Electron-Cyclotron-Resonance, Vacuum-Ultraviolet Light Source

Spire CorporationBedford MA

ACCOMPLISHMENTS Demonstrated stable, reproducible VUV output at wavelengths

shorter than 30 nanometers.

Increased VUV output with modified microwave and magnetic field configuration.

Designed higher frequency, higher field VUV source.

COMMERCIALIZATION ECR plasma equipment and technology were adapted to treat

internal and external surfaces of polymer tubing, especially for medical applications. (See graphic of ECR plasma inside 4 mm ID silicone rubber tube.)

Patent application has been filed for ECR plasma treatment of polymer tubing.

Spire plans to commercialize ECR plasma treatments for medical devices.

SmallBusinessInnovationResearch

1992 Phase II, SS-5-074, 1/03

GOVERNMENT/SCIENCE APPLICATIONS Many potential NASA and Government applications for ECR plasma

treatment of polymers, glass, and ceramics. E.g., biological and medical research, bioactive coatings, low-temperature sterilization.

Spire Corporation has received Phase I and Phase II SBIR grants from National Science Foundation to develop ECR plasma treatments for bioactive coatings on internal and external surfaces of polymer tubing such as catheters.

Goddard Space Flight Center

INNOVATIONRadiation source based on resonant heating of electrons in magnetically-confined plasma. Light output covers a wide wavelength range from visible to VUV. Source could provide intense, stable radiation for instrumentation calibration and UV

degradation studies on large samples.

Points of Contact:NASA – Ray Boucarut (301) 286-4251Spire - Ward Halverson (781) 275-6000

graphic