Spectral Sensors
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Spectral Sensors
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Spectral Sensors
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Spectral Sensors
0,2 0,4 0,6 0,8 1,0 1,2 1,4 1,6 1,8 2,0 2,2 λ(µm)
Price Straylight/Noise
Opticalresolution
Sensitivity
MMS IR PbS*(0,91-2,2 µm)
< 20 nm
MMS IR InGaAs*(0,6-2,1 µm)
< 20 nm
MCS 551 NIR(0,7-1,1 µm)
2.5 nm
MCS 551 VIS(0,36-0,78 µm)
2.5 nm
MCS 501 UV-NIR(0,19-1,015 µm)
2.5 nm
MCS 551 UV(0,20-0,62 µm)
2.5 nm
MMS 1(0,30-1,1 µm)
< 10 nm
MMS UV-VIS(0,19-0,74 µm)
< 7 nm
MMS UV(0,19-0,4 µm)
< 3 nm
Spectral Sensors
Spectral range Accuracy Resolution
MMS 1 305...1150 nmspecification for therange360---900 nm
0.3 nm 10 nm
MMS UV 200...400 nmspecification for therange220---400
0.2 nm 3 nm
MMS UV VIS 305...1150 nmspecification for therange360---900 nm
0.2 nm 7 nm
Spectral Sensors
Spectral Sensors
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Spectral Sensors
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Spectral Sensors
Spectral Sensors
Spectral Sensors
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Spectral Sensors
Measuring method
Background
Demands on sensor
Suitable CZ sensors
Fields of application
Transmission
Spectral dependence of absorption constant
High speedHigh wavelength reproducibility
All MMS/MCS
Concentration analyses of fluidsFilter measurementMeasurement ofarchitectural glass
Interference spectrum evaluation
Evaluation of phase differences in the light reflected by optically transparent layers
High wavelength accuracy High wavelength reproducibility
MMS VIS for optical layer thicknessmeasurement <40 µmMCS VIS/NIR <150 µm
Layer thickness measurement on transparent materials such as coating films, plastics, films
Spectral Sensors
Measuring method
Background
Demands on sensor
Suitable CZ sensors
Fields of application
Emission
Spectral emission of light sources
High wavelengthaccuracyHigh wavelengthreproducibilityGood spectralresolving powerHigh light sensitivity
All MMS/MCSLimited spectralresolution in case of veryclosely spaced lines
Monitoring of plasmsMeasuring the solarspectrumFluorescenceProduction screening of lampsWavelength determination of LEDs
Remission
Diffuse reflection
High light sensitivityHigh reproducibility
MMS VISMCS UV-VISMCS VIS
Colour measurement on different surfaces
Reflection
Directly reflected light
High wavelength accuracy
All MMS/MCS
Measurement of metal surfaces
Spectral Sensors
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Spectral Sensors
SimultaneousSpectrometer MCS 500
ConcentrationAbsorpt ion A
ColourRemiss ion R
LayerThicknessReflect ion, Transmission
Flow through cel lA T R
Immersion probe
Standard opt icsY-f ibre bundle
O F T
OFT 0°/dOFR d/0°
OMK 0°/45°Colour Immersion probe
Dissolution testingSewage moni tor ingBenzene synthesis
Print ing machinesTexti l colours
Architecture glass
IC productionCopier drums
Headlight coating
Spectral Sensors
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for single component analysisat a single wavelength
or
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- SYX
Spectral Sensors
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Spectral Sensors
Method for Layer Thickness Measurement X-ray Fluorescence Method
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Measuring range Remarks
X-ray tube
Counter tube X-rays
Sample
Non-contact layer thickness measurement
• Multi-layer systems can be analyzed• State-of-the-art measuring method, but still relatively expensive• At present, few on-line applications possible
The measuring range depends on the material and the software.Single layers approx. 0.1 - 100 µmDouble layers <25 µm per layer
Spectral Sensors
Methods for Layer Thickness Measurement - Beta Reflection Method
Non-contact thickness measurement of layers whose atomic number differs substantiallyfrom the substrate material.
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Layer thickness d
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Spectral Sensors
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Evaluation of the reference pattern caused by the phase differences in the light reflected by the upper and lower boundary surfaces.
1IEWYVMRK VERKI
• Upper limit depends on the spectrometer resolution• MMS: 10 nm - 40 µm optical layer thickness• MCS: 10 nm - 150 µm optical layer thickness
6IQEVOW
w Contact-free, non-destructive measurement• Reflection and transmission measurement possible• Relatively insensitive to vibrations• No hazardous or harmful radiation• Simple installation for on-line use
Spectral Sensors
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The tristimulis values can be derived from:
X=100 ∗∫ R (λ) ∗ I (λ) ∗ x (λ) dλ ∫ I (λ)* y (λ) dλ
Y=100 ∗∫ R (λ) ∗ I (λ) ∗ y (λ) dλ ∫ I (λ)* y (λ) dλ
Z=100 ∗∫ R (λ) ∗ I (λ) ∗ z (λ) dλ ∫ I (λ)* y (λ) dλ
0 � E � F �'-)0%&� SV 0 � Y � Z
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The colour impression received from an illumi-nated body can be described by means of 3 colours. To determine the values the following data must be provided:1. Spectral diffuse remission R (l ) or transmis-sion T ( l ) curve, obtained by spectral-photo-metric measurement of the sample using a corresponding measuring geometry.2. Defined norm light types described as a function of relative intensity against wavelength.I rel (l)3. Normalized spectralfunction x (l),y (l), z (l) that define the standard colour sensitive human eye
In order to achieve a better correspondenc
with subjective colorimetric distances the tristimulis values can be transformed
into colour coordinates of difficult
colourspaces eye.
Spectral Sensors
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Spectral Sensors
0EWIV -R�7MXY %QQSRME 1SRMXSV JSV 4S[IV 4PERXW
Principle: differential absorption spectroscopyLaser: 1W CO2 -Laser;10,80 µm/ 10,78 µmLower DetectableLimit: <1 ppmSwitching Frequency: 1 KHzMeasuring Length: 1 - 20 m
Application: Waste incineration plantsPower plants
Spectral Sensors