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Robo$queminiatureetcollabora$vepourassemblageultraprécis
PhilippeLutzAS2M/FEMTO-ST
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2016
La robotique dans l’Usine du Futur - 9 juin 2016 – CNRS - Paris
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FEMTO-ST
FEMTO-ST - CNRS institute, Besançon, France A wide range of technical competencies in ENGINEERING SCIENCES • A MULTIDISCIPLINARY research institute • A high level MICROFABRICATION TECHNOLOGY facility • A culture of INNOVATION : from basic research to industrial partnership
Automation and Robotics department Members: 26 associate, full-professors or CNRS scientists, 9 engineers and 2 administrative staff 33 PhD students, 6 post-docs, and about 20 MSc students. Budget: Indicative annual consolidated budget: 3,3 M€ /year included 1,4 M€ /year on contracts Publications: 35 articles and 45 communications in conf. each year
Exploit dynamics in
micro-nanoscale
Improve
dexterity of systems
Improve
intelligence of systems
Prognostics
Robotics
Automation
Mechatronics
Artificial Intelligence
In-vitro robotics
Micromechatronics
Nanorobotics Biomedical microrobots
Health management
Robotic micro-assembly
Robotic nanomanipulation
Non-linear control
Microsystems design
Micro-nano-handling
Lifetime prediction
Microactuators
Smart systems
Hybrid microsystems
Cell sorting
Microsurgery
High precision
Predictive maintenance Intelligent systems
Nanodevices
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Scien<ficchallengesBackground:automa<on,robo<cs,mechatronics,ar<ficalintelligence
Interna0onalposi0onningOneofthelargestteaminmicrorobo<csinEuropeRecognisedworksonPronositc&HealthManagementattheinterna<onallevel
Ac$vi$es:AdvancedcontrolNoncontactµmanipula<onPercep<ondynamics
Exploitthemicro-nanoscaledynamicbehaviours
Improvemicrorobotdexterity
Improveintelligenceofsystems
Ac$vi$es:MicrohandlingdexterityMicroassemblyoprera<onsSurgicalmicrorobots
Ac$vi$es:Dataanalysis&clusteringPronos<c&HealthmanagementMaintenanceop<misa<on
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… and also FEMTO-ST facilities including 800m2 clean rooms for MEMS fabrication and characterisation
TechnicalplaUormsandequipmentsµROBOTEX platform (sci. instrumentation for µ-nanorobotics) - 2 electronic microscopes - SEM & SEM–FIB (focused ion beam) - 1 environemental room (temperature and humidity control) - 3 interferometers and several high precision position sensors - 2 micro-nano-force measurement equipments - 2 home-made micromanipulation robots (SAMMI-PRONOMIA) - 6 real-time control boards and several acquisition boards - 3 high speed cameras and several cameras or microscopes…
Intelligent Systems platform (sci. instrumentation for prognostics) Equipements for testing bearing aging, cuting tools aging, fuell cells aging, MEMS aging…
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Challengesforminiaturerobo<cs
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Robo<csandscaleeffect
EPFL
Evolution of the robotic joints
- 1961 : the first robot ‘UNIMATE’ launched in General Motors
- 80’s : development of compliant joint to improve precision
Throughput and velocity growing impact of robot inertia when the object size reduces:
type robotmass Objectmass ra<o
automobile 600kg 30kg 20
Micro-electronics 10kg 5g 2000
Micro-assembly 100g 5pg 2.1013
Inertia of the robots reduces the throughput in micro-assembly
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• Nouvellegénéra<ondemicrorobotscompactsetintégrés
Systèmesmicromécatroniques:Approcheparmicro-assemblageetop<queintégrée
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Proposedapproaches
Objectives - reach huge throughput in pick-and-place µ-operations (100Hz to 1kHZ) - develop a new microscale paradigm:
« assemble smaller to assemble cheaper »
Proposedapproach-Robo<csolu<onisveryinteres<ngwhenhumancan’tact- AssociateHumanandrobottogetdexterity,accessibilityandprecision- Designmicrobottoactinthe«microworld»
- Dexterous, precise and smart microhandling - principle: manipulation using multifingered gripper - advantages: local rotation of the object, high blocking force - challenge: develop handling strategies available in microscale
- Non contact manipulation - principle: exploitation de forces à distance - advantages: no mechanical interia of the power transmission - challenge: high speed control and 3D positionning
Possible architectures
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Dexterous,preciseandsmartmicrohandling
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Dexterousetprecisemicromanipula<on
Why developing dexterous micromanipulation ? • Micro-assembly plays an important role in the
development of new technologies due to theminiaturiza<onofsystemsandcomponents
• Fields of applica<ons are very large such as health,defenseandtelecommunica<on
• Most of the micro-assembly are done by hand ortele-operated
• Exis<ngmicro-manipulators lackof speed,flexibility,
andautonomy
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Why dexterous micromanipulation are problematic ? • Precise rota<ons are difficult to perform at
microscale
• Miniaturize the robo<carms fromthemacroscale isnot a feasible solu<on because of backlash andeccentricity
• Adhesionphenomenaarepreponderantthusobjectss<cktoeachother
Developing specific techniques is required
Dexterousetprecisemicromanipula<on
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Automa0cmicro-assemblybasedonvision Objective: - Automating complex micro-assembly tasks - Control the final position of an object based on vision
Mainresults:Automatedassemblysuccessfullyperformed
Method: - CAD based model tracking - Streoscopic feedback
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Tac<lemicrogripper
• Displacement resolution: nm range • Displacement range: 100 µm
• Dynamics of the actuator: 1 kHz
• Sensor resolution: 100 nN • Sensor range: 2mN
• Dynamics of the sensor: 8.52 kHz
TSFM performances
Piezoelectric actuator
Piezoresistive force sensor
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AutomatedMicroassemblybasedonforce
Robo<cmicro-assemblyusing2DOFForcebasedcontrol
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Robo<cmicroassemblyandforcecontrol
Principle:forcecontrolforassistedassembly
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DexterousMicromanipula<on
How to perform autonomous dexterous micromanipulation ?
• Developingamicro-handsystem
• Using in-hand manipula<on which take advantageofaccuratemicro-posi<oner
• Developing specific micromanipula<on strategiesthankstoadhesionphenomena
Trajectories for dexterous micromanipulation with or without adhesion
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DexterousMicromanipula<on
Example of dexterous micromanipulation without using adhesion:
Example of dexterous micromanipulation using adhesion:
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Nanoscalerobo<cassembly
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Nano-assemblyinscanningelectronicmicroscope
2realhighprecisionrobotsinaSEM-FIB
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Nanoscaleassemblies
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Conclusion:enhancerobo<cperformanceswithcollabora<vestrategieswithhuman
- Use the microrobot dexterity - Automatized when and where it is necessary - User-friendly HMI interface to have a very well adapted
feedback coupling
• Robot to help augmented human operator to increase his precision and hability
- Smart gripping system (4 DoF instrumentized gripper) - Haptic interface with high fidelity, stability and transparency - Bilateral control with different kind of control modes - Virtual reality system - Acceptability by the users
• Scientific challenges for a new collaborative microrobotic platform
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PRODUCTSANDSERVICES
Extremerobo<cmicromanipula<onforhightechnologyapplica<ons
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Thecompany 23
PERCIPIOROBOTICSdesigns,buildsandsellssmartrobo<csystemsfor:
-Cobo<cmicro-assembly-Helpinextrememicromanipula<on-Automatedmicromanipula<on-Automatedmicro-assembly
Femto-STIns<tute’sspinofffoundedin2011:
-15yearsofknow-howonworldclassresearch-Supportfromfrenchinnova<onagencies-ValuableIPontechnologiesandsoiware
Teamof8engineersandPhD,4techniciansinmechanics,microtechnics,cleanroomfabrica<on,soiwaredesignandrobo<cs.
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CoreProducts 24
• Highestflexibility• Highaccuracy(50xTP80fromStaubli)• Easy-to-use,plug-and-produce• Automa<onready
Robo$cgripper,handlingpartsfrom5µmto5mminsizewith1µmaccuracy
Embbededhighprecisionrobotintabletopmachineformicro-assembly
• Principleoftweezers• Highaccuracy(100xmanualtweezers)• Highstroke(10xthanbestcompe<tor)
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CoreTechnology 25
• Piezoelectricbidirec<onalbenders(patented)• Integratedinnovatedmagne<cposi<onsensors(patented)• Fast-mountend-effectorswithwiderangeofshape(patented)
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Chronogrip 26
Easy-to-use,tabletophighaccuraterobotformicrohandlingandmicro-assembly
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CoreAc0vity 27
FromR&Dprojecttosystemdesign&produc<on
Processupgrade
Micro-assembly
Customer’sapplica<on
Luxurywatchindustry Lab-on-chip
Op$calm
icro-systems
Complexpackaging
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KnowhowandR&Dservices 28
• 10yearsofunderstandingmicrohandlinginnumerousapplica<ondomains• Widerangeofdesignsandprinciplesmasteredtoperformmicro-assembly
100µmproteincrystal25µmglasssphere
Watchcomponentwith0,5mmshaL
7µmcarbonfiber
40µmsiliconpart
• Analyzeobjectshandlingprocessaspartofaproduc<onflow• Designoradaptmicro-assemblyfrommanualtorobo<zedprocess