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Towards disposable sensors for gas detection and development of smart sensing systems on foil
Pattanaphong Janphuang, Ph.D.
Synchrotron Light Research Institute (Public organization)
August 24th, 2018
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Trends in gas sensor development1. Food quality control
(maturity, decomposition)
Source: en.wikipedia.org/wiki/Food
Harvesting, processing, transport, storage
2. Microorganisms
Identification by their volatile metabolism products
Source: IME, Fraunhofer & Freshplaza
3. Air quality
Identification of pollutants
Source: Ecolink & Prachachat
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Principle of gas detection
Courtesy of Dr. Mark Bücking, IME, Fraunhofer
Sample input Sensitive layer
Signal & Output
Transducer
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Analytical instruments
Courtesy of Dr. Mark Bücking, IME, Fraunhofer
Complex reference analysis of
organic residues
High accuracy & good sensitivity
Fast detection
× Expensive
GC/MS as a starting point…..
Requirements: (further development)
Smaller (portable and/or wearable)
Faster & easier (integration to system)
Reproducible
Cost effective
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Metal oxide based gas sensorsGas sensor (electronic nose) - An instrument comprises of (an array) anelectronic chemical sensor(s) with an appropriate pattern recognitionsystem capable of recognizing simple or complex odours(Gardner, J.; Bartlett, P.; Sens. Actuators 18, 211-220)
Sample input Sensit ive layer
Signal & Output
Transducer
CO gas sensor module (arduitronics)
Metal oxide (Mox) sensing layer – adsorbed volatilecompounds on the surface of the semiconductorsgenerates change in the electrical resistance varyingwith the type of volatile compound and itsconcentration
Source: figaro..co.jp
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Microfabrication of gas sensorsLight source used for production
Mask: Chrome mask (Cr on Quartz substrate)
Good sensitivity
× Exposed area absorb
developer (distortion) Good resolution
Good chemical resistance
× Poor adhesion
× Low sensitivity
Radiation (UV)
Mask
Photosensitive materials
Substrate (e.g. Si, glass)
Photosensitive materialsChange only when exposed to radiation
Spray substrate with developer solution
a) Positive resist, developer-solution removes exposed area
b) Negative resist, developer-solution removes unexposed area
Source:htaphotomasks.com
Synchrotron Light Research Institute (Public organization)Sensors on foil | SATI11August 24th, 2018| P. Janphuang
Light source Wavelength Feature size
I line Hg lamp (UV) 365 nm 0.25 µm
6
Photolithography(cleanroom processing)
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Fabrication of capacitive humidity sensors
Synchrotron Light Research Institute (Public organization)
PET Cr/Ni CAB PR
New device design(Clewin, LayoutEditor)
Flexible humidity sensor on PET substrate
5mm
H2O
Absorped water vapour in CAB cause change in dielectric property
Sensitivity of 0.027 pF/%RH (wearable device and packaging)
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Flexible microhotplate for gas sensing application
Synchrotron Light Research Institute (Public organization)
Design of µ-hotplate (temperature sensor)
PET Ti/Pt PR
Flexible microhotplate on PET substrate
0.0 0.2 0.4 0.6 0.80
20
40
60
80
100
Te
mp
era
ture
(OC
)
Power (W)
Pt
Ag
Au
Heat generated when an electric current flows through a resistant path
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Gas sensors based on metal oxide films
Metal oxide gas sensors on plastic foil platform
Flexible ammonia sensor on transparent sheet
0
20
40
60
80
100
120
140
160
180
Re
sis
tan
t (Ω
)
Ammonia cycle
NH3Other gases
PET Ti/Pt SU-8 ITO Cr/Au
Synchrotron Light Research Institute (Public organization)
Change in electrical conductivity or
resistivity of thin films on exposure to a target gas
(reducing gas) Multilayer devices
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Synchrotron Light Research Institute (Public organization)
New trends in smart sensors for industrial applications
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Synchrotron Light Research Institute (Public organization)
MotivationsInternet of Things: Smart objects that can interact betweenthem and with their environment
Courtesy of Dr. Danick Briand, EPFL, Switzerland
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Synchrotron Light Research Institute (Public organization)
Technology shift
Flexible and printed sensors
Courtesy of EPFL, Switzerland
Fujifilmusa.com
Additive processes, i.e. printing
Large area manufacturing (on foil)
Good resolution (≥ 100 µm)
Low cost production
Environmentally friendly materials
- Water based inks
- Recyclable substrates (PET, paper…)
Courtesy of IMT-EPFL, SwitzerlandIis-servo.com
Inkjet printer
Roll-to-Roll printer
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Synchrotron Light Research Institute (Public organization)
Printing electronics devicesWhy use plastic and/or paper substrate?
Lower costs
Flexibility – good reliability
Source: Plasticlogic
Foldable
Source: Swedish ICT
Conformal
Source: SEMICONWEST 2012
Large area
(light weight)
Source: Princeton University, USA
Source: GSA
Courtesy of Dr. Danick Briand, EPFL, Switzerland
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Synchrotron Light Research Institute (Public organization)
Smart sensing systems on foil
Embedded Sensing Systems
Smart objects and large area intelligent surface
Syst
em
in foil
inte
gra
tion tech
nolo
gie
s
Large area and -
- additive manufacturing
Electronics, CommunicationAnd Power Management
(in collaboration)
MEMSSensors
EnergyHarvestingand Storage
Energy autonomous smart labels
On foil using additive manufacturing
Integrating ‘nano’ and bio materials
Low environmental impact
Disposable / reusable electronics
GREEN electronics
Ultimatetely Biodegradable
From imperceptible to Disappearing electronics
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Synchrotron Light Research Institute (Public organization)
Mox-based gas sensor on foil
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Smart sensing systems on foil (II)
Synchrotron Light Research Institute (Public organization)
Courtesy of Dr. Danick Briand, EPFL, Switzerland
Foil-based sensors (fully printed) Integration of components on foil
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Smart textile
Synchrotron Light Research Institute (Public organization)
Capacitive humidity and VOCs sensors
Resistive temperature detector (RTD)
Plastic stripes processed using printing technology
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Synchrotron Light Research Institute (Public organization)
Biodegradable sensorsOn biodegradable substrates low Tg (56°C) poly lactic acid (PLA)
detection of humidity and temperature
Printing of Au and Ag inks
Photonic sintering
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Biodegradable sensors
Synchrotron Light Research Institute (Public organization)
Printed organic field effect transistors (OFETs) on PLA
Thin films & electrochemical
PLA as substrate & gate dielectric
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Biodegradable sensors
Gate functionalization with odorant binding proteins
Ids-Vgs curves acquired before and after exposure to saturated vapours of analyte(ambient condition)
Synchrotron Light Research Institute (Public organization)
Courtesy of Dr. Danick Briand, EPFL, Switzerland
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None of us is as smart as all of us !!!
Thank you for your attention !
Looking forward to seeing you @ SLRI !!!
Synchrotron Light Research Institute (Public organization)Sensors on foil | SATI11August 24th, 2018| P. Janphuang 21
[email protected]@slri.or.th