Download - Status of pre-production at TESLA
Pixel week, October 2001 Václav Vrba, Institute of Physics, AS CR1
Václav Vrba
Institute of Physics AS CR, Prague
Status of pre-production at TESLA
Pixel week, October 2001 Václav Vrba, Institute of Physics, AS CR2
.Last week TESLA finished second part of pre- production with:
133-tile wafers and
13 2-tile wafers
Significant improvement of yield
Process flow practically the same all the time, significant changes on production line – the most pronounced one was change of manual/semiautomatic aligner for the automatic one.
Pixel week, October 2001 Václav Vrba, Institute of Physics, AS CR3
New alignerHandling spots
Pixel week, October 2001 Václav Vrba, Institute of Physics, AS CR4
Basic characteristics
Ufd 80 V
Pixel week, October 2001 Václav Vrba, Institute of Physics, AS CR5
Basic characteristics (cont)
Iox @ 50 V 100 pA
Pixel week, October 2001 Václav Vrba, Institute of Physics, AS CR6
Basic characteristics (cont)
3-Tiles - New delivery
Good Tiles - Old delivery
Significant improvement of leakage current !
Pixel week, October 2001 Václav Vrba, Institute of Physics, AS CR7
Basic characteristics (cont)
Batch Waferp-spray-
new formula
p-spray - old
formula-/cm 2̂ -/cm 2̂
ATL-30 7 2.55E+12 2.06E+12ATL-31 7 3.12E+12 2.63E+12ATL-33 8 3.13E+12 2.45E+12ATL-34 4 3.22E+12 2.92E+12
Diode with Guard ring
P-spray doses
Pixel week, October 2001 Václav Vrba, Institute of Physics, AS CR8
DeliveryAccording contract:
11 3-tile wafers
2 2-tile wafers
1 2-tile wafer (Prague, replacement of nonconform.)
1 2-tile wafer (NM, broken)
Additionally available:
2 3-tile wafers
9 2-tile wafers
Pixel week, October 2001 Václav Vrba, Institute of Physics, AS CR9
Conclusions
• TESLA finished second part of the pre-production with significant improvement of the yield and the quality of sensors