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Simulation Training for a Psychomotor-based task Aligning the KLA-Tencor 3XX Optics Bench EDIT 227 - For Dr. Juan Davila By Gregg Peterson 5/19/2002

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Page 1: EDIT 227 Instructional Design Modelgreggpeterson.com/files/EDIT227_SimulationTraining... · Support Engineer (CSE) does not seem to be getting any shorter. The 3XX Series of reticle

Simulation Training for a Psychomotor-based task

Aligning the KLA-Tencor 3XX Optics Bench

EDIT 227 - For Dr. Juan Davila

By Gregg Peterson 5/19/2002

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Aligning The KLA-Tencor 3XX Optics Bench EDIT 227 Class Project

EXECUTIVE SUMMARY The training organization at KLA-Tencor has come a long way in the last couple of years. The group has even just recently won 5th place out of the 100 top training organizations in industry according to Training Magazine. Yet, despite many efforts to improve the time to train for a particular piece of equipment, the almost 6 months that it takes to train a typical 3XX Customer Support Engineer (CSE) does not seem to be getting any shorter. The 3XX Series of reticle inspection tools that KLA-Tencor produces is a complex scanning UV laser based system. The engineer that fixes the tool needs to be proficient in pneumatic systems, optics alignment, numerous mechanical robotic systems, and computer system troubleshooting. We are going to explore the use of a different paradigm of training to see if we can reduce the hands-on and instructor time currently required for a CSE to learn to align the 3XX Optics Bench using self-paced computer simulation training. This report will explore all aspects of this project.

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TABLE OF CONTENTS

EXECUTIVE SUMMARY .......................................................................................................................... 2

FRONT END ANALYSIS ........................................................................................................................... 4 THE SITUATION ........................................................................................................................................... 4 GENERAL NEEDS STATEMENT..................................................................................................................... 4 GENERAL INTENT........................................................................................................................................ 4 NEEDS ANALYSIS ........................................................................................................................................ 4 DISCREPANCY BASED NEEDS ANALYSIS (GAP ANALYSIS) ......................................................................... 5 LEARNING ENVIRONMENT ANALYSIS ......................................................................................................... 6 LEARNER ANALYSIS.................................................................................................................................... 7

TASK ANALYSIS........................................................................................................................................ 8 LEARNER GOALS ......................................................................................................................................... 8 INFORMATION PROCESSING ANALYSIS (MENTAL/PHYSICAL STEPS)........................................................... 8 PREREQUISITE ANALYSIS ............................................................................................................................ 9

OBJECTIVES............................................................................................................................................... 9

INSTRUCTIONAL STRATEGY ............................................................................................................. 10

FORMATIVE EVALUATION STRATEGY .......................................................................................... 11

SUMMATIVE EVALUATION STRATEGY.......................................................................................... 11

RESOURCES REQUIRED ....................................................................................................................... 11

COSTS......................................................................................................................................................... 12

CONCLUSION........................................................................................................................................... 12

STORYBOARD.......................................................................................................................................... 13 INTRO - PAGE1 .......................................................................................................................................... 13 LOGIN – PAGE 2 ........................................................................................................................................ 13 MAIN MENU – PAGE 3............................................................................................................................... 13 STEP1A/1 PAGE (SEE INFORMATION PROCESSING ANALYSIS).................................................................... 13 STEP1B/2 PAGE ......................................................................................................................................... 13 STEP1C/3 PAGE ......................................................................................................................................... 13 STEP1D AND 1E/4 PAGE............................................................................................................................. 13 STEP1F/5 PAGE ......................................................................................................................................... 14 STEP1G/6 PAGE......................................................................................................................................... 14 STEP1H/7 PAGE......................................................................................................................................... 14 STEP2A/8 PAGE......................................................................................................................................... 14 STEP2B/9 PAGE ......................................................................................................................................... 14 STEP2C/10 PAGE ....................................................................................................................................... 15 STEP 2D/11 PAGE ...................................................................................................................................... 15 REPEAT WITHOUT HELP............................................................................................................................ 15

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Aligning The KLA-Tencor 3XX Optics Bench EDIT 227 Class Project

Aligning the KLA-Tencor 3XX Optics Bench FRONT END ANALYSIS The Situation The new 3XX CSE (equipment service personnel) at KLA-Tencor are taking too much time to learn how to align the optics on a 3XX tool (see Fig 1.). A large part of the training that they take regards how to align the laser-illuminated optical system. This part of the training course takes 6 weeks. The training management and crew have tried just about everything to decrease the time needed without success. Our task is to explore the option of allowing students to take the optics alignment training through CBT. This will be difficult as this type of task is typically a psychomotor-based skill that requires extensive practice on the tool with instructor feedback to become proficient. We will try to give them this “practice” and feedback using a computer only. This will allow them to practice in off-hours (as homework) and will have the added advantage of lettinthat the actual, highly sensitive, easily broken, expensive-to-fix t

General Needs Statement Our overall need for this project is to train the student to successTencor 3XX reticle inspection tool. The student will need to do tcomputer-based training program with performance feedback ontime from the current training model. General Intent Our group intends to create an interactive CD-ROM based CBT simulate the actual optics bench on a KLA-Tencor 3XX to train immediate feedback on aligning the optics bench using only a pr Needs Analysis One of the first checkpoints that we cover when analyzing any inthere really is an instructional problem that needs to be solved anthis needs analysis will be a list of ‘goals’, which reflect what lea The first issue to look at is the events that brought to light this inneeds assessment. Asking, “Is there really a problem?” the answthe new employees to align the optics bench. Another related proexcessive amounts of time and attention by the trainers to carry oproblem is that the training currently requires large amounts of paccentuated by the fact that there is only one tool per class and tyonly one student is able to practice and thus train at a time. Sincepsychomotor-based task, this training system must be created wion the actual tool at the training center in San Jose. The next question to ask is, “How does the employee performanc

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Figure 1. 3XX Optics Bench

g the students practice on something other ool.

fully align the optics system on a KLA-his using only a procedure and a self-paced ly in 5 weeks, a one week reduction in

using highly accurate 3D models to on and give the student practice time, and ocedure and the CBT.

structional project is to make sure that d can be solved by us. The output from rners currently are unable to do.

structional problem and precipitated a er is that it currently takes too long to train blem is that the current training requires ut the training tasks. Yet another related ractice time on the tool. This is further pically four to six students per class. So this instructional system is training for a th the final test being an alignment session

e relate to the problem?” The problem

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Aligning The KLA-Tencor 3XX Optics Bench EDIT 227 Class Project

appears to be caused by the type of training that is currently being used. The student’s performance after the current training is acceptable, but the time and resources required to get these results is the problem. Our task is to explore using CBT (a different type of training) to solve these problems. In general, some type of training system is required to solve the general problem of training service personnel to align an optics bench. We have successfully created complex simulation-based training in the past and believe that this is the way to go here. So ultimately, employee performance is an issue as the move to the newer, faster system is implemented. But can this new system produce the same employee performance as the old system? To answer this question, we ask a few more. Is the solution to the achievement/ performance learning? Yes. Learning has never been an issue that has been in question. A new learning system is needed that will also solve the time-to-train issues and instructor resource issues while maintaining learner perfcurrently offered? The answer is YES and NOperformance goals, but does not meet time-to-self-paced training system needs to be designeleveraged to design the new system. So given developed by a Discrepancy Needs Analysis o

.

Discrepancy Based Needs Analysis (Gap An To find the gaps in the current instructional syinstructional system. The goals of this traininKLA-Tencor 3XX tool and give them “hands-week period (savings of 1 weeks over current here to keep in mind. The first set is learner petrain and instructor involvement). Now, how wtraining system, learner performance goals areachieved. So what is the difference between “train and instructor usage goals are not being mthere is only one tool for up to six students to exists. In summary here are the gaps that we have ide 1. Time-to-train is 1 week too long. 2. Tool-to-student ratio for hands-on practic3. Instructor time commitment is too high. 4. A new self-paced training program will n

training material. 5. The new self-pace training program must

tool.

Figure 2. Needs Analysis Findings

ormance. Also, is instruction for these learning goals . There exists a current training program that meets learner train goals. In order to meet this time-to-train goal, a new, d. Certainly portions of the current training system can be that an existing course exists, let’s explore the gaps or need r Gap Analysis.

alysis)

stem that we need to fill, we need to look at the goals of this g is to teach the student how to align the optics bench on a on” practice time with performance related feedback in a 5 training system). So specifically, there are two sets of goals rformance goals and the second are resource goals (time-to-ell are goals currently being achieved? With the current

being meet satisfactorily but the resource goals are not being what is” and “what should be”? The gap here is the time-to-

et. The training is taking 1 week longer than the goal. Since use for hands-on time, an acceptable tool-to-student ratio gap

ntified, with the most important listed first (see Fig 2.):

e time is too low.

eed to be designed (although leveraged off of the current

be designed with a in-house, hands-on final test on the real

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And are all of these gaps solvable using a new instructional product? Yes, clearly all of the previous gaps or problems can and must be solved instructionally! And now that we have established that there is a need to design a new instructional product, that this product is needed to solve our problem, and have our list of what students are currently unable to do, we move to the next step. This next step is to start gathering information on the context of the instructional problem, specifically we begin by looking at the learning environment. Learning Environment Analysis A learning environment analysis will describe the learning environment in which instruction will be used. In this step it is necessary to keep in mind the entire training “system”. To begin, we must ask, “What are the characteristics of the teachers/trainers who will be using these materials?” In this case, there will be no formal teacher or trainer until the final testing that must be done on a real system. This trainer will not be doing any of the actual training. Therefore the trainer is the CBT or character in the CBT. We also need to figure out what media hardware is commonly available in the potential learning environment. The students are Customer Support Engineers who all have laptops that are capable of playing any program thabout limitations. Are there any charaStudents will be expected to use this pplaced on where or when they will ne

.

Next we need to know a little about ththe organization are (i.e. beliefs of rolmanagement actually encouraged thisbusiness goals and objectives of the gand now they are desperate. They aretypically enjoy self-paced training an So in summary we have learned the f1. All of the training will be done w

with a human trainer. 2. All of the students have adequate

we can create. So no need to limi3. The training will be entirely off-l

involvement by other parties. 4. The management in charge of thi

willing to spend time and moneythey are not sure if it will be enoubad during the development of th

5. The students have a positive attit

Figure 3. Learning Environment Analysis

at we create in Authorware or Flash. There will be no need to worry cteristics of classes and facilities that will use the new instruction? rogram on their laptop at their convenience. No requirements will be

ed to use this system.

e organization and company, specifically, what the characteristics of es and expectation of learners, teachers, mgmt). At KLA-Tencor, the change. Solving the problems stated before is very important to the roup. Management has tried everything to get the time-to-train down willing to risk it with this one. The students at KLA-Tencor are d have had good experiences with CBT.

ollowing about the learning environment (see Fig 3.): ith self-pace CBT. The final testing will be done on a real system

computer hardware to run the most complex simulation training that t the complexity of the program. ine, and self-paced. Students can learn at their own pace with minimal

s project are behind it. The are have tried everything else and are to see if this will work. They expect it to work to some degree, but gh. This may be a point of concern if the economic environment gets e project. ude about CBT.

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Now that we have looked at the context of the overall learning environment, the context of the individual learner needs to be explored next. Learner Analysis We will begin by taking by listing the characteristics that we need to explore in each of the domains of learning and then fill in what we have found after that characteristic. We will then develop a profile for the learners. This profile will help us to plan our training to maximize it’s effectiveness. It will also give the students the most positive experience with the training. COGNATIVE: General characteristics:

General & Specific Aptitudes – technically proficient, advanced computer literacy, CBT familiar.

Language development level – adult, college-educated. Reading level – adult, college-educated. Level of visual literacy (ability to gain info from graphics) – most are very web/computer

literate, know how to use technical manuals, use graphics every day, very familiar with graphics

Specific Prior Knowledge – learners have college level understandings of electronics and computers. Most have experience troubleshooting electronics. Many have experience aligning mechanical systems and are mechanically inclined, optical systems are very similar. PHYSIOLOGICAL:

Sensory perception – good, young adults, lack of sensory perception not a factor. General health – good, young adults. Age – most young adults, typically 23-36, some 36 - 50

AFFECTIVE:

Interests – typically technical interests (computers, computer games), many mechanical interests (cars, motorized anything), sports, games. All of this can work to our advantage, especially if we can add some “game play” to the training.

Motivations to learn – job is dependant on knowing this skill; life will be hard if they don’t know this skill, so they are typically very motivated. If we can leverage their interests and some “game play”, that will increase motivation as well.

Attitude toward learning – most are motivated because of previous statement. Also, our learner is learning all of the time, always taking classes to keep up with new technology. They are experienced learners and understand the value of learning.

Perceptions of and experience with specific forms of media – most have experience with CBT, all have computers, most like web and using computers.

SOCIAL:

Relationships to peers – most like co-workers but typically work alone, need to rely on peers for help sometimes (tech support). Technical training is typically psychomotor, so the “lone student, with individual hands-on practice time” model prevails with these students. CBT simulation training fits with this model.

Feelings toward authority – respect, good, these are young adult professionals, with the need to constantly get trained if they are to be successful in their job and therefore life. Complainers and condescenders get fired quickly in this industry.

Tendencies toward cooperation or competition – cooperation is important and necessary to everyday job. Competition may be an area to leverage if we create “game play” into the training. Students could compete for best times.

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In summary, we see great encouragement in looking at the student base. We see that our CBT simulation training model will work well, maybe even better than the current training that is in placestudent motivation to learn and appeal to theimake the training appear to be a professionaladvantage that we can use to leverage this tra

.

TASK ANALYSIS Now that we have developed our learning ena few conclusions based on this analysis, it istask analysis, we will create a list of goals ansubsequent design. When we are finished, weknow or be able to do at the completion of inlearner will come away with. Learner goals The goals of this training is to teach the studeand give them “hands-on” practice time with week over current training system). The typemainly psychomotor (eye-to-hand) types of le Information Processing Analysis (Mental/P Given the goal, lets conduct an information pmental/physical steps that someone must go tthe correct order here: Steps: 1. Rough align beam through Spatial Filter

a) Slide the permanently mounted toolipasses through the aperture in the ta

b) Slide the permanently mounted toolithat it will reflect the incoming beam

c) Screw the projection tool snuggly inprescanner.

d) If this is a first time set up of M1/M2e) Ensure the M1 - M2 servo system isf) Adjust M1 in X and Y to center the g) Adjust M2 in X and Y to center the

on the M1 tooling target. h) Reiterate step 6 and 7 until the laser

Figure 4. Learner Analysis

. Of note is the affective domains, where we can maximize r interests if we can add “game play” to the learning and try to , well done computer game. This could provide us the ining into doing what the previous model was unable to do.

vironment and learner characteristic context and have come to time to look at the training tasks and do a task analysis. In our d transforms them into a form that can be used to guide will have a list of goals that describe what the learners should struction, the prerequisite skills, and knowledge that the

nt how to align the optics bench on a KLA-Tencor 3XX tool performance related feedback in a 5 week period (savings of 1 s of learning that will be required to meet this goal involve arning.

hysical Steps)

rocessing analysis on that goal and come up with the hrough to complete this learning goal. We will list the steps in

ng target on M1 into alignment position so that the laser beam rget. ng aperture at the entrance of the spatial filter into position so .

to it's alignment position between the spatial filter and the

, ensure that M1 & M2 are in their nominal positions. disabled. beam on the spatial filter entrance aperture. beam reflection from the partial mirror back into the aperture

beam exits the spatial filter as seen with the projection tool.

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2. Rough align beam through Spatial Filter

a) Return the M1 tooling target to the stowed positions. b) Walk the beam in X and Y to find maximum spot brightness and quality. c) Return the spatial filter tooling to it's stowed (running) position. d) Verify the quality of the spot at the exit of the projection tool.

Prerequisite Analysis Next we need to conduct a prerequisite analysis and determine what the learner must know or be able to do before this training to achieve these steps. Basically, the learner must be able to run a computer, must be able to use a hex wrench. Based on our learner analysis we will assume the students automatically meet the prerequisite requirements. OBJECTIVES An now we an write a set of objectives for the learning goals and each of the prerequisites. These objectives are written in formal objective format with all three elements of a good objective, the conditions surrounding the action, the action, and the standard to which we are going to measure the success of the action to.

Overall Objective: Using the CBT and the Phase 2 Manufacturing procedure, the student will be able to align the optics bench so that a standard CAL Plate test will run successfully

First high-level objective: Using the CBT and the Phase 2 Manufacturing procedure, the student will be able to rough align beam through Spatial Filter so that at least a visible amount of light will be visible on the exit target.

Enabling Objectives: a) Using the CBT and the Phase 2 Manufacturing document, the student will be able to

slide the permanently mounted tooling target on M1 into alignment position so that the laser beam passes through the aperture in the target.

b) Using the CBT and the Phase 2 Manufacturing document, the student will be able to slide the permanently mounted tooling aperture at the entrance of the spatial filter into position so that it will reflect the incoming beam.

c) Using the CBT and the Phase 2 Manufacturing document, the student will be able to screw the projection tool snuggly into its alignment position between the spatial filter and the prescanner.

d) Using the CBT and the Phase 2 Manufacturing document, the student will be able to ensure that M1 & M2 are in their nominal positions if the situations calls for it and they will be able to determine if the situation calls for it.

e) Using the CBT and the Phase 2 Manufacturing document, the student will be able to ensure the M1 - M2 servo system is disabled.

f) Using the CBT and the Phase 2 Manufacturing document, the student will be able to adjust M1 in X and Y to center the beam on the spatial filter entrance aperture.

g) Using the CBT and the Phase 2 Manufacturing document, the student will be able to adjust M2 in X and Y to center the beam reflection from the partial mirror back into the aperture on the M1 tooling target.

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h) Using the CBT and the Phase 2 Manufacturing document, the student will be able to reiterate step 6 and 7 until the laser beam exits the spatial filter and can be seen with the naked eye on the projection tool.

Second high-level objective: Using the CBT and the Phase 2 Manufacturing procedure, the student will be able to maximize the beam energy through the Spatial Filter so that the laser spot is the brightest it can be and that the spot has no refraction rings around the spot.

Enabling Objectives: a) Using the CBT and the Phase 2 Manufacturing document, the student will be able to

return the M1 tooling target to the stowed positions. b) Using the CBT and the Phase 2 Manufacturing document, the student will be able to

walk the beam in X and Y to find maximum spot brightness and quality. c) Using the CBT and the Phase 2 Manufacturing document, the student will be able to

return the spatial filter tooling to it's stowed (running) position. d) Using the CBT and the Phase 2 Manufacturing document, the student will be able to

verify the quality of the spot at the exit of the projection tool so that the spot that is transmitted through the pinhole of the spatial filter and shows out of the projection tool, with it being circular with no diffraction around the spot.

INSTRUCTIONAL STRATEGY As should be evident from our discussion so far, we have already selected our instructional strategy. We are going to exclusively use simulation training. Our simulation training will use high quality 3D animations (see Fig. 5) to try to emulate the real 3XX optics bench. Our goal is to simulate the real optics bench behavior so much that the student will have a “very short mental distance” to go when performing the tasks on the real machine. We will guide the student through the procedure, giving them qualitative immediate feedback on how well they performed the task. Then we will make the student do the task again, this time the task without help to get credit for that portion

.

Pa

Figure 5. CBT Prototype Screen Shot

without any help. They must demonstrate that they can do of the procedure.

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FORMATIVE EVALUATION STRATEGY Formative evaluation is the process of checking our quality and effectiveness while we are developing the project. To make sure we are on the right track we will develop a prototype module on the first section of the optics alignment and we will run a pilot session with actual target audience members and have them try the training. We will watch them as they are interacting with the training to watch for:

Intuitiveness of the instruction Ability of student to act alone. Attitude of student toward material and approach. Effectiveness of instruction Suggestions

We will then take the student and have them try the actual alignment on the actual tool. The results will be tabulated and corrective action will be taken. This pilot section should be executed no more than 1/3rd of the way into the project. SUMMATIVE EVALUATION STRATEGY Summative evaluation is how we are going to the test the student at the end of the training to make sure that they “got it”. As already discussed, our summative evaluation strategy will be to have the student come into the company and align the optics bench on an actual tool. An 3XX Optics trainer will facilitate the testing and will pass judgment on the student as to whether they can be trusted to align the optics bench in the real world. RESOURCES REQUIRED The resource required for this project will be an issue only in the development phase. We have established that the learners already own the computer equipment that will be necessary to run the training. Any computer-based training requires more time to develop up front. We will need a number of resource personnel to develop this project. Specifically, we need an instructional designer, a 3D graphics person, a graphics art person to develop the interface for the CBT, an advanced programmer that will be able to code complex interactions and feedback into the CBT, and a project manager to keep the whole project running smoothly. That is a total of 5 people to create this project. All will require advance skill levels in their field, as this is a complex CBT project. Luckily, I can take on all of these rolls, but we may need to hire others if the schedule is tight enough that one person cannot do all of the jobs fast enough. I have all of the software and equipment that we will need to create this project. I recommend hiring a locally for the second person to avoid traveling expenses. Another, less tangible resource that needs to be considered is time. A typical yardstick that is used in the creation of CBT is the time to develop vs. the student training time. At typical number for complex, professional looking CBT is 200 hours development time per 1 hour of CBT training time. We estimate that the total CBT training time will be 8 hours. That means that this project will require 1600 hours of development time. That equals 40 man weeks or 10 man months. If we hire another person to help out, theoretically we could get that down to 5 months development time. This is typical and needs to be considered when thinking of resources. Total Resources Needed: 2 expert level personnel for 5 months.

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COSTS As discussed in the last section, a total time of 10 man months will be needed to create this project. This includes all that is needed to analyze, design, develop, implement, and evaluate the course. In other words a turnkey product will be produced in that amount of time. Figuring that expert level personnel will be required to create this caliber of product, around $60 per hour should be estimated for this development time. That equals $96,000. This is actually a good price. Many projects of this quality can get into multiple hundreds of thousands of dollars. Total Production Cost: $96,000 CONCLUSION That is our plan for this project. We believe that we can be successful with the CBT learning strategy that we have put forth. This type of learning can be very effective with this type of learner also. Putting “game play” into the action (which we have not included in the sample storyboard included next) could make this a more effective tool that the current model and will definitely help us reach our goal of getting the same learning results in a weeks less time. And, if all goes well, we may be able to cut out even more time.

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STORYBOARD The storyboard is the blueprint that we use to create the CBT. We describe the images, wording, and production notes that go on each page so that production personnel will be able to create the CBT with no (little) other input. We plan on having voiceovers on each of the pages. Intro - Page1

Image: CBT Logo and possibly a 3D fly-through video Text: Welcome to “Aligning the KLA-Tencor 3XX Optics Bench” Computer Based Training

Login – Page 2

Image: Show Login dialog box Text: Show instructions on how to log into the CBT

Main Menu – Page 3

Image: Show the Main Menu Text: Welcome to the main menu. Please select a topic below to go to that section. We recommend going in order but you don’t have to.

Part 1. Rough align beam through Spatial Filter Step1a/1 Page (See information processing analysis)

Image: Show a 3D view of the optics bench M1 with the tooling target in the normal position. Text: Step 1. Slide the permanently mounted tooling target on M1 into alignment position so that the laser beam passes through the aperture in the target. Production: Set up drag area over tooling and move the animation of the tool moving into position as the student clicks and drags it into the correct position. Give feedback, say “keep moving” until they reach the correct position, then say “correct, now move to the next step”.

Step1b/2 Page

Image: Show a 3D view of the spatial filter with the tooling target in the normal position. Text: Step 2. Slide the permanently mounted tooling aperture at the entrance of the spatial filter into position so that it will reflect the incoming beam. Production: Set up drag area over tooling and move the animation of the tool moving into position as the student clicks and drags it into the correct position. Give feedback, say “Keep Moving” until they reach the correct position, then say “Correct, now move to the next step”.

Step1c/3 Page

Image: Show a 3D view of the spatial filter and prescanner without the projection tool. Show a projection tool in a picture of a toolbox. Text: Step 3. Screw the projection tool snuggly into its alignment position between the spatial filter and the prescanner. (For the cbt, just click and drag the tool to the correct position and then let go to install it) Production: Set up a drag/drop interaction so that if the student drops the tool in the area between the prescanner and spatial filter, it will stay there, if not move it back to the toolbox. Give them a hint arrow, pointing to the correct spot if they don’t get it right after 2 tries. Give feedback, say “Keep Trying…” until they reach the correct position, then say “Correct, now move to the next step”.

Step1d and 1e/4 Page

Image: Show a 3D view of the spatial filter and prescanner without the projection tool. Show a projection tool in a picture of a toolbox. Text: Step 4. If this is a first time set up of M1/M2, ensure that M1 & M2 are in their nominal positions; we will assume that it has been set up before thought. So next, ensure the M1 - M2 servo system is disabled by looking at the Disable LED here. Click on the Disable LED to let me know that you know where it is.

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Aligning The KLA-Tencor 3XX Optics Bench EDIT 227 Class Project

Production: The first time through, show an arrow and put a hotspot on the led. The second time through, don’t show the arrow, but give them a hint arrow, pointing to the correct spot if they don’t get it right after 2 tries. Give feedback, say “Keep Trying…” until they reach the correct position, then say “Correct, now move to the next step”.

Step1f/5 Page Image: Show a 3D view including M1 and the spatial filter laser target. Show blow up views of both M1 and the target tools also. Show an Allen wrench in a picture of a toolbox Text: Step 5. Adjust M1 in X and Y to center the beam on the spatial filter entrance aperture. For this CBT, drag and drop the Allen wrench onto the screw that you want to insert it into. Then click and drag around the Allen wrench to turn it. View the laser spot on the target and get the spot to go through the center of the target so that you can not see the spot evenly in both directions. Production: Put a drag drop function of the tool from the toolbox to the Allen screws on the mirrors (X and Y). Allow the student to move the wrench between the screws also. Depending on which screw the Allen wrench is in, move the laser dot accordingly as they drag around the wrench so that it can move over the whole target area. Give feedback, say “Too High, Keep Trying…” (or “too low”, “too far left”, “too far right”) until they reach the correct position, then say “Correct, now move to the next step”.

Step1g/6 Page Image: Show a 3D view including M2 and the M1 laser target. Show blow up views of both M2 and the target tools also. Show an Allen wrench in a picture of a toolbox Text: Step 6. Adjust M2 in X and Y to center the beam reflection from the partial mirror back into the aperture on the M1 tooling target. For this CBT, drag and drop the Allen wrench onto the screw that you want to insert it into. Then click and drag around the Allen wrench to turn it. View the laser spot on the target and get the spot to go through the center of the target so that you can not see the spot evenly in both directions. Production: Put a drag drop function of the tool from the toolbox to the Allen screws on the mirrors (X and Y). Allow the student to move the wrench between the screws also. Depending on which screw the Allen wrench is in, move the laser dot accordingly as they drag around the wrench so that it can move over the whole target area. Give feedback, say “Too High, Keep Trying…” (or “too low”, “too far left”, “too far right”) until they reach the correct position, then say “Correct, now move to the next step”.

Step1h/7 Page Repeat Step 6 one more time to show the interaction between the two adjustments, then move on. Text: Step 7. Reiterate step 5 and 6 until the laser beam exits the spatial filter as seen with the projection tool.

Part 2. Rough Align Beam Through Spatial Filter

Step2a/8 Page Image: Show a 3D view of the optics bench M1 with the tooling target in the extended position. Text: Step 8. Return the M1 tooling target to the stowed positions. Production: Set up drag area over tooling and move the animation of the tool moving into position as the student clicks and drags it into the correct position. Give feedback, say “keep moving” until they reach the correct position, then say “correct, now move to the next step”.

Step2b/9 Page

Image: Show a 3D view including M1 and the projection tool laser target. Show blow up views of both M1 and the target tools also. Show an Allen wrench in a picture of a toolbox Text: Step 9. Move the beam with M1 in X and Y to find maximum spot brightness and quality as seen through the projection tool. For this CBT, drag and drop the Allen wrench onto the screw that

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Aligning The KLA-Tencor 3XX Optics Bench EDIT 227 Class Project

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you want to insert it into. Then click and drag around the Allen wrench to turn it. View the laser spot on the projection tool target and get the spot to it’s maximum brightness and quality. Production: Put a drag drop function of the tool from the toolbox to the Allen screws on the mirrors (X and Y). Allow the student to move the wrench between the screws also. Depending on which screw the Allen wrench is in, move the laser dot accordingly as they drag around the wrench so that it can move over the whole target area. Give feedback, say “Too High, Keep Trying…” (or “too low”, “too far left”, “too far right”) until they reach the correct position, then say “Correct, now move to the next step”.

Step2c/10 Page

Image: Show a 3D view of the spatial filter with the tooling target in the extended position. Text: Step 10. Return the spatial filter tooling to it's stowed (running) position. Production: Set up drag area over tooling and move the animation of the tool moving into position as the student clicks and drags it into the correct position. Give feedback, say “Keep Moving” until they reach the correct position, then say “Correct, now move to the next step”.

Step 2d/11 Page Image: Show a 3D view including M1 and the projection tool laser target. Show blow up views of both M1 and the target tools also. Show an Allen wrench in a picture of a toolbox Text: Step 11. Verify the quality of the spot at the exit of the projection tool. For this CBT, click on the projection tool to remove it and then watch the spot to make sure the quality doesn’t degrade if it is OK press the OK button to move on. Production: Ask the person to click on the projection tool and then erase it. Change the spot size a little and then give a button to say OK it didn’t change or it did change.

Repeat Without Help Image: Congratulatory message. Text: Good job. You have now aligned the first leg of the optics bench. At this point you will need to go back and complete each step without my help. Completing these steps without my help will be necessary to get credit for this part of the procedure. Click CONTINUE to begin... Production: Include a button to go back and turn off the help. Tell the student what the step is, since they will have a procedure, but do not tell them how to do it. Let them use the procedure.