• Using SOAP/XML messages over an HTTP or HTTPS connection
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SECS/GEM vs Interface A
SECS/GEM Interface A
SECS/GEM requires support for only one client connection. Interface A requires support for multiple concurrent clients.
SECS/GEM is only partially self-describing and therefore relies on good documentation.
Interface A is self-describing through the E125 standard's metadata including a listing and description of all available data.
SECS/GEM data is relatively flat and unorganized. Interface A presents the data in a hierarchy, organized by the major hardware components.
Data in a SECS/GEM message is highly structured and relatively inflexible.
Interface A uses XML; therefore the inherently design to accommodate additional metadata.
SECS/GEM is only used in a few industries; therefore there are a limited number of experts in the world.
SOAP/XML and HTTP are the backbone of most Internet and Intranet applications.
There are relatively few software packages in the world to deal with SECS/GEM technology; most are only known to the Semiconductor industry.
There are a tremendous number of software packages worldwide from many industries that can handle SOAL/XML and HTTP technology.
In most factories, the SECS/GEM interface is used for equipment configuration and control; therefore subject to extensive oversight and lengthy change procedures.
Interface A is independent of the GEM interface and therefore immediately available for the dynamic data collection needs of the process engineers.
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SECS/GEM & Interface A Similarities
SECS/GEM Interface A
Status VariablesEquipment ConstantsData Variables
Parameters
Alarms Exceptions
Collection Events (S6,F11) Events in DCP
E39 Objects SEMIObjTypeInstance IDs
Trace Data Collection Traces in DCP
Reports Data Collection PlansData Collection Reports
State Machines State Machines
Enable Collection EventsDisable Collection Events
ActivatePlanDeactivatePlan
Define & Link Reports (S2,F33 & S2,F35) DefinePlan
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EDA Overview
• The EDA interface suite of standards is focused on two main capabilities.– SEMI E125, is the equipment self-description (or metadata)– SEMI E134, is Data collection
• The complete set is as follows:– SEMI E125, Equipment Self Description– SEMI E120, Common Equipment Model– SEMI E134, Data Collection Management– SEMI E132, Equipment Client Authentication and Authorization
• SEMI E147 provides a useful technical overview of EDA.– SEMI E147, Guide for Equipment Data Acquisition
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Related Standard
• The helpful set is as follows:– SEMI E128, XML Message Structures– SEMI E138, XML Semiconductor Common Components– SEMI E145, Classification for Measurement Unit Symbols in
XML– SEMI E151, Guide for Understanding Data Quality
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Interface A Client Operations
SEMI E125
Equipment Self Description
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SEMI E125, Equipment Self Description
• Defines equipment metadata– The metadata is built upon the structural elements of the E120
equipment model
• Provides messaging services for clients to acquire the metadata definitions from the equipment
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Organization of Metadata Concept
E125 : Equipment Self Description
Equipment Node Description
State Machines
Events
SEMI Objects
Exceptions
Parameters
Types
Units
Equipment
Module
Subsystem
Module
Subsystem
……
……
IO Device
E120 : Common Equipment Model
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Interface for Accessing Equipment Metadata
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Metadata Client Interface
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Describing Equipment Nodes
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Describing Typed Parameters
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Unit Class
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Parameter Classifications
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Describing Exceptions
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Describing State Machines
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Describing State Machine Instances
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Describing Implemented SEMIObjTypes
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Describing SimpleEvent
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Typical Equipment Metadata Use Case
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Use Case Realization for “Retrieve StateMachine Descriptions”
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Use Case Realization for “Retrieve SEMIObjType Descriptions”
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Use Case Realization for “Retrieve Exception Descriptions”
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Use Case Realization for “Retrieve Equipment Parameter Descriptions”
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Use Case Realization for “Retrieve Equipment Configuration”
SEMI E120
Common Equipment Model
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SEMI E120, Common Equipment Model
• Provides the tools for creating a structural model of the equipment.
• SEMI E125 provides the means to add parameters, state models, exceptions, and SEMI Objects to the structural elements
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CEM Model Extension
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Inheritance Hierarchy
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Relationship View
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Nameable Class
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EquipmentElement Class
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ExecutionElemtnt Class
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Extension Class
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Equipment Class
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Module Class
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Subsystem Class
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IODevice Class
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MaterialLocation Class
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SoftwareModule Class
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Example : Equipment Hierarchy
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Example : Equipment Hierarchy with Shared Object
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Equipment Modeling Representation
SEMI E134
Data Collection Management
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SEMI E134, Data Collection Management
• Defines the means for the client/user to define and control data collection plans (DCPs).
• DCPs can specify event data collection, trace data collection, and exception reporting.
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Consumer Specifies What Data Should Be Sent Off-Tool
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The DataCollectionManager Interface
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DCPDefined Class
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UnauthorizedOperation Error
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InvalidPlan Error
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NoSuchPlan Error
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DCPDeavtivated Class
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DCPNotActive Class
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DCPIsActive Error
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DCPActivated Class
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DCPDeleted Class
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ObjTypeRequest Class
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ObjTypeResult and Related Classed
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Data Collection Privileges
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Data Collection Plan
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DataCollectionPlan State Model
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DataCollectionPlan-Active State Model Diagram
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TraceRequest State Model
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Operational Performance State Diagram
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Data Collection Reports
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Event Reports
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Exception Reports
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Trace Reports
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DCPConsumer Interface and Argument Types
SEMI E132
Equipment Client Authentication and Authorization
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SEMI E132, Equipment Client Authentication and Authorization
• Defines security for EDA messaging, including encryption of equipment-bound message content and means to limit client access to only the appropriate capabilities.