dry vacuum pump ls series · pumping speed120~1200m3/h class *with mecanical booster pump model is...
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Dry Vacuum Pump
LS Series
High pumping speedand Low power consumption
High pumping speedHigh pumping speed at near atmospheric pressure,and pumping down time can be drastically reduced.
Low power consumptionECO-SHOCK technology realizes low power consumption. (C Type)Power consumption at the ultimate pressure is the industry-leading 0.6kW or less.(LS120A-C)
Low noiseBuilt-in silencer achieves the noise level 61dB(A) or less.
Low running-costNo shaft sealing gas.*Purge gas is available with L Type.
Di�erence in pumping speed In�uence on pumping down timeConditionChamber : 100L Piping : 2inches, 1m Target pressure : From ATM to 10Pa
*This data is a calculated value.It may di�er from the actual condition under the in�uence of the discharge Gas etc.
0
20
40
60
80
100
120
140
1 10 100 1000 10000 1000000.1
Pressure [Pa]
Pum
ping
spee
d [m
3 /h]
1
10
100
1000
10000
100000
200 40 60
Time [sec]
Pres
sure
[Pa]
This difference in performanceaffects pumping down timeThis difference in performanceaffects pumping down time
Pumping timeShorten about 20%Pumping timeShorten about 20%
LS120AGeneral low-power consumption dry pump
LS120AGeneral low-power consumptiondry pump
4 kinds of model
LS120A
LS1200ALS600ALS300A
Pumping speed120~1200m3/h Class *With mecanical booster pump
Model is selectable with the optimum pumping speed according to the application.
2 types for speci�c application
C Type : Clean process (LS***A-C)
Feature : Low power consumption model (with built-in ECO-SHOCK) Applications : For clean process such as air and N2 Sputtering / Vapor deposition / Lamination / Load lock room / TMP backing pump etc.
L Type : Light process (LS***A-L)
Features : Light process model (with surface treatment and purge function) Applications : For light process such as steam and volatile liquid medicine Vacuum drying / Freeze drying / Ashing / General industrial use etc.
Speci�cationsD
imensions
Pumping speed curve
Model
Max. pumping speed
Ultimate pressure
Power consumption *1
Cooling water �ow rate
Purge gas �ow rate *2
Max. water vapor tolerance *3
Noise
m3/h
Pa
kW
L/min
SLM
kg/h
dB(A)
kgWeight
Inlet port
Outlet port
Power supply
Applicable standard
Standard accessory
Pump head option
External option
MODEL
LS120A
LS300A
LS600A
LS1200A
ULVAC, Inc. Components Division www.ulvac.co.jp/en/
USA : ULVAC Technologies, Inc.GERMANY : ULVAC GmbHCHINA : ULVAC (SHANGHAI) Trading Co.,Ltd. TAIWAN : ULVAC TAIWAN, Inc.KOREA : ULVAC KOREA, Ltd.SINGAPORE : ULVAC SINGAPORE PTE LTD
Overseas Sales in Japan TEL +81-467-89-2261TEL +1-978-686-7550TEL +49-89-960909-0TEL +86-21-6127-6618TEL +886-3-579-5688TEL +82-31-683-2922TEL +65-6542-2700
PHILIPPINES : ULVAC SINGAPORE PTE LTD Philippines BranchVIETNAM : ULVAC SINGAPORE PTE LTD Vietnam Representative O�ceINDONESIA : ULVAC SINGAPORE PTE LTDIndonesia Representative O�ceTHAILAND : ULVAC (THAILAND) LTDMALAYSIA : ULVAC MALAYSIA SDN. BHD.INDIA : ULVAC, Inc., India Branch
TEL +63-46-437-7700TEL +84-8-6255-6762TEL +62-21-8990-5070TEL +66-2-7388883TEL +60-3-5121-4700TEL +91-40-27007006
This catalog is subject to change without notice.This catalog is published in order to sell this product in overseas. Please see Japanese catalog when purchasing in Japan. 1055E/2018041500SP
A
201
226
201
247
B
35
35
35
35
C
78
78
78
78
D
272
-
-
-
H
307
537
563
563
H1
355
593
619
619
L
639
639
639
639
L1
65
65
65
65
P
4-M12
2-M16
4-M16
4-M16
Q
-
ISO-F50
ISO-F80
ISO-F100
W
311
311
311
311
W1
26
26
26
26
Unit : mm
*1 At ultimate pressure (reference only) *2 Purge gas is not available with C Type. *3 Max.water vapor tolerance is a value when purge gas is used. *4 C type is not leakless.
CE, cTUVus
Instruction manual(CD-R), Power connector, Waterproof cable clamp, Remote connector, Guard for power connector
Power supply : 200V Class or 400V Class, Material of seal : FFKM(L type only)
MBP inlet �ange adaptor, Packege Exhaust port, Earthquake-proof Bracket, LR compatible Unit(Inlet, Remote), Purge gas valve
KF40
200V Class : 3Phase, 50/60Hz, AC200-240V or 400V Class : 3Phase, 50/60Hz, AC380-480V
LS120A
C L C L C L C L
0.6 2.0 1.0 2.5 1.3 2.6 1.3 2.7
--
0~50
1.5
--
0~50
1.5
--
0~50
1.5
--
0~50
1.5
LS1200ALS300A LS600A
61
KF50(Horizontal)/VG50(Vertical)
64
ISO-F-100
61
ISO-F-50
62
ISO-F-80
142 266220 242
120
≦0.6
1000380 600
≦0.1
>2.0 >4.0
(C : C Type)(L : L Type)
C
L
HH1
A B
W
Eyebolt:P
Inlet port:Q
L1(400V)
Drain port Lubricant inspection window(L type only) (L type only)
(L type only)
Outlet port:KF40
(L type only) Power connector
Guard for power connector
Signal connector
Controller
Controller
Drain valve
(MBP)
(DRP)
(Accessories)Purge gas inlet
(Swagelok for 6.35 mm-diameter pipe)
Cooling water inlet
Cooling water outlet
(Rc 3/8)
(Rc 3/8)
(Rc 3/8)W1
LS300A / LS600A / LS1200ALS120A
CD
L
A B
W
HH1
Eyebolt:P
Inlet port(vertical):VG50
L1(400V)Lubricant inspection whindow Drain port
(L type only) (L type only) (L type only)
(L type only)
Guard for power connector
Power connectorSignal connectorController
port(Horizontal):KF50
Outlet port:KF40
(Accessories)
Purge gas inlet(Swagelok for 6.35 mm-diameter pipe)
Cooling water inlet
Cooling water outlet(Rc 3/8)
(Rc 3/8)W1 Drain valve
(Rc 3/8)
0.1 1 10 100 1000Pressure [Pa]
Pum
ping
spee
d [m
3 /h]
10000 1000000
20
40
60
80
100
120
140 LS120A
0.1 1 10 100 1000Pressure [Pa]
Pum
ping
spee
d [m
3 /h]
10000 1000000
200
400
600
800
1000
1200 LS300A
LS600A
LS1200A