end station wafer guides for gsd implanters...end station wafer guides for gsd implanters 2...
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G-30-022AH12 Rev 06
PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598
A Resource for Semiconductor Manufacturers
Illustrated Parts Guide forEnd Station Wafer GuidesFor GSD Implanters
G-30-022AH12 Rev 062 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598
* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.
A Resource for Semiconductor Manufacturers
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Item P/N Description OEMs Qty1 82382 Socket Head Cap Screw, SHCS, 2-56 X 1/4”, SST 4400120, 1231200204 82 99566 No. 2 - Wafer Holder Guide, Left Side, 150mm, Vespel ® 17096540, 17A0002 23 99567 No. 1 - Wafer Holder Guide, Upper Right, 150mm, Vespel ® 17096530, 17A0747 14 99567A No. 1 - Wafer Holder Guide, Upper Left, 150mm, Vespel ® 17096531, 17A0748 1
150mm Wafer Holder Chuck Components
G-30-022AH12 Rev 063 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598
* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.
A Resource for Semiconductor Manufacturers
99714OEM 17A7183No. 1 Wafer Holder Chuck Arm AssemblyAssembly Includes: 4 - 8A7652 - 99713 1 - 99714-1
99715OEM 17A7184No. 2 Wafer Holder Chuck Arm AssemblyAssembly Includes: 4 - 8A7652 - 99711 1 - 99715-1
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Item P/N Description OEMs Qty1 8A765 Slotted Cheese Head Screw, CH, M2 X .4 X 4MM, 18-8 SS 44S0293 82 99711 No. 2 - Holder Guide, 200mm 17099700 23 99711A No. 2 - Holder Guide, 200mm, Extended Life 170997004 99713 No. 1 - Holder Guide, 200mm 17098180 25 99713A No. 1 - Holder Guide, 200mm, Extended Life 170981806 99714-1 No. 1 - Holder Chuck Arm, 200mm No OEM Reference 17 99715-1 No. 2 - Holder Chuck Arm, 200mm No OEM Reference 1
200mm Wafer Holder Chuck Components99714 & 99715
G-30-022AH12 Rev 064 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598
* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.
A Resource for Semiconductor Manufacturers
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Item P/N Description OEMs Qty1 82382 Socket Head Cap Screw, SHCS, 2-56 X 1/4”, SST 4400120, 1231200204 22 82412 Socket Head Cap Screw, SHCS, 6-32 X 1/4”, 18-8 SST 4400025, 4400216 23 82584 Flat Head Screw, FH, M2 X 4mm, Slotted, 90°, SST 44S0281 44 99568 No. 1 - Wafer Arm Guide, 150mm, Vespel ® 17096730, 17S8976 15 99568A No. 1 - Wafer Arm Guide, 150mm, Deep Channel, Vespel® 17096730, 17S89766 99685 150mm Wafer Chuck Finger, Aluminum 17A8406 17 99686 No. 2 - Wafer Arm Guide, 150mm, Vespel ® 17096740, 17S8977 18 99686A No. 2 - Wafer Arm Guide, 150mm, Deep Channel, Vespel® 17096740, 17S89779 99688 No. 3 - Wafer Arm Guide, 150mm, Vespel ® 17096750, 17A8409 110 99688A No. 3 - Wafer Arm Guide, 150mm, Deep Channel, Vespel® 17096750, 17A8409
150mm Wafer Arm Chuck Components
G-30-022AH12 Rev 065 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598
* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.
A Resource for Semiconductor Manufacturers
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Item P/N Description OEMs Qty1 82382 Socket Head Cap Screw, SHCS, 2-56 X 1/4”, SST 4400120, 1231200204 22 82412 Socket Head Cap Screw, SHCS, 6-32 X 1/4”, 18-8 SST 4400025, 4400216 23 82584 Flat Head Screw, FH, M2 X 4mm, Slotted, 90°, SST 44S0281 44 99685A 200mm Wafer Arm Chuck, Aluminum 17A3569 15 99707 No. 1 - Wafer Arm Guide, 200mm, Vespel ® 17098370 16 99707A No. 1 - Wafer Arm Guide, 200mm, Deep Channel, Vespel ® 170983707 99708 No. 2 - Wafer Arm Guide, 200mm, Vespel ® 17098380 18 99708B No. 2 - Wafer Arm Guide, 200mm, Deep Channel, Vespel ® 170983809 99709 No. 3 - Wafer Arm Guide, 200mm, Vespel ® 17098390 1
10 99709A No. 3 - Wafer Arm Guide, 200mm, Deep Channel, Vespel ® 17098390
200mm Wafer Arm Chuck Components
G-30-022AH12 Rev 066 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598
* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.
A Resource for Semiconductor Manufacturers
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Item P/N Description OEMs Qty1 8A765 Slotted Cheese Head Screw, CH, M2 X .4 X 4MM, 18-8 SS 44S0293 82 82382 Socket Head Cap Screw, SHCS, 2-56 X 1/4”, SST 4400120, 1231200204 23 82584 Flat Head Screw, FH, M2 X 4mm, Slotted, 90°, SST 44S0281 44 99711 No. 2 - Holder Guide, 200mm 17099700 25 99713 No. 1 - Holder Guide, 200mm 17098180 26 99707 No. 1 - Wafer Arm Guide, 200mm, Vespel ® 17098370 17 99708 No. 2 - Wafer Arm Guide, 200mm, Vespel ® 17098380 18 99709 No. 3 - Wafer Arm Guide, 200mm, Vespel ® 17098390 1
Wafer Arm Guide KitK99711
G-30-022AH12 Rev 067 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598
* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.
A Resource for Semiconductor Manufacturers
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Item P/N Description OEMs Qty1 8A765 Slotted Cheese Head Screw, CH, M2 X .4 X 4MM, 18-8 SS 44S0293 82 82382 Socket Head Cap Screw, SHCS, 2-56 X 1/4”, SST 4400120, 1231200204 23 82584 Flat Head Screw, FH, M2 X 4mm, Slotted, 90°, SST 44S0281 44 99711 No. 2 - Holder Guide, 200mm 17099700 25 99713 No. 1 - Holder Guide, 200mm 17098180 26 99707A No. 1 - Wafer Arm Guide, 200mm, Deep Channel, Vespel ® 17098370 17 99708B No. 2 - Wafer Arm Guide, 200mm, Deep Channel, Vespel ® 17098380 18 99709A No. 3 - Wafer Arm Guide, 200mm, Deep Channel, Vespel ® 17098390 1
Glemco EnhancedWafer Arm Guide Kit
K99712
G-30-022AH12 Rev 068 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598
* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.
A Resource for Semiconductor Manufacturers
D C
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Item P/N Description OEMsA-1 99568B No. 1 - Wafer Arm Guide, 150mm, Deep Channel, ESD Conductive Material 17096730A-2 99568C No. 1 - Wafer Arm Guide, 150mm, ESD Conductive Material 17096730A-3 99686B No. 2 - Wafer Arm Guide, 150mm, Deep Channel, ESD Conductive Material 17096740 A-4 99686C No. 2 - Wafer Arm Guide, 150mm, ESD Conductive Material 17096740 A-5 99688B No. 3 - Wafer Arm Guide, 150mm, Deep Channel, ESD Conductive Material 17096750 A-6 99688C No. 3 - Wafer Arm Guide, 150mm, ESD Conductive Material 17096750 B-1 99707B No. 1 - Wafer Arm Guide, 200mm, Deep Channel, ESD Conductive Material 17098370 B-2 99708C No. 2 - Wafer Arm Guide, 200mm, Deep Channel, ESD Conductive Material 17098380B-3 99709B No. 3 - Wafer Arm Guide, 200mm, Deep Channel, ESD Conductive Material 17098390C 99895A In Vac Wafer Cassette Guide, 200mm, Wear Resistant, ESD Conductive Material 17A7350D 99896A In Vac Wafer Cassette Guide, 200mm, Wear Resistant, ESD Conductive Material 17A7351
Glemco Enhanced150mm & 200mm ESD Guide Components
G-30-022AH12 Rev 069 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598
* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.
A Resource for Semiconductor Manufacturers
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Item P/N Description OEMs1 99342 No. 3 - Wafer Arm Guide, 100mm, Vespel® 17101610, 17A27842 99350 No. 2 - Wafer Arm Guide, 100mm, Vespel® 17101600, 170884603 99351 No. 1 - Wafer Arm Guide, 100mm, Vespel® 17126120
Glemco Enhanced100mm Wafer Guides