Technical development in commercializing printed memory and integrated systems Christer Karlsson, Ph. D. CTO Thin Film Electronics ASA
Thinfilm introducBon Mem
ory Standalone
memory for toys and games
Mem
ory + Logic Addressable memory for integraBon
Integrated Systems Sensor tags
Display tags Wireless
• Strong IP posi-on in unique and cri-cal memory technology
• Secured partnerships and other technology components for integrated systems
Thinfilm ferro-‐electric memory
BoHom Electrode (BE) = WL
FE Polymer
Top Electrode (TE) = BL
• Non-‐volaBle • Rewritable • Excellent retenBon
Memory product development
• Mass producBon (R2R
prinBng) at our partner
InkTec (South Korea)
• Process development at
Thinfilm
– Currently S2S; will be R2R.
• Gravure prinBng
• Slot die coaBng
• Screen prinBng
• Test speed: up to 10M memories per month equivalent to 200M cells/month.
• Step-‐and-‐go principle • 6 memories are currently
tested in parallel.
R2R tesBng
5
R2R tester data
0-‐signal: blue dots indicate polarizaBon by ferro-‐electric switching. 1-‐signal: red dots indicate polarizaBon by bulk capacitance.
Data here from > 50000 cells printed roll-‐to-‐roll.
Thinfilm Electronics confidenBal
Q1
Q0
Cell number
Signal charge
Sorted (no defects)
Unsorted
ProtecBon of memories • Hard scratch protecBon: Significant yield drop
• The soluBon is a two-‐step coaBng process:
– A first layer that is a flexible and handle mechanical stress
– A second layer that is hard and scratch resistant
Type Yield loss (%)
Cross-‐linkable PPG 0%
Natural rubber 0%
Polyvinylacetate 0%
Cross-‐linkable PDMS Low
Highly flexible acrylates Moderate
Flexible acrylates High
Epoxides High
Epoxide/acrylate hybride High
AliphaBc isocyanate High
Transistor fabricaBon steps
2. 4.
1. 3. 5.
6.
# Layer Material Initial process Target process
- Substrate PEN foil - -
1 Planarization Polymer Spin coating Slot die/-
2 S/D electrodes Ag Evaporation or Inkjet Gravure
3 S/D treatment SAM Spin coating Printing or Immersion
4 Semiconductor Organic Spin coating or Inkjet Gravure
5 Gate insulator Polymer Spin coating Gravure or Screen
6 Gate electrodes Ag Evaporation or Inkjet Gravure
p-‐channel OTFTs with printed S/D, OSC, GI and G
L = ~30 µm
W = 650 µm
Ci = 4 nF/cm2
µsat = ~0.5 cm2/Vs @ 20 V
ION/IOFF = ~104
Layer Material Deposi-on process Source-‐drain electrodes Ag Gravure Semiconductor Organic Gravure Gate insulator Polymer Screen Gate electrodes Ag Gravure
n-‐channel OTFTs with printed S/D, OSC and G
L = ~35 µm
W = 2000 µm
Ci = 4.5 nF/cm2
µsat = ~0.3 cm2/Vs @ 20 V
ION/IOFF = ~105
Layer Material Deposi-on process Source-‐drain electrodes Ag Gravure Semiconductor Organic Gravure Gate insulator Polymer Spin coaBng Gate electrodes Ag Gravure
Temperature tag proof-‐of-‐concept prototype
2-‐bit memory Thinfilm
TFT circuits PARC
Thermistor bridge PST
Electrochromic display ACREO
Backplane and Integra-on Thinfilm and PARC
4 printed devices/technologies integrated on the same printed plasBc backplane
Trigger circuitry supported by Flextech
Tag block diagram
Temp sensor
Threshold trigger
Amplifier/Buffer
Pulse generator
External electronics Display
Memory
Trigger circuitry supported by Flextech
• Basic funcBonality achived! • CalibraBon needed using current processes
Q&A Further quesBons: [email protected] +46 702 157921