Unique Technologies for...
Thin Film Solar CellsType of thin film solar cell Single Crystal
PolycrystallinePolycrystalline thin filmOthers
Amorphous
Thin film solar cell
Compound Semiconductor
II-VI (CIS, CdTe, etc.)III-V (GaAs, InP, etc.)Others
Si
Amorphous Si
Sunlight
Glass
a-Si Poly-Si
Tansparent electrode Zn0, Sn0
2
Back-side electrode Zn0/Ag
Series contact hole
Contact holeA-Si
Metal electrode
Film substrate
Back-side electrode
GlassSnO2a-Si
a-SiGeMetal
Unique Technologies for the Flat Panel Display and Solar Cell Industries. ULVAC is a leading supplier of PVD and CVD equipment with an extensive line-up of products and knowledge to assist with the turnkey set-up of a solar cell manufacturing line rapidly and at very competitve cost.
Metals & Metal Oxides
Unique Technologies for...
Thin Film Solar Cells
Crystal Type
PE-CVD Systema-Si, µc-Si, Passivation SiN
Multi-Chamber Type PE-CVD System CMD-950
Cluster-Type Small Substrate CME-200
In-Line Type Plasma CVD System CCV-1000
Sputtering SystemMetals (Al, Ag, etc.), Metal oxides (ZnO, ITO, etc.)
Multi-Chamber Type Sputtering System SMD-950
Cluster-Type Small Substrate SME-200
In-Line Type Sputtering System SCH-135
