FANUC LASER C2000+-MODEL C FANUC LASER C4000+-MODEL C FANUC LASER C6000+-MODEL C

MAINTENANCE MANUAL

B-70475EN/01

No part of this manual may be reproduced in any form. All specifications and designs are subject to change without notice. The products in this manual are controlled based on Japans Foreign Exchange and Foreign Trade Law. The export from Japan may be subject to an export license by the government of Japan. Further, re-export to another country may be subject to the license of the government of the country from where the product is re-exported. Furthermore, the product may also be controlled by re-export regulations of the United States government. Should you wish to export or re-export these products, please contact FANUC for advice. In this manual we have tried as much as possible to describe all the various matters. However, we cannot describe all the matters which must not be done, or which cannot be done, because there are so many possibilities. Therefore, matters which are not especially described as possible in this manual should be regarded as impossible.

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SAFETY PRECAUTIONS

SAFETY PRECAUTIONSThis manual contains precautions which must be observed during operation and maintenance of the laser oscillator to ensure the safety of the operator and maintenance personnel and prevent damage to the oscillator. Maintenance involves a variety of risks and, therefore, must be conducted by those personnel who have sufficiently trained in maintenance and safety. Besides the laser oscillator, the laser machining system contains a machine, power magnetics cabinet, servo system, CNC, and operator's panel. This manual describes the laser oscillator. For a description of notes other than those on the oscillator, refer to the corresponding manuals, supplied by the machine tool builder and FANUC. Contents DEFINITION OF WARNING, CAUTION, AND NOTE.........................................................................s-1 WARNINGS AND CAUTIONS ON EXPOSURE ...................................................................................s-2 WARNINGS AND CAUTIONS ON MAINTENANCE...........................................................................s-3 WARNINGS AND CAUTIONS ON HANDLING ...................................................................................s-4 WARNINGS AND CAUTIONS ON MACHINING.................................................................................s-5 WARNING LABELS AND STICKERS ...................................................................................................s-6

DEFINITION OF WARNING, CAUTION, AND NOTETo ensure the safety of maintenance personnel (referred to as users) and prevent damage to the machine, this manual indicates each precaution on safety with "Warning" or "Caution" according to its severity. Supplementary information is indicated by "Note". Read the contents of each "Warning", "Caution", and "Note" before attempting to use the oscillator.

WARNING Applied when there is a danger of the user being injured or when there is a danger of both the user being injured and the equipment being damaged if the approved procedure is not observed. CAUTION Applied when there is a danger of the equipment being damaged, if the approved procedure is not observed. NOTE Notes are used to indicate supplementary information other than Warnings and Cautions. Read this manual carefully, and store it in a safe place.

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SAFETY PRECAUTIONS

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WARNINGS AND CAUTIONS ON EXPOSURE1 WARNING It is extremely dangerous to expose your eyes to direct, scattered, or reflected CO2 laser light. Always wear protective glasses(over OD7 recommended) while the laser is operating. Exposure to laser light can cause blindness. If your eyes are accidentally exposed, seek medical advice immediately. Do not turn on the laser oscillator while a panel is removed or a door is open. Operating the laser with a door open or panel removed may result in the operator being directly exposed to CO2 laser radiation. Exposure to laser light can cause blindness and/or severe burns. If your eyes are accidentally exposed to laser light, seek medical advice immediately. Before turning on the power during maintenance if absolutely necessary, wear protective glasses and clothing to prevent accidents. If you wear protective glasses, dont look at the laser light directly. Surround the laser machining tool with a fence made of a material which absorbs laser light well (such as acrylic). Place appropriate warning notices on the fence. The door in the safety fence shall be fitted with an interlock switch such that opening the door stops the laser. Failure to provide such a fence exposes persons in the vicinity of the machine tool to the danger of being exposed to CO2 laser radiation and the associated risk of blindness. If a person is accidentally exposed to laser light, seek medical advice immediately. If the laser oscillator is operated with a panel open, ultraviolet radiation is emitted from the high-frequency discharge section. Gazing the discharge section for a long time can cause visual disturbances such as impaired eyesight. Always wear protective glasses during work. If you feel trouble with your eyes, seek medical advice immediately. Open beam paths should be located above or below eye level where practical. Enclose the path of the laser beam with covers. Do not leave the end of the beam path open. Place laser- absorbing material at the end of the beam path to absorb the beam's energy. A CO2 laser beam is directional and has a high energy density. Exposure to laser light can cause blindness. Flammable material may burn or explode if exposed to the laser beam. If your eyes are accidentally exposed to laser light, seek medical advice immediately. If there is a possibility of being exposed to CO2 laser radiation exceeding the maximum permissible exposure (MPE) level for skin, wear protective clothing. Otherwise, there is a danger of being burnt. The oscillator is fitted with a red semiconductor laser to indicate the approximate position of invisible CO2 laser beam. Do not look directly at the semiconductor laser beam. Otherwise, your eyes may be injured.

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NOTE 1 Warning labels are affixed to those parts of the laser oscillator where there is a danger of exposure to laser radiation. Observe the precautions given on the labels. 2 During installation or maintenance necessitating the opening of an oscillator door or the removal of a panel, only persons who have undergone maintenance training should operate the laser. In such a case, extreme caution must be exercised. 3 Laser products shall conform to the regulations laid down in the laser safety standard, including that stipulating control using a key. The oscillator start signal (RUN ON) shall be controlled with a key switch such that the oscillator cannot be turned on without a specific key. Control using a key ensures that other than the authorized personnel cannot operate the laser oscillator. It is extremely dangerous if a person who is unfamiliar with the equipment attempts to operate the laser oscillator. 4. The shutter shall be unlocked only while a beam is being output. Otherwise, keep the shutter locked to provide protection should the laser accidentally be turned on. The laser oscillator is equipped with a warning light as an option. The warning light blinks while discharge is in progress or whenever laser radiation is possible. While the warning light is blinking, pay careful attention to laser radiation and high voltages.

WARNINGS AND CAUTIONS ON MAINTENANCE1 WARNING A high voltage of 3 to 4 kV0-p is applied to some places in the laser oscillator cabinet. Therefore, do not turn the power to the oscillator on or operate the oscillator when an oscillator panel is open. Operating the laser oscillator with a panel open can cause a touch on a high-voltage place, resulting in electric shock. Before daily inspection, the replacement of a maintenance part or maintenance, open the main circuit breaker and turn the power supply off (double power-off). To prevent the power from being inadvertently turned on, lock the circuit breaker open, and affix an indication of work in progress. Before turning on the power during maintenance if absolutely necessary, take measures for safety. The gas circulating system in the oscillator becomes very hot. Do not touch the gas pipes, turbo blower, heat exchanger, or exhaust pump, until they have cooled down sufficiently after the oscillator has been turned off. Otherwise, you may be burnt. The oscillator contains cooling fan units. Although the fan units are fitted with a finger guard, to prevent injury, keep your hands well away from the fans. Laser oscillator is equipped with the warning light, optionally. The warning light is blinking continuously during the system in the discharging mode. Please make sure that the blinking function is working properly for the safety purpose, and change immediately in case of any functional failure.

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SAFETY PRECAUTIONS

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WARNINGS AND CAUTIONS ON HANDLING1 WARNING The oscillator output mirror and focusing lens on the machining head both have a substrate made of ZnSe (zinc selenide), a toxic substance. Therefore, do not touch the mirror or lens with your bare hands if it is damaged. ZnSe is not poison, but inhaling ZnSe dust may cause difficulty in breathing, completely stopping the breathing of the victim in the worst case. If you accidentally touch the mirror or lens with your bare hands, wash your hands well under running water. If you accidentally inhale ZnSe dust or debris, seek medical advice immediately. If the laser oscillator must be moved, entrust the work to the machine tool builder whenever possible. If performed by inexperienced personnel, the oscillator may topple or be dropped, resulting in a potentially fatal accident. When the machine tool builder is not available to move the oscillator, follow the procedure described on the hanging method label. While moving the oscillator, stand well clear and never pass under the oscillator. Do not allow any dangerous or high-pressure gas to get into the oscillator housing. The oscillator cabinet has a hermetic structure (dustproof and dripproof), it cannot be ventilated easily. 1) Flammable gases such as oxygen can cause a fire or explosion. 2) Toxic gases can harm operators during maintenance. 3) Organic gases can degrade machining performance. 4) High-pressure gases can damage a panel or the cabinet, resulting in injury from flying matters. If such a gas accidentally gets into the oscillator housing, remove a panel for ventilation. The installation room must be also well ventilated. To purge the oscillator housing, use purified, low-pressure air or nitrogen. Those who use a cardiac pacemaker must avoid maintenance and inspection work during the discharge of the oscillator because the electromagnetic waves generated during the discharge may affect the operation of the pacemaker. If you feel sick or out of condition, either immediately leave the spot or stop operation.

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CAUTION 1 The oscillator is controlled according to the CNC internal parameter settings. If a numeric value different from a setting is entered and the oscillator is operated, the oscillator may malfunction. In the worst case, the oscillator may be damaged. 2 Use laser gas with the specified correct composition ratios. If you use laser gas with different specifications by mistake, performance degradation or an alarm will result. In the worst case, the oscillator may be damaged. 3 If storing the laser oscillator for a long time or leaving it unused for a long time, drain the inside of the oscillator. Otherwise, corrosion and clogging may result. Also drain the oscillator if it is likely to freeze in winter. If it freezes, the water piping and cooling system components will be damaged.

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NOTE Do not discard a used output mirror or focusing lens together with regular waste. If the output mirror or focusing lens is replaced, return the original to the supplier or entrust it to a specialized disposal company.

WARNINGS AND CAUTIONS ON MACHINING1 WARNING Do not look at the machining point without eye protection. Otherwise, your eyes may be exposed to reflected laser light, resulting in blindness. If your eyes are accidentally exposed to laser light, seek medical advice immediately. Before attempting to machine any material for the first time, consult with the manufacturer of the material. Some materials generate toxic gases when cut or drilled by a laser beam. Should you accidentally inhale any toxic gas, seek medical advice immediately. The workpiece becomes very hot during machining. Never touch the workpiece with your bare hands. Otherwise, you may be burnt. During machining, extremely hot chips are likely to be generated. Unless sufficient caution is exercised, there is a danger of the operator being burnt, or of a fire being started. Some materials may burn or explode when laser machined. Before attempting to machine any material for the first time, consult with the manufacturer of the material.

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NOTE 1 Do not place any flammable material (such as paper, cloth, or wood) near the workpiece table. 2 Keep a fire extinguisher beside the unit.

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SAFETY PRECAUTIONS

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WARNING LABELS AND STICKERSThe oscillator uses high voltages and laser beam radiation. Such hazards are indicated with warning labels attached to the positions. In addition, there are some stickers for the explanation. This section describes the warning labels, stickers and their positions. (1) Standards

Fig.S.1 (a) The positions of warning labels and stickers for C2000i-C (Short optical path length type)

Fig.S.1 (b) The positions of warning labels and stickers for C2000i-C (Short optical path length type: rear view)

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Fig.S.1(c) The positions of warning labels and stickers for C2000i-C (Long optical path length type)

Fig.S.1 (d) The positions of warning labels and stickers for C2000i-C (Long optical path length type: rear view)

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Fig.S.1 (e) The positions of warning labels and stickers for C4000i-C (Short optical path length type)

Fig.S.1 (f) : The positions of warning labels and stickers for C4000i-C (Short optical path length type: rear view)

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Fig.S.1 (g) The positions of warning labels and stickers for C4000i-C (Long optical path length type)

Fig.S.1 (h) The positions of warning labels and stickers for C4000i-C (Long optical path length type: rear view)

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Fig.S.1 (i) The positions of warning labels and stickers for C6000i-C

Fig.S.1 (i) The positions of warning labels and stickers for C6000i-C (Rear view)

(a) Warning labels Class identification label (FDA)

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SAFETY PRECAUTIONSModel C2000i-C C4000i-C C6000i-C Maximum output 5KW 8KW 12KW Gas composition CO2: N2: He=5:35:60% CO2: N2: He=5:35:60% CO2: N2: He=5:35:60%

Class identification label (FDA)

Model C2000i-C C4000i-C C6000i-C

Maximum output 5KW 8KW 12KW

Gas composition CO2: N2: He=5:35:60% CO2: N2: He=5:35:60% CO2: N2: He=5:35:60%

Laser mark

Aperture label

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SAFETY PRECAUTIONS Lifting method label

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Access label

Label inside the access panel

Discharge section label

Label for regulating the atmospheric gasses in the oscillator housing

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Ascent/Descent prohibited label

(b) Stickers Maintenance label

C2000i-C, C4000i-C

C6000i-C

Certification label

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SAFETY PRECAUTIONS SCCR

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C2000i-C

C4000i-C

C6000i-C

Equipment name plate

Address label

Cooling water and gas maintenance label

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Inlet / outlet of water and gas

(2) CE Marking

Fig.S.1 (a) The positions of warning labels and stickers for C2000i-C (Short optical path length type)

Fig.S.1 (b) The positions of warning labels and stickers for C2000i-C (Short optical path length type: rear view)

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Fig.S.1(c) The positions of warning labels and stickers for C2000i-C (Long optical path length type)

Fig.S.1 (d) The positions of warning labels and stickers for C2000i-C (Long optical path length type: rear view)

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Fig.S.1 (e) The positions of warning labels and stickers for C4000i-C (Short optical path length type)

Fig.S.1 (f) The positions of warning labels and stickers for C4000i-C (Short optical path length type: rear view)

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Fig.S.1 (g) The positions of warning labels and stickers for C4000i-C (Long optical path length type)

Fig.S.1 (h) The positions of warning labels and stickers for C4000i-C (Long optical path length type: rear view)

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Fig.S.1 (i) The positions of warning labels and stickers for C6000i-C

Fig.S.1 (i) The positions of warning labels and stickers for C6000i-C (Rear view)

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SAFETY PRECAUTIONS(a) Warning labels Class identification label

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C2000i-C

C4000i-C

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C6000i-C

Laser mark

Access label

Label inside the access panel

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SAFETY PRECAUTIONS Lifting method label

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Aperture label

Discharge section label

Label for regulating the atmospheric gasses in the oscillator housing

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Ascent/Descent prohibited label

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PREFACE

PREFACEContents of the manualThis manual consists of the following chapters and appendixes: Chapter 1 : Internal Structure Chapter 1 describes the beam path, the structure, the operation and the internal connection of the laser oscillator. Chapter 2 : Installation Chapter 2 describes the installation and checking of the laser oscillator. Chapter 3 : Maintenance Chapter 3 describes daily maintenance and periodic maintenance. Chapter 4 : Troubleshooting Chapter 4 describes the actions to be applied in the event of a fault occurring in the laser oscillator. Chapter 5 : Units Chapter 5 describes how to replace and adjust internal units of the laser oscillator. Chapter 6 : Laser Software Function Chapter 6 describes the software functions for controlling the laser oscillator. Appendix A. External View of Oscillator B. Specifications C. Laser Alarm List D. Diagnosis Screen Information E. Parameter List F. Control Sequences in Laser Oscillator G. External Gas Leakage Recording Table H. Glossary

Applicable modelsThis manual covers the following models. The following abbreviations may be used in the text of this manual.Model FANUC LASER C2000i-MODEL C FANUC LASER C4000i-MODEL C FANUC LASER C6000i-MODEL C Abbreviation C2000i-C C4000i-C C6000i-C

Related manualsThe following manuals are available for the FANUC LASER C2000i /C4000i /C6000i-MODEL C.FANUC Series 30i/31i-LB DESCRIPTIONS CONNECTION MANUAL OPERATORS MANUAL MAINTENANCE MANUAL PARAMETER MANUAL OPERATORS MANUAL MAINTENANCE MANUAL (this manual) B-64492EN B-64493EN B-64494EN B-64495EN B-64500EN B-70474EN B-70475EN

FANUC LASER C2000i /C4000i /C6000i -MODEL C

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TABLE OF CONTENTS

TABLE OF CONTENTSSAFETY PRECAUTIONS............................................................................s-1DEFINITION OF WARNING, CAUTION, AND NOTE ............................................. s-1 WARNINGS AND CAUTIONS ON EXPOSURE ..................................................... s-2 WARNINGS AND CAUTIONS ON MAINTENANCE ............................................... s-3 WARNINGS AND CAUTIONS ON HANDLING....................................................... s-4 WARNINGS AND CAUTIONS ON MACHINING..................................................... s-5 WARNING LABELS AND STICKERS ..................................................................... s-6

PREFACE ....................................................................................................p-1 1 INTERNAL STRUCTURE........................................................................ 11.1 1.2 1.3 1.4 OUTLINE ....................................................................................................... 1 INTERNAL STRUCTURE .............................................................................. 2 OPTICAL PATHS IN THE OSCILLATOR ...................................................... 8 INTERNAL CONNECTION .......................................................................... 101.4.1 1.4.2 1.4.3 Electrical Connections............................................................................................10 Cooling Water Piping.............................................................................................16 Vacuum Gas Connection........................................................................................19

2

INSTALLATION .................................................................................... 202.1 2.2 INSTALLATION PROCEDURE ................................................................... 20 OSCILLATOR CONNECTIONS................................................................... 282.2.1 Laser Gas................................................................................................................282.2.1.1 2.2.1.2 2.2.1.3 2.2.1.4 Laser gas specification....................................................................................... 28 Gas pipe ............................................................................................................. 28 Leakage in external piping................................................................................. 29 Replacing the laser gas cylinder ........................................................................ 29 Specification of the cooling water ..................................................................... 30 Pure water supply unit ....................................................................................... 30 Anticorrosive ..................................................................................................... 30 Cleaning agent ................................................................................................... 30 Antifreezing ....................................................................................................... 31

2.2.2

Cooling Water ........................................................................................................292.2.2.1 2.2.2.2 2.2.2.3 2.2.2.4 2.2.2.5

2.2.3

Electrical Connections............................................................................................31 Power Supply Checking .........................................................................................402.3.1.1 2.3.1.2 2.3.1.3 2.3.1.4 2.3.1.5 2.3.1.6 Checking the power supply ............................................................................... 40 Phase rotation .................................................................................................... 40 Setting the frequency of the power supply of the hour meter............................ 41 Measurement of voltage of DC power supply unit............................................ 41 Checking of jumper pins on the interface PCB ................................................. 42 Checking the interface PCB signals................................................................... 43

2.3

DETAILS OF CHECKING ............................................................................ 402.3.1

2.3.2 2.3.3 2.3.4 2.3.5 2.3.6 2.3.7 2.3.8 2.3.9

External Laser Gas Piping Leakage Check (Clamp Test) ......................................43 Checking Cooling Water ........................................................................................44 Check for Leakage within the Oscillator................................................................44 Locating Internal Leakage......................................................................................44 Discharge Aging.....................................................................................................45 Beam Mode Check .................................................................................................46 Oscillation Characteristics......................................................................................47 Discharge Margin Check........................................................................................48c-1

TABLE OF CONTENTS2.3.10

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Power Supply Margin Check (Pulse Check) ..........................................................48 Packing for Transportation .....................................................................................49 Removing Cooling Water.......................................................................................50

2.4

PREPARATION PRIOR TO SHIPMENT ..................................................... 492.4.1 2.4.2

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MAINTENANCE .................................................................................... 523.1 3.2 3.3 DAILY INSPECTION ................................................................................... 52 PERIODIC MAINTENANCE ........................................................................ 53 DETAILS OF MAINTENANCE..................................................................... 543.3.1 Turbo Blower Oil ...................................................................................................543.3.1.1 3.3.1.2 3.3.1.3 Check method .................................................................................................... 54 Replacement method.......................................................................................... 55 Storage and expiration date of turbo blower oil ................................................ 56 Check method .................................................................................................... 56 Replacement method.......................................................................................... 57 Replacement method.......................................................................................... 57 Cleaning and Replacing the Optical Parts ......................................................... 58 Cleaning and Replacing the Output Coupler and Rear Mirror .......................... 59 Cleaning and Replacing the Folding Mirrors .................................................... 61 Cleaning and Replacing the Beam Folding Unit ............................................... 64

3.3.2 3.3.3 3.3.4

Exhaust Pump Oil...................................................................................................563.3.2.1 3.3.2.2 3.3.3.1 3.3.4.1 3.3.4.2 3.3.4.3 3.3.4.4

Exhaust Pump Filter ...............................................................................................57 Laser Optical Parts .................................................................................................58

3.4

MAINTENANCE PARTS.............................................................................. 64 TROUBLESHOOTING PROCEDURE......................................................... 71 RESPONDING TO ALARM MESSAGES ON THE SCREEN ...................... 71 MAJOR FAULTS ....................................................................................... 1104.3.1 4.3.2 4.3.3 4.3.4 4.3.5 Laser Output Just after Switch On Is Low ...........................................................110 Circuit Breaker for Cooling Fan, Solenoid Valve, and 24V Power Supply Trips110 Motor starter of Exhaust Pump Trips Thermally..................................................110 Main Breaker Trips ..............................................................................................110 Excessive Laser Gas Consumption ......................................................................111

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TROUBLESHOOTING .......................................................................... 704.1 4.2 4.3

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UNITS .................................................................................................. 1125.1 UNIT CONFIGURATION ........................................................................... 1135.1.1 5.1.2 5.1.3 5.1.4 C2000i-C INPUT UNIT .......................................................................................113 C4000i-C INPUT UNIT .......................................................................................115 C6000i-C INPUT UNIT .......................................................................................117 Replacement Method............................................................................................1195.1.4.1 5.1.4.2 5.1.4.3 Breaker............................................................................................................. 119 Motor starter .................................................................................................... 120 Magnetic contactor .......................................................................................... 120

5.2

LASER POWER SUPPLY UNIT ................................................................ 1215.2.1 Replacement Method............................................................................................1215.2.1.1 5.2.1.2 5.2.1.3 Replacing the power supply unit ..................................................................... 121 Replacing a high-speed diode.......................................................................... 122 Replacing an RF FET PCB.............................................................................. 123 Preparation....................................................................................................... 124 Perform laser power supply automatic adjustment .......................................... 125 Check ............................................................................................................... 125 c-2

5.2.2

Adjustment Method ..............................................................................................1235.2.2.1 5.2.2.2 5.2.2.3

5.3

MATCHING BOX ....................................................................................... 126

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TABLE OF CONTENTS5.3.1 Replacement Method............................................................................................126 Placement Numbers..............................................................................................127 Replacement Method............................................................................................127 Replacement Method............................................................................................128 Replacement Method............................................................................................129 Leakage Check and Discharge Aging ..................................................................131 Operation of the Digital Operator.........................................................................131 Replacement Method............................................................................................1345.7.2.1 5.7.2.2 Inverter............................................................................................................. 134 Cooling Fan in the Inverter.............................................................................. 135

5.4 5.5 5.6 5.7

DISCHARGE TUBE................................................................................... 1265.4.1 5.4.2 5.5.1 5.6.1 5.6.2 5.7.1 5.7.2

TRIGGER ELECTRODE ........................................................................... 128 TURBO BLOWER...................................................................................... 129 INVERTER................................................................................................. 131

5.8 5.9

EXHAUST PUMP ...................................................................................... 1385.8.1 5.8.2 5.9.1 5.9.2 5.9.3 Replacement Method............................................................................................138 Parts of Exhaust Pump .........................................................................................138 Configuration .......................................................................................................138 Replacement Method............................................................................................1405.9.2.1 5.9.2.2 5.9.3.1 5.9.3.2 5.9.3.3 5.9.3.4 Charge unit ...................................................................................................... 140 Exhaust unit ..................................................................................................... 140 Setting the gas supply pressure sensor............................................................. 141 Setting the atmospheric pressure sensor .......................................................... 141 Operating the gas supply pressure sensor and atmospheric pressure sensor ... 142 Adjusting the exhaust unit (adjusting the laser gas consumption)................... 143

GAS CONTROLLER.................................................................................. 138

Adjustment Method ..............................................................................................141

5.10

THE WATER DISTRIBUTION UNIT .......................................................... 1445.10.1 5.10.2 5.10.3 Replacement Method............................................................................................144 Replacement of the Flow Sensor Unit..................................................................147 Adjustment of the Flow Sensor Unit ....................................................................147 Replacement Method............................................................................................1485.11.1.1 Shutter unit ...................................................................................................... 148 5.11.1.2 Shutter mirror .................................................................................................. 149 5.11.1.3 Shutter switch (thermal and photoelectric switches) ....................................... 149

5.11

SHUTTER UNIT ........................................................................................ 1485.11.1

5.12

BEAM ABSORBER.................................................................................... 1505.12.1 5.12.2 Replacement Method............................................................................................1505.12.1.1 Beam absorber ................................................................................................. 150 5.12.1.2 Beam absorber mirror ...................................................................................... 150

Adjusting the Position ..........................................................................................151 Replacement Method............................................................................................151 Adjustment Method ..............................................................................................152 Replacement of Fan..............................................................................................153 Detachment and Attachment of a Fan Unit ..........................................................153 Detachment and Attachment of Fan-assisted Radiator.........................................154 Replacement Method............................................................................................154 Adjustment Method ..............................................................................................154 Replacement Method............................................................................................155c-3

5.13 5.14

GUIDE LASER (SEMICONDUCTOR LASER)........................................... 1515.13.1 5.13.2 5.14.1 5.14.2 5.14.3

FAN ........................................................................................................... 152

5.15 5.16

POWER SENSOR ..................................................................................... 1545.15.1 5.15.2 5.16.1

THE DEW SENSOR .................................................................................. 155

TABLE OF CONTENTS 5.175.17.1

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PCB ........................................................................................................... 155Replacement Method............................................................................................1555.17.1.1 5.17.1.2 5.17.1.3 5.17.1.4 Interface PCB .................................................................................................. 155 24V power supply............................................................................................ 155 Shutter PCB ..................................................................................................... 156 Safety circuit PCB ........................................................................................... 156

5.18 5.19 5.20 5.21 5.22 5.23

OIL MIST DECOMPOSING ELEMENT ..................................................... 1575.18.1 5.19.1 5.20.1 5.21.1 5.22.1 5.23.1 5.23.2 5.23.3 Replacement Method............................................................................................157 Cleaning ...............................................................................................................159 Replacement Method............................................................................................159 Replacement Method............................................................................................160 Replacement Method............................................................................................161 Gas Fitting ............................................................................................................1625.23.1.1 Tightening method........................................................................................... 162 5.23.1.2 Re-installing..................................................................................................... 162

GAS DUST COLLECTION UNIT ............................................................... 159 LOW TEMPERATURE SENSOR UNIT ..................................................... 159 OXYGEN SENSOR UNIT .......................................................................... 160 WARNING LIGHT UNIT ............................................................................ 161 GAS FITTING AND WATER FITTING....................................................... 162

WATER FITTING ...............................................................................................1635.23.2.1 Tightening method........................................................................................... 163 5.23.2.2 Re-installing..................................................................................................... 163

Fittings and Tube Ordering Information ..............................................................163 Alignment Procedure during Installation after Transportation.............................1685.24.1.1 Preparation....................................................................................................... 168 5.24.1.2 Adjustment method.......................................................................................... 169

5.24

ALIGNMENT OF THE RESONATOR ........................................................ 1665.24.1 5.24.2 5.24.3 5.24.4

Alignment Procedure at Mirror Cleaning Time ...................................................1705.24.2.1 Preparation....................................................................................................... 170 5.24.2.2 Adjustment method.......................................................................................... 170

Alignment Procedure for Adjusting All Mirrors ..................................................1715.24.3.1 Preparation....................................................................................................... 171 5.24.3.2 Adjustment method.......................................................................................... 171

Obtaining a Maximum Power ..............................................................................1725.24.4.1 Preparation....................................................................................................... 172 5.24.4.2 Procedure ......................................................................................................... 173

5.25 5.26 5.27

POWER CALIBRATION METHOD............................................................ 1755.25.1 Setting a Power Input Compensation Coefficient ................................................175

ALIGNMENT OF THE BEAM FOLDING UNIT (C2000i-C, C4000i-C SHORT OPTICAL PATH LENGTH TYPE).............. 175 HEAT EXCHANGER ................................................................................. 1765.27.1 Replacement .........................................................................................................1765.27.1.1 C2000i-C ......................................................................................................... 177 5.27.1.2 C4000i-C and C6000i-C .................................................................................. 179

6

LASER SOFTWARE FUNCTION........................................................ 1836.1 MAINTENANCE SCREEN......................................................................... 1836.1.1 6.1.2 6.1.3 Overview ..............................................................................................................183 Method of Operation ............................................................................................184 Display Information .............................................................................................1846.1.3.1 6.1.3.2 6.1.3.3 Compensation coefficient history display........................................................ 184 Parts run time display ...................................................................................... 185 Discharge-related alarm history display .......................................................... 185 c-4

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TABLE OF CONTENTS6.1.3.4 6.1.3.5 6.1.3.6 6.1.3.7 6.1.3.8 6.1.3.9 6.1.3.10 Laser alarm history screens.............................................................................. 187 Pulse power feedback screens ......................................................................... 188 Power sensor time constant measurement screen ............................................ 188 Leak check screen............................................................................................ 189 Laser tuning screen .......................................................................................... 190 Command of running beam internally with shutter closed .............................. 192 Input and output of saved maintenance data.................................................... 192

6.2

POWER FEEDBACK FUNCTION BASED ON THE ACTUAL OUTPUT ESTIMATION METHOD ............................................................................ 1936.2.1 6.2.2 6.2.3 6.2.4 Overview ..............................................................................................................193 Data Table ............................................................................................................1936.2.2.1 6.2.2.2 6.2.3.1 Method of registration ..................................................................................... 193 Data table structure .......................................................................................... 194 Time constant measurement method................................................................ 195

Compensation for Power Sensor Response Speed ...............................................195 Bell-shaped Filter for Power Feedback Gain .......................................................196 Overview ..............................................................................................................197 Function................................................................................................................197 Setting...................................................................................................................198 Release of alarm ...................................................................................................199 Overview ..............................................................................................................199 Setting...................................................................................................................199 Operation of Laser Power Supply Automatic Adjustment ...................................200

6.3

OIL EXCHANGE TIME LIMIT ALARM MONITOR FOR TURBO BLOWER1976.3.1 6.3.2 6.3.3 6.3.4

6.4

LASER POWER SUPPLY AUTOMATIC ADJUSTMENT FUNCTION ....... 1996.4.1 6.4.2 6.4.3

6.5

TURBO BLOWER OIL ABNORMALLY TEMPERATURE DETECT FUNCTION ................................................................................................ 2016.5.1 6.5.2 6.5.3 6.5.4 Overview ..............................................................................................................201 Setting...................................................................................................................201 Operation ..............................................................................................................201 Alarm....................................................................................................................201

6.6

SUPPORT FUNCTION FOR START-UP AFTER TURBO OIL EXCHANGE............................................................................................... 2026.6.1 Setting...................................................................................................................202

APPENDIX A B C D EXTERNAL VIEW OF LASER OSCILLATOR .................................... 205 SPECIFICATIONS............................................................................... 208 LASER ALARM LIST .......................................................................... 209 DIAGNOSIS SCREEN INFORMATION .............................................. 212D.1 D.2 INFORMATION DISPLAYED ON THE DIAGNOSIS SCREEN ................. 212 LASER OSCILLATOR STATUS DISPLAY ................................................ 215 PARAMETERS FOR ENABLING/DISABLING VARIOUS FUNCTIONS.... 223 PARAMETERS FOR DISCHARGE TUBE SELECTION............................ 226 PARAMETERS FOR LASER MAINTENANCE TIMING INDICATION FUNCTIONS.............................................................................................. 227 PARAMETERS FOR THE OSCILLATOR.................................................. 228c-5

E

PARAMETER LIST ............................................................................. 223E.1 E.2 E.3 E.4

TABLE OF CONTENTS E.5 E.6 E.7 E.8 E.9 E.10 E.11 E.12

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PARAMETERS FOR DISCHARGE ........................................................... 230 PARAMETERS FOR GAS CONTROL ...................................................... 231 PARAMETERS FOR HIGHLY REFLECTIVE MATERIAL ALARMS.......... 233 PARAMETERS FOR LASER POWER / VOLTAGE DROP ....................... 233 PARAMETERS FOR POWER TABLE SETTING ...................................... 234 PARAMETERS FOR AUTOMATIC AGING FUNCTION ........................... 235 PARAMETERS FOR POWER FEEDBACK BASED ON THE ACTUAL OUTPUT ESTIMATION METHOD............................................................. 237 PARAMETERS FOR PROCESSING MODE CHANGE FUNCTION ......... 239E.12.1 E.12.2 E.12.3 Setting for Fine Mode...........................................................................................239 Setting for Alarm Monitor (Alarm No.4125) .......................................................242 Setting for Automatic Aging Function (Fine Mode) ............................................243

E.13 E.14 E.15 E.16 E.17 E.18 E.19 E.20 E.21 E.22 E.23 E.24 E.25 E.26 E.27 E.28

PARAMETERS FOR THE GAS PRESSURE CHANGE WARM UP FUNCTION ................................................................................................ 244 PARAMETERS FOR PREHEAT FUNCTION ............................................ 245 PARAMETERS FOR POWER COMMAND ............................................... 246 PARAMETERS FOR GAS PRESSURE ANALOG MONITOR................... 248 PARAMETERS FOR TURBO BLOWER ................................................... 249 PARAMETERS FOR LASER PSU INDIVIDUAL DRIVING........................ 250 PARAMETERS FOR WATER FLOW RATE MONITOR............................ 250 PARAMETERS FOR POSITIVE PRESSURE LEAK CHECK FUNCTIONS.............................................................................................. 252 PARAMETERS FOR LASER POWER SUPPLY AUTOMATIC ADJUSTMENT........................................................................................... 252 PARAMETERS FOR GAS PRESSURE INCREASE ................................. 255 PARAMETERS FOR PREPARATION 1C ................................................. 255 PARAMETERS FOR TURBO BLOWER START....................................... 256 PARAMETERS FOR AUTOMATIC AGING 2 ............................................ 256 PARAMETERS FOR CALIBRATION AND PEPARATION ........................ 257 PARAMETERS FOR TURBO BLOWER RUN........................................... 258 PARAMETERS FOR POWER SAVING .................................................... 258 OUTLINE OF LASER OSCILLATION SEQUENCES ................................ 261 INTRA-TUBE GAS PRESSURE CONTROL SEQUENCES ...................... 263F.2.1 F.2.2 F.2.3 RUN ON...............................................................................................................263 HV ON .................................................................................................................264 RUN OFF .............................................................................................................264

F

CONTROL SEQUENCES IN LASER OSCILLATOR.......................... 261F.1 F.2

F.3 F.4

WARM UP IN START UP SEQUENCE ..................................................... 264 POWER SAVING....................................................................................... 264F.4.1 Quick Power Saving State ....................................................................................264F.4.1.1 F.4.1.2 F.4.1.3 Start quick power saving state ......................................................................... 264 Quick power saving state................................................................................. 264 Stop quick power saving state ......................................................................... 265 Start ECO power saving state .......................................................................... 265 ECO Power Saving State ................................................................................. 265 Stop ECO power saving state .......................................................................... 265 ECO power saving state intra-tube gas pressure ............................................. 266 c-6

F.4.2

ECO Power Saving State......................................................................................265F.4.2.1 F.4.2.2 F.4.2.3 F.4.2.4

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TABLE OF CONTENTS

G H

EXTERNAL GAS LEAKAGE RECORDING TABLE .......................... 267 GLOSSARY......................................................................................... 269

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1.INTERNAL STRUCTURE

11.1 1.2 1.3 1.4

INTERNAL STRUCTUREOUTLINE .............................................................................................................................................1 INTERNAL STRUCTURE...................................................................................................................2 OPTICAL PATHS IN THE OSCILLATOR.........................................................................................8 INTERNAL CONNECTIONS............................................................................................................10

Chapter 1, INTERNAL STRUCTURE consists of the following contents:

1.1

OUTLINEPart of Discharge power supplyLaser power supply Laser power supply

Fig. 1.1 shows an outline of the structure of the oscillator.200 VAC

Housing

Input unit24V PSU

Signal (to CNC)

Interface PCB

Part of InterfaceFolding mirror

Matching box

Matching box

Part of Laser resonatorDischarge tube Discharge tube Discharge tube

Low Dew temperasensor ture sensor

Output mirror

Guide laser

Beam folding unit

Folding mirror

Shutter unitRear mirrorPower sensor

Discharge tube

Part of Pressure controlExhaust control Hour meterExhaust pump

Inlet H/E

Outlet H/EGas dust collection unit

Beam absorber

To parts

From partsFlow sensor

Pressure control

Turbo blower

Turbo PCB

Water distributor

Inverter

Part of Gas circulatingExhaust gas Laser gas

Watercooled part

Fig.1.1 Outline of structure

(1) Part of Laser resonator The resonator consists of an output coupler, a rear mirror, folding mirrors, discharge tubes, a power sensor unit etc., has the function to transform the electrical energy to the optical energy which is single mode laser beam as 10.6m. Several discharge tubes are connected in series using folding mirrors, with an output coupler and a rear mirror placed at the open ends of the discharge tubes, thus sealing the tubes. The resonator is fitted with a gas pipe connecting port through which laser gas is fed into the discharge tubes. A discharge from the electrodes of the discharge tubes energizes CO2 molecules, which emit light. This light is amplified by the stimulated emission that takes place while the light travels back and forth between the output coupler and the rear mirror. The resonator is capable of converting electrical energy to optical energy (10.6-m single-wavelength laser beam).

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1.INTERNAL STRUCTURE

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(2) Part of discharge power supply This consists of laser power supply and matching box. This has the function that generates the high frequency discharge in the discharge tubes, and supplies the energy to laser gas. (3) Part of gas circulating A gas circulating system is configured by connecting the resonator and the fan (turbo blower) with a circulating pipe. Laser gas runs through the discharge tubes at a high speed. Two kinds of the heat exchange are placed between the resonator and the fan (turbo blower). The one cool the laser gas heated by discharge, another cools the laser gas heated by the fan (turbo blower). (4) Part of pressure control This controls the gas pressure of the part of gas circulating from start-up to the end of laser oscillator. During the normal working, a part of laser gas is replaced to the fresh laser gas to interrupt the degradation of laser gas. (5) Part of Interface This is the input unit connecting the interface PCB and outside power supply to connect CNC. The laser oscillator is controlled by CNC through the interface PCB. The outside electrical power is supplied to some units in the oscillator through the input unit. (6) Water-cooled part This part supplies the cooling water to every unit in laser oscillator. (7) Housing The laser oscillator is covered with the metal panel, and protects the humans from exposure to a laser beam exceeding an accessible emission level or strong collateral radiation. All panels are screw-fixed and cannot be removed without an appropriate tool.

1.2

INTERNAL STRUCTURE

This section describes the internal structure of the oscillator more specifically. Fig.1.2 (a) to (f) are internal structural drawing.(30)Short optical path length type (3) (29) (31) (4) Long optical path length type(30) (5) (7) (2) (6) Short optical path length type(28) (21)

(23) (17) (24) (25)

(20)

(34) (11)

(8)

(9)

(10) (12)

(16) (15)

(22)

Fig.1.2 (a) Internal structural drawing for C2000i-C (front view)

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1.INTERNAL STRUCTURE

(27) (18) (1)

(26)

(32)

(3)

(19)

(33)

(14)

(13)

Fig.1.2 (b) Internal structural drawing for C2000i-C (rear view)

(3)

(31)

(4)

(5)

(3)

(28)

(30)

(21) (23) (24)

(25)

(20) (34) (11) (8)

(9)

(10) (12)

(16) (17) (15)

(22)

Fig.1.2(c) Internal structural drawing for C4000i-C (front view)

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1.INTERNAL STRUCTURE(2) (27) (18) (6) (1) (26) (29) (7) (32) (3)

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(16)

(33)

(14)

(13)

Fig.1.2 (d) Internal structural drawing for C4000i-C (rear view)

(23) (24)

(6)

(2)

(7)

(31)

(4)

(5)

(29) (3)

(27) (18) (21) (19)

(25)

(30)

(22)

(17)

(8)

(9)

(10) (12)

(11)

(16)

(15)

Fig.1.2 (e) Internal structural drawing for C6000i-C (front view)

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1.INTERNAL STRUCTURE

(1)

(26) (7)

(32)

(3)

(20)

(33)

(14) (13)

(34)

Fig.1.2 (f) Internal structural drawing for C6000i-C (rear view)

(1) Output coupler A ZnSe (zinc selenide) substrate coated with dielectric. The output coupler is a transmission-type reflecting mirror used to output the laser beam amplified inside the resonator. (2) Rear mirror A reflecting mirror consisting of a Ge (germanium) substrate, coated with dielectric. The rear mirror is used to reflect the laser beam within the resonator while transmitting part of the laser light to the outside to obtain the monitor light for laser output measurement. (3) Folding mirror A mirror with a Si (silicon) substrate coated with dielectric to reflect the laser beam. It linearly polarizes the laser beam. (4) Discharge tube A pair of electrodes is metallized on the surface of a hollow quartz glass tube. discharge between these electrodes injects electrical energy into the laser gas. A high-frequency

(5) Trigger electrode This electrode is capable of pre-discharging outside the laser oscillation area so that the laser output becomes completely zero when the beam is off. (6) Power sensor An optical sensor which detects the intensity of the laser beam, transmitted through the rear mirror, thus enabling monitoring of the laser output level. (7) Oil mist decomposing element This element is capable of decomposing the organic matter that gets into the part of laser gas circulating, with photo catalytic effect, using the ultraviolet rays generated from the discharge tubes. (8) Laser power supply This power supply outputs high-frequency power (2 MHz) according to a specified output with commands from the CNC and supplies it to the discharge tubes via the matching box. (9) Matching box The matching box contains a matching circuit, which ensures that power is effectively input to the discharge tubes.-5-

1.INTERNAL STRUCTURE

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(10) Turbo blower This fan circulates the laser gas in the gas circulating system at high speed. It rotates at a high speed of 60,000 revolutions per minute (min-1). (11) Inverter This inverter drives the turbo blower. It is responsible for acceleration/deceleration control and issuing alarms during start and stop of the blower. (12) Gas dust collection unit This unit is a cyclone dust collector that removes dust that gets in the gas circulating system. (13) Heat exchanger (inlet) Water-cooled heat exchanger used to cool the laser gas that has been heated by discharge, before it is drawn into the turbo blower. (14) Heat exchanger (outlet) Water-cooled heat exchanger used to cool the laser gas that has been heated by compression in the turbo blower, before being forced into the discharge tubes. (15) Gas controller This gas controller constantly monitors the gas pressure in each discharge tube and supplies fresh laser gas to the part of laser gas circulating to keep the pressure constant while exhausting degraded laser gas. It also monitors the supply status of the laser gas, purge check for the part of laser gas circulating and other items and has a function of adjusting the amount of flow of the gas to be exhausted. (16) Exhaust pump This pump is used to vacuum-exhaust laser gas from the gas circulating system such that its pressure falls to that used for laser oscillation. In addition, it exhausts part of the degraded gas in the gas circulating system. (17) Hour meter The hour meter records the total number of hours that the laser oscillator has operated (how many hours the exhaust pump has operated) to indicate whether maintenance or inspection is necessary. (18) Shutter The shutter is normally closed to keep the laser beam inside, and can be opened and closed with CNC commands. It is equipped with a position sensor and a temperature sensor and constantly monitors the open/close status and the shutter mirror temperature. (19) Beam absorber To perform laser oscillation without emitting the laser beam to the outside, the laser beam is reflected on the shutter mirror and guided into the beam absorber. The absorber, which is water-cooled, absorbs the laser beam. The absorber is equipped with a temperature sensor, which allows the system to constantly monitor the temperature of the absorber. (20) Water distribution unit This unit distributes temperature-regulated external cooling water to each unit inside the laser oscillator. The unit is equipped with a flow sensor, which allows the system to constantly monitor the flow rate of the cooling water. (21) Shutter PCB This PCB relays signals collected into the shutter section, such as those from the limit switch, absorber temperature sensor, power sensor, and dew sensor, to the interface PCB.-6-

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1.INTERNAL STRUCTURE

(22) Input unit This unit distributes the power supplied to the oscillator to each unit in the laser oscillator. It also protects each unit from overcurrents. (23) Safety circuit PCB This PCB has the relays that intercept the source of laser beam by the action of safety circuit (Emergency stop circuit etc.). This PCB also has the relay to make the contactor and the valve for AC200V to action by the command from CNC. (24) Interface PCB (IF PCB) This PCB communicates with the CNC via the FANUC I/O LINK (serial interface). (25) 24-V power supply This unit supplies DC power (24 VDC) to the interface PCB and various units. (26) Dew sensor This sensor is mounted to the output mirror holder to monitor the output mirror for condensation. It prevents faults from occurring due to condensation. (27) Guide laser (red semiconductor laser) A diode laser is overlaid on the same optical axis as a guide beam for checking the optical axis because the CO2 laser beam is invisible to the unaided eye. The guide beam is emitted in synchronization with the mechanical shutter only when the shutter is closed. The guide laser can be used for roughly adjusting the optical path of an external optical system and for obtaining a guide for the machining point. (28) Beam folding unit (C2000i-C, C4000i-C) This unit extends the optical path length by folding back the laser beam output from the output mirror in the oscillator and outputting the beam from the outlet of the oscillator. It consists of one circular polarization mirror and one zero shift mirror or of two zero shift mirrors. It is provided in an oscillator of short optical path length type; it is not provided in an oscillator of long optical path length type. (29) Low temperature sensor This sensor measures the temperature of cooling water. When the temperature in the laser oscillator is 20 or less in start-up of the oscillator, warm-up driving is executed by software. Therefore, it prevents output power decrease. (30) Oxygen sensor A sensor for measuring the concentration of oxygen in the oscillator cabinet. This oxygen sensor is placed near the beam exit to detect an inflow of oxygen from the outside. When the concentration of oxygen has increased beyond the specified value, an alarm is issued, the oscillator is stopped, and a purge operation is performed. (31) Fan unit Fan motors release the heat that is generated by discharge from the discharge tubes. (32) Radiator fan unit (resonator) The atmospheric temperature rises due to the heat generated by discharge from the discharge tubes. This water-cooled heat exchanger is used to cool the heated air before circulated in the oscillator. (33) Radiator fan unit (power supply) The heat by the laser power supply unit is exhausted to outside of the power supply unit. This water-cooled heat exchanger is used to cool the heated air before circulated in the oscillator.-7-

1.INTERNAL STRUCTURE

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(34) Noise filter This noise filter for turbo blower reduces normal mode noise between power wires that is generated from the inverter and common mode noise between the power supply and ground.

1.3

OPTICAL PATHS IN THE OSCILLATOR

The figures below show the laser optical paths inside the oscillator.Safety cover Discharge tube Discharge tube Safety cover

Beam For Short optical Path length type Discharge tube Discharge tube

Beam For Short optical Path length type

Beam For Short optical Path length typeFig.1.3 (a) Optical paths in the C2000i-C

Beam For Short optical Path length type

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1.INTERNAL STRUCTURESafety cover Discharge tube Discharge tube Safety cover

Beam BeamFor Short optical Path length type For Long optical path length type

Discharge tube

Discharge tube

Beam BeamFor Short optical Path length type For Short optical Path length type

Fig.1.3 (b) Optical paths in the C4000i-C

Discharge tube Discharge tube Discharge tube Discharge tube Safety cover

Beam

Beam

Fig.1.3(c) Optical paths in the C6000i-C

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1.41.4.1

INTERNAL CONNECTIONElectrical Connections

The following show electrical connection diagrams of the individual models.

Fig.1.4.1 (a) Electrical connection diagram for C2000i-C (Standard)

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1.INTERNAL STRUCTURE

Fig.1.4.1 (b) Electrical connection diagram for C2000i-C (CE Marking)

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Fig.1.4.1(c) Electrical connection diagram for C4000i-C (Standard)

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1.INTERNAL STRUCTURE

Fig.1.4.1 (d) Electrical connection diagram for C4000i-C (CE Marking)

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Fig.1.4.1 (e) Electrical connection diagram for C6000i-C (Standard)

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1.INTERNAL STRUCTURE

Fig.1.4.1 (f) Electrical connection diagram for C6000i-C (CE Marking)

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1.INTERNAL STRUCTURE

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1.4.2

Cooling Water Piping

The following show cooling water flow diagrams for the individual models.

Fig.1.4.2 (a) Water flow diagram for C2000i-C

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1.INTERNAL STRUCTURE

Fig.1.4.2 (b) Water flow diagram for C4000i-C

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Fig.1.4.2(c) Water flow diagram for C6000i-C

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1.INTERNAL STRUCTURE

1.4.3

Vacuum Gas Connection

The following show vacuum system diagrams for the individual models.

Fig.1, 4.3(a) Vacuum system diagram for C2000i-C and C4000i-C

Fig.1.4.3 (b) Vacuum system diagram for C6000i-C

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2.INSTALLATION

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23.1 3.2 3.3 3.4

INSTALLATIONINSTALLATION PROCEDURE .......................................................................................................20 OSCILLATOR CONNECTIONS.......................................................................................................28 DETAILS OF CHECKING ................................................................................................................40 PREPARATION PRIOR TO SHIPMENT .........................................................................................49

Chapter 2, INSTALLATION consists of the following contents:

2.1

INSTALLATION PROCEDURE

Use the following procedure to make adjustments and checks during installation. As soon as the oscillator is delivered, loosen the clamps of the resonator described in (3) below.

CAUTION If the clamps of the resonator are left fastened for a long time, the resonator can deform. As a result, a problem such as a failure in beam mode adjustment or insufficient laser output can arise.(1) Check the environment at the installation location. [Environmental conditions]1 2 3 4 5 Ambient temperature Temperature variation Humidity Vibration Atmosphere +5 to 35C without condensation 1.1C /minute maximum 75% or below (relative humidity) Acceleration not to exceed 0.05G. Vibration amplitude not to exceed 5m. Dust must be minimized. There must be no organic volatile components. There must be no flammable gas or dangerous gas such as dense oxygen.

(2) Adjust the table horizontally where the oscillator is installed, and then put the oscillator on, and fix it by the bolts. The C6000i-C has adjustable feet for fixing with bolts. Use the following procedure to install the C6000i-C.

Fig. 2.1(a) External view of C6000i-C

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2.INSTALLATION

Fixed foot (a: Its height is fixed.)

Adjustable foot (b: Its height can be fine-adjusted.) Fig. 2.1(b) Details of feet

(a) Installing the oscillator (putting the oscillator on or putting it on again after moving it) Adjust the machine table horizontally. Before installing the oscillator on the machine table, tighten all adjustable feet (at the three places marked with b) on the oscillator as shown below so that their height is shorter than the height of the fixed feet (at the three places marked with a).Oscillator frame Adjustable foot Tighten Machine table

Lift the oscillator by a crane using the four eyebolts on the top of the oscillator.

Lifting

Keep lifting the oscillator by a crane, set the fixed feet (at the three places marked with a) on the oscillator on the machine table until they slightly touch the machine table as shown below, and attach the fixed feet using the bolts securing them temporarily.Oscillator frame Slightly touches the machine table. Fixed foot Machine table Bolt securing the foot (M20)

Keep lifting the oscillator

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2.INSTALLATION

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NOTE When setting each fixing foot, keep lifting the oscillator by a crane and the status in which the fixing feet slightly touch the machine table (slings are strained) without securing the oscillator on the machine table completely. If the oscillator is completely secured on the machine table only with the fixed feet, the cabinet can deform. Turn each adjustable foot on the oscillator as long as it turns with hand, and then make it touch the machine table.Loosen the foot until it touches the table. Oscillator frame Adjustable foot Machine table Turn the foot in the arrow direction.

Keep lifting the oscillator.

Set down the oscillator on the machine table completely.

Set down the oscillator completely.

Fully tighten the fixed and adjustable feet on the oscillator with the bolts securing them.Oscillator frame Fixed foot Adjustable foot Machine table Bolt securing the foot (M20) Bolt securing the foot (M20)

(b) Moving the oscillator (moving the oscillator installed on the machine table) Install the machine table together with the oscillator. Remove the bolts securing the fixed and adjustable feet on the oscillator. Lift only the oscillator by a crane using the four eyebolts on the top of the oscillator again. (The oscillator is required to be lifted just slightly off the machine table.) Tighten all adjustable feet on the oscillator as shown below so that their height is shorter than the height of the fixed feet.

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2.INSTALLATIONOscillator frame Tighten Machine table

Adjust the machine table horizontally. After that, follow steps to in (a). (3) Remove resonator and shutter clamps. The clamp locations are shown in Figs.3.1(c) to (e). Keep the detached parts for clamp

Resonator clamp

Shutter clamp

Fig. 2.1(c) Clamp locations of C2000i-C

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Shutter clamp

Resonator clamp

Resonator clamp Fig. 2.1(d) Clamp locations ofC4000i-C

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2.INSTALLATION

Resonator clamp

Resonator clampFig. 2.1(e) Clamp locations of C6000i-C

Shutter clamp

Shutter unit Beam cover pipe

Mirror holder

Space between beam flange and beam cover pipe

Beam flange Bolt

Safety cover

Beam cover pipe

Fig. 2.1(f) Safety cover for shutter unit

Fig. 2.1(g) Details of Safety cover

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2.INSTALLATION

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(4) Check the safety cover of shutter unit The beam flange of the safety cover is fixed with a small space exists between the beam cover pipe installed in output mirror holder. Check whether the interference with the beam flange and the beam cover pipe, and loosening of beam flange installation bolt . When there is interference of loosening, adjust and tighten according to procedure below. (a) Before alignment, loose bolt .

NOTE Loose the bolt absolutely. If not, it is possible that it contaminated with the alignment.(b) After the alignment, adjust to keep a small space between the hole of beam flange and the beam cover pipe. In addition, keep a small space , and fix the beam flange with bolt . (5) Check the outsides of units installed in the oscillator as follows:Check items 1 2 3 4 5 6 7 8 9 10 11 12 Check whether any printed circuit boards are loose or removed. Check whether any cables are damaged (such as damaged sheathing). Check whether any connectors are loose or detached. Check that the discharge tubes are neither cracked nor damaged. Check that the turbo blowers and other units are neither loose nor missing. Check that the power supply units and matching boxes are neither loose nor missing. Check that the input unit is neither loose nor missing. Check that the connection to the electrode of each discharge tube is not loose. Check whether any fittings part of the water piping and gas piping is loose. Check all screw terminals in the units. Check the oil level in the turbo blowers. (See Subsection 3.3.1 for details.) Check the oil level in the exhaust pump, and check for oil contamination. (See Subsection 3.3.2 for details.)

(6) Connect the power and signal lines to the oscillator. (See Subsection 2.2.3 for details.)Check items 1 2 3 4 Oscillator power cable Ground cable of 10 or less (Class-A ground: For Japan, Protection Class 1: For foreign country) Communication cable between the CNC and oscillator (I/O Link, FSSB) Signal cables

(7) Check the input power supply voltage, frequency and phase rotation. (See Subsection 2.3.1 for details.) Set the frequency of the power supply to the hour meter. (See Subsection 2.3.1 for details.)

CAUTION In the installing, the moving or the construction of electrical facility, it is possible that the phase rotation is incorrect. Be sure to check the phase rotation, and then start the exhaust. If the gas pressure does not fall after one minute, stop the exhaust, and then check it. Check the gas pressure on PSW2 of gas controller or DGN No.905.(8) Connect the laser gas and cooling water pipes. (See Subsections 2.2.1, 2.2.2, and 2.3.2 for details.)Check items 1 2 3 Check the laser gas composition and purity (check whether the specifications are satisfied). Check the laser gas piping status. Check that there is no gas leakage in the external piping between the gas cylinder and oscillator.

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2.INSTALLATIONCheck items

4

Check the quality of the cooling water (use of tap water passed through an ion exchanger).

(9) Check the supply gas pressure. Check that the secondary pressure of the gas regulator is 0.1750.025 MPa. (10) Check the parameters and setting data. A parameter table for the laser oscillator is attached to the oscillator. Some machine builders prepare a parameter table including parameters for the laser oscillator. If data sheets are not found, contact the machine tool builder. (a) On the setting screen of the CNC, set the parameter write enable state. (b) Check the parameters, and enter the same values as specified in the parameter table. (c) On the setting screen of the CNC, set the parameter write protected state, and press the reset button.

CAUTION 1 If the oscillator is started with an incorrect parameter value specified, the oscillator may fail in the worst case. Be particularly careful when entering and checking parameter values. 2 Some parameters may require modification to, for example, suit the operating state of the oscillator or enable maintenance. When parameters are modified, it is recommended that modification history (date, parameters before modification, parameters after modification, and reason for modification) be recorded so that old parameters and invalid parameters are not used. 3 Be careful not to lose the attached data sheets, and keep them safely.(11) Check that cooling water is supplied normally, and that there is no water leakage inside the oscillator or at any external connection points. (See Subsection 2.3.3 for details.) Check that the temperature of the cooling water is set to 25 to 30C. Normally, it is recommended that the temperature be set to 27C. (12) Turn on the power and RUN switch, and then check the operation of the fan motors in the laser oscillator after SEQ1500. Note, however, that the fan motor installed in the laser power supply does not start until the oscillator sequence starts the turbo blower operation (SEQ1700). (13) Conduct an oscillator vacuum leakage test. Check the oscillator for any internal leakage. When performing the leakage check, use the automatic leakage check function. If there is internal leakage, locate the leakage according to the leakage location method described in Subsection 2.3.5. (14) Check that the laser gas pressure is controlled normally. (a) Set all bits of parameter No. 15027 to 0 because only the pressure control operation is to be checked, without causing discharge. Check that alarm Nos. 4073 and 4078 are not issued. If one of the alarms is issued, see the solution in Section 4.2, and take appropriate action. (b) After completing the checking, reset the changed parameters to their original settings. (15) Start the laser oscillator to perform discharge aging. See Subsection 2.3.6 to start the aging function. If the oscillator is left unused for two weeks or more), perform discharge aging for at least 8 hours. (16) Check the laser beam mode.- 27 -

2.INSTALLATION

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CAUTION A beam mode deviation may occur depending on the transportation method and storage condition. When installing the oscillator, be sure to perform this step. A mode deviation does not mean a failure. Perform alignment by following the procedure described in Subsection 5.24.1.(a) Record the value of the micrometer of OC, RM and FM. (b) Take the power max by FM. referring to subsection 5.24.4. C2000i-C:FM1, C4000i-C:FM4, C6000i-C:FM1 and FM4 (c) Check the below items referring to subsection 4.3.7 (i) No difference between the taken mode and the mode attached to the oscillator. (ii) Mode shape is the circular symmetry. (iii) No fringe pattern around the mode. (d) If it is abnormal, execute the alignment referring to subsection 5.24.1. (17) Check the oscillation characteristics and output. See Subsections 2.3.8, 2.3.9, and 2.3.10 for details of the check method. (a) Check that the correction coefficient is 1100 or less. (b) Oscillation characteristic check : Check that the discharge voltage during base discharge and when a rated output is specified is within the factory-set value plus 200 V. If the correction coefficient or discharge voltage exceeds the maximum, repeat discharge aging. (c) Discharge margin check : Check that a margin is provided. (d) Voltage margin check : Check that no alarm is issued.

2.2

OSCILLATOR CONNECTIONS

The oscillator has connections for laser gas piping, cooling water piping, and power and signal cables. For details of the electrical connections for the CNC and machine, refer to the corresponding connection manual.

2.2.12.2.1.1

Laser Gas Laser gas specification

Supply the laser oscillator with a mixture of gases that satisfy the conditions listed below. (1) Composition ratio and accuracy (For the composition ratio, check the label and specifications of the oscillator.) CO2 50.25 : He 603(He balance) : N2 351.75 (2) Water (H2O) : 5 ppm or less (3) Hydrocarbon (CnHm) : 1 ppm or less (4) Gas purity : 99.99% or higher

2.2.1.2

Gas pipe

Observe the following cautions for piping between the laser gas cylinder and laser oscillator. (1) It is recommended that a polyethylene tube E series (E-64-Y-0100: 3/8 inches, Yellow) having an inside diameter of 6 mm or larger (manufactured by Parker Hanniffin Corporation) be used. Do not use a nylon, rubber, or urethane tube. (2) Use swage-lock vacuum fittings. Do not use a one-touch coupler, quick coupler, or hose-band fittings.- 28 -

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2.INSTALLATION

(3) Minimize the length of tubing. It should be kept within 5 m. Never exceed 15 m. For a length of 15 m or more, use stainless bright-annealed piping, but do not use a copper piping. In this case, do not extend piping over 30 m. (4) Minimize the number of fittings used. Connect pipes, if necessary, using a swage-lock vacuum fittings or by TIG welding. Piping should be installed by a vacuum piping specialist. (5) Always keep the piping materials clean. Do not allow foreign matter to get in the pipe. (6) Use a regulator that has been degreased and is free from gas leakage. (7) Please set the exhaust time of external piping (parameter No.15260) long when the piping distance is 5m or more. The standard value of the parameter is two seconds every 5m. (8) The gas used by the laser oscillator is exhausted from the GAS OUT port. Though the exhausted amount of gas is very small, do not exhaust the amount of the exhausted gas in the room with airtight, Lay pipes from the GAS OUT port and exhaust laser gas to outdoors.

2.2.1.3

Leakage in external piping

After installing the piping, see Subsection 2.3.2, and be sure to conduct a clamp test to check for gas leakage. If the rate of change in primary pressure over eight hours exceeds 10%, or if the rate of change in secondary pressure over eight hours exceeds 10% for a polyethylene tube or 6% for a stainless pipe, leakage that prevents normal oscillator operation is present. Use the helium leakage detector to locate the leakage and eliminate it.

2.2.1.4

Replacing the laser gas cylinder

(1) If the primary pressure of the regulator installed in the laser gas cylinder is 1 MPa or less, replace the laser gas cylinder with new one. (2) When laser gas runs out during oscillator operation, the oscillator stops automatically. In this case, after the oscillator stops, replace the gas cylinder. (3) When replacing the gas cylinder, close the main plug of the gas cylinder, completely loosen the adjustment valve of the regulator, then remove the regulator. If the adjustment valve of the regulator is left tightened, external air will enter the piping. When the oscillator is started after the replacement of the cylinder, the external piping exhaust operates to remove gas inside the piping, and the oscillator starts in the normal sequence. When laser gas runs out during purging, a stop occurs while the inside of the piping is in the negative pressure state. If the gas cylinder is replaced in this state, the atmosphere is sucked. Therefore, be sure to loosen the adjustment valve of the regulator before removing the regulator. Before the oscillator starts, the external piping exhaust operation takes place then the automatic aging function operates to perform aging in the oscillator to prevent possible troubles from occurring if the atmosphere should be sucked.

2.2.2

Cooling WaterCAUTION To prevent that the cooling water flows in to the oscillator by the irregular driving of the chiller in the oscillator off, install the valve on the cooling water inlet of the oscillator.

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2.2.2.1

Specification of the cooling water

The quality of cooling water is specified in the table below. Use pure water or tap water passed through an ion exchanger.pH (25C) Conductivity (25C) Chlorine ion ClSulfate ion SO42M alkalinity Total hardness CaCO3 Iron Fe Sulfur ion S2Ammonia ion NH4+ Ionic silica SiO2 6.0 to 8.0 200S/cm or less 20mg/L or less 50mg/L or less 50mg/L or less 50mg/L or less 0.3mg/L or less Not to be detected 0.2mg/L or less 30mg/L or less ppm = mg/L

Standard item

Reference item

2.2.2.2

Pure water supply unit

Install a pure water supply unit (ion-exchange region) at the water inlet of the chiller. The pure water supply unit can prevent problems with the oscillator from occurring due to corrosion or a clogged pipe. Replace the water periodically after every 1,500 hours because the quality of the circulating cooling water is lowered. Product name : Pure Water Supply Cartridge Manufacturer : ORUGANO Co. Ltd. Use : Refer to the description indicated on the product.

2.2.2.3

Anticorrosive

Add the following anticorrosive to cooling water immediately after installation to prevent problems due to corroding cooling water and to decrease the frequency of replacement of cooling water. Consult the chiller manufacturer for use of the anticorrosive.Product name 1 2 CONTLIME K-6000 Kurilex L-111 Manufacturer Mitsubishi Gas Chemical Company, Inc. Kurita Water Industries Ltd.

Use : Add the anticorrosive above to cooling water initially so that the concentration is within 1000 to 2000 ppm. (100 to 200 cc/100 liters). Monthly check the concentration of the anticorrosive using concentration check paper dedicated to anticorrosive and adds the anticorrosive to cooling water until the concentration reaches about 1000 ppm. Concentration check paper : Purchase a concentration check set (50 sheets of check paper, a dropping pipette, etc.) together with CONTLIME K-6000 (manufactured by Mitsubishi Gas Chemical Inc).

CAUTION If the above anticorrosive is added to cooling water and the concentration is controlled, also be sure to replace the cooling water every year.

2.2.2.4

Cleaning agent

To remove foreign matters such as fur that have adhered to the inside of the cooling water circulating path, wash the cooling water circulating path using the following detergent. Consult the chiller manufacturer for use of the detergent.- 30 -

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2.INSTALLATIONProduct name Manufacturer Mitsubishi Gas Chemical Company, Inc. Kurita Water Industries Ltd.

1 2

DESLIME Kuridine I-302

Use: Add the detergent of 10% of the amount of cooling water, circulate the water for an hour, and then drain the water. After that, rinse the cooling water circulating path thoroughly. Do not touch a stock solution of DESLIME with your bare hands because the solution is a strong chemical. If a stock solution accidentally contacts your skin, wash the stock solution