enhanced dual-beam excitation photoelectric detection of ... · e2, [nv-] ~ 20 ppm) and annealed....
TRANSCRIPT
1
Enhanceddual-beamexcitationphotoelectricdetectionofNVmagnetic
resonancesindiamond
E.Bourgeoisa,b,E.Londeroc,K.Buczakd,Y.Balasubramaniamb,G.Wachterd,J.Stursae,K.Dobesf,F.Aumayrf,M.
Trupked,A.Galic,g,andM.Nesladeka,b
aIMOMECdivision,IMEC,Wetenschapspark1,B-3590Diepenbeek,Belgium.bInstituteforMaterialsResearch(IMO),Hasselt
University,Wetenschapspark1,B-3590Diepenbeek,Belgium.cInstituteforSolidStatePhysicsandOptics,WignerResearch
CentreforPhysics,HungarianAcademyofSciences,POBox49,H-1525Budapest,Hungary.dViennaCenterforQuantum
ScienceandTechnology,Atominstitut,TUWien,1020Vienna,Austria.eNuclearPhysicsInstitute,v.v.i.,ASCR,CZ-25068Rez,
CzechRepublic.fInstituteofAppliedPhysics,TUWien,WiednerHauptstr.8-10,1040Vienna,Austria.gDepartmentof
AtomicPhysics,BudapestUniversityofTechnologyandEconomics,Budafokiút8,H-1111Budapest,Hungary.
Date:2016-07-04
Abstract
ThecoreissuefortheimplementationofthediamondNVcentrequbitstechnologyisthesensitivereadoutof
NVspinstate.WehaverecentlydemonstratedthephotoelectricdetectionofNVmagneticresonances(PDMR),
anticipatedtobefasterandmoresensitivethanopticaldetection(ODMR).HerewereportonaPDMRcontrast
of9%-threetimesenhancedcomparedtopreviouswork-onshallowN-implanteddiamond.Basedonab-
initiomodelling,wedemonstrateanovelone-photonionizationdual-beamPDMRprotocol.Wepredictthat
thisschemeissignificantlylessvulnerabletotheinfluenceofdefectssuchassubstitutionalnitrogen.
2
Thenegativelychargednitrogen-vacancy (NV-)centre indiamondhasattractedparticularattentionasaroom
temperaturesolidstatequbit(1)thatcanberead-outbyopticaldetectionofmagneticresonances(ODMR)(2).
Numerousapplicationsinthefieldofsolid-statequantuminformationprocessing(3)andsensing(4)(5)(6)(7)(8)
are being studied, including non-perturbing nanoscale magnetometry with single NV- (9) and ultrasensitive
magnetometrywithNV-ensembles(10).
We have recently demonstrated the photoelectric detection ofNV- electron spinmagnetic resonances under
greenillumination(single-beamPDMR,ors-PDMR)(Fig.1a),basedontheelectricdetectionofchargecarriers
promotedtothediamondconductionband(CB)bytheionizationofNV-andperformeddirectlyonadiamond
chip equipped with electric contacts (11). Since the sensitivity of the magnetic resonance (MR) detection is
inversely proportional to the product between theMR contrast and the rootmean square of the number of
detectedphotonsNporelectronsNe(4)(12)(11),achievingahighphotocurrentsignalandasufficientMRcontrast
iscriticalforfurtherapplicationsofPDMRinquantumtechnology.Usings-PDMR,weachievedadetectionrateof
~107electrons.s-1perNV-(N.A.oftheobjective:0.95,greenillumination:3.4mW,electricfield:2.4104Vcm-1),
comparedto2104photons.s-1perNV-usingconfocalODMRdetection.However,theone-photonionizationof
single substitutional nitrogen (NS0) is one of the factors limiting the PDMR contrast, making a high green
illumination power necessary to achieve a sufficient contribution of NV- two-photon ionization to the total
photocurrent(11).Weobservedthatunderblueillumination,theionizationofNV-canbeachievedbyamore
effectiveone-photonprocess,enhancingtheproportionofthephotocurrentassociatedwithNV-comparedto
NS0. Based on this idea, we developed the dual-beam excitation PDMR (d-PDMR) scheme (Fig. 1a), that is
anticipated to lead to enhanced PDMR contrast in the case of sampleswith high [NS0]/[NV-] ratio and could
thereforeholdpromiseforthephotoelectricreadoutofsingleNV-spin(sincetheproportionofNS0inthedetection
volume remains substantial even in the case of single NV- centers contained in ultra-pure diamond) or for
ultrasensitivediamondmagnetometrywithNV-ensembles(forwhichirradiatedtype-Ibdiamondscontaininga
highproportionofNs0areused).
3
TodeterminethethresholdforNV-andNS0one-photonionization,wefirstmeasuredthephotocurrentspectraof
irradiatedtype-Ibdiamonds.Basedontheidentificationoftheionizationbands,wedesignedthed-PDMRscheme,
inwhichpulsedbluelight(2.75eV)directlypromoteselectronsfromNV-groundstatetotheCBandconvertsthe
resultantNV0backtoNV–.SimultaneousCWgreenillumination(2.33eV)independentlycontrolstheMRcontrast
byinducingspin-selectiveshelvingtransitionstoNV-metastablestate(13).Byperformingab-initiocalculationsof
Ns0,NV-andNV0ionizationcross-sections,wecouldexplorethephoto-physicsrelatedtotheproposedscheme,
relevantforachievinghigherMRcontrastandphotocurrentsignal.
ThesampleusedforPDMRmeasurements(sampleTP4)isanelectronicgradetype-IIadiamondimplantedwith
14N4+ions,resultingafterannealingintheformationofashallowNV-layer(density~30µm-2,depth:12±4nm).
Forphotocurrentspectroscopy,anas-receivedtype-Ibdiamondplate(sampleR,[NS0]~160ppm)wasusedasa
reference,whiletwootherswererespectivelyproton-(sampleA,[NV-]~35ppm)andelectron-irradiated(sample
E2,[NV-]~20ppm)andannealed.Coplanarelectrodeswithadistanceof100µm(samplesR,E2andA)or50µm
(sampleTP4)werepreparedonthesurfaceofthesediamondplates.Thetype-Ibsampleswerecharacterizedby
photoluminescence,FTIRandUV-visibleabsorptionspectroscopy(seesupplementaryinformation).
Torealizethed-PDMRscheme,aDCelectricfield(2.4104Vcm-1)isappliedinbetweenelectrodes.Acollimated
blue(2.75eV)laserbeam,pulsedat131Hz,isfocusedinbetweenelectrodesontothediamondsurfaceusinga
40Xairobjective(NA:0.95,lightspotdiameter~600nm).CWgreen(2.33eV)lightproducedbyalinearlypolarized
Nd:YAG laser is combined with the blue beam using the same objective. The resulting photocurrent is pre-
amplified and measured by a lock-in amplifier referenced to the blue light pulsing frequency, so that the
photocurrentinducedbyCWgreenlightdoesnotcontributetothemeasuredsignal.Thediamondchipismounted
onacircuitboardequippedwithmicrowaveantennas(14).Forphotocurrentspectroscopy,monochromaticlight
(1 to 300 µW) pulsed at 12Hz is focused onto the sample. At each photon energy, the photocurrent is pre-
4
amplified andmeasured by lock-in amplification (photocurrent detected down to 3 fA). The photocurrent is
normalizedtothefluxofincomingphotons.
To gain insight into NV-, NV0 and NS0 photo-ionization mechanisms, we apply ab-initio Kohn-Sham density
functionaltheory(DFT)calculations.Inthephoto-ionizationprocess,anelectronisexcitedfromanin-gapdefect
leveltotheCBorfromthevalenceband(VB)toanin-gapdefectlevel.Inourmeasurements,abiasvoltageis
applied to thesample,making the resultantelectronorhole instantly leave thedefects.Thephoto-ionization
probabilityisthendirectlyproportionaltotheabsorptioncross-sectionthatdependsontheimaginarypartofthe
dielectric function related to the transition between the initial ground state and the final excited state. This
processcanbewellapproximatedbythetransitionofasingleelectronfrom/tothein-gapdefectlevelto/from
thebandedges,thustheimaginarypartofthedielectricfunctioncanbecalculatedbetweenthecorresponding
Kohn-Shamlevels.Insummary,thetaskistocalculatetheexcitationenergiesandthecorrespondingimaginary
partofthedielectricfunction.
Tothisend,wecalculatethelowestexcitationenergythatcorrespondstothepureelectronictransition[zero-
phononline(ZPL)energy]bytheconstraintDFTapproach.Basedonourpreviousstudies(15)(16),weusearange-
separatedandscreenedhybriddensityfunctionalHSE06(17)(18).WeexplicitlycalculatedtheZPLenergiesonly
forthebandedges,andassumedthattheexcitationsathigherenergyfollowthecalculatedbandenergiesw.r.t.
thebandedgeenergy.Theimaginarypartofthedielectricfunctioniscalculatedatthegroundstategeometry,
followingtheFranck-Condonapproximation.Opticaltransitionstothebandsrequireaccuratecalculationofthe
electrondensityofstates.SinceHSE06calculationswithmanyk-pointsintheBrillouin-zonearecomputationally
prohibitive,andgiventhatPBEandHSE06Kohn-ShamwavefunctionsareverysimilarforNSandNVcentres,we
appliedageneralisedgradientapproximatedfunctionalPBEtocalculatetheiropticaltransitiondipolemoments
(19). The defects were modelled in a 512-atom diamond supercell. Details about ab-initio calculations are
presentedinsupplementaryinformation.
5
The proposed d-PDMR schemewas tested on shallowNV- ensembles implanted in electronic grade diamond
(sampleTP4).Asareference,s-PDMRwasmeasuredonthesamesample.Atafixedmicrowavepowerof1W,a
maximum s-PDMR contrast of 8.9 ± 0.3%was obtained (Fig. 1b), higher than the PDMR contrast previously
observedon type-Iband type-IIadiamond (11).Undergreen illumination thePDMRcontrast is limitedby the
backgroundphotocurrentresultingfromtheionizationofNs0(11).Theenhanceds-PDMRcontrastobservedon
sampleTP4canbeexplainedbythehighercontributionofthequadraticNV-two-photonionizationtothetotal
photocurrent (see supplementary Fig. 1),which is due to the confinement of the defects to thewaist of the
illumination beam – where the intensity is highest. By contrast, the illumination intensity in bulk samples
decreaseswithdepth,leadingtoahigherproportionoflinearNS0ionizationinthetotalphotocurrent.
Figure1.(a)Schematicdiagramofthes-PDMRandd-PDMRschemes(b)Comparisonbetweend-PDMR(pulsedblueexcitation:226µW,CWgreenexcitation:9.1mW)and s-PDMR (pulsedgreenexcitation:3mW) spectrameasuredonshallowNV-ensembles,intheconditionsleadingtomaximumMRcontrast(sampleTP4,microwavepower:1W).
Amaximumd-PDMRcontrastof9.0±0.4%isobtainedonsampleTP4(Fig.1b),closetothemaximums-PDMR
contrast observed on the same sample at identical microwave power. Measurements of photocurrent as a
functionofgreenandbluelightpoweronsampleTP4(supplementaryFig.1band2b)showinadditionthatat
identicalpower,blueone-photonexcitationinduceshigherphotocurrentthangreenexcitation.Forexample,the
(a)
Lock-inamplifier
+
Pulsedgreenlight
SinglecrystaldiamondSingle-beamPDMR
NV0 NV- +hNV- NV0 +e
hν =2.33eV
CWgreenlight
Singlecrystaldiamond
Pulsedbluelight
NV0 NV- +hNV- NV0 +e
hν =2.75eV
Dual-beamPDMRMW
antenna
MWantenna
Lock-inamplifier
+
2820 2840 2860 2880 2900 29200.90
0.95
1.00
1.05
1.10
Lorentzian fit
Dual-beam PDMR
Norm
alized photocurrent (a.u.)
Nor
mal
ized
pho
tocu
rrent
(a.u
.)
Microwave frequency (MHz)
(b)
Single-beam PDMR
0.85
0.90
0.95
1.00
6
photocurrentmeasuredunder226µWexcitation(conditionsleadingtomaximald-PDMRcontrast)isfivetimes
higherunderblue(800fA)thanundergreenlight(165fA).
AlthoughonshallowimplantedNV-ensemblestheMRcontrastsobtainedbyd-PDMRands-PDMRaresimilar,the
d-PDMRschemecouldpotentiallyleadtohighercontrastthans-PDMRincaseofsampleswithhigh[NS0]/[NV-]
ratio,duetothelowercontributionofNS0ionizationtothetotalphotocurrentunderblueillumination.Indeed,
considering the green light power dependence of the photocurrent measured on type-Ib sample E2
(supplementaryFig.1a),under4mWgreenexcitationthetwo-photonionizationofNV-(quadraticfractionofthe
photocurrent)representsonly~1.5%(0.6pA)ofthetotaldetectedphotocurrent,whileab-initiocalculations
indicatethatunder4mWblueillumination~30%(0.6nA)ofthetotalphotocurrentoriginatesfromthe1-photon
ionizationofNV-(seesupplementaryFig.8).
Toexplorethemechanismbehindthed-PDMRscheme,westudiedtheenergydependenceofNVandNSphoto-
ionizationcross-sectionsbyphotocurrentspectroscopy.Thesemeasurementswereperformedonirradiatedand
annealed type-Ibdiamonds, sinceahighdensityofdefects allows to reachahighdynamic rangeofdetected
photocurrent,leadingtoaprecisedeterminationofphoto-ionizationthresholds.
The photocurrent spectrum measured on a type-Ib reference diamond (sample R, [NS0] ~ 160 ppm) can be
observedinFig.2a.Thisspectrumdisplaysaphoto-ionizationbandwithathresholdionizationenergyof~2.2eV,
obtainedbyfittingexperimentaldatatoInkson’sformulaforthephoto-ionizationcross-sectionofdeepdefects
(20).ThisbandcorrespondstotheionizationofNS0toNS
+(21)(22).Thoughitscalculated(+|0)pureelectronic
chargetransitionlevelisatEC-1.7eV(EC:CBminimum)thegiantredistributionofpositionoftheNandCatoms
inthecoreofthedefectuponionizationofNS0resultsinalowionizationcross-sectionatthisenergy.Duetovery
strongelectron-phononinteraction,aphoto-ionizationbandemergesinthephononsidebandsaroundEC-2.2eV
(see(23)and(24)forfurtherdiscussion).
7
Figure 2.Measured and calculated photo-ionization bands. (a) Comparison between photocurrent spectrameasuredonreferencetype-Ibdiamond[sampleR,Ei=2.18(3)eV]andirradiatedandannealedtype-Ibdiamonds[samplesA,Ei=2.66(4)eV;sampleE2,Ei=2.69(3)eV].Ei:thresholdionizationenergyfromInkson’sfitting.(b)Fitting of photocurrent measured on sample A using calculated ionization cross-sections. In the ab-initiocalculationitwasassumedthatNV-,NV0andNS
0ionizationdominatesthespectrum,withotherparasiticdefectscontributingtoasmallextenttothespectruminthelowenergyregion(notshown).
Compared tonon-irradiateddiamond, thephotocurrent spectrameasuredonproton- andelectron-irradiated
type-Ibdiamonds(samplesAandE2,inwhich~10%ofNSdefectsareconvertedtoNV-centres)showablueshift
andtheformationofanionizationbandwiththresholdat~2.7eV(Fig.2a).Photoluminescence,FTIRandoptical
absorptionspectroscopyindicatethatthedominantdefectsinthesesamplesareNSandNV,withsomeadditional
spuriousdefects(possiblyassociatedtoNi)insampleA(seesupplementarynote3).
Wecalculatedtheionizationcross-sectionsofNSandNVdefectsasafunctionofthephoto-excitationenergy(see
supplementarynote4)andcompared the resultswith thephotocurrentmeasurements (Fig.2b for sampleA,
supplementaryFig.8forsampleE2).Inthesimulationplotswesettheexperimentalvalueof[NS0]andfit[NV0]
and[NV–]totheexperimentaldata.Usingonlythesetwofittingparametersweobtained[NV–]≈31.4ppmand
[NV0]≈1.0ppminsampleA,inexcellentagreementwiththeconcentrationsdeterminedfromphotoluminescence
measurements([NV–]≈34.0ppmand[NV0]≈1.1ppm).Ourab-initiocalculationspredicted(25)thatthe(0|–)
acceptorlevelofNVliesjustinthemiddleofthediamondgap,atEC-2.75eV.UnlikeNS,NV0andNV–presentvery
8
similar geometries, thus pure electronic transitions dominate the ionization process. Photonswith an energy
above2.7eVcanthereforeionizeNV–toNV0bypromotinganelectrontotheCB,butalsoconvertNV0backto
NV–bydirectpromotionofanelectronfromtheVB.CalculationspredictinadditionthatNV0has~10timeslarger
ionizationcross-sectionthanNV–at2.75eV,implyingalargerratefortheback-conversionthanfortheionization
ofNV-.
Figure3.d-PDMRonNV-centres. (a) Schematicdiagramof thed-PDMRmechanism(not toscale). Left:one-photon ionization of NV-. Right: Back-conversion from NV0 to NV-. RS: resonant state. (b) d-PDMR contrastmeasuredon shallowNV- ensembles as a functionof the ratioRGB between the green andblue light powers(sampleTP4).Errorbarsrepresentthestandarderrorsofthefittingparameters.
Basedontheresultsofphotocurrentspectroscopyandab-initiocalculations,weexplainthed-PDMRschemeas
follows(Fig.3a).Pulsedbluelight(2.75eV)promoteselectronsfromNV–tripletgroundstate3A2totheCBbya
one-photonprocess(transition1),andinducesalsotheone-photonback-conversionfromNV0toNV-(transition
4).SimultaneousilluminationbyCWgreenlaserlight(2.33eV)inducestransitionsfromthegroundstate3A2to
theexcitedstate3E(transition2),followedbyspin-selectivenon-radiativedecayfromthe|±1>spinmanifoldof
3Etothesingletstate1A1(transition3)(13).Fromthere,electronsfalltothemetastablestate1E(220nslifetime)
(27).Atresonantmicrowavefrequency(2.87GHz),theseshelvingtransitionsresultinatemporarydecreasein
theoccupationofNV–groundstate,andthustoadecreaseinthephotocurrentassociatedwiththeone-photon
3A2
3E
MW2E
2A1
Free electron
|0>
|0>
NV-
NV0
1A1
1E
|±1>
|±1>
12
3
(a)
RS CB
VB
Free holeRS 0 20 40 60 80 100 120 140 160 180
0
2
4
6
8
10
Fixed green light power (9.1 mW) Fixed blue light power (226 µW)
PDM
R c
ontra
st (%
)
Ratio between green and blue light power
(b)
9
ionizationofNV–.Hereweassumethatthephoto-ionizationcross-sectionfromthe1EshelvingstatetotheCBis
low,althoughthemetastablestate1Estatehasbeenrecentlyestimatedtobelocated~0.4eVaboveNV-ground
state(i.e.~2.3eVbelowtheCB)(28)andcouldthereforetheoreticallybeionizedby2.75eVphotons.However,
thenegativeresonancesobservedind-PDMR(Fig.1b)indicatethatthecontributionofthisprocesstothetotal
photocurrentissignificantlylowerthanthecontributionofdirecttransitionsfromNV-groundstatetotheCB.
Ourd-PDMRmodelindicatesthattherelativeratesbetweenthedirectionization,back-conversionandshelving
transitionstothemetastablestate,whichcanbecontrolledbyvaryingtheratioRGBbetweenthegreenandblue
lightpowers,aredominantlyresponsibleforthePDMRcontrast.Atafixmicrowavepower(1Winthepresented
experiments), the PDMR contrasts obtainedby varying the green light power at constant blue power andby
varyingthebluepoweratconstantgreenpowerpresentasimilartrend(Fig.3b),whichindicatesthatintherange
oflaserpowerconsideredhereandforRGB<40,thed-PDMRcontrastriseswithRGB.Thed-PDMRschemeallows
thusanindependentcontrolofthephotocurrentintensity(bythebluelightpower)andtheMRcontrast(byRGB).
Theincreaseinthed-PDMRcontrastwithRGB(observedbelowRGB≈40)canbeexplainedbythetransferofan
increasedproportionofelectronsinitiallyinthe|±1>spinmanifoldtothemetastablestate.AboveRGB≈40,the
contrastsaturatesandslightlydecreases.Itshouldbenotedthatthiseffectdoesnotresultfromthesaturationof
thesingletstate1E,sinceitoccurswhenthebluelightpowerisreducedatfixedgreenlightpower.
Inconclusion,wedemonstratedthataone-photonionizationschemecanbeusedforreadingoutthespinstate
ofNV-. Based on this principle,we designed a novel photoelectric scheme for the detection ofNV-magnetic
resonances,inwhichblueilluminationinducestheone-photonionizationofNV–andconvertsNV0backtoNV-,
while theMRcontrast is independentlycontrolledbyCWgreen light.AmaximalPDMRcontrastof9.0%was
obtainedonshallowNV–centresimplantedinelectronicgradediamond.Thed-PDMRschemeisexpectedtobe
lesssensitivethans-PDMRtobackgrounddefectsindiamondandtoleadthustoenhancedMRcontrastinthe
caseofsampleswithhigh[NS0]/[NV-]ratio.Thisrobustphotoelectricdetectionschemecouldthereforerepresent
10
animportantsteptowardthephotoelectricreadoutofsingleNV-spinstateandbeusedfortheconstructionof
diamondquantumopto-electronicsdeviceswithenhancedperformances.
11
Bibliography
1.Doherty,M.W.,etal.1,2013,Phys.Rep.,Vol.528,pp.1-45.
2.Jelezko,F.andWrachtrup,J.13,2006,phys.stat.sol.(a),Vol.203,pp.3207-3225.
3.Childress,L.andHanson,R.February2013,MRSBulletin,Vol.38,pp.134-138.
4.Rondin,L.,etal.5,2014,Rep.Prog.Phys.,Vol.77,p.056503.
5.Hong,S.,etal.2013,MRSBulletin,Vol.38,pp.155-161.
6.Schirhagl,R.,etal.2014,Annu.Rev.Phys.Chem.,Vol.65,pp.83-105.
7.Balasubramanian,G.,etal.2014,Curr.Opin.Chem.Biol.,Vol.20,pp.69-77.
8.Shi,F.,etal.2015,Science,Vol.347,pp.1135-1138.
9.Maletinski,P.,etal.2012,Nat.Nanotechnol.,Vol.7,pp.320-324.
10.Wolf,T.,etal.2015,Phys.Rev.X,Vol.5,p.041001.
11.Bourgeois,E.,etal.2015,Nat.Com.,Vol.6,p.doi:10.1038/ncomms9577.
12.Dréau,A.,etal.2011,Phys.Rev.B,Vol.84,p.195204.
13.Tetienne,J.-P.,etal.2012,New.J.Phys.,Vol.14,p.103033.
14.Mrozek,M.,etal.2015,AppliedPhysicsLetters,Vol.107,p.013505.
15.Gali,A.,etal.2009,Phys.Rev.Lett.,Vol.103,p.186404.
16.Deàk,P.,etal.2010,Phys.Rev.B,Vol.81,p.15320.
17.Heyd,J.,Scuseria,G.E.andErnzerhof,M.2003,J.Chem.Phys.,Vol.118,p.88207.
18.Krukau,A.V.,etal.2006,J.Chem.Phys.,Vol.125,p.224106.
19.Perdew,J.P.,Burke,K.andErnzerhof,M.1996,Phys.Rev.Lett.,Vol.77,pp.3865-3868.
20.Inkson,J.1981,Phys.C:SolidStatePhys.,Vol.14,pp.1093-1101.
21.Nesladek,M.,etal.25,1998,Appl.Phys.Lett.,Vol.72,pp.3306-3308.
22.Rosa,J.,etal.1999,Diam.Relat.Mater.,Vol.8,pp.721-724.
23.Enckevort,W.J.P.andVersteegen,E.H.1992,J.Phys.:Condens.Matter,Vol.4,p.2361.
24.Thiering,G.,etal.Tobesubmitted.
12
25.Deàk,P.,etal.2014,Phys.Rev.B,Vol.89,p.075202.
26.Siyushev,P.,etal.2013,Phys.Rev.Lett.,Vol.110,p.167402.
27.Acosta,V.M.,etal.2010,Phys.Rev.B,Vol.82,p.201202.
28.Goldman,M.L.,etal.2015,Phys.Rev.B,Vol.91,p.165201.
29.Bube,R.H.Photoconductivityofsolids.s.l.:Wiley,1960.
Acknowledgements
SupportfromEU(FP7projectDIADEMS,grantNo.611143) isacknowledged.A.G.acknowledgestheLendület
programoftheHungarianAcademyofSciences.TheauthorsthankA.JarmolaandD.BudkerfromtheDepartment
ofPhysicsoftheUniversityofCalifornia(Berkeley,California)forthepreparationoftheelectron-irradiatedtype-
Ibdiamond.
Authorcontributions
E.B.andK.B.performedtheexperiments.E.B.processedthePDMRdataandperformedtheanalysis.E.L.andA.G.
carriedouttheab-initiodevelopmentsandcalculations.Y.B.preparedelectrodesontype-Ibdiamondsamples.
G.W.designedandbuiltthebluediodelaseranddesignedtheMWantennas.J.S.preparedtheproton-irradiated
type-Ibdiamond.K.D.andF.A.performedthediamond ion implantation.M.T.proposedtheuseof implanted
defects,designedtheelectrodesandassembledthedevice.M.N.,M.T.andA.G.supervisedthework.E.B.,A.G.
andM.N.wrotethemanuscript.Allauthorsdiscussedtheresultsandcommentedonthemanuscript.
SupplementaryInformationaccompaniesthispaper.
Competingfinancialinterests:Theauthorsdeclarenocompetingfinancialinterests.