fabrication and properties of metal...
TRANSCRIPT
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These are preliminary lecture notes, intended only for distribution to participants.
SMR: 1643/14
WINTER COLLEGE ON OPTICS ON OPTICS AND PHOTONICSIN NANOSCIENCE AND NANOTECHNOLOGY
( 7 - 18 February 2005)
"Fabrication and Propertiesof Metal Nanoparticles"-I
presented by:
F. HubenthalUniversität Kassel
Fachbereich Physik
Germany
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Fachbereich NaturwissenschaftenInstitut für Physik
Dr. Frank Hubenthal
Institut für Physik, Experimentalphysik I, and
Center for Interdisciplinary Nanostructure Science and Technology
Universität Kassel
Internet: http://www.physik.uni-kassel.de/exp1E-Mail: [email protected]
Preparation and Characterisationof Metal Nanoparticles
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Fachbereich NaturwissenschaftenInstitut für Physik
by Richard P. Feynman (1959)
“Why cannot we write the entire 24 volumes of the Encyclopedia Brittanica on the head of a pin?”
http://www.zyvex.com/nanotech/feynman.html
„There's Plenty of Room at the Bottom“
An Invitation to Enter a New Field of Physics
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Fachbereich NaturwissenschaftenInstitut für Physik
Richard P. Feynman1918 – 1988
There’s Plenty of Room at the Bottom• Miniaturisation of circuits, computers, storage media, etc. down to an
atomar/molecular level
• Biological systems as an example how to store information and function
• Writing the entire information of all books in the world in a cube of material of the size of a piece of dust
• Imaging and manipulation of single atoms and molecules
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Fachbereich NaturwissenschaftenInstitut für Physik
Nanostructure Science
1 Nanometer = 1 nm = 0,000000001 m
How many atoms are inside one Nanoparticle?
Example: Sodium
20 Atoms: Ø = 1,1 nm500 Atoms: Ø = 3,3 nm107 Atoms: Ø = 100 nm
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Fachbereich NaturwissenschaftenInstitut für Physik
number of atomsper cluster
number of atomson the surface of the cluster
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Fachbereich NaturwissenschaftenInstitut für Physik
ultimate miniaturisation
new properties of materials, phenomena and processes
single elements and nano-systems:building blocks of natural and artificial matters
efficient fabrication: little energy, little waste
Why nanostructures ?
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Fachbereich NaturwissenschaftenInstitut für Physik
Why Nanoparticles
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Fachbereich NaturwissenschaftenInstitut für Physik
Ionisation potential and work funktion of mercury
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Fachbereich NaturwissenschaftenInstitut für Physik
Macroscopic Matter
Atoms, MoleculesT.P. Martin
• exciting fundamental research
• tailored materials for applications
• huge technological potential
⇒
top-down, lithography, structuring
⇒ bottom-up, self organization,controlled growth
Preparation
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Fachbereich NaturwissenschaftenInstitut für Physik
Electron Beam Lithography
N. Felidj, J. Aubard, G. Levi, J.R. Krenn, M. Salerno,G. Schider, B. Lamprecht, A. Leitner, F.R. Aussenegg, Phys.Rev.B. 65, 075419 (2002).
limited to structures withR > 20 nm
Scanning electronic microscope(SEM) image of a gold particlesquare grating produced byelectron beam lithography. Thediameter of the particlesparallel to the substrate is 110 nm and the particle height is 60 nm.
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Fachbereich NaturwissenschaftenInstitut für Physik
Nanosphere Lithography
Choosing and cleaning of the substrate
Preparea solution of nanospheres
Nanosphere lithography technique
V. Ng, Y. V. Lee, B. T. Chen and A. O. Adeyeye, Nanotechnology 13, 554-558, 2002.
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Fachbereich NaturwissenschaftenInstitut für Physik
Substrate Preparation
• The mean surface corrugation should be much smaller than the particle diameter.
glass plates;polished silicon wafers;
• Cleaning the substrate: piranha solution (3:7 H2O2:H2SO4);alkaline solution (NaOH, KOH) 20 minutes, after that 5 minutes in 1 M hydrochloric acid, finally 20 minutes in pure water;combine piranha solution with alkaline solution
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Fachbereich NaturwissenschaftenInstitut für Physik
NSL procedure
Step 2: Gold Deposition
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Fachbereich NaturwissenschaftenInstitut für Physik
Step 3: Nanosphere Removal
Step 4: Annealing
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Fachbereich NaturwissenschaftenInstitut für Physik
Preparation Methods
Angle Evaporation
Dip Coating
Spin Coating
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Fachbereich NaturwissenschaftenInstitut für Physik
Spin Coating• The thickness of the
monolayer can be calculated by:
• Spin speed: 100-2000 rpm;
3/1
20
23~ ⎟
⎟⎠
⎞⎜⎜⎝
⎛
⋅⋅
=ωρ
η
A
mh
h = coating thickness, ω = angular speedρΑ0 = initial value of the density of the solution η = viscosity, m = evaporation rate of the solvent
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Fachbereich NaturwissenschaftenInstitut für Physik
Angle evaporation
• Investigate the monolayer formation by varying the angle of the tilt plane from 5° to 15°.
• Use of a Peltier cell for a good thermal stability.• To control the evaporation rate, means to control the
temperature.
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Fachbereich NaturwissenschaftenInstitut für Physik
Dip coating method
• Controlled dipping and pulling of the substrate with a constant velocity smaller than 1mm/s;
• The coating thickness can be calculated by the Landau-Levich equation:
L.D. Landau, B.G. Levich, Acta Physiochim 17, 42-54 , 1942.
( )( ) 2/16/1
3/2
94.0g
vhLV ⋅
⋅⋅=
ργη h = coating thickness, ν = velocity
γ = Surface tension, ρ = densityη = viscosity, g = gravity constant
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Fachbereich NaturwissenschaftenInstitut für Physik
Nanosphere removal
• Dissolved in Tetrahydrofuran (THF)
• Soaking in dichlormethane for one minute
• Ultrasonic bath in pure water for five minutes
• Adhesive tape
F. Burmeister, W. Badowsky, T. Braun, S. Wieprich, Applied Surface Science 144, 461-466, 1999.
Also limited to sizes larger than Req = 20 nm
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Fachbereich NaturwissenschaftenInstitut für Physik
Examples of bottom-up techniques for the preparation of metal nanostructures
• Deposition of atoms and molecules– Pulsed laser deposition– Electron beam evaporation– Chemical vapour deposition
• Adiabatic expansion• Wet-chemically
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Fachbereich NaturwissenschaftenInstitut für Physik
• 1857: Faraday‘s colloidal solutions of gold (The Royal Institution‘s Faraday Museum, London)
• Reduction of hydrogen tetrachloraureate HAuCl4 bysodium citrate
• Negative citrate ions adsorb on the nanoparticles surface and prevent aggregation
J. Turkevich, P.C. Stevenson, J. Hiller: Discuss. Faraday Soc. 11, 55 (1951).
Frens, G.: Nat. Phys. Sci. 241, 20 (1973).
Chemical reduction
H(AuCl4) . 3H2O + C6H8O7
Au-NP, size: 30 nm – 40 nm
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Fachbereich NaturwissenschaftenInstitut für Physik
purple solution:tetrachloraureateand sodium citrateat 90ºC
blue solution:tetrachloraureateand hydrazinesulfate solution
Different Methods – Different Properties
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Fachbereich NaturwissenschaftenInstitut für Physik
Chemically prepared nanoparticles
Hodac et al. J. Phys. Chem. B 2000, 104, 11708-11718Link et al. J. Phys. Chem. B 2000, 104, 6152-6163
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Fachbereich NaturwissenschaftenInstitut für Physik
Optical properties (Ag-NP)
Mock et al. J. CHEM. PHYS. 116, 2002
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Fachbereich NaturwissenschaftenInstitut für Physik
Colours
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Fachbereich NaturwissenschaftenInstitut für Physik
Preparation of clusters by means ofadiabatic expansion
http://e-diss.uni-kiel.de/diss_473/d473.pdf
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Fachbereich NaturwissenschaftenInstitut für Physik
http://www.ebepe.com/html/310_div.html
adiabatic expansion
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Fachbereich NaturwissenschaftenInstitut für Physik
cluster source
massspectrometer
ionisation
Mass separation
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Fachbereich NaturwissenschaftenInstitut für PhysikFachbereich NaturwissenschaftenInstitut für Physik
Mass spectrum for Xe
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Fachbereich NaturwissenschaftenInstitut für PhysikFachbereich NaturwissenschaftenInstitut für Physik
Mass spectrum for NaCl
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Fachbereich NaturwissenschaftenInstitut für Physik
Example: C60
Preparation by means of Laser evaporation
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Fachbereich NaturwissenschaftenInstitut für PhysikFachbereich NaturwissenschaftenInstitut für Physik
C60
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Fachbereich NaturwissenschaftenInstitut für Physik
The Nobel Prize in Chemistry 1996„for their discovery of fullerenes“
Robert F. Curl Jr. Sir Harold W. Kroto Richard E. Smalley
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Fachbereich NaturwissenschaftenInstitut für Physik
also called buckyball
Third allotropic form of carbon
• graphite• diamond• fullerene
C60
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Fachbereich NaturwissenschaftenInstitut für Physik
American Pavillion (Biosphère), Expo '67,fromRichard Buckminster Fuller, Ile Sainte-Hélène, Montreal
Geodesic Dome
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Fachbereich NaturwissenschaftenInstitut für PhysikFachbereich NaturwissenschaftenInstitut für Physik
beam of atoms
desorption
cluster
coalecence island growth
heterogeneousnucleation homogeneous
nucleationdiffusion
Deposition of Atoms
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Fachbereich NaturwissenschaftenInstitut für Physik
layer-by-layerFrank-van der Merwe
layer+islandStranski-Krastanow
islandVolmer-Weber
Growth modes
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Fachbereich NaturwissenschaftenInstitut für Physik
Atomic processes responsible for nucleation and growth of thin films on substrate surfacesStep 1: Adsorption of adatomsAtoms arrive from the gas phase at rate R or at an equivalent vapor pressurep such that
mkTpRπ2
=with: m atomic mass
k Bolzmann constantT absolute temperature of vapor source
This creates adatoms the areal density of which increases initially as n(t) = R * tThe adatoms remain on the surface only for a certain period of time given by the Frenkel equation:
with: τ0 ≈ 10-12 s oscillation period of atoms in surface potential
Ea adsorption energymean residence time
kTEa
e0ττ =
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Fachbereich NaturwissenschaftenInstitut für PhysikFachbereich NaturwissenschaftenInstitut für Physik
Atomic processes responsible for nucleation and growth of thin films on substrate surfacesStep 1: Examples1. mean residence time as a function of binding energy with
T = const. = 100 K
2. mean residence time as a function of temperature withE = const. = 1 eV
1067 s2,0164 a0,564 h0,410 s0,3
2,2 * 10-8 s0,1
τE [eV]
5 * 10-5 s6002 * 104 s300
1039 s100ΤT [K]
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Fachbereich NaturwissenschaftenInstitut für PhysikFachbereich NaturwissenschaftenInstitut für Physik
Atomic processes responsible for nucleation and growth of thin films on substrate surfacesStep 2: Surface diffusion of adatomsThe diffusion constant D is given by:
with: νd jump frequencyEd diffusion energya ≈ 0,2 – 0,5 nm jump distance
Ed ≤ 0,4 Ea
kTE
dd
eaD−
=4
2ν
The mean square path S covered by diffusing atoms in time t is given by (Einstein and Smoluchowski):
During typical residence times τ, S can be very large and the atoms migrate over considerable distances of micrometers or more.
S2 = D * τ
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Fachbereich NaturwissenschaftenInstitut für PhysikFachbereich NaturwissenschaftenInstitut für Physik
Atomic processes responsible for nucleation and growth of thin films on substrate surfacesStep 3: Nucleation and cluster growthDuring their random walk on the surface the atoms collide with other atoms or surface defects
☺ ☺homogenous and / or heterogenous nucleation(high deposition rate) (low deposition rate)
☺atoms „decorate“ surface defects that act as nucleation centers
☺defect density: 109 – 1010 cm-2 on annealed single crystal surfaces
☺well-defined relation between mean cluster size and number of deposited atoms
Each growing cluster is surrounded by a „capture area“. Atoms impinging on thesubstrate in this area are tapped at the cluster perimeter after surface diffusionand thus contribute to particle growth.
Diffusion of clusters is usually neglected.
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Fachbereich NaturwissenschaftenInstitut für PhysikFachbereich NaturwissenschaftenInstitut für Physik
Process depends on temperature:
Since most growth processes take place more or less far from thermal equilibrium
metastable growth modes are possible
at low temperature usually fairly homogenous films can bedeposited even if 3-dimensional islands are favorable
Alternative points of view:
Do the adsorbed atoms bind more strongly to each other orto the substrate atoms?
Does or does not wet the film the substrate?
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Fachbereich NaturwissenschaftenInstitut für PhysikFachbereich NaturwissenschaftenInstitut für Physik
Substrate surface energy σ1Adsorbate surface energy σ2Interface energy γ12
Island/clusters are thermodynamically favorable and formed if
σ2 + γ12 < σ1
Layer-by-layer growth is thermodynamically favorable and occurs if
σ2 + γ12 > σ1
Heteroepitaxy of lattice matched systems
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Fachbereich NaturwissenschaftenInstitut für PhysikFachbereich NaturwissenschaftenInstitut für Physik
In reality the substrate and the film have different latticeconstants ⇒ mismatch
⇒ epitaxial strain
⇒ interface energy γ12 changes as a functionof film thickness
⇒ initial growth is layer-by-layer, however, with increasing strain energy
the system can lower the strain energy that increases withtickness by strain relaxation
⇒ island formation
⇒ transition from Frank van der Merwe to Volmer-Weber growth
(resulting in Stranski-Krastanow growth for the complete system)
Heteroepitaxy with lattic mismatch
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Fachbereich NaturwissenschaftenInstitut für PhysikFachbereich NaturwissenschaftenInstitut für Physik
J.J. Métois, J.C. Heyraud, R. Kern, Surf. Sci. 78, 191 (1978)
Lattice mismatch between clusters and substrate surface
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Fachbereich NaturwissenschaftenInstitut für Physik
Frank-van der Merwe growth
http://sundoc.bibliothek.uni-halle.de/diss-online/01/02H034/prom.pdfhttp://www.fkf.mpg.de/kern/lectures/lectures_pic.html
copper on ruthenium and silver on platinium
so-called dendritic or fractal structure
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Fachbereich NaturwissenschaftenInstitut für Physik
Dendritic structures in nature
http://www.digicamfotos.de/index3.htm?http://www.digicamfotos.de/4images/details.php?image_id=24482&mode=search
ice crystals
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Fachbereich NaturwissenschaftenInstitut für PhysikFachbereich NaturwissenschaftenInstitut für Physik
GaAs (311)B substrate
In0,2Ga0,4As covered withAIGaAs on GaAs (311)B substrate
Stranski-Krastanow-Growth
R. Nötzel, Semicond. Sci. Technol. 11 (1996) 1365–1379.
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Fachbereich NaturwissenschaftenInstitut für PhysikFachbereich NaturwissenschaftenInstitut für Physik
Size of AlGaAs dots dependson In content of InGaAs overlayer
In content 0,2 → <r> ≈ 220 nmIn content 0,4 → <r> ≈ 70 nm
R. Nötzel, Semicond. Sci. Technol. 11 (1996) 1365–1379.
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Fachbereich NaturwissenschaftenInstitut für PhysikFachbereich NaturwissenschaftenInstitut für Physik
C.S. Tsai, R.B. Lee, K.J. Vahala,Mat. Res. Soc. Symp. Proc. 358, 969 (1995)
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Fachbereich NaturwissenschaftenInstitut für Physik
Stranski-Krastanow in nature
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Fachbereich NaturwissenschaftenInstitut für Physik
Nylonfaden
Wasserfilm
nylon thread
water layer
Self-organisation of a breaking water layer
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Fachbereich NaturwissenschaftenInstitut für Physik
M. Krohn, Vacuum 37, 67 (1987)
Gold decoration of an NaCl cleavage
surface
Volmer-Weber-Growth
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Fachbereich NaturwissenschaftenInstitut für PhysikFachbereich NaturwissenschaftenInstitut für Physik
J.E. Greene, in Handbook of Crystal Growth, Vol. 1, Elsevier (1993)
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Fachbereich NaturwissenschaftenInstitut für Physik
Volmer-Weber-Growth
Ag / quartz
2 nm
200 nm0
<Req> = 3.5 nm
4 nm
200 nm0
8 nm
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Fachbereich NaturwissenschaftenInstitut für Physik
Equivalent radius of particles on surfaces
Particles are characterized by
1. equivalent radius Req
2. axial ratio a/b
AFM Tip
Rtip ~ 15 nm Scan Line
Clusters on Surface
spherical particles
R
R
V = 4/3πR3
oblate particles(rotational ellipsoids)
b
a
V = 4/3πab2
Req