Binocular)
Interpupillary distance adjustment 48 to 75mm
Eyepieces (with diopter adjustment) C-W10x (F.O.V. 22), C-W15x (F.O.V. 16), C-W20x
(F.O.V. 12.5), C-W30x (F.O.V. 7)
Zoom range 0.75 to 11.25x
Zoom ratio 15 : 1
Objectives P-HR Plan Apo 0.5x, 1x, 1.6x (Can be used with
diascopic illumination only.)
For details, see the corresponding catalog. (Catalog list on page 2)
Specifications
SMZ1500-1
Stereoscopic Zoom Microscope SMZ1000
The SMZ1000 offers the highest levels of optical performance,expandability, ergonomic operability, and cost efficiency.
Magnification range: 4-480x (Depending on combination ofeyepiece and objective lenses)
Optical system Parallel-optics zoom system
Total magnification 4-480x (Depending on eyepiece and objective used)
(When coaxial episcopic illuminator is attached: 6-540x)
Eyepiece inclination 20° (Standard Binocular and Low-Eye-level Binocular),
0-30° (Tilting Binocular)
Interpupillary distance adjustment 48 to 75mm
Eyepieces (with diopter adjustment) C-W10x (F.O.V. 22), C-W15x (F.O.V. 16), C-W20x (F.O.V.
12.5), C-W30x (F.O.V. 7)
Zoom range 0.8 to 8.0x
Zoom ratio 10 : 1
Objectives P-Plan Apo 0.5x, 1x; P-ED Plan Apo 1.5x, 2x; P-Plan 1x;
P-Achro 0.5x; P-ERG Plan 1x ERGO (Can be used with
zoom magnification 1x or higher.)
For details, see the corresponding catalog. (Catalog list on page 2)
Specifications
SMZ1000-1
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35
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Stereoscopic Zoom Microscope SMZ800
Ergonomics are incorporated into every aspect of the SMZ800. It offersimage sharpness on a par with upper-class microscopes andexpandability at an affordable price.
Magnification range: 5-378x (Depending on combination ofeyepiece and objective lenses)
Optical system Parallel-optics zoom system
Total magnification 5-378x (Depending on eyepiece and objective used) (When
coaxial episcopic illuminator is attached: 7.5-425x)
Eyepiece inclination 20° (Standard binocular tube/low-eye-level binocular tube),
0°-30° (tilting binocular tube)
Interpupillary distance adjustment 48 to 75mm
Eyepieces (with diopter adjustment) C-W10x (F.O.V. 22), C-W15x (F.O.V. 16), C-W20x (F.O.V.
12.5), C-W30x (F.O.V. 7)
Zoom range 1 to 6.3x
Zoom ratio 6.3 : 1
Objectives P-Plan Apo 0.5x, 1x; P-ED Plan 1.5x, 2x; P-Plan 1x; P-
Achro 0.5x; P-ERG Plan 1x ERGO
For details, see the corresponding catalog. (Catalog list on page 2)
Specifications
Stereoscopic Zoom Microscopes SMZ645/660
The SMZ645/660 represents a basic model in the SMZ series,developed by completely renewing optical performance and operability.It offers all the advantages of airtight, anti-mold and anti-electrostaticdesign.
Magnification range: 4-300x (Depending on combination ofeyepiece and auxiliary objective lenses)
SMZ800-1
Model SMZ645 SMZ660
Optical system Twin zooming objective
Total magnification 4-300x (Depending on eyepiece and auxiliary objective used)
Eyepiece inclination 45˚ 60˚
Interpupillary distance 52 to 75mm
adjustment
Eyepieces C-W10x (F.O.V. 22), C-W15x (F.O.V. 16), C-W20x (F.O.V. 12.5),
(with diopter adjustment) C-W30x (F.O.V. 7)
Zoom range 0.8 to 5x
Zoom ratio 6.3 : 1
Auxiliary objectives AL0.5x (W.D. 211mm), AL0.7x (W.D. 150mm), AL1.5x (W.D. 61mm),
AL2x (W.D. 43.5mm), AL ERG 0.77-1.06x (W.D. 102-48mm)
Working distance 115mm
Antistatic function Discharge time: less than 0.2 sec.
Airtight construction JIS dew prevention standard Type 1 compliant
For details, see the corresponding catalog. (Catalog list on page 2)
Specifications
SMZ660
SMZ645
36St
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Stereoscopic Zoom Microscope SMZ-1 ESD
The SMZ-1 offers legendary Nikon stereo performance at an affordableprice.
Magnification range: 3.5-90x (Depending on combination ofeyepiece and auxiliary objective lenses)
Stereoscopic Zoom Microscope SMZ-2
The SMZ-2 features high-resolution optics perfect for inspection,assembly and measurement in the electronics industry.
Magnification range: 4-120x (Depending on combination ofeyepiece and auxiliary objective lenses)
Optical system Twin zooming objective
Total magnification 3.5-90x (Depending on eyepiece and auxiliary
objective used)
Eyepiece inclination 60˚
Interpupillary distance adjustment 54 to 75mm
Eyepieces (with diopter adjustment) C-W10x (F.O.V. 22), SM E15xA (F.O.V. 14), SM E20xA
(F.O.V. 12), C-W30x (F.O.V. 7)
Zooming range 0.7 to 3x
Zooming ratio 4.28 : 1
Auxiliary objectives AL0.5x (W.D. 211mm), AL0.7x (W.D. 150mm)
Working distance 100mm
For details, see the corresponding catalog. (Catalog list on page 2)
Specifications
SMZ-1
Optical system Twin zooming objective
Total magnification 4-120x (Depending on eyepiece and auxiliary
objective used)
Eyepiece inclination 45˚
Interpupillary distance adjustment 56 to 75mm
Eyepieces (with diopter adjustment) 10x (F.O.V. 23), 15x (F.O.V. 14), 20x (F.O.V. 12.5),
C-W30x (F.O.V. 7)
Zooming range 0.8 to 4x
Zooming ratio 6.3 : 1
Working distance 77.5mm
For details, see the corresponding catalog. (Catalog list on page 2)
Specifications
SMZ-2
37
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Stereoscopic Zoom Microscope SM-5
A standard stereoscopic microscope featuring fixed magnification. Witha 45˚ eyepiece tube inclination, the SM-5 is ideal for use on a desktop.
Magnification range: 10-60x (combination of eyepiece andobjective lenses)
Optical system Fixed type
Total magnification 20x: standard (with 2x objective), 10x-60x (depending on
the eyepiece and auxiliary objective used)
Eyepiece inclination 45˚
Interpupillary distance adjustment 56 to 75mm
Eyepieces SM E10xA (standard), SM E15xA, SM E20xA, C-W30x
Objectives 2x
Auxiliary objectives 0.5x, 0.7x
Working distance 100mm (standard)
For details, see the corresponding catalog. (Catalog list on page 2)
Specifications
SM-5 (Clemmer is optional)
38St
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Accessories for Stereoscopic Microscopes
Eyepiece Tubes/Eye-level Riser SM-S4L 4 x 4 Stage
Beam Splitters (P-IBSS2, P-IBSD2)
P-THSS Teaching Head
P-IDT Drawing Tube
P-FLA Epi-fluorescence attachment
1. Standard binocular eyepiece tube(inclination 20°)
2. Low eye-level eyepiece tube (inclination 20°)
3. Tilting eyepiece tube (inclination0°-30°)
4. Eye-level riser: 25mm
SMZ1500
SMZ645/660
SMZ1000 SMZ800
SMZ1500
SMZ645/660
SMZ1000 SMZ800
SMZ1500
SMZ800
SMZ1000
SMZ1500 SMZ1000 SMZ800
SMZ1500 SMZ1000 SMZ800
SMZ1500 SMZ1000 SMZ800
SMZ1500
SMZ645/660
SMZ1000 SMZ800
SMZ1500
SMZ645/660
SMZ1000 SMZ800 SMZ1500
SMZ645/660
SMZ1000 SMZ800
SMZ645/660
SMZ1000 SMZ800
SMZ645/660
SMZ1000 SMZ800
SMZ1000SMZ1500
SMZ800
C-PS160 Plain Stand C-PS/C-PSC Plain Stands
C-DS Diascopic Stand C-DSS Diascopic Stand
C-DSD Diascopic Stand C-BD Diascopic Bright/Darkfield Stand
• In addition, the SMZ-U Large Stand is also available.
q
e
w r
: compatible microscopes
P-IBSS2
SMZ645 + C-PS Plain Stand
SMZ645 + C-PSC Plain Stand
Used in combination with an optionalextension pillar, the 4 x 4 Stage allowsprecise movement in the XY direction,facilitating fine alignment during high-magnification observations underepiscopic illumination.(Although mountable on a diascopicstand, it is not suitable for observationas it blocks illumination.)
The high-end C-DSD Diascopic Standfeatures condenser lenses that can beswitched between low and highmagnifications. A newly developedOblique Coherent Contrast (OCC)Illumination system* allows colorlessand transparent samples to be observedin high relief.*Patent pending.
This stand uses a seven-sided toroidalmirror* to substantially reduce straylight, creating high S/B ratiodarkfield images.*Patent pending.
This stand features a hand rest thatensures comfortable operation and alarge-diameter stage glass.
This stand accommodates a light sourceand its power supply in a simpledesign. The angle of the built-in mirrorcan be easily adjusted with a knob.
This stand features a thin design, alarge ø180mm stage plate and a long160mm distance between the pillarand optical axis to boost yourworking efficiency.
The narrow design offers a comfortablework area and allows easy handling ofsamples. The C-PSC stand has a smallbase that saves desk space. (The C-PSC isfor SMZ645 and 660 only.)
This teaching head enables the simultaneous observation of the samesample by two persons, making it ideal for teaching and educationalpurposes.
The drawing tube enables the drawing of images while viewing. Withinthe visual field, the drawing is overlaid on top of the image, allowing theuser to draw the image simply by tracing it.
The P-FLA permits quick switchingbetween the fluorescence andbrightfield methods. By adding anoptional photo port, users can captureimages without using a beam splitter.
Using a beam splitter and adapter, anFX-III series photomicrographicsystem, CCTV camera, or a digital stillcamera can be attached. The P-IBSD2Beam Splitter D2 has two ports,allowing one photomicrographicsystem and one CCTV camera to bemounted at the same time.
SMZ-1 SMZ-1
SMZ-1 SMZ-1
SMZ-1 SMZ-1
SMZ-1
39
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P-ICI2 Coaxial Episcopic Illuminator
SMZ1500 SMZ1000 SMZ800
This illuminator uses a 12V-100W fiber-optics light sourceto deliver bright illuminationover the entire sample surface.The thickness of the 1/4λ platehas been reduced, minimizingspherical aberrations in highN.A. objectives.*Zoom magnifications that canbe used vary depending onobjective. For details, consult aNikon representative.
Accessories for Stereoscopic Microscopes
: compatible microscopes The photos are examples of configuration with microscopes. Some configurations require adapters for mounting.
SMZ1500 SMZ645/660SMZ1000 SMZ800
C-FID Fiber-optics Bifurcated Illuminator (12V-100W halogen)
C-DSLS Lamphouse (6V-20W halogen)
SMZ-U Episcopic Arm
G-LS Episcopic Illuminator (6V-10W halogen)
G-EIA Flexible Arm
C-FPS Fluorescent Ring Illuminator
SM-LW61Ji LED Illuminator
C-POL Polarizing Attachment
C-FIR Fiber-optics Ring Illuminator (12V-100W halogen)
This illuminator incorporates a12V-100W halogen lamp withreflection mirrors. It suppliesconical-shaped light through anoptical fiber from above thesample to its center, minimizingunwanted shadow. It is ideal forphotomicrography.
This illuminator offerssufficient brightness withreflection light originatingfrom a 6V-10W halogen lamp.It can be mounted on the C-PSPlain Stand where itsillumination angle can be easilyadjusted.
This illuminator incorporates a12V-100W halogen lamp withreflection mirrors to projectlight beams onto the desiredposition via two optical-fiberarms. The direction and angleof the illumination can bechanged with simpleadjustments of these flexiblearms.
Using a 6V-20W halogen lampas light source, the C-DSLScan be externally attached togenerate epi-fluorescenceillumination. It can also bemounted to the C-DSDiascopic Stand.
This arm can be mounted to theC-DSLS Lamphouse or the G-LS Episcopic Illuminator.
This arm can be flexibly bentso that the G-LS EpiscopicIlluminator can be set to theappropriate position.
A ring-shaped fluorescent tubeprovides uniform illuminationover the entire visual fieldwithout shadows. Thisilluminator uses a long-life(over 500 hours) CRT of160V-30mA, and it lights upimmediately after switchingON.
This is a high-intensityilluminator incorporating 60long-life white LEDs.Flickering is suppressed byadjusting the intensity control.
The polarizer is set on the stage while the analyzer is fitted on the objectivelens cover, through which diascopic illumination light passes, making itpossible to observe flakes of rock or mined ore, or double refraction images ofsamples (in conjunction with a diascopic illuminator).
SMZ645/660SMZ1000 SMZ800
8-Segment LED Ring Light CYN-E1
Because the optimum direction of illumination can be selected from eightdirections, it is now possible to clearly see the edges of plastic mold parts anddrills.
SMZ1500 SMZ645/660 SM5SMZ-2SMZ1000 SMZ800
SMZ1500 SMZ645/660 SM5SMZ-2SMZ1000 SMZ800
SMZ1500 SMZ645/660SMZ1000 SMZ800
SMZ1500 SMZ645/660SMZ1000 SMZ800
SMZ1500 SMZ645/660SMZ1000 SMZ800
SMZ645/660SMZ1000 SMZ800
SMZ1500 SMZ645/660 SM5SMZ-2SMZ1000 SMZ800
SMZ1500 SMZ645/660 SM5SMZ-2SMZ1000 SMZ800
SMZ-1 SMZ-1
SMZ-1
SMZ-1 SMZ-1
SMZ-1 SMZ-1
SMZ-1
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Accessories for Stereoscopic Microscopes
Universal Table Stands G-US1/G-US2• Used in conjunction with the C-FMB Focusing Mount B on the
SMZ645/660/1.• Used in conjunction with the SM Focusing Mount and the G-USA SM US
Adapter on the SM5.• Can not be used with the SMZ1000/800 when photomicrographic equipment
is mounted on these models.
Specifications
413
364
126
25
ø28
ø28
90-350
10-60
148
228-500
452
ø38
315
413
364
75
ø28
ø28
90-350
230
148
25
Can be installed onthe top or bottomedge.
Unit: mm
G-US1 Universal Table Stand 1
G-US2 Universal Table Stand 2
Universal Stand P
Focusing MountsVarious types of focusing mounts are available depending on use. They are used to incorporate stereoscopic microscope bodies into IC bonders orother devices. (SM Focusing Mount is for SMZ-2 and SM-5.) These mounts can also be used when attaching them to Universal Table Stands.
Unit: mm
The image is a configuration sample with the SMZ645.
Universal Table Stand
Model G-US1 G-US2 P
Vertical cross travel 245mm 229mm
Horizontal cross travel 260mm 272mm
Weight (approx.) 4.4kg 23.0kg 30.5kg
C-FMA Focusing Mount A — �
C-FMB Focusing Mount B � —
C-FMB Focusing Mount C — —
SM Focusing Mount �* �
Use of photomicrographic equipment — �
�: Possible * G-USA Adapter is required
C-FMA Focusing Mount A C-FMB Focusing Mount B C-FMC Focusing Mount C SM Focusing Mount
Focusing area 40mm 50mm 50mm 40mm
Weight (approx.) 0.6kg 0.8kg 1.6kg 0.6kg
Compatible microscopes SMZ1000/800/645/660/1 SMZ2, SM5
C-FMB Focusing Mount B
Unit: mmø76mm: C-FMA Focusing Mount Aø62mm: SM Focusing Mount
C-FMC Focusing Mount C
148
25
10153
116
ø76 ø15.8
101
ø24.5
30
74
160
ø76ø32
100
25
C-FMA Focusing Mount ASM Focusing Mount
The image is a configuration sample with the SMZ645.
Universal Table Stand P• Used in conjunction with the C-FMA Focusing Mount A on the
SMZ1000/800/645/660/1.• Used in conjunction with the SM Focusing Mount on the SM5.
41
Digit
alCa
mer
asfo
rMicr
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Imag
e-Re
lated
Prod
ucts
Digital Cameras for Microscopes—Digital Sight Series
C-mount
DS-2Mv-L2 + LV150 Industrial Microscope
The Digital Sight series responds to various needs, from high-levelresearch to standard inspections, in conjunction with a camera head andcontroller.Three types of camera heads are available: The DS-Fi1 is a high-definition type; the DS-2Mv provides comfortable on-monitorobservations and image capture; the DS-5Mc has a cooled camera headwith a Peltier device.Control units are also selectable from the PC-use control unit DS-U2and standalone control unit DS-L2. The DS-U2 has a USB 2.0 interfacefor PC connection, while the DS-L2’s built-in, large-size high-definitionLCD monitor allows independent operations without a PC.
Standard Cameras:
• Digital Sight DS-2Mv-L2
• Digital Sight DS-2Mv-U2
• Digital Sight DS-Fi1-L2
• Digital Sight DS-Fi1-U2
Cooled Cameras:
• Digital Sight DS-5Mc-L2
• Digital Sight DS-5Mc-U2
For details, see the corresponding catalog. (Catalog list on page 2)
High-definition Digital Camera for Microscopes—DXM1200C
C-mount
Configured with IC Inspection Microscope ECLIPSE LV150
DXM 1200C is equipped with a cooling mechanism thatretains CCD temperature at approximately 20˚C below roomtemperature. This reduces thermally induced noise that occursduring imaging sessions requiring lengthy exposure, andenables the capture of lifelike specimen images.
• Super high-resolution 12.6-mega output pixels (4116 x 3072pixel)
• Images are transferred at a rapid 15 fps. max speed forsmooth, natural display of live image observations.Specimens are protected against photobleaching due to ashortening of the overall imaging workflow process.
• The imaging software NIS-Elements provides convenientfunctions such as scale display and annotation. Livepreview, still image, and thumbnail display and capturing,can all be done on one screen.
For details, see the corresponding catalog. (Catalog list on page 2)
42Di
gital
Cam
eras
forM
icros
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s/Im
age-
Relat
edPr
oduc
ts
Film-type Photomicrographic System H-III
Exposure control Auto
Exposure metering range 1% partial/35% average
Control Electronic
Shutter speed Auto: 0.01-999 sec.*, Manual: 0.01-999 sec.
Shutter speed display LED digital display
Multiple exposure —
Memory shooting mode �
ISO sensitivity setting 35mm DX coded film: Auto, manual
Non-DX coded film: Manual (ISO 6-20,000)
Exposure compensation –2 to +2 EV (13 steps in 1/3 EV)
Finder Telescope type (crosslines for shooting range and focusing range
indication provided), use with focusing telescope (optional) in
low-magnification
Film format 35mm to 4” x 5” format
35mm camera box FDX-35 (Auto film wind/rewind/film sending to first frame)
(compatible with DX coded film)
Specifications
Combination of H-III and SMZ800
Stereoscopic Microscope
Shu
tter
* e.g. with 35mm format film, ISO 100, without exposure compensation, up to 200 seconds.
For details, see the corresponding catalog. (Catalog list on page 2)
Compact and easy-to-operate photographic system. Nikon’s swing-out prism offers fast shutter speeds and high contrastimages without internal reflection. Covers a wide range of uses.
43
CCTV System Diagram
1/3”pickup plate
C-mount CCTV
camera
2/3”pickup plate
C-mountCCTV camera
Systems thatcan be
attached tothe cameraport group*
2/3” pickupplate C-mountCCTV camera
2/3” pickup plateENG-mount
CCTV camera
2/3”pickup plateENG-mount
CCTV camera
F-mountcamera
body
C-mount TVadapter0.35x*1
C-mount TVadapter0.45x
C-mountTV adapter
C-mountzoom
adapter
ENG-mountzoom
adapter
F-mountphoto adapter
Photomicrographicsystem projection
lenses
ENGcamera portconversion
adapter
TV zoominglens
TV zoominglens
Relay lens1x
C-mountTV adapter
0.6x
C-mountTV adapter
0.7x
C-mountTV adapter
A
C-mountAdapter0.55x*5
ENG-mountTV adapter
0.45x*2,0.45xT*3
ENG-C mountadapter
ENG-mountTV adapter
0.6xT*3
ENG-mountTV adapter
1/2”pickup plate
C-mountCCTV
camera
1/2” pickupplate SonyENG-mount
CCTV(38-bayonet)
camera
Direct port group Camera port group ENG-mount eyepiece tube group
• FXL/FXA/SA main unit, etc. • X2 TV tube
C-mount TVadapter A
C-mountTV adapter
VM2.5x
C-mount TVadapterVM4x
• OPTIPHOT trinocular tubes* • ECLIPSE trinocular tubes* (For Y-TF2 and Y-TT2, use together with Y-T TV tube) • Ultra-wide tilting trinocular tube UWTTL* • Ultra-wide trinocular tube UW* • Trinocular tube TP* • Trinocular tube X2T* • Trinocular tube X2F* • LV-TT2 Tilting Trinocular Tube*4 • LV-TI3 Trinocular Tube ESD*4
• SMZ-U/10A Beam Splitter• SMZ-U Side Port• P-IBSS Beam Splitter S2/P-IBSD Beam Splitter D2*4
• OPTIPHOT trinocular tubes* • ECLIPSE trinocular tubes (Ultra-wide tilting trinocular tube L2-TT, ultra-wide tilting trinocular tube L2-TT2, and trinocular tube L-TI2 require V-T photo adapter. Trinocular tube Y-TT2 requires V-T photo adapter and Y-T TV tube. Trinocular tube LV-TI3 and tilting trinocular tube LV-TT2 require V-T photo adapter and LV-TV TV tube.) • Trinocular tube Y-TF2 and Y-TT2 require Y-T TV tube and V-T photo adapter • Ultra-wide tilting trinocular tube X2TW • Ultra-wide tilting trinocular tube UW • Trinocular tubes TP, etc. • Trinocular tube X2T • Trinocular tube X2F • X2 quadruple tube • SMZ-2T • ENG-mount tube group + ENG camera port conversion adapter
• SMZ-U/10A Beam Splitter + Photo Adapter• SMZ-U Side Port + Photo Adapter
*1 Cannot be used with the double port sub-port. Use the 0.35xB adapter.
*2 Cannot be used with the double port sub-port. Use the 0.45xB adapter
*3 When used with the X2F eyepiece tube, use the F type adapter; use the T type with other tubes.
*4: Requires a LV-TV TV tube (except when the C-mount adapter 0.55x is used).
*5: Cannot be used with trinocular eyepiece tubes other than the LV-TI3 and LV-TT2.
* Remove the camera installation port.
EnPrinted in Japan (0705-1)T Code No. 2CE-IWWH-9This brochure is printed on recycled paper made from 40% used material.
Specifications and equipment are subject to change without any notice or obligationon the part of the manufacturer. May 2007 ©2006-7 NIKON CORPORATION
WARNINGTO ENSURE CORRECT USAGE, READ THE CORRESPONDINGMANUALS CAREFULLY BEFORE USING YOUR EQUIPMENT.
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NIKON CANADA INC.CANADA phone: +1-905-625-9910 fax: +1-905-625-0103
NIKON FRANCE S.A.S.FRANCE phone: +33-1-45-16-45-16 fax: +33-1-45-16-00-33
NIKON GMBHGERMANY phone: +49-211-9414-0 fax: +49-211-9414-322
NIKON INSTRUMENTS S.p.A.ITALY phone: +39-55-3009601 fax: +39-55-300993
NIKON AGSWITZERLAND phone: +41-43-277-2860 fax: +41-43-277-2861
NIKON UK LTD. UNITED KINGDOM phone: +44-20-8541-4440 fax: +44-20-8541-4584
NIKON GMBH AUSTRIA AUSTRIA phone: +43-1-972-6111-00 fax: +43-1-972-6111-40
NIKON BELUXBELGIUM phone: +32-2-705-56-65 fax: +32-2-726-66-45