Electron Microscopy LaboratoryElectron Microscopy Laboratory IFPANIFPAN

Technical parameter and investigation possibilities Technical parameter and investigation possibilities

with thewith the

FEI FEI TitanTitan CUBED 80CUBED 80--300300

andand

HELIOS 600HELIOS 600

CCD camera 2048x2048x16 b

Symmetric objective S-TWIN

EDX

Projection lens

Electron gun X-FEG

Spherical aberrations corrector

Compustage holder, αβ+/-45

Lorentz lensHDTV camera 40 fm/s 1kx1k

Kocheler condensor + scanner

Monochromator

Electrostatic biprism

HAADF/BF/BF detector

Magnetic filter for energy

filtering applications

Projection lens => x20

Second CCD camera

2048x2048x16 b

FEI Titan CUBED 80-300

Technical parameters and possibilities for investigations

SEM/FIB HELIOS 600

Ion-beam: 500V-30kV

Electron resolution: 15 kV = 0.9 nm

1kV = 1.4 nm

Ion resolution: 30 KV 5 nm

Omiprobe nanomanipulator

EDX detector

EDX

High resolution transmission electron microscopy (HRTEM) using an

objective lens’ spherical aberration corrector

• Point resolution ~= Information Limit = 70 - 90pm

• S-Twin lens, 5.4 mm , constant specimen position for 80 - 300kV

• Compustage x,y +/- 1mm z 0.375 , step: 1 nm, 0.1º

• Probe Φ3.05 mm thickness max 0.34 mm

• Gatan Ultrascan camera 1000p optimized for 300kV

2048x2048x16b , 4Mpixels/s

• Camera 40 frames/s 1000x1000

TITAN-IFPAN

Scanning Transmission Electron Miccroscopy - STEM

Scanning system STEM

- Resolution 512x512, 1024x1024,2048x2048 for 14 bit

- Electronic azimutal scanning movement

- Resolution during STEM operations ≤ 140 pm

- Smallest electron beam size ≤ 200 pm

HAADF detector => Z contrast

EDX

Spectroscopy and imaging using energy filtered and monochromated

electron beam

Monochromator + Gatan Image Filter GIF Quantum 966

Energy resolutiion of the system 0.2 eV

Electron holography with Cs corrector

Lorentz microscopy

Resolution ≤ 3 nm for 300 kV

(Magnetic pole in the probe region ≤ 5mT)

EDX microanalysis

EDX detector:

Detection for Z > 4 (Be),

Active surface detector with min. 30 mm2,

Energy resolution ≤ 136 eV,

Two low noise Beryllium holders with liquid nitrogen

cooling.

Work in STEM mode.

High intensity beam from X-FEG.

EDX

Sensible materials, radiation defects’ reduction

Possibility of probes’ investigations starting from 80 kV.

Point resolution better than 190 pm.

Double tilt liquid nitrogen cooled holder.

Microscope operation in “low dose” mode possible.

Software

- DigitaMicrographic => Camera management, EELS, STEM

- Amplitude and phase reconstruction for electron holography – Holoworks

- Amplitude and phase reconstruction of image series

-„TrueImage Professional”

- Goniometer control based on stereographic projection

- SDK controlling every microscope function

Virtual laboratory tour available at : http://www.wkraj.pl/index.php?page=vr&start=50464