MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS VOLUME 361

Ferroelectric Thin Films IV

Symposium held November 29-December 2, 1994, Boston, Massachusetts, U.S.A.

EDITORS:

Bruce A. Tuttle Sandia National Laboratories

Albuquerque, New Mexico, U.S.A.

Seshu B. Desu Virginia Tech

Blacksburg, Virginia, U.S.A.

R. Ramesh Bellcore

Redbank, New Jersey, U.S.A.

Т. Shiosaki Kyoto University

Kyoto, Japan

IMIRISI MATERIALS RESEARCH SOCIETY

Pittsburgh, Pennsylvania

Contents PREFACE . .г xiii

ACKNOWLEDGMENTS xv

MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS xvi

PART I: LAYERED STRUCTURE FERROELECTRICS

»LAYERED STRUCTURE OXIDES FOR FATIGUE FREE FERROELECTRIC APPLICATIONS 3

Dilip P. Vijay, Seshu B. Desu, Masaya Nagata, Xubai Zhang, and Tze C. Chen

CRYSTALLIZATION AND TEXTURE OF Bi-CONTAINING LAYERED PEROVSKITE THIN FILMS 15

S-Y. Chen, X-F. Du, and I-W. Chen

STRUCTURAL AND FERROELECTRIC PROPERTIES OF SrBi,Ta,09 THIN FILMS 21

Kazushi Amanuma, Takashi Hase, and Yoichi Miyasaka

PULSED LASER DEPOSITION OF Bi.TLO., THIN FILMS ON SAPPHIRE SUBSTRATES 27

William Jo and T.W. Noh

STRUCTURAL AND LEAKAGE CURRENT BEHAVIOR OF Bi4Ti3012 THIN FILMS ON La05Sr0 5Co03 BOTTOM ELECTRODES GROWN BY PULSED LASER DEPOSITION 33

William Jo, K.H. Kim, T.W. Noh, S.D. Kwon, B.D. Choe, and B.D. You

PREPARATION AND USE OF MOSAIC TARGET FOR THE DEPOSITION OF FERROELECTRIC BISMUTH TITANATE THIN FILMS 39

P.K. Ghosh and M.E. Azimi

ORIENTATION AND PHASE FORMATION OF Bi4Ti30,, FILM ON (100) SILICON BY AMPOCVD AND RTA 45

H. Wang, X.J. Su, J.M. Zeng, Z. Wang, S.X. Shang, and M. Wang

PART II: CHARACTERIZATION

*MECHANISM(S) FOR THE SUPPRESSION OF THE SWITCHABLE POLARIZATION IN PZT AND BaTi03 51

William L. Warren, Duane Dimos, Bruce A. Tuttle, Gordon E. Pike, Mark V. Raymond, Robert D. Nasby, R. Ramesh, and Joseph T. Evans, Jr.

»IMPRINT OF La-Sr-Co-O/Pb-La-Zr-Ti-O/La-Sr-Co-OHETERO-STRUCTURES GROWN BY PULSED LASER DEPOSITION 67

J. Lee, R. Ramesh, and V.G. Keramidas

CAN WE EXPLOIT IMPRINT IN FERROELECTRIC THIN FILM CAPACITORS FOR MEMORY APPLICATIONS? 79

In Kyeong Yoo and Seshu B. Desu

EFFECTS OF ELECTRON BEAM IRRADIATION ON PZT/PLZT THIN FILM CAPACITORS 85

Bo Jiang, Jiyoung Kim, Rajesh Khamankar, Insup Lee, and Jack C. Lee

»Invited Paper

v

REACTIVE ION ETCHING DAMAGE TO FERROELECTRIC THIN FILMS CAPACITORS 93

W. Pan, C.L. Thio, S.B. Desu, and Cheewon Chung

HETEROEPITAXIAL GROWTH OF Ba0 ,Sr0 ,Ti03/SrRu03 ON YSZ/Si BY OFF-AXIS SPUTTERING .'...' 99

S.Y. Hou, J. Kwo, R.K. Watts, J.-Y. Cheng, R.J. Cava, W.F. Peck, Jr., and D.K. Fork

MICROSTRUCTURES OF ULTRATHIN FILM OF SPUTTERED PbTi03 105 Kiyotaka Wasa, T. Satoh, K. Tabata, H. Adachi, Y. Ichikawa, and K. Setsune

A STUDY OF SWITCHING BEHAVIOR IN Pb(Zr,Ti)0, THIN FILMS USING X-RAY DIFFRACTION I l l

Michael O. Eatough, Duane Dimos, Bruce A. Tuttle, William L. Warren, and R. Ramesh

NUCLEAR REACTION PROBE OF OXYGEN VACANCY MIGRATION IN ELECTRICALLY FATIGUED PZT THIN FILM CAPACITORS 117

R.L. Pfeffer and W.D. Wilber

ENERGY LEVELS OF POINT DEFECTS IN PERVOSKITE OXIDES 123 J. Robertson and W.L. Warren

VACANCY RELATED DEFECTS IN THIN FILM Pb(ZrTi)03 MATERIALS 129 A. Krishnan, D.J. Keeble, R. Ramesh, W.L. Warren, B.A. Tuttle, R.L. Pfeffer, В. Nielsen, and K.G. Lynn

PHYSICAL PHENOMENA IN FERROELECTRIC THIN FILMS: STUDY AND MODELING 135

Vladimir I. Petrovsky, Eugeniy Ph. Pevtsov, and Alexsander S. Sigov

FERROELECTRIC FILM SELF-POLARIZATION 141 E. Sviridov, I. Sem, V. Alyoshin, S. Biryukov, and V. Dudkevich

OPTICAL BAND GAP IMPLICATIONS FOR FERROELECTRIC MEMORY APPLICATIONS 147

J.D. Klein and S.L. Clauson

PART III: PHOTONIC PHENOMENA

«OPTICAL LOSSES IN FERROELECTRIC OXIDE THIN FILMS: IS THERE LIGHT AT THE END OF THE TUNNEL? 155

D.K. Fork, F. Armani-Leplingard, and J.J. Kingston

DEPOSITION OF STRONTIUM BARIUM NIOBATE THIN FILMS BY METAL-ORGANIC CHEMICAL VAPOR DEPOSITION AND THEIR NONLINEAR OPTICAL PROPERTIES 167

M.J. Nystrom, B.W. Wessels, D.A. Neumayer, T.J. Marks, W.P. Lin, and G.K. Wong

PULSED LASER DEPOSITION OF EPITAXIAL Sr0 6,Ba0 39Nb,06 THIN FILMS FOR WAVEGUIDE APPLICATIONS . . . . . . 7 173

K.E. Youden, S. Schwyn Thöny, L. Hesselink, and J.S. Harris, Jr.

CONTROL OF HETEROEPITAXY IN SOL-GEL DERIVED LiNb03 THIN LAYERS 179

P.G. Clem and D.A. Payne

*Invited Paper

VI

LIGHT INFLUENCE ON FATIGUE IN PZT FILMS WITH PLANAR ELECTRODES 185

V.P. Dudkevich, I.M. Sem, E.V. Sviridov, and Z. Surowiak

OPTICAL STUDY OF PbTiO, THIN FILMS GROWN BY SOL-GEL TECHNIQUE 191

E. Ching-Prado, R.W. Tao, R.S. Katiyar, and A.S. Bhalla

SPECTROSCOPIC ELLIPSOMETRY CHARACTERIZATION OF La,TL,07 THIN FILMS " 197

Bryan D. Dickerson, Masaya Nagata, Y.J. Song, H.D. Nam, and Seshu B. Desu

PHOTOFERROELECTRIC PHENOMENA IN Sn2P,S6 SINGLE CRYSTALS AND THIN FILMS " 203

E. Arnautova, N. Kosonogov, E. Rogach, A. Pavlov, N. Protsenko, and A. Grekov

PHOTOFERROELECTRIC EFFECTS OF UNDOPED AND EXTRINSIC ION-DOPED PZT THIN FILMS 209

Li Li, Chhiu-Tsu Lin, Martin S. Leung, Paul M. Adams, and Russell A. Lipeles

INFLUENCE OF THE FERROELECTRIC PHASE TRANSITION ON THE PHOTOELECTRICAL PROPERTIES OF THE P-N JUNCTIONS 215

Anatol T. Lupu and Svetlana P. Grishechkina

PART IV: PROCESS INTEGRATION ISSUES

IMPACT OF A Ti ADHESION LAYER ON Pt/PZT/Pt CAPACITORS . 223 R.E. Jones, Jr., P.D. Maniar, J.L. Dupuie, J. Kim, R. Moazzami, J. Witowski, M.L. Kottke, N.C. Saha, and R.B. Gregory

MICROSTRUCTURAL AND ELECTRICAL PROPERTIES OF FERROELECTRIC CAPACITORS WITH Pt/RuO, HYBRID ELECTRODES 229

H.N. Al-Shareef, Y.L. Chen, O. Auciello, and A.I. Kingon

EFFECTS OF ANNEALINGS ON Pt/TiN/Ti INTERFACIAL REACTIONS 235 F. Varniere, B. Ea Kim, B. Agius, R. Bisaro, J. Olivier, G. Chevrier, H. Achard, H. Mace, and L. Peecoud

ELECTRODE CONTACTS ON PZT THIN FILMS AND THEIR INFLUENCE ON FATIGUE PROPERTIES 241

J.J. Lee, C.L. Thio, M. Bhattacharya, and S.B. Desu

STUDY ON MULTILAYERED ELECTRODES FOR FERROELECTRIC THIN FILM CAPACITORS 249

Ilsub Chung, J.K. Lee, Wan In Lee, C.W. Chung, and Seshu B. Desu

PART V: DRAM THIN FILM TECHNOLOGY

Pt HILLOCK FORMATION AND DECAY 257 Scott R. Summerfelt, Dave Kotecki, Angus Kingon, and H.N. Al-Shareef

EFFECTS OF A.C. STRESS ON CHARGE AND VOLTAGE DECAY RATES OF PZT THIN FILM CAPACITORS FOR DRAM APPLICATIONS 263

Rajesh B. Khamankar, Jiyoung Kim, Bo Jiang, and Jack С Lee

VII

MICROSTRUCTURAL AND ELECTRICAL CHARACTERIZATION OF BARIUM STRONTIUM TITANATE THIN FILMS 269

Yujing Wu, Elizabeth G. Jacobs, Russell F. Pinizzotto, Robert Tsu, Hung-Yu Liu, Scott R. Summerfelt, and Bruce E. Gnade

CORRELATIONS OF Ba. xSrxTiO, MATERIALS AND DIELECTRIC PROPERTIES ". 275

Robert Tsu, Hung-Yu Liu, Wei-Yung Hsu, Scott Summerfelt, Katsuhiro Aoki, and Bruce Gnade

THE EFFECTS OF La CONCENTRATION ON THE PROPERTIES OF PLT THIN FILMS: FROM THE PERSPECTIVE OF DRAM APPLICATIONS 281

Seong Jun Kang, Jeong Seon Ryoo, and Yung Sup Yoon

SrTi03 FILMS PREPARED BY MOCVD USING NOVEL Sr SOURCE 287 Hideaki Yamauchi, Takafumi Kimura, and Masao Yamada

PART VI: CHEMICAL VAPOR DEPOSITION

»MOCVD OF FERROELECTRIC Pb(Zr,Ti)0, THIN FILMS FOR MEMORY DEVICE APPLICATIONS 295

Masaru Shimizu and Tadashi Shiosaki

EPITAXIAL Pb(Zr0 40Ti0 60)O3/SrRuO3 and PbTi03/SrRu03 MULTILAYER THIN FILMS PREPARED BY MOCVD AND RF SPUTTERING 307

C M . Foster, R. Csencsits, P.M. Baldo, G.R. Bai, Z. Li, L.E. Rehn, L.A. Wills, R. Hiskes, D. Dimos, and M.B. Sinclair

GROWTH AND PROPERTIES OF PbTi03/PLT HETEROSTRUCTURES 313 Yeongkwan Kim, Y.H. Han, A. Erbil, and L.A. Boatner

LIQUID DELIVERY CVD OF FERROELECTRIC (Pb,La)(Zr,Ti)03 THIN FILMS 319

W. Tao, S.B. Desu, C.H. Peng, B. Dickerson, Т.К. Li, C.L. Thio, J.J. Lee, and W. Hendricks

IMPROVED ELECTRICAL PROPERTIES OF SrTi03 THIN FILMS BY ELECTRON CYCLOTRON RESONANCE PLASMA CHEMICAL VAPOR DEPOSITION 325

Hisato Yabuta, Koichi Takemura, Hiromu Yamaguchi, Shuji Sone, Toshiyuki Sakuma, and Masaji Yoshida

FERROELECTRIC (Pb,La)Ti03 THIN FILMS PREPARED BY METALORGANIC CHEMICAL DEPOSITION 331

Z.C. Feng, B.S. Kwak, and A. Erbil

GROWTH AND CHARACTERIZATION OF PbTi03 and Pb(Zr,Ti)0, THIN FILMS BY MOCVD 337

Y. Gao, W. Dong, and B.A. Tuttle

ELECTRICAL AND MICROSTRUCTURAL PROPERTIES OF LEAD TITANATE THIN FILMS DEPOSITED BY METALORGANIC CHEMICAL VAPOR DEPOSITION 343

M. Vellaikal and A. Kingon

A LOW TEMPERATURE VAPORIZATION OF Pb(THD), WITH NH3 349 June Key Lee, Wan In Lee, and Seshu B. Desu

»Invited Paper

VIII

GROWTH OF EPITAXIAL BaTi03 THIN FILMS AT 600°C BY METALORGANIC CHEMICAL VAPOR DEPOSITION 355

D.L. Kaiser, M.D. Vaudin, L.D. Rotter, Z.L. Wang, J.P. Cline, C S . Hwang, R.B. Marinenko, and J.G. Gillen

INFLUENCE OF Ti SOURCES ON PROPERTIES OF (Ba,Sr)Ti03 FILMS PREPARED BY LIQUID SOURCE CVD 361

T. Kawahara, M. Yamamuka, T. Makita, A. Yuuki, N. Mikami, and K. Ono

AUTOSTOICHIOMETRIC VAPOR DEPOSITION OF MULTICOMPONENT OXIDES 367

K.W. Chour and R. Xu

PART VII: SOLUTION DEPOSITION

»EFFECTS OF ACETYLACETONE ADDITIONS ON PZT THIN FILM PROCESSING 377

Robert W. Schwartz, R.A. Assink, D. Dimos, M.B. Sinclair, T.J. Boyle, and C D . Buchheit

RAPID THERMAL PROCESSING AND CRYSTALLIZATION KINETICS IN LEAD ZIRCONATE TITANATE (PZT) THIN FILMS 389

E.M. Griswold, L. Weaver, I.D. Calder, and M. Sayer

THE PYROCHLORE-TO-PEROVSKITE TRANSFORMATION IN SOLUTION-DERIVED LEAD ZIRCONATE TITANATE THIN FILMS 395

James A. Voigt, В.A. Tuttle, T.J. Headley, and D.L. Lamppa

EFFECTS OF RHEOLOGICAL CHARACTERISTICS OF SOL ON PREFERENTIAL ORIENTATION OF Pb(Mg,Zn),;,Nb2/,0, THIN FILMS . . . . . . 403

Hyun M. Jang and Mun K. Cho

EFFECT OF MICROSTRUCTURE ON THE ELECTRICAL CHARACTERISTICS OF SOL-GEL DERIVED PZT THIN FILMS 409

Jiyoung Kim, Rajesh Khamankar, Bo Jiang, Papu Maniar, Reza Moazzami, Robert E. Jones, and Jack С Lee

PREPARATION AND CHARACTERIZATION OF METAL ALKOXIDE DERIVED EPITAXIAL LEAD TITANATE BASED THIN FILMS 415

Keiichi Nashimoto and Shigetoshi Nakamura

THE CHARACTERIZATION AND ELECTRICAL PROPERTIES OF DOPED PZT THIN FILMS PREPARED BY SOL-GEL PROCESSING 421

Wan In Lee, J.K. Lee, Ilsub Chung, C.W. Chung, I.K. Yoo, and Seshu B. Desu

PREPARATION OF PbZrJ i , x 0 3 FILMS ON Si SUBSTRATES USING SrTiOj BUFFER LAYERS 427

Eisuke Tokumitsu, Kensuke Itani, Bum-Ki Moon, and Hiroshi Ishiwara

DIELECTRIC AND FERROELCTRIC PROPERTIES OF SOL-GEL DERIVED PLZT FILMS 433

G. Teowee, E.L. Quackenbush, C D . Baertlein, J.M. Boulton, E.A. Kneer, and D.R. Uhlmann

INFLUENCE OF THE SOL-GEL SYNTHESIS CONDITIONS ON THE 'ERTIES OF THIN PbTi03 FILMS P.J. Retuert, T.P. Velilla, V. Del С Martin, and R.E. Avila

PROPERTIES OF THIN PbTi03 FILMS 439

»Invited Paper

IX

PREPARATION AND ELECTRICAL CHARACTERISTICS OF (100), (111), AND RANDOMLY ORIENTED PZT THIN FILMS 445

Chang Jung Ют, Dae Sung Yoon, Joon Sung Lee, Chaun Gi Choi, Won Jong Lee, and Kwangsoo No

PART VIII: VAPOR DEPOSITION

•CONSTRUCTION OF STRAINED SrTi03/BaTi03 SUPERLATTICES AND THEIR DIELECTRIC PROPERTIES 453

Hitoshi Tabata, Hidekazu Tanaka, and Tomoji Kawai

THICKNESS DEPENDENCE OF INDUCED FERROELECTRICITY IN EPITAXIALLY GROWN Ba0 MSr0 56Ti03 THIN FILMS

Kazuhide Abe and Shuichi Komatsu

THE INFLUENCE OF THE CRYSTALLINE STRUCTURE ON THE ELECTRICAL •ERTIES OF BaTi03/SrRu03 L.A. Wills and Jun Amano

PROPERTIES OF BaTi03/SrRu03 HETEROSTRUCTURES 471

EFFECTS OF EXCESS Pb ON CRYSTALLIZATION AND ELECTRICAL PROPERTIES OF FERROELECTRIC PZT FILMS DEPOSITED BY REACTIVE RF MAGNETRON SPUTTERING 477

S.D. Bernstein, T.Y. Wong, S.R. Collins, Yanina Kisler, and R.W. Tustison

PREPARATION AND CHARACTERIZATION OF PMN (PbMgxNb, _Oz FILMS BY SPUTTERING 483

J.S. Cross, M. Tsukuda, K. Kurihara, N. Kamehara, and K. Niwa

ENHANCEMENT OF THE ELECTRICAL PROPERTIES OF BaTi03 FILMS ON GaAs USING DOUBLE LAYER STRUCTURES 489

L.H. Chang and W.A. Anderson

PHYSICOCHEMICAL AND ELECTRICAL PROPERTIES OF RF MAGNETRON SPUTTERED LEAD ZIRCONATE TITANATE THIN FILMS 495

B. Ea. Kim, M.C. Hugon, F. Varniere, B. Agius, H. Achard, and M. Puech

MICROSTRUCTURE EVOLUTION OF EPITAXIAL (Ba,Sr)TiO3/(001)MgO THIN FILMS 501

V.A. Alyoshin, E.V. Sviridov, VI.M. Mukhortov, I.N. Zakharchenko, and V.P. Dudkevich

STRUCTURE AND FERROELECTRIC BEHAVIOUR OF STEP-CRYSTALLIZED PbZr05Ti05O3 THIN FILMS PREPARED BY ELECTRON BEAM EVAPORATION OF MULTI-COMPONENT OXIDES 507

Shaban R. Darvish and A.C. Rastogi

PART IX: PULSED LASER DEPOSITION

SrxBa(1.x)Ti03 THIN FILMS FOR ACTIVE MICROWAVE APPLICATIONS 515 J.S. Horwitz, J.M. Pond, B. Tadayan, R.C.Y. Auyeung, P.C. Dorsey, D.B. Chrisey, S.C. Qadri, and C. Muller

EPITAXIAL GROWTH OF Ba, xSrxTi03 FILMS ON Si BY PULSED LASER DEPOSITION AND THEIR DIELECTRIC PROPERTIES 521

Myung-Bok Lee, Masashi Kawasaki, Mamoru Yoshimoto, Bum-Ki Moon, Hiroshi Ishiwara, and Hideomi Koinuma

*Invited Paper

X

IN SITU MONITORING IN THE PULSED LASER DEPOSITION OF FERROELECTRIC THIN FILMS 527

Peter K. Schenck, Mark D. Vaudin, Byeong W. Lee, David W. Bonnell, John W. Hastie, and Albert J. Paul

THIN FILM FORMATION OF PEROVSKITE TYPE DIELECTRIC AND FERROELECTRIC MATERIALS (MTi03;M=Ca,Sr,Ba and Pb) 533

Hitoshi Tabata, Hidekazu Tanaka, and Tomoji Kawai

PULSED LASER DEPOSITION OF FERROELECTRIC MULTILAYER CAPACITORS Wa2Cu,07JBaTiO,/YBa,Cu,07,ON Si(100) SUBSTRATES . . . . . . . . . 539

J. Luo, Q. Li, D.B. Fenner, S. Liu, W.D. Hamblen, and X.D. Wu

INVESTIGATION OF THE CHARACTERISTICS OF FERROELECTRIC THIN FILMS DEPOSITED BY PULSED LASER ABLATION 545

S. Sengupta, D.P. Vijay, and S.B. Desu

ELECTRICAL PROPERTIES OF PZT PREPARED BY PULSED LASER ABLATION ON VARIOUS ELECTRODES 551

Akiharu Morimoto, Yasuhiro Yamanaka, Toshiharu Minamikawa, and Tatsuo Shimizu

STRONTIUM BARIUM NIOBATE THIN FILMS PREPARED BY PULSED LASER DEPOSITION 557

Y. Liu, C.W. Ong, P.W. Chan, and C.L. Choy

PULSED EXCIMER LASER DEPOSITION AND RAPID THERMAL ANNEALING OF FERROELECTRIC Pb(Zr0 „TL 48)0, THIN FILMS ON Si-ON-INSULATOR . 563

Yiqing Chen, Lirong Zheng, Chenglu Lin, Xinglong Xu, and Shichang Zou

GROWTH OF FERROELECTRIC PLT THIN FILMS ON VARIOUS SINGLE CRYSTAL SUBSTRATES 569

Y.M. Kang, J.K. Ku, and S. Baik

PULSED LASER DEPOSITION OF EPITAXIAL LiNbO, FILMS ON SAPPHIRE SUBSTRATES USING A SINGLE CRYSTAL TARGET 575

See-Hyung Lee, Tae W. Noh, Jai-Hyung Lee, and Young-Gi Kim

CHARACTERIZATION OF POST-ANNEALED PZT THIN FILMS DEPOSITED USING PULSED LASER ABLATION 581

Jyrki Lappalainen, Johannes Frantti, and Seppo Leppävuori

PART X: PIEZOELECTRIC AND IR THIN FILM TECHNOLOGY

LIQUID PHASE EPITAXY OF Na, KTa, _Nbx03 FOR PYROELECTRIC APPLICATIONS 589

Z. Sitar, R. Gutmann, H. Pierhöfer, and P. Günter

PROPERTIES OF REACTIVELY SPUTTER DEPOSITED SrTiO, FILMS FOR IR DETECTOR READOUT ELECTRONICS 595

S.D. Bernstein, T.Y. Wong, J.K. Rawson, and R.W. Tustison

PREPARATION OF TEXTURED Sn,P,S6 FILMS AND THEIR PIEZO­ELECTRIC PROPERTIES ". '. 601

E. Arnautova, N. Protsenko, D. Sandjiev, I. Zakharchenko, and L. Zadorognaya

Y-Ba-Cu-0/PZT CURRENT CONTROLLABLE DISTRIBUTED RC-ELEMENT 607 J. Hagberg, J. Levoska, S. Leppävuori, and T. Murtoniemi

XI

ANISOTROPIC DYNAMIC STRAIN SENSORS BASED ON FERROELECTRIC PZT FILMS 613

A.A. Bakirov, E.V. Sviridov, and V.P. Dudkevich

AUTHOR INDEX 619

SUBJECT INDEX 623

xii