fast, accurate metrology with 3d microscopes based on ... · corrosion and wear monitoring fast,...

46
Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

Upload: leanh

Post on 21-Jul-2018

213 views

Category:

Documents


0 download

TRANSCRIPT

Page 1: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

Page 2: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

Outline

2/26/2014 2 Bruker Confidential

• Introductions

• Brief Overview of 3D Microscopes based on WLI

• General technology description

• Benefits and general applications

• Specific Webinar Application Examples

• Corrosion Measurement/Monitoring

• Wear Metrology

• Summary

Page 3: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

Introductions Bruker Nano Surfaces Division

2/26/2014 3 Bruker Confidential

• Scanning Probe Microscopy

• 3D Optical Microscopy

• Stylus Profilometry

• Tribology and Mechanical Testing

Page 4: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

Introductions Bruker Stylus and Optical Metrology

2/26/2014 4 Bruker Confidential

• Technology Leadership

• 60+ Patents

• 3 R&D 100 Awards

• 6 Photonics Circle of Excellence Awards

• Manufacturing Excellence

• Lean, six sigma-based process

• >100 systems/quarter capacity

• Rapid production ramp capability

Bruker NSD SOM is part of Bruker Materials (BMAT), a division of Bruker

Page 5: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

Introductions Speaker

Matt Novak, Ph.D.

Director, Technology and Applications

Stylus and Optical Metrology

[email protected]

• Joined Bruker 2011 (~3 years)

• Industry experience (~17 years) optical engineering, fabrication and metrology

• Earned Ph.D. working in private sector metrology capital equipment (instrument design/assembly/test)

2/26/2014 5 Bruker Confidential

Page 6: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

• People interested fast, non-contact method for looking at wear or corrosion on metal or other parts (vs. gravimetric or SEM type studies)

• Those looking for metrology to monitor changes in surface topography from nm to µm scales with accuracy and repeatability

• Those unfamiliar with 3D microscopes based on WLI will gain understanding of this technique for quantitative surface measurements and imaging capabilities

• Those already familiar with 3D microscopes based on WLI –introduced to some example applications where the technique may be new

Who Will Benefit? Intended Webinar Audience

2/26/2014 6 Bruker Confidential

Page 7: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

Outline

2/26/2014 7 Bruker Confidential

• Introductions

• Brief Overview of 3D Microscopes based on WLI

• General technology description

• Benefits and general applications

• Specific Webinar Application Examples

• Corrosion Measurement/Monitoring

• Wear Metrology

• Summary

Page 8: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

3D Optical Microscope Bruker - White Light Interference (3D WLIM)

• Specialized objective and precision

scanner on an extremely stable

microscope platform

• Scan special objective in a

predefined fashion to change optical

path between sample and reference

• CCD camera captures the intensity

changes over multiple frames

• Best focus determined from captured

intensity - phase calculated from the

fringes or COM of signal envelope

used to build height information

Page 9: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

VSI

Demonstration of 3D Optical Scan Step Height Measurement

Step Height Sample

2/26/2014 Bruker Confidential 9

Page 10: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

2/26/2014 10 Bruker Confidential

~ 40 µm

~ -110 µm

~ 150 µm

range

Images can be displayed as a color look up table (e.g., red high, blue low)

…or displayed in greyscales to

look like SEM as well

3D Microscope Surface Imaging What do the images look like?

Page 11: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

Benefits and Applications Why 3D Optical Microscopes?

MEMS

Electronics

Orthopedics

Functional surface +

texture metrology

3D Optical Microscopes

provide…

• Fast, accurate, GR&R capable metrology

• Non-contact, non-destructive

• 1000+ analyses

• Stable and operator independent data

Page 12: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

Outline

2/26/2014 12 Bruker Confidential

• Introductions

• Brief Overview of 3D Microscopes based on WLI

• General technology description

• Benefits and general applications

• Specific Webinar Application Examples

• Corrosion Measurement/Monitoring

• Wear Metrology

• Summary

Page 13: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

Corrosion important in…

• Structural Infrastructure Management

• Buildings, Bridges, Railways, etc…

• Large Commercial Asset Management

• Trucks, Excavation equipment, Mining, etc.

• Automotive, Aerospace, Military

• Turbines

• Wind, Jet

• Coupon Analysis (Pipelines)

• Oil and gas

• Natural Gas Condensate

• Liquid Petroleum

• Water

Applications in Corrosion Monitoring How Quickly Will Infrastructure Degrade?

Alliance Pipeline Repair

US/Canada Border

Page 14: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

• Leaks, cleanup, PR issues

• Closed pipeline, product availability & sales

• Survey and tracking of pipeline conditions

• Preventative maintenance - products and manpower

There's a need for corrosion monitoring and preventing costly failures

14

Corrosion Causes Problems Expensive Problems…

Page 15: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

• Large Oil companies

• Large monitoring service providers for these companies

• Pipeline protectant and coating providers

2/26/2014 15

Industry Supply/Support Oil & Gas, Monitoring, Protectants

Page 16: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

Pipe-line Coupons

• A “coupon” is placed through (or could be) a section of pipe that is removed to establish service requirements

• Coupons placed in pipe (using ‘hot-taps’) and measured for corrosion

• Commonly measured every few months for amount of corrosion

• Conservative estimates approximately ~5000 of these pulled every day to be measured (global basis)

16

Common Industry Measurment/Sampling Oil & Gas, Monitoring, Protectants

Page 17: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

Many different types..

• Strip

• Disk

• Scale

• Weld

• Stressed

• Coupon placement in pipes

• Sometimes coupons are small parts of the original piece

• i.e., sections of pipes

17

Common Industry Measurment/Sampling Coupons Used in Monitoring

Page 18: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

Corrosion Global vs Localized Pitting

• Surface changes over time can be both global and localized

• Global changes, such as rusted areas, area easily modeled and can be tested using bulk techniques such as resistivity

• Localized changes, such as pitting, are difficult to model and can cause catastrophic failure in short periods of time

Global

corrosion

Localized

Pitting

Page 19: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

Pitting Corrosion Examination Serious Enough For a Designated Standard!

©2006 Veeco Instruments Inc.

Page 20: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

Currently using

• Weight loss – for global corrosion, slow (need to remove large material to get accuracy)

• SEM – for quantifying corrosion pits, time consuming, small area sample

Industry Challenge

• Need rapid and sensitive measure general/global corrosion

• High precision corrosion pit measurement

• Automated throughput of multiple sample measurements

2/26/2014 20

Pitting Corrosion Monitoring Current monitoring methods

Page 21: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

Current Corrosion Testing Gravimetric or SEM

• ASTM standards for testing corrosion coupons

• Mainly directed at gravimetric (weight loss/gain) for corrosion measurement

• Need for accurate and fast pit measurements – these are of real importance in corrosion and leak prevention

• Significant work being done using 3D microscope inspection to improve corrosion monitoring

Page 22: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

Corrosion Metrology Example Corrosion Study

• Experiments range from salt water baths for petrochemical industry to slight atmospheric contamination in MEMS

• To accelerate experiments, expose surfaces to dilute Sulfuric Acid

• Aluminum coupon and 22 different surface texture regions on a GAR strip were examined

Four of the 22 surface regions studied for corrosion

Surface roughness is 2, 8, 16 and 63 micro-inches moving from left to right

*GAR strip is a Precision Reference Standard, rectangular in shape, (2 1/2" x 3 3/4"), made of electroformed nickel and is

rhodium plated for superior abrasion resistance. It is a calibration block (on the market) with actual patch mean values of low

and high micro-inch surfaces and certified by the National Institute of Standards and Technology. (N.I.S.T.).

Page 23: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

RMS roughness changes from 1.3 to 3.5 µm

Ra 1.0

micron

Ra 1.46

micron

Ra 1.88

micron

Ra 2.58

micron

0 m

in

10 M

in

20 M

in

30 M

in

Corrosion Metrology Example Corrosion Study

Page 24: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

• Corrosion with different starting surface finish type and level examined

• Overall rougher surfaces did not corrode significantly more in static environment

• Some initial defects seen to foster pitting and corrosion

SM

OO

TH

R

OU

GH

CORROSION

- +

Corrosion Metrology Example Corrosion Study

Page 25: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

• Various surface finishes examined for rate of corrosion over longer time period

• Similar trends on increasing roughness and randomness of the surface

• Rougher surfaces corroded to greater degree

Y PSD of surface finish

1

10

100

1000

10000

10 100 1000

Spatial Frequency (1/mm)

PS

D (

mm

nm

^2)

Uncorroded

7 hours corroded

14 hours corroded

21 hours corroded

Corrosion Metrology Example Corrosion Study – Longer Accelerated Exposure

Page 26: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

Data Analysis Automated Multiple Region Analysis

• Easy way to study dynamic processes

• Visual or automated examination of surface differences

• Calculate volumes, areas, relative statistics on user-defined regions

• Here 13 pits are >250nm depth

Page 27: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

Curved Coupon Stitched Image

Robust Gaussian Filter - Removes Form

• RGF keeps edge details intact best possible results for depths/edge informaiton

2/26/2014 27

Data Analysis Automated Data Conditioning Enables Best Results

Page 28: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

• Utilized software analysis to provide to find corrosion pits and quantify their size and volume

2/26/2014 28

Image of flat coupon with corrosion pits

Data Analysis Automated Software Analysis to ID and Quantify Pitting/Corrosion

Page 29: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

Outline

2/26/2014 29 Bruker Confidential

• Introductions

• Brief Overview of 3D Microscopes based on WLI

• General technology description

• Benefits and general applications

• Specific Webinar Application Examples

• Corrosion Measurement/Monitoring

• Wear Metrology

• Summary

Page 30: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

Bruker Confidential Decemberr 2011 30

• Science of mechanisms of friction, lubrication, and wear of interacting surfaces that in relative motion

•A very old science, historically quantified using Gravimetric methods (weight changes determine material loss)

• Quantification of these processes is essential for many industries

Automotive, Aerospace, robotics, data storage, Petroleum, MEMS, Biomedical, Chemical, Materials, precision machining, Microelectronics and more

• Current development studies and process/quality control goals require higher performance as manufacturing demands increase

Tribology Accurate Quantitative Metrology is Key

Page 31: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

Bruker Confidential

Tribological Study: Drills Examination of Wear of Drilling Bits

Decemberr 2011 31

Page 32: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

Bruker Confidential Decemberr 2011 32

• Examine surface properties of bits of varying material/coatings drilling the same surface

• High speed steel, TiCN, SiC, TiN bits used to drill into 6mm anodized aluminum plate

• Head, inside surface, and forward surfaces examined throughout the process

• Many parameters examined to obtain meaningful data

Tribological Study: Drills 3D Images Allow Study of Tribology of Drilling Process

Page 33: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

Bruker Confidential

TiCN TiN HSS SiC

• 30 holes drilled with each type of bit, using same machine, plate, and setup

• SiC bit showed least amount of material redeposition, HSS the most

• Edge chipping, radius of curvature changes overall insignificant for this number of uses

Tribological Study: Drills 3D Images Allow Study of Tribology of Drilling Process

Page 34: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

Bruker Confidential

Example Tribology Case Studies Cutting Tools

Decemberr 2011 34

Page 35: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

Bruker Confidential Decemberr 2011 35

Sphere with wear scar

Same surface with spherical form removed

PEEK Sphere

Untested 3D Profile

Tribological Study: Implant Material 3D Images Allow Study of Wear

Page 36: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

• PEEK (Polyether ether ketone)

• Used in implants due to robustness, excellent mechanical/chemical properties

• Wear study on PEEK sphere follows as example application of 3D microscope for wear monitoring

36

Tribological Study Wear on PEEK Material

Page 37: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

37

Example Images of Simulated Wear Wear on PEEK Material

Page 38: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

38

Example Images of Simulated Wear Wear on Carbon-PEEK Material

Page 39: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

39

3D Microscope for Wear Metrology Orthopedic Material Application Example

• Wear of bearing surfaces is function of the amount and type of use and conditions under which the bearing operates

• The same principle applies to metal-on-metal and ceramic-on-ceramic bearings

• For a majority of patients, walking is the activity that contributes most to wear of total hip and knee prostheses

• Polyethylene (PE) wear of more than 0.1-0.2mm/year is associated with later osteolysis and failure of total hip arthroplasty (THA)

• Broad need for materials understanding

Page 40: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

40

Sphere before wear Wear mark introduced

Sphere terms removed,

before and after subtracted,

wear remains

Sphere mass measured before and after wear

Tribological Study 1” PEEK Sphere Wear on PEEK Material

Page 41: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

41

Initial Wear 1mg PEEK Removed Based on Mass Density ~7.6x108 µm3/mg

Page 42: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

42

1mg of PEEK Removed 0.152mm Depth of Wear Scar

Page 43: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

43

Wear 5mg PEEK Removed Based on Mass Density ~3.75x109 µm3/mg

Slight difference

due to wear

outside FOV..

Page 44: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

Outline

2/26/2014 44 Bruker Confidential

• Introductions

• Brief Overview of 3D Microscopes based on WLI

• General technology description

• Benefits and general applications

• Specific Webinar Application Examples

• Corrosion Measurement/Monitoring

• Wear Metrology

• Summary

Page 45: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

Summary

2/26/2014 45 Bruker Confidential

• Introduced Bruker BNS-SOM, 3D Microscopes based on WLI

• Gave general benefits of technology and brief overview of applications

• Discussed specific applications for corrosion and wear metrology

• Questions

Page 46: Fast, Accurate Metrology with 3D Microscopes Based on ... · Corrosion and Wear Monitoring Fast, Accurate Metrology with 3D Microscopes Based on White Light Interferometry (WLI)

© Copyright Bruker Corporation. All rights reserved.

www.bruker.com