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Proceedings of the 12th international conference of the european society for precision engineering and nanotechnology

June 4th - 7th 2012 Stockholm, Sweden

Volume I

Editors: P. Shore H. Spaan T. Burke

Proceedings Compilation: D. Nyman T. Horwood D. Phillips

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Contents

Volume I

Keynotes: Keynotes 24

Session 1: Precision Engineering of Plastic Based 35 Electronics

Session 2: Nordic Region Precision Engineering & 48

Nanotechnology

Session 3: Nano & Micro Metrology 63

Session 4: Ultra Precision Machines & Control 297

Session 5: High Precision Mechatronics 443

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Proceedings of the 12th euspen International Conference - Stockholm - June 2012

K1 Keynote 1: "Production Incubator for Optical Devices: Technology 25V1 and Industrialisation" Hans Hentzell, Swedish ICT Research AB

K2 Keynote 2: "Roll-to-Roll Fabricated Organic Devices" 27V1 Paul W.M. Blom, TNO/Holst Centre, Eindhoven, The Netherlands

K3 Keynote 3: "The Expanding Role of Optical Metrology in Precision 31V1 Engineering" P. de Groot, Zygo Corporation, Middlefield, USA

Oral Session 1: Precision Engineering of Plastic Based Electronics and Optronics

01.1 Equipment for atmospheric, spatial Atomic Layer Deposition in 36V1 roll-to-roll processes R. Knaapen1, P. Poodt1, R. Olieslagers1, A. Lankhorst1, M. van den Boer1, D. van den Berg1, A. van Asten1, F. Roozeboom1,2

1TA/0, Eindhoven, Netherlands 2Eindhoven University of Technology, Netherlands

01.2 Surface metalized polymer nanogratings as high-sensitive 40V1 SERS substrates Uwe Huebner1, K. Weber1'2, D. Cialla12, H. Schneidewind1, M. Zeisberger1, H.-G. Meyer1, J. Popp1,2

11nstitute of Photonic Technology, Germany 2lnstitute of Physical Chemistry and Abbe Center of Photonics, Friedrich-Schiller-University Jena, Germany

01.3 Nanoimprint Lithography technology for high volume 44V1 manufacturing T. Eriksson, K-D Lee, B. Heidari Obducat Technologies AB, Sweden

Oral Session 2: Nordic Region Precision Engineering and Nanotechnology

02.1 Manufacturing of Dimpled Surfaces in Hard Turning and 49V1 subsequent Honing operation J. Kaminski, J. Facht and U. Sjoblom SKF Group Manufacturing Development Centre, MDC, Sweden

02.2 Quantified evaluation of machined surfaces on sintered porous 53V1 stainless steel samples J. Denafas1, H. N. Hansen*1, G. Bissacco1, J. H. Hales2, T. Lund-Olesen2

1 Department of Mech, Eng., Technical University of Denmark 2Danish Technological Institute, Centre for Microtechnology and Surface Analysis, Denmark

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02.3 Development of a state-of-the-art nm-measurement system for 57V1 square meter sized lithography masks Peter Ekberg Micronic Mydata AB, Sweden

Oral Session 3: Nano and Micro Metrology

03 A 1 Scanning measurement of step height and freeform surface by 64V1 using optically trapped microsphere M. Michihata, Y. Takaya, T. Washitani, T. Hayashi Osaka University, Japan

03A.2 Model Based Error Correction for Optical Aberrations in Laser 68V1 Scanning Microscopes L.S. Ginani, R. Theska Ilmenau University of Technology, Germany

03A.3 New reference object for metrological performance testing of 72V1 industrial CT systems P. Müller, J. Hiller, A. Cantatore, G. Tosello, L. De Chiffre Department ofMech. Eng., Technical University of Denmark

03A.4 Design and construction of six-degree-of-freedom motion error 76V1 measurement system in a linear stage using angle sensor-combined grating interferometry ChaBum Lee1, Gyu Ha Kim1, Dong-Jin Lee1, Sun-Kyu Lee1,2,

1 School of Mechatronics, Gwangju Institute of Sei. & Tech., Korea 2RISE, Gwangju Institute of Sei. & Tech., Korea

03B.1 A micro-scanning probe microscope-head with integrated 80V1 interferometric fiber optic displacement sensor Sai Gao, Helmut Wolff, Zhi Li, Ludger Koenders, Uwe Brand Physikalisch-Technische Bundesanstalt (PTB), Germany

03B.2 Optical Absolute Position Measurement on Rough and 84V1 Unprepared Technical Surfaces S. Patzelt, K. Pils, A. Tausendfreund, G. Goch Bremen Institute for Metrology, Automation and Quality Science (BIMAQ), Germany

03B.3 Application of a novel fibre-coupled confocal sensor in a 88V1 nanopositioning and nanomeasuring machine F. G. Balzer1 U. Gerhardt1, T. Hausotte2, K. Albrecht1, E. Manske1

and G. Jäger 11lmenau University of Technology, Institute of Process Measurement and Sensor Technology, Germany 2Chair of Manufacturing Metrology, University Erlangen-Nuremberg, Germany

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03B.4 The assessment of areal surface texture parameters for 92V1 characterizing the adhesive bond strength of copper plated micro-machined glass B. He1, J.N. Petzing1, D.P. Webb2, P.P.Conway1, R.K. Leach3

1 Loughborough University, UK 2Manufacturing Technology Centre, UK 3National Physical Laboratory, UK

Oral Session 4: Ultra Precision Machines and Control

04.1 Advanced Integrated Machine Control for Fast Tool Assisted 298V1 Ultra Precision Machining C. Brecher1, D. Lindemann , M. Zavelberg1, C. Buss1, C. Wenzel1

^Fraunhofer Institute for Production Technology IPT, Germany

04.2 Design of a precision measurement system using moving 302V1 linear scales N. Bosmans1, J. Qian1, J. Piot1, D. Reynaerts1

1ACU Leuven, Department of Mechanical Engineering, Belgium

04.3 Ultraprecision positioning with sub-nanometer resolution by 306V1 using ball screw and aerostatic guide way S. Fukada1, M. Matsuyama1, J. Hirayama1

:Shinshu University, Japan

04.4 Nanometre performance of a 6 DoF MAGLEV system based on 311V1 1 Dp/us encoders A. Krebs1, R. Coleman1, A. Bakker2, R. Klaver2

1ETEL SA - Switzerland 2HEIDENHAIN NUMERIC, Netherlands

04.5 The EMRP Project "Thermal design and dimensional drift" 315V1 J. Flügge1, E. Beckert2, N. Jennett3, T. Maxwell3, D. Petit4, S. Rudtsch1, J. Salgado5, M. Schalles6, R.Schödel1, D. Voigt7, M. Voigt1

1PTB Germany 2FhG IOF Jena Germany 3NPL UK 4PPRIME France 5LNE France 6 TU Ilmenau Germany 7VSL The Netherlands

Oral Session 5: High Precision Mechatronics

05.1 Advanced bearing systems for large diameter rotors 444V1 H.M.J.R. Soemers13, J.B.M. Soetens1, A.J.W. van Lievenoogen1

^Philips Innovation Services, The Netherlands 2Twente University, The Netherlands

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05.2 Reduction of transient thermal deformation in a thin plate 448V1 under moving heat load using thermal modal analysis based control methods T. Morishima1, R. van Ostayen1, J. van Eijk1,2, R. Munnig Schmidt1

1 Delft University of Technology, the Netherlands 2Mice bv, the Netherlands

05.3 Design of smart plucked energy scavengers 453V1 for rotating systems Eugenio G. M. Brusa Dept. Mech and Aerospace Eng, Politecnico di Torino, Italy

05.4 Dynamic error budgeting for performance analysis and 457V1 optimization of active aerostatic bearings G. Aguirre, M. Gorostiaga, M. Buruaga, H. Urreta IK4-IDEKO, Spain

05.5 A two-scale force sensor for power device wire-pull test 461V1 W.J. Chen, G.L. Yang, W. Lin Singapore Institute of Manufacturing Technology, Singapore

Posters Sessions 3-5

Session 3: Nano and Micro Metrology

P3.01 Thickness measurement of silicon MEMS pressure sensor 97V1 membrane using laser generated ultrasound C. McKee1, B.Culshaw1, R. Leach2

1 University of Strathclyde, Electronic and Electrical Engineering Department, UK 'National Physical Laboratory, UK

P3.02 Investigation of a mini clamping system for micro 101V1 manufacturing M. Neugebauer, U. Neuschaefer-Rube Physikalisch-Technische Bundesanstalt (PTB), Germany

P3.03 Precision assessment of surface coating roughness 3D 105V1 parameters M. Kumermanis, J. Rudzitis, A. Avisane, G. Springis Riga Technical University, Latvia

P3.04 Metrology applied to microfabrication 109V1 J.G. Duduch , A.D. Vieira1, R.G. Jasinevicius1

1 University of Sao Paulo, Brazil

P3.06 A boundary segmentation algorithm for extracting micro- 113V1 scale dimensional parameters in the measurement of structured surfaces J. Wang1, X. Jiang1, L.A. Blunt1, R.K. Leach2, P.J. Scott1

^EPSRC Centre for Innovative Manufacturing in Advanced Metrology, University of Huddersfield, UK 2Eng. Measurement Division, National Physical Laboratory, UK

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P3.07 Optical measurement of waviness on specular surfaces by 117V1 Fringe Reflection Technique, FRT B. Daemi, L. Mattsson Industrial Metrology and Optics, Dept. of Production Engineering, KTH Royal Institute of Technology, Sweden

P3.08 Miniature Fiber Interferometer 121V1 C. Hughes, R. Hocken Center for Precision Metrology, University of North Carolina at Charlotte, USA

P3.09 Development of morphological filtering method for 125V1 specification and characterisation of hip replacement taper junctions P.J. Bills, S. Lou, X. Jiang EPSRC Centre for Innovative Manufacturing in Advanced Metrology, University of UK.

P3.10 Material investigation for manufacturing of reference step 129V1 gauges for CT scanning verification A. Cantatore, J. Angel, L. De Chiffre Dept. of Mechanical Eng., Technical Univ. of Denmark, Denmark

P3.11 Areal Roughness Standards 133V1 J. Frühauf1, R. Kriiger-Sehm2, A. Feigner2, T. Dziomba2

^SIMETRICSS GmbH, Germany 2Physikalisch Technische Bundesanstalt (PTB), Germany

P3.12 Nanometer Profile Measurement of Large Aspheric Optical 137V1 Surface by Scanning Deflectometry with Rotation Devices - Development of Three Dimensional Measuring Facility and Experiment Muzheng Xiao, Satomi Jujo, Satoru Takahashi, Kiyoshi Takamasu The University of Tokyo, Japan

P3.13 A new Spindle Error Motion Separation Technique with sub- 141V1 nanometre uncertainty S. Cappa1, D. Reynaerts1, F. Al-Bender1

1 KU Leuven, Department of Mechanical Engineering, Belgium

P3.14 Key ideas on computed tomography measurement corrections 145V1 applied to a conventional CT machine R. Jimenez1, S. Ontiveros1, S. Carmignato2, J.A. Yagüe-Fabra1

^University of Zaragoza, Spain 2 University of Padova, Italy

P3.16 A novel stitching algorithm for the measurement of aspheric 150V1 surfaces M. Negishi, K. Akutsu, K. Hosaka Canon Inc. Japan

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P3.17 Surface texture characterization of ultra-precision machined 154V1 parts based on laser speckle pattern analysis Motochika Shimizu, Hiroshi Sawano, Hayato Yoshioka, Hidenori Shinno Tokyo Institute of Technology, Japan

P3.18 Towards New Interferometer Technology for Surface Metrology 158V1 L.B.Baath and B.G.Rosen Halmstad University, Sweden

P3.19 Preliminary results of a proficiency testing of industrial CT 162V1 scanners using small polymer items J. Angel, A. Cantatore, L. De Chiffre Dept. of Mechanical Eng., Technical Univ. of Denmark, Denmark

P3.20 An automatic interferometer capable to measure the gauge 166V1 blocks up to 1,000 mm TaeBong Eom, MyungSoon Kim, JaeWan Kim, Jong-Ann Kim, HoSuhng Suh and Chu-Shik Kang Korea Research Institute of Standards and Science, South Korea

P3.21 Modeling and Simulation of 2-Dimensional Encoder System 170V1 Hakchu Lee Agilent Technologies, Inc. USA

P3.22 Development of direct pain evaluation test by using Substance 174V1 P Kazuyoshi Tsuchiya1, Yusri1,3, Kagemasa Kajiwara2 and Minoru Kimura2

1Department of Precision Engineering, Tokai University, Japan 2Department of Molecular Life Science, School of Medicine, Tokai University, Japan 3Faculty of Mechanical Engineering, University of Malaysia Pahang, Malaysia

P3.23 ln-situ characterisation of the probing force of contact stylus 178V1 profilers using a micromachined nanoforce actuator Zhi Li, Thomas Ahbe, Sai Gao, Uwe Brand Physikalisch-Technische Bundesanstalt (PTB), Germany

P3.25 Phase-shifting algorithms for the interferometric measurement 182V1 of form error, diameter variation and refractive index inhomogeneity of fused silica spheres C.-S. Kang1,2, U. Griesmann1, J. A. Soons1

^National Institute of Standards and Technology, USA 2Korea Research Institute of Standards and Science, Korea

P3.27 Evaluation of periodic nonlinearities of optical interferometers 186V1 by comparing two interferometers with different wavelength C. Weichert, G. Molnar, S. Strube, P. Köchert, R. Köning, H. Danzebrink, J. Flügge Physikalisch Technische Bundesanstalt, Germany

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P3.28 A plateau-valley separation method for multifunctional 190V1 surfaces characterization A. Godi1, A. Kühle2, L. De Chiffre1

department of Mechanical Engineering, Technical University of Denmark (DTU), Denmark. 2Image Metrology A/S, Denmark.

P3.29 Generalized two-point method for straightness error motion 194V1 measurement in low spatial frequency domain E.Okuyama and Y.lshizuka Akita University, Japan

P3.31 Direct numerical simulation of rough microcontacts 198V1 under normal load R. Meeß, F. Löffler Physikalisch-Technische Bundesanstalt PTB, Germany

P3.32 Error budgeting as a tool for the design of a 2D moving 202V1 platform with nanometer resolution M. Torralba1, M. Valenzuela2, R. Acero1, J.A. Yagüe-Fabra2, J.A. Albajez2, J.J. Aguilar2, R.J. Hocken3

^Centro Universitario de la Defensa, Zaragoza, Spain 2 University of Zaragoza, Spain 3 University of North Carolina at Charlotte, USA

P3.34 Capacitive sensors based kinematic modeling of an indexed 206V1 metrology platform. A. Brau1, J. Santolaria1, J. J. Aguilar1, M. Pueo2

1Dpto. de Ingenieria de Disefio y Fabrication. University of Zaragoza, Spain 2Centro Universitario de la Defensa. University of Zaragoza, Spain

P3.36 Deformation measurement of a plate with damping contact 210V1 J.G. Vogel, J.W. Spronck, R.H. Munnig Schmidt Delft University of Technology, Netherlands

P3.37 Low Energy Non-Contact Electrical Discharge Measurement 214V1 System on a Micro-manufacturing Platform J L Montgomery SmalTec International, USA

P3.38 3D shape measurement system for various refractive indexes 218V1 using optical projection method Ryouta Kamei, Yoshihisa Uchida Dept. of Mechanical Eng., Aichi Institute of Technology, Japan

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Proceedings of the 12th euspen International Conference - Stockholm -June 2012

P3.40 Development of a metrological atomic force microscope 223V1 prototype J Piot1, J Qian1, H Piree2, G Kotte2, J Petry2, J-P Kruth1, A.Volodin3, C Van Haesendonck3, D Reynaerts1

^KULeuven, Department of Mechanical Engineering, Belgium 2FPS Economy - SMD Metrology, Belgium 3KULeuven, Laboratory of Solid-State Physics and Magnetism, Belgium

P3.41 A positioning system using a contact-type capacitive 227V1 displacement sensor Daesil Kang, Sungjoo Kim, Woongji Kim, Wonkyu Moon Dept. of Mechanical Engineering, POSTECH, South Korea

P3.42 The assessment of residual flatness errors in focus variation 231V1 areal measuring instruments F. Hiersemenzer, J. Singh1, J.N. Petzing1, R.K. Leach2, F. Helmli3, R. Danzl3

1 Loughborough University, UK 2National Physical Laboratory, UK 3Alicona Imaging GmbH, Austria

P3.43 Automated Measurement Data Analysis for Micro Structured 235V1 Surfaces G. Lanza, V. Schulze, S. Stockey, M. Chlipala, B. Haefner wbk Institute of Production Science, Karlsruhe Institute of Technology (KIT), Germany

P3.44 Measuring subsurface damage on optical glass 239V1 J. Neauport', C. Ambard2, O. Cahuc3, P. Cormont', N. Darbois', P. Damis3, R. Laheurte3, S. Lambert2, C. Maunier' ' CEA CESTA, BP2, France 2 CEA Le Ripault, France 3I2M Site ENSCBP, France

P3.47 An active bearing rotary unit with magnetic actuators for 243V1 rotation error compensation S.-K. Ro, G. Khim, J.-K. Park Korea Institute of Machinery and Materials, Korea

P3.48 Simple calibration artifact for use on roundness testers 247V1 D. Arneson, M. Liebers, A. Kleineschay Professional Instruments Company Hopkins, USA

P3.50 On-machine measurement of a distance between high speed 251V1 rotation tool tip and workpiece by laser diffraction Panart Khajomrungruang, Keiichi Kimura, Keisuke Suzuki Kyushu Institute of Technology, Japan

P3.51 Recent advances in the development of the LNE metrological 255V1 AFM Younes Boukellal, Benoit Poyet and Sebastien Ducourtieux Laboratoire National de Metrologie et dEssais, France

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P3.52 Super-heterodyne Interferomter for Length-Measurment Using 259V1 the Beat Signal of Laser Diodes and the Optical Frequency Comb X.N. Wang, S. Takahashi, K. Takamasu, H. Matsumoto Dept. of Precision Engineering, the University of Tokyo, Japan

P3.53 Thermal expansion and long term stability of ceramics 263V1 NEXCERA studied by absolute length measurements using multiple wavelengths imaging interferometry R. Schödel1, J. Sugawara2, N. Kosugi2 and H. Unno2

'Physikalisch-Technische Bundesanstalt, Germany 2Krosaki Harima Corporation, Japan

P3.54 Length measurement based on Pulse repetition interval of a 268V1 femtosecond optical frequency comb Dong Wei1, Kiyoshi Takamasu2, Hirokazu Matsumoto2

'Global COE Program "Mechanical Systems Innovation", School of Engineering, The University of Tokyo, Japan 2Dept. of Precision Engineering, The University of Tokyo, Japan

P3.55 Relations between different definitions of optical resolution 272V1 Krüger-Sehm R1, Feigner A1, Fabich M2

1 Physikalisch-Technische Bundesanstalt (PTB), Germany 2Olympus Life Science Europe, Germany

P3.57 A simple yet comprehensive approach to the testing of 276V1 machine tools with arbitrary axis configurations C. Brecher1, J. Flore1, H. Schwenke2, M. Wissmann2, C. Wenzel1

'Fraunhofer Institute for Production Technology (IPT), Germany 2EtalonAG, Germany

P3.58 Resolution-improved digital refocusing microscope for 280V1 microstructure measurement S. Usuki1, M. Uno2, K. T. Miura3

'Division of Global Research Leaders, Shizuoka University, Japan 2Graduate School of Engineering, Shizuoka University, Japan ^Graduate School of Science and Tech., Shizuoka University, Japan

P3.59 How accurate is Computed Tomography? Main findings from 284V1 the CT Audit intercomparison S. Carmignato1, E. Savio2

1 University of Padova, DTG, Italy 2University of Padova, DU, Italy

P3.60 Characterization of large area nanostructured surfaces using 288V1 AFM measurements M. Calaon1, H.N. Hansen1, G. Tosello1, J0rgen Garnass2, C. Ravn3, P.T. Tang3

'Technical university of Denmark, Denmark 2DFM, Danish Fundamental Metrology 3IPU, Denmark

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Proceedings of the 12th euspen International Conference - Stockholm -June 2012

P3.61 Force constant determination of AFM cantilevers with 292V1 calibrated thermal tune method Engl Wolfgang, Sulzbach Thomas NanoWorld Services GmbH, Germany

Session 4: Ultra Precision Machines & Control

P4.01 Dynamic Characterization of a Miniature Ultra-High-Speed 320V1 (UHS) Spindle through Experimental Modal Analysis B.Bediz, E. Korkmaz, B. A. Gozen, O. B. Ozdoganlar Depr. of Mechanical Engineering, Carnegie Mellon University, USA

P4.02 "Taming" ultrasonic vibrations with ILC for controlled pre- 324V1 heating of polymeric embossing process Jun Liang Tan1,2, Choon Meng Kiew1, Puttachat Khuntontong1, Guilin Yang1, Yee Cheong Lam2

1 Singapore Institute of Manufacturing Technology, Singapore 2Nanyang Technological University of Singapore, Singapore

P4.04 A quality control system for laser chemical finishing of micro 328V1 forming tools P. Zhang1, S. Mehrafsun2, G. Goch1, F. Vollertsen2

1BIMAQ, Bremen Institute for Metrology, Automation and Quality Science, University of Bremen, Germany 2BIAS, Bremer Institut für angewandte Strahltechnik GmbH, Germany

P4.05 Chuck System for Integrated IR-Based Temperature 332V1 Measurement in Rotational Grinding of Sapphire Wafers F. Klocke1, O. Dambon1, M. Herben1, D. Veselovac2, O. Adams2, E. Kuljanic3, M. Sortino3, G. Totis3

Fraunhofer Institute for Production Technology IPT, Germany 2Laboratory for Machine Tools and Production Engineering, RWTH Aachen University, Germany ^Department of Electrical, Management and Mechanical Engineering, University of Udine, Italy

P4.06 Thermal Stability and Geometric Error Assessment of A 336V1 Hydrostatic Bearing Guided Machine J.Y. Shim , C.H, Park, C.H. Lee Ultraprecision Systems Lab., Korea Institute of Machinery & Materials, Korea

P4.07 Image Recognition and Interferometry Applied to High 340V1 Performance Positioning Systems Luciana Montanari, Arthur Jose Vieira Porto, Jaime Gilberto Duduch University of Säo Paulo, Brazil

P4.08 Influences of Control, Feedback and Servo Drive Systems on 344V1 Precision Machining C. Brecher, D. Lindemann, C. Wenzel Fraunhofer Institute for Production Technology IPT, Germany

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P4.10 Design of a uECM machine tool: a holistic approach and its 348V1 implementation perspectives Qingshun Bai1 2, Atanas Ivanov1, Kai Cheng1, Frank Wardle3

1 School of Eng. and Design. Brunei University, Oxbridge, UK 2Dept. of Mech. Manuf. & Autom., Harbin Institute of Technology, Harbin, China 3UPM Ltd, UK

P4.11 Development of a freezing pin chuck for fabricating a 352V1 nonwarped substrate: Peeling due to thermal stress during polishing and deformation during fixing K. Takehana1, A. Une1, N. Ogasawara1, K. Yoshitomi1, and M. Mochida1

^Dept. of Mechanical Engineering, National Defense Academy, Japan

P4.13 Performance of High-Speed Precision Air-Bearing Spindle 356V1 with Active Aerodynamic Bearing H. Mizumoto1, Y. Yabuta1, S. Arii1, Y.Tazoe2, T. Hirose2

1 Tottori University, Japan 2Nachi-Fujikoshi, Japan

P4.15 Workspace and Dexterity Optimization of 3-PRR Planar 360V1 Parallel Manipulator Yanlu Dong, Jeong-Jae Lee, Yong-Ho Jeon, Moon-Gu Lee" , Min-Sung Hong School of Mechanical Engineering, Ajou University, Korea

P4.17 Nearly motionless initial angle estimation for non-salient 364V1 permanent magnet synchronous motors Mikael Bianchi, Ivan Furlan, Silvano Balemi University of Applied Sciences and Arts of Southern Switzerland (SUPSI), Switzerland

P4.18 Simulation of 6 DOF Motion Errors using the Transfer 368V1 Function Method in the Linear Motion Systems C. H. Park, J. S. Oh, G. Khim Korea Institute of Machinery and Materials(KIMM), Korea

P4.20 An Iterative Learning Control Architecture For Precision 372V1 Machining Processes Ivan Furlan, Silvano Balemi University of Applied Sciences of Southern Switzerland, Switzerland

P4.21 Machine integrated, direct measuring devices for the 376V1 compensation of thermal deformation C. Brecher, J. Flore,. M. Klatte, A. Merz, C. Wenzel Fraunhofer Institute for Production Technology IPT, Germany

P4.22 Demand oriented Calibration of 5-Axis Machine Tools 380V1 C. Brecher, J. Flore, C. Wenzel, C. Radermacher Fraunhofer IPT, Germany

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P4.23 Evaluation of dynamic characteristics of water driven stage Y. 384V1 Nakao, T, Sano, S. Harada, K. Suzuki Kanagawa University, Japan

P4.24 Precision Measurement of Rail Profiles in Aerostatic Stages 388V1 G. Khim1, J. S. Oh1, J-S. Oh1, C. H. Park1

1 Korea Institute of Machinery and Materials(KIMM), Korea

P4.26 Improving laser material processing objective lenses towards 392V1 better utilization of high brilliance light sources Lutz Reichmann, Hans- Jürgen Feige, Dr. Jürgen Finster, Matthias Bening, Jörg Wunderlich, Dr. Peter Triebel, Helmut Bernitzki, Uwe Schuhmann Jenoptik Optical Systems GmbH

P4.27 6-DOF Parallel Nano-Positioning System with flexure joints 395V1 and Piezoelectric Stepping Motors Dongwoo Kang1, Hyo Young Kim2, Daegab Gweon2

1KIMM, Korea 2NOM Lab., KAIST, Korea

P4.28 Optimal Performance of a Controlled System with Structural 399V1 Parameter Variation K. Vandyshev, M. Langelaar, F. van Keulen, J. van Eijk Delft University of Technology, The Netherlands

P4.29 Flexure Based Feed Unit for Long Feed Ranges: Concept and 403V1 Design N. Kong, S. Grimske, B. Röhlig, J.P. Wulfsberg Helmut-Schmidt-University, University of the Federal Armed Forces Hamburg, Germany

P4.30 New Slurry-flowback Mechanism Stabilizing Slurry Flow to 407V1 Improve Removal Rate for CMP K. Yoshitomi1, A. Une1, M. Mochida1

1Depf. of Mechanical Engineering, National Defense Academy, Japan

P4.31 The equipment and technologies for ultra precision 410V1 machining and grinding of tools from extra-hard materials G.V. Borovsky \ E.M. Zakharevich 2, V.S. Gorohov2, S.V. Grubyy 3

' Russian Research & Development Institute of Cutting Tools "Vniiinstrument", Russia 2 Join stock company "Resource Tochnosty" 3 Bauman Moscow State Technical University

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