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Background Statement for SEMI Draft Document 6089Line Item Revision to:‘SEMI E170-0416: SPECIFICATION FOR SECURED FOUNDATION OF RECIPE MANAGEMENT SYSTEM (SFORMS)’,‘SEMI E170.1-0416: SPECIFICATION FOR SECS-II PROTOCOL FOR SECURED FOUNDATION OF RECIPE MANAGEMENT SYSTEM’, and‘SEMI E5-0813: SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT (SECS-II)’ with title change.

NOTICE: This Background Statement is not part of the balloted item. It is provided solely to assist the recipient in reaching an informed decision based on the rationale of the activity that preceded the creation of this ballot.

NOTICE: For each Reject Vote, the Voter shall provide text or other supportive material indicating the reason(s) for disapproval (i.e., Negative[s]), referenced to the applicable section(s) and/or paragraph(s), to accompany the vote.

NOTICE: Recipients of this ballot are invited to submit, with their Comments, notification of any relevant patented technology or copyrighted items of which they are aware and to provide supporting documentation. In this context, ‘patented technology’ is defined as technology for which a patent has been issued or has been applied for. In the latter case, only publicly available information on the contents of the patent application is to be provided.

Background

During development of the first version of the SEMI E170.1, new SECS-II messages were unable to be added to SEMI E5 according to the direction by SEMI. Therefore all SEMI E170 messages were mapped to SEMI E39 OSS generic services which are not unfamiliar enough in the industry. Now, according to the direction change of SEMI, a replacement of current generic message mapping with SECS-II message mapping is requested and is agreed that it is reasonable for accelerating SEMI E170 implementation.

In addition, the title of SEMI E5 should be changed according to the SEMI Procedure manual February 12 2016 Appendix A4-1, Table A4-1, and A4-1-1, because it is a nonconforming title.

Note : In this document, remarkable amendments from published Standard are distinguished by color. In addition, the added parts are typically highlighted with underline; the removed parts are typically denoted with double strikeout marks (on the bottom for figure). Deleted figures may also be denoted with Delete, added figures may also be denoted with Add for better readability. These markings are for highlight in the ballot only. They are not proposed to be included in the updated standard.

The ballot results will be reviewed and adjudicated at the meetings indicated in the table below. Check www.semi.org/standards under Calendar of Events for the latest update.

Review InformationTask Force Review Committee Review

Group: Japan GEM300 TF Japan TC Chapter of Information & Control Global Technical Committee

Date: Friday, April 21, 2017 Friday, April 21, 2017Time & Time Zone: TBD TBDLocation: SEMI Japan office SEMI Japan officeCity, State/Country: Tokyo, Japan Tokyo, JapanLeader(s): Yoshihisa Takasaki

(SCREEN Semiconductor Solutions)Yuko Toyoshima (Hitachi High-Technologies)

Takayuki Nishimura (SCREEN Semiconductor Solutions)Mitsuhiro Matsuda (Hitachi Kokusai Electric)

Standards Staff: Chie Yanagisawa (SEMI Japan)81.3.3222.5863 / cyanagisawa @semi.org

Chie Yanagisawa (SEMI Japan)81.3.3222.5863 / cyanagisawa @semi.org

Task Force Review meeting’s details are subject to change, and additional review sessions may be scheduled if necessary. Contact the task force leaders or Standards staff for confirmation.

If you need a copy of the documents in order to cast a vote, please contact the following person within SEMI. Chie YanagisawaSEMI Standards, SEMI JapanTel: 81.3.3222.5863Email: [email protected]

Please be advised that voter requests for access to the full Standards must be made at least three business days before the voting deadline. Late requests may not be honored, and if the Standards are not available for this reason, the voter may not use this as justification for rejecting the ballot.

http://www.semi.org/standards

DRAFTDocument Number:

Date: 5/21/23

SEMI Draft Document 6089Line Item Revision to:‘SEMI E170-0416: SPECIFICATION FOR SECURED FOUNDATION OF RECIPE MANAGEMENT SYSTEM (SFORMS)’,‘SEMI E170.1-0416: SPECIFICATION FOR SECS-II PROTOCOL FOR SECURED FOUNDATION OF RECIPE MANAGEMENT SYSTEM’, and‘SEMI E5-0813: SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT (SECS-II)’ with title change.

Note: See the ‘Quotations of Required Sections from the Documents’ section in the end of this document for the quotation of Purpose, Scope, and Terminology etc. from the Standards to be revised by this ballot.

Line Item Revisions

Note: Additions are indicated in blue with underline and deletions are indicated in red with strikethrough.

Note: Numbers of section, table, and figure, and numbers used for their references in the quoted portion of the proposals are aligned with the existing Standard unless otherwise noted. Those numbers are subjects to change per the result of various line items which may add or remove those elements. Those numbers will be adjusted by SEMI prior to publication.

1 Line Item #1: Revise the Message Mapping in SEMI E170.1 with some Parameter Changes in SEMI E170, and Add SECS message definitions in SEMI E5.

1.1 Line Item #1-1 Make the following revisions to SRSOBJ related Tables in SEMI E170.

Table 15 SRSOBJ Service Message Parameter Definition

Parameter Name Form Description

ObjID Text.SRSOBJID. Numerical text expression of positive integer.ObjID is equipment defined.

SRSOBJ object Identifier.

SRSSwitch Enumerated: Disabled, Enabled Enable / Disable entire SRS functionalities. Default is Disabled.

PEMFlagList List of PEMFlag

PEMFlag Maximum 16 characters PEMFlag = ‘Conventional’ :PEM

Off PEMFlag = ‘Production’ or

‘Production n’ :PEM On

PEMFlag holds SecurityID to be used for PJ creation

RecipeID RecID which is defined in SEMI E40 Recipe IDRecID may not always be a unique identifier

This is a Draft Document of the SEMI International Standards program. No material on this page is to be construed as an official or adopted Standard or Safety Guideline. Permission is granted to reproduce and/or distribute this document, in whole or in part, only within the scope of SEMI International Standards committee (document development) activity. All other reproduction and/or distribution without the prior written consent of SEMI is prohibited.

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VersionID Maximum 256 characters Optional unique identifier of recipesVersionID shall be unique within the recipes with the same Recipe ID

SecurityID Maximum 16 characters Identifier of Security Class of the recipeTypeID Maximum 16 characters Identifier of the Type of the recipeEquipmentID Maximum 256 characters Identifier that indicates equipment which the recipe

is tuned forRecipeXID List of

RecipeIDVersionIDSecurityIDTypeIDEquipmentID

Extended recipe identifier

RecipeBody Equipment defined recipe Recipe BodyRecipeXIDList List of (RecipeID, VersionID,

SecurityID, TypeID, EquipmentID)List of RecipeXID

RecipeList List of (RecipeID, VersionID, SecurityID, TypeID, EquipmentID, RecipeBody)

List of Recipe

CheckInformation User defined Check information of specified recipesPre-ExeCheckResult Enumerated: OK, NG OK/NG response from the host to Pre-Exe Check

event from equipmentSetSRSSwitchResp Enumerated: Done, Error Information concerning the result of the serviceSetPEMFlagResp Enumerated: Done, Error Information concerning the result of the serviceClearClassResp Enumerated: Done, Error Information concerning the result of the serviceDeleteRecipeResp Enumerated: Done, Error Information concerning the result of the serviceWriteRecipeResp List of

RecipeTransferResultList of EachRecipeTransfer

Information concerning the result of the service

RecipeCheckNotifResp List of EachRecipeCheck Notification of recipe check result to the serviceGetRecipeXIDListResp Enumerated: Done, Error Information concerning the result of the serviceReadRecipeResp Enumerated: Done, Error Information concerning the result of the servicePreSpecifyRecipeResp Enumerated: Done, Error Information concerning the result of the servicePresetRecipeXIDResp Enumerated: Done, Error Information concerning the result of the serviceQueryRecipeEventResp Enumerated: Done, Error Information concerning the result of the event.Pre-ExeCheckEventResp Enumerated: Done, Error Information concerning the result of the event.Pre-ExeCheckResp List of

Pre-ExeCheckResultAckConditional WriteRecipeResp

Information concerning the result of the service

QueryRecipeXIDListEventResp Enumerated: Done, Error Information concerning the result of the event.QueryRecipeXIDListResp Enumerated: Done, Error Information concerning the result of the servicePostRecipeEventResp Enumerated: Done, Error Information concerning the result of the event.RecipeTransferResult Enumerated: Done, Full, Error Response component for a list of recipe transferEachRecipeTransfer Enumerated: OK, NG Response component for single recipe transferEachRecipeCheck Enumerated: OK, NG Response component for single recipe checkPre-ExeCheckResultAck Enumerated: Done, Error Response component for Pre-ExeCheckResult


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Table 25 QueryRecipe Event Parameter Definitions

Parameter Name Req/Ind Rsp/Conf Description

RecipeXIDList M - List of RecipeXIDQueryRecipeEventResp - M Information concerning the result of the event.

Table 26 Pre-ExeCheck Event Parameter Definitions


RecipeXIDList M - List of RecipeXIDCheckInformation M - Check information for Pre-Execution Check.Pre-ExeCheckEventResp - M Information concerning the result of the event.

Table 28 QueryRecipeXIDList Event Parameter Definitions


SecurityID M -EquipmentID C - Identifier which indicates for which equipment the recipe is tuned.QueryRecipeXIDListEventResp - M Information concerning the result of the event.

Table 30 PostRecipe Event Parameter Definitions


RecipeList M -PostRecipeEventResp - M Information concerning the result of the event.

1.2 Line Item #1-2 Make the following revisions to RACOBJ related Tables in SEMI E170.

Table 31 RACOBJ Service Message Parameter Definition


ObjID Text.RACOBJID.‘<Security Class>’Security Class implemented by SRS ObjectObjID is equipment defined.

RACOBJ object Identifier.

RACSwitch Enumerated: Enabled, Disabled Enable/Disable of entire RAC functionalitiesAutoClose Unsigned integer.

Unit is user defined.‘0’ = AutoClose function is not used (Default)‘1’ or more = Maximum time

A function that equipment closes the session automatically when operator access doesn’t occur exceeding the predefined maximum time.

OperatorID Maximum 32 characters Identifier of the operator who uses the Remote Access session

OperatorPassword Maximum 16 characters Password of the operator who uses the Remote Access session

SecurityID Maximum 16 characters Identifier of Security Class of the recipe


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EquipmentID Maximum 256 characters Identifier which indicates for which equipment the recipe is tuned.

CloseStatus Enumerated: Normal, AutoClose, Error Status of the RACObjSetRACAttributesResp Enumerated: Done, Error Information concerning the result of the serviceOpenRemoteAccessEventResp Enumerated: Done, Error Information concerning the result of the event.OpenRemoteAccessResp Enumerated: OK, NG Information concerning the result of the serviceCloseRemoteAccessEventResp Enumerated: Done, Error Information concerning the result of the event.CloseRemoteAccessResp Enumerated: OK, NG Information concerning the result of the service

Table 42 OpenRemoteAccess Event Parameter Definitions


ObjID M - Object IDObjType M - Object TypeOperatorID M - ID of the operatorOperatorPassword M - Password of the operatorSecurityID M - This specifies the Security Class of targeted recipesEquipmentID C - Identifier which indicates for which equipment the recipe is tuned.OpenRemoteAccessEventResp - M Information concerning the result of the event.

Table 44 CloseRemoteAccess Event Parameter Definitions


ObjID M - Object IDObjType M - Object TypeSecurityID M - This specifies the Security Class of targeted recipesCloseStatus M - Informs if the session is being closed properlyCloseRemoteAccessEventResp M Information concerning the result of the event.

1.3 Line Item #1-3 Add ObjType to the Table 16 through 24, Table 27, Table 29, Table 36, Table 41, Table 43 and Table 45 in E170, just under ObjID as shown below.


ObjID M - Object IDObjType M - Object Type

1.4 Line Item #1-4 Amend editorial error of using ‘Y’ instead of ‘R’ to say ‘required’.

Table 39 RACOBJ Service Message Description

Service Name Triggered by Type#1 Req#2 DescriptionSetRACAttributes Host R YR This service sets attributes of RACOBJ


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Service Name Triggered by Type#1 Req#2 DescriptionGetRACAttributes Host R YR This service gets attributes of RACOBJOpenRemoteAccess Equipment R YR This service requests to open a Remote Access session to the host.CloseRemoteAccess Equipment R YR This service requests to close a Remote Access session to the host.

#1 The ‘Type’ column is used to indicate whether the service consists of a request/response message pair, ‘R’, or a single notification message, ‘N’.#2 The ‘Req’ column is used to indicate whether the service is required, ‘R’, or optional, ‘O’.

1.5 Line Item #1-5 Replace entire table of specified tables in SEMI E170.1 as shown below. Also, improve some table names as shown below.

Note to SEMI Staff: In case new Stream number request conflict occurs among the ballots submitted to this ballot cycle, the Stream number may be reassigned by SEMI Staff.

Table 1 SRSOBJ Service Messages Mapping

SRSOBJ Service Message Name Stream, Function SECS-II Name

GetSRSAttributes S14F1,F2 GetAttr Request/GetAttr DataSetSRSSwitch S 20 F 1 ,F 2 SetSRSSwitch Request/Acknowledge SetPEMFlag S20F3, F4 SetPEMFlag Request/Acknowledge ClearClass S20F5, F6 ClearClass Request/Acknowledge DeleteRecipe S20F7, F8 DeleteRecipe Request/Acknowledge WriteRecipe S20F9, F10 WriteRecipe Request/Acknowledge GetRecipeXIIDList S20F11, F12 GetRecipeXIDList Request/Acknowledge ReadRecipe S20F13, F14 Read Recipe Request/Acknowledge PreSpecifyRecipe S20F15, F16 PreSpecify Recipe Request/Acknowledge PresetRecipeXID S20F17, F18 Preset Recipe XID Request/Acknowledge Pre-ExeCheck S20F19, F20 Pre-ExeCheck Request/Acknowledge QueryRecipeXIDList S20F21, F22 Query Recipe XID Request/Acknowledge QueryRecipe Event S20F23, F24 QueryRecipeEvent Send/AcknowledgePre-ExeCheck Event S20F25, F26 Pre-ExeCheckEvent Send/AcknowledgeQueryRecipeXIDList Event S20F27, F28 QueryRecipeXIDListEvent Send/AcknowledgePostRecipe Event S20F29, F30 PostRecipeEvent Send/Acknowledge

Table 2 SRSOBJ Service Parameter to SECS-II Data Items Mapping

SRSOBJ Service Parameter Range SECS-II Data Item

ObjID [20] 1-80 characters OBJIDObjType [20] “SRSObject”SRSSwitch [51] Enumerated:

0=Disabled, 1=EnabledSRSSWITCH

PEMFlag [20] 0-16 characters:“Conventional”, “Production”, “Production n”

PEMFLAG


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PEMFlagList [0] Structure L,n 1. <PEMFLAG1> : n. <PEMFLAGn>

RecipeID [20] RecID, defined in SEMI E40i.e. RCPSPEC or PPID

VersionID [20] 0-256 characters VERIDSecurityID [20] 0-16 characters SECIDTypeID [20] 0-16 characters TYPEIDEquipmentID [20] 0-256 characters EQIDRecipeXID [0] Structure L,5

1. <RecID> 2. <VERID> 3. <SECID> 4.<TYPEID> 5.<EQID>

RecipeBody User defined RCPBODYARecipeXIDList [0] Structure L, n

1. L,5 1. <RecID1> 2. <VERID1> 3. <SECID1> 4.<TYPEID1> 5.<EQID1> : n. L,5 1. <RecIDn> 2. <VERIDn> 3. <SECIDn> 4.<TYPEIDn> 5.<EQIDn>

RecipeList [0] Structure L,n 1. L,6 1. <RecID1> 2. <VERID1> 3. <SECID1> 4.<TYPEID1> 5.<EQID1> 6.<RCPBODYA1> : n. L,6 1. <RecIDn> 2. <VERIDn> 3. <SECIDn> 4.<TYPEIDn> 5.<EQIDn> 6.<RCPBODYAn>

CheckInformation User defined CHKINFO


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Pre-ExeCheckResult [51] Enumerated:0=OK, 1=NG

P ECACK

SetSRSSwitchResp [51] Enumerated:0=Done, 1=Error

SSSACK

SetPEMFlagResp [51] Enumerated:0=Done, 1=Error

SPFACK

ClearClassResp [51] Enumerated:0=Done, 1=Error

CCACK

DeleteRecipeResp [51] Enumerated:0=Done, 1=Error

DRRACK

RecipeTransferResult [51] Enumerated:0=Done, 1=Error, 2=Full

RXACK

EachRecipeTransfer [51] Enumerated:0=Done, 1=NG

ERXACK

WriteRecipeResp [0] Structure L,2 1. <RXACK> 2. L,n 1.< ERXACK1> : n.< ERXACKn>

RecipeCheckNotifResp [0] Structure L,n 1.< ERCACK1> : n.< ERCACKn>

GetRecipeXIDListResp [51] Enumerated:0=Done, 1=Error

GRXLACK

ReadRecipeResp [51] Enumerated:0=Done, 1=Error

RRACK

PreSpecifyRecipeResp

[51] Enumerated:0=Done, 1=Error

PSRACK

PresetRecipeXIDResp

[51] Enumerated:0=Done, 1=Error

PRXACK

Pre-ExeCheckResultAck [51] Enumerated:0=Done, 1=Error

P ECRACK

Pre-ExeCheckResp [0] Structure L,2 1.< P ECRACK> 2. L,2 (*Note 1) 1. <RXACK> 2. L,n 1.< ERXACK1> : n.< ERXACKn>

*Note1: 0 length list means “WriteRecipeResp is not returned”

QueryRecipeXIDListResp [51] Enumerated:0=Done, 1=Error

QRXACK


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EachRecipeCheck [51] Enumerated:0=OK, 1=NG

ERCACK

QueryRecipeEventResp [51] Enumerated:0=Done, 1=Error

QREACK

Pre-ExeCheckEventResp [51] Enumerated:0=Done, 1=Error

PECEACK

QueryRecipeXIDListEventResp [51] Enumerated:0=Done, 1=Error

QRXLEACK

PostRecipeEventResp [51] Enumerated:0=Done, 1=Error

PREACK

Table 3 PRCOBJ Service Messages Mapping

PRCOBJ Service Message Name Stream, Function SECS-II Name

SetPRCAttributes S20F31, F32 SetPRCAttr Request/AcknowledgeGetPRCAttributes S14F1,F2 GetAttr Request/GetAttr Data

Table 4 PRCOBJ Service Parameter to SECS-II Data Items Mapping

PRCOBJ Service Parameter Range SECS-II Data Item

ObjID [20] 1-80 characters OBJIDObjType [20] “PRCObject”PRCSwitch [51] Enumerated:

0=Disabled, 1=EnabledPRCSWITCH

AutoClear [51] Enumerated:0=Disabled, 1=Enabled

AUTOCLEAR

MaxNumber [0] Structure L, n 1.<MAXNUMBER1> : 2.<MAXNUMBERn>

MaxTime [51] Enumerated:0=Maximum Time function is not used,1 or more =Maximum Time

MAXTIME

PRCPre-ExeCheck [51] Enumerated:0=Disabled, 1=Enabled

PRCPREEXECHK

SetPRCAttributesResp [51] Enumerated:0=Done, 1=Error

SPAACK

Table 5 RACOBJ Service Messages Mapping

RACOBJ Service Message Name Stream, Function SECS-II Name

SetRACAttributes S20F33,F34 SetRACAttr Request/SetRACAttr DataGetRACAttributes S14F1,F2 GetAttr Request/GetAttr DataOpenRemoteAccess S20F35, F36 OpenRemoteAccessRequest/AcknowledgeOpenRemoteAccess Event S20F37, F38 OpenRemoteAccessEvent Send/Acknowledge


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RACOBJ Service Message Name Stream, Function SECS-II Name

CloseRemoteAccess S20F39, F40 CloseRemoteAccessRequest/AcknowledgeCloseRemoteAccess Event S20F41, F42 CloseRemoteEvent Send/Acknowledge

Table 6 RACOBJ Service Parameter to SECS-II Data Items Mapping

RACOBJ Service Parameter Range SECS-II Data Item

ObjID [20] 1-80 characters OBJIDObjType [20] “RACObject”RACSwitch [51] Enumerated:

0=Disabled, 1=EnabledRACSWITCH

AutoClose [5( )] Enumerated:0=AutoClose function is not used (default),1 or more =Maximum Time

AUTOCLOSE

SetRACAttributesResp [51] Enumerated:0=Done, 1=Error

SRAACK

OperatorID [20] 0-32 characters OPRIDOperatorPassword [20] 0-16 characters OPRPWORDSecurityID [20] 0-16 characters SECIDEquipmentID [20] 0-256 characters EQIDOpenRemoteAccessResp [51] Enumerated:

0=OK, 1=NGORAACK

OpenRemoteAccessEventResp [51] Enumerated:0=Done, 1=Error

ORAEACK

CloseStatus [51] Enumerated:0=Normal, 1=AutoClose, 2=Error

CLSSTS

CloseRemoteAccessResp [51] Enumerated:0=OK, 1=NG

CRAACK

CloseRemoteAccessEventResp [51] Enumerated:0=Done, 1=Error

CRAEACK

1.6 Line Item #1-6 Delete entire table of ‘Table 7 Variable Data Item Mapping’ in SEMI E170.1.


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1.7 Line Item #1-7 Add Data Items shown in blue with underline to ‘Table 3 Data Item Dictionary’ in SEMI E5.

Table 3 Data Item Dictionary

Name Format Description Values Where Used

AUTOCLEAR 51 A flag which enables or disables the Auto Clear function.

0 = Disabled, 1=Enabled S20F31

AUTOCLOSE 5() A function that equipment closes the session automatically when operator access doesn’t occur exceeding the predefined maximum time.

0 = AutoClose function is not used

1 or more =Maximum Time

S20F33

CCACK 51 Information concerning the result of the service.

0 = Done, 1=Error S20F6

CHKINFO User defined. S20F25

CLSSTS 51 Information if the session is closed properly.

0=Normal, 1=AutoClose, 2=Error S20F41

CRAACK 51 Information concerning the result of the service.

0 = OK, 1=NG S20F40

CRAEACK 51 Information concerning the result of the event.


DRRACK 51 Information concerning the result of the service.


EQID 20 Identifier that indicates equipment which the recipe is tuned for.

S20F7, F9, F12, F13, F14, F15, F17, F19, F20, F22, F23, F25, F27, F29, F37

ERCACK 51 Response component for single recipe check.

0 = OK, 1=NG S20F10, F16, F20

ERXACK 51 Response component for single recipe transfer.

0 = Done, 1=NG S20F10, F20

GRXLACK 51 Information concerning the result of the service.


MAXNUMBER 20 Provides MaxNumber information for each subspace. Used in the data item MAXNUMBERLIST.

See MAXNUMBERLIST

MAXNUMBERLIST 0 Maximum number of PEM Recipes allowed to be preserved in PRC after PJ creation. MaxNumber has a list structure so that it can be applied to each subspace. The usage of the list structure is equipment

L,n 1.<MAXNUMBER1>

n.<MAXNUMBERn>

‘n’ is recipes allowed

S20F31

See SEMI E170 PRCOBJ Service Message Parameter Definition for detail.


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defined.

MAXTIME 51 Maximum time during which a PEM Recipe allowed to be in PRC after use.

0 = Maximum Time function is not used,1 or more =Maximum Time

S20F31

OBJID 20, 5() Identifier for an object . S1F19;S14F1, F2, F3, F4;S20F1, F3, F5, F7, F9, F11, F13, F15, F17, F19, F21, F31, F33, F35, F39

OPRID 20 Host-registered identifier of the operator who uses the Remote Access session

Maximum 32 characters. S20F37

OPRPWORD 20 Host-registered password of the operator who uses the Remote Access session.

Maximum 16 characters. S20F37

ORAACK 51 Information concerning the result of the service.

0 = OK, 1=NG S20F36

ORAEACK 51 Information concerning the result of the event.


PECACK 51 OK/NG response from the host to Pre-Exe Check event from equipment.

0 = OK, 1=NG S20F19

PECEACK 51 Information concerning the result of the event.


PECRACK 51 Response component for single recipe check.


PEMFLAG 20 PEMFlag holds SecurityID to be used for PJ creation:

PEM On: “Conventional”,

PEM Off: “Production”, “Production n”

S20F3

PRCPREEXECHK 51 Enable/Disable of Pre-Execution Check option.

This defines use of optional Pre-Execution Check.


PRCSWITCH 51 Enable/Disable of entire PRC functionalities.


PSRACK 51 Information concerning the result of the service.


PREACK 51 Information concerning the result of the event.


PRXACK 51 Information concerning the result of the service.


QREACK 51 Information concerning the result of the event.



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QRXACK 51 Information concerning the result of the service.


QRXLEACK 51 Information concerning the result of the event.


RACSWITCH 51 Enable/Disable of entire RAC functionalities.

0 = Disabled, 1=Enabled S20F33,

RCPBODYA 0, 10, 20, 3(),

5()

Recipe body allowed list structure.

S20F9, F14, F29

RRACK 51 Information concerning the result of the service.


RXACK 51 Response component for a list of recipe transfer.

0 = Done, 1=Error, 2=Full S20F10, F20

RecID 20 <RCPSPEC>or<PPID>

RecID may not always be a unique identifier.

S20F7, F9, F12, F13, F14, F15, F17, F19, F20, F22, F23, F25, F29

SECID 20 Identifier of Security Class of the recipe.

S20F5, F7, F9, F11, F12, F13, F14, F15, F17, F19, F20, F22, F23, F25, F27, F29, F37, F41

SPAACK 51 Information concerning the result of the service.


SPFACK 51 Information concerning the result of the service.


SRAACK 51 Information concerning the result of the service.


SRSSWITCH 51 Enable / Disable entire SRS functionalities. Default is Disabled.


SSSACK 51 Information concerning the result of the service.


TYPEID 20 Identifier of the Type of the recipe.

S20F7, F9, F12, F13, F14, F15, F17, F19, F20, F22, F23, F25, F29

VERID 20 Optional unique identifier of recipes.

S20F7, F9, F12, F13, F14, F15, F17, F19, F20, F22, F23, F25, F29


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1.8 Line Item #1-8 Add SECS message definitions in SEMI E5 10.25 Stream 20 Specification for secured Foundation Of Recipe Management System.

Note to SEMI Staff: :In case new Stream number request conflict occurs among the ballots submitted to this ballot cycle, the Stream number may be reassigned by SEMI Staff.

10.25 Stream 20 Specification for secured Foundation Of Recipe Management System — This stream provides protocol for a set of messages that enable the control of SEMI E170 SFORMS.

Stream,Function Name (Mnemonic) DirectionS20,F0 Abort Transaction (S20F0) S,H<->EDescriptionUsed in lieu of an expected reply to abort a transaction. Function 0 is defined in every stream and has the same meaning in every stream.StructureHeader only

Exception

Stream,Function Name (Mnemonic) DirectionS20,F1 SetSRSSwitch Request (SSRSSR) S,H->E,replyDescriptionThis message requests to set SRSSwitch.StructureL,3 1. <OBJID> 2. <OBJTYPE> 3. <SRSSWITCH>

ExceptionNone

Stream,Function Name (Mnemonic) DirectionS20,F2 SetSRSSwitch Acknowledge (SSRSSA) S,H<-EDescriptionThis message returns information concerning the result of the service.Structure<SSSACK>

ExceptionNone.


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Stream,Function Name (Mnemonic) DirectionS20,F3 SetPEMFlag Request (SPFR) S,H->E,replyDescriptionThis message requests to set PEMFlags.StructureL,3 1. <OBJID> 2. <OBJTYPE> 3. L,n n = number of PEMFlags requested 1. <PEMFLAG1> . . n. <PEMFLAGn>

ExceptionNone

Stream,Function Name (Mnemonic) DirectionS20,F4 SetPEMFag Acknowledge (SPFA) S,H<-EDescriptionThis message returns information concerning the result of the service.Structure<SPFACK>

ExceptionNone.

Stream,Function Name (Mnemonic) DirectionS20,F5 ClearClass Request (CCR) S,H->E,replyDescriptionThis message requests to clear all recipes in the Security Class specified by SecurityID.StructureL,3 1. <OBJID> 2. <OBJTYPE> 3. <SECID>

ExceptionNone

Stream,Function Name (Mnemonic) DirectionS20,F6 ClearClass Acknowledge (CCA) S,H<-EDescriptionThis message returns information concerning the result of the service.Structure<CCACK>

ExceptionNone.


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Stream,Function Name (Mnemonic) DirectionS20,F7 DeleteRecipe Request (DRR) S,H->E,replyDescriptionThis message requests to delete specified recipes in SRS.StructureL,3 1. <OBJID> 2. <OBJTYPE> 3. L,n n = number of recipes requested 1. L,5 1. <RecID1> 2. <VERID1> 3. <SECID1> 4. <TYPEID1> 5. <EQID1> . . n. L,5 1. <RecIDn> 2. <VERIDn> 3. <SECIDn> 4. <TYPEIDn> 5. <EQIDn>

ExceptionA zero-length list means to request all recipes in SRS to be deleted.

Stream,Function Name (Mnemonic) DirectionS20,F8 DeleteRecipe Acknowledge (DRA) S,H<-EDescriptionThis message returns information concerning the result of the service.Structure<DRRACK>

ExceptionNone.


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Stream,Function Name (Mnemonic) DirectionS20,F9 WriteRecipe Request (WRR) S,H->E,replyDescriptionThis message requests to writes recipes down into SRS.StructureL,3 1. <OBJID> 2. <OBJTYPE> 3. L,n n = number of recipes requested 1. L,6 1. <RecID1> 2. <VERID1> 3. <SECID1> 4. <TYPEID1> 5. <EQID1> 6. <RCPBODYA1> . . n. L,6 1. <RecIDn> 2. <VERIDn> 3. <SECIDn> 4. <TYPEIDn> 5. <EQIDn> 6. <RCPBODYAn>

ExceptionNone

Stream,Function Name (Mnemonic) DirectionS20,F10 WriteRecipe Acknowledge (DRA) S,H<-EDescriptionThis message returns information concerning the result of the service.StructureL,2 1. L,2 1. <RXACK> 2. L,n n = number of recipes returned 1. <ERXACK1> . . n. <ERXACKn> 2. L,n 1. <ERCACK1> . . n. <ERCACKn>

ExceptionA zero-length list means no recipe returned.


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Stream,Function Name (Mnemonic) DirectionS20,F11 GetRecipeXIDList Request (GRXLR) S,H->E,replyDescriptionThis message requests a list of RecipeXID which has specified SecurityID.StructureL,3 1. <OBJID> 2. <OBJTYPE> 3. <SECID>

ExceptionNone

Stream,Function Name (Mnemonic) DirectionS20,F12 GetRecipeXIDList Acknowledge (GRXLA) S,H<-EDescriptionThis message returns information concerning the result of the service.StructureL,2 1. L,n n = number of RecipeXID specified by SecurityID 1. L,5 1. <RecID1> 2. <VERID1> 3. <SECID1> 4. <TYPEID1> 5. <EQID1> . . n. L,5 1. <RecIDn> 2. <VERIDn> 3. <SECIDn> 4. <TYPEIDn> 5. <EQIDn> 2. <GRXLACK>



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Stream,Function Name (Mnemonic) DirectionS20,F13 ReadRecipe Request (RRR) S,H->E,replyDescriptionThis message requests to read specified recipes from SRS.StructureL,3 1. <OBJID> 2. <OBJTYPE> 3. L,n n = number of recipes requested 1. L,5 1. <RecID1> 2. <VERID1> 3. <SECID1> 4. <TYPEID1> 5. <EQID1> . . n. L,5 1. <RecIDn> 2. <VERIDn> 3. <SECIDn> 4. <TYPEIDn> 5. <EQIDn>

Exceptionn=0 is not assumed.

Stream,Function Name (Mnemonic) DirectionS20,F14 ReadRecipe Acknowledge (RRA) S,H<-EDescriptionThis message returns information concerning the result of the service.Structure


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L,2 1. L,n n = number of recipes requested 1. L,6 1. <RecID1> 2. <VERID1> 3. <SECID1> 4. <TYPEID1> 5. <EQID1> 6. <RCPBODYA1> . . n. L,6 1. <RecIDn> 2. <VERIDn> 3. <SECIDn> 4. <TYPEIDn> 5. <EQIDn> 6. <RCPBODYAn> 2. <RRACK>

ExceptionNone.

Stream,Function Name (Mnemonic) DirectionS20,F15 PreSpecifyRecipe Request (PSRR) S,H->E,replyDescriptionThis message requests to specify recipes by using RecipeXID for subsequent PJ creation message that does not support RecipeXID.StructureL,3 1. <OBJID> 2. <OBJTYPE> 3. L,n n = number of recipes requested 1. L,5 1. <RecID1> 2. <VERID1> 3. <SECID1> 4. <TYPEID1> 5. <EQID1> . . n. L,5 1. <RecIDn> 2. <VERIDn> 3. <SECIDn> 4. <TYPEIDn> 5. <EQIDn>

ExceptionNone

Stream,Function Name (Mnemonic) DirectionS20,F16 PreSpecifyRecipe Acknowledge (PSRA) S,H<-E


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DescriptionThis message returns information concerning the result of the service.StructureL,2 1. <PSRACK> 2. L,n n = number of recipes returned 1. <ERCACK1> . . n. <ERCACKn>


Stream,Function Name (Mnemonic) DirectionS20,F17 PresetRecipeXID Request (PRXR) S,H->E,replyDescriptionThis message requests to preset RecipeXID for subsequent conventional access with the same RecipeID.StructureL,3 1. <OBJID> 2. <OBJTYPE> 3. L,n n = number of recipes requested 1. L,5 1. <RecID1> 2. <VERID1> 3. <SECID1> 4. <TYPEID1> 5. <EQID1> . . n. L,5 1. <RecIDn> 2. <VERIDn> 3. <SECIDn> 4. <TYPEIDn> 5. <EQIDn>

ExceptionNone

Stream,Function Name (Mnemonic) DirectionS20,F18 PresetRecipeXID Acknowledge (PRXA) S,H<-EDescriptionThis message returns information concerning the result of the service.Structure<PRXACK>

ExceptionNone.


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Stream,Function Name (Mnemonic) DirectionS20,F19 Pre-ExeCheck Request (PECR) S,H->E,replyDescriptionThis message is used to send Pre-ExeCheckResult to the equipment. Correct recipes are also sent down when Pre-ExeCheckResult is NG.StructureL,4 1. <OBJID> 2. <OBJTYPE> 3. L,n n = number of recipes requested 1. L,5 1. <RecID1> 2. <VERID1> 3. <SECID1> 4. <TYPEID1> 5. <EQID1> . . n. L,5 1. <RecIDn> 2. <VERIDn> 3. <SECIDn> 4. <TYPEIDn> 5. <EQIDn> 4. <PECACK>

ExceptionNone

Stream,Function Name (Mnemonic) DirectionS20,F20 PreExeCheck Acknowledge (PECA) S,H<-EDescriptionThis message returns information concerning the result of the service.Structure


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L,3 1. L,m m = number of PR-ExeCheck NG recipes 1. L,5 1. <RecID1> 2. <VERID1> 3. <SECID1> 4. <TYPEID1> 5. <EQID1> . . m. L,5 1. <RecIDm> 2. <VERIDm> 3. <SECIDm> 4. <TYPEIDm> 5. <EQIDm> 2. L,2 n = number of errors 1. <PECRACK> 2. L,2 1. <RXACK> 2. L,n 1. <ERXACK1> . . n. <ERXACKn> 3. L,p p = number of result 1. <ERCACK1> . . p. <ERCACKp>

ExceptionNone.

Stream,Function Name (Mnemonic) DirectionS20,F21 QueryRecipeXIDList Request (QRXLR) S,H<-E,replyDescriptionThis message requests RecipeXIDList to the host by QueryRecipeList Event from the equipmentStructureL,2 1. <OBJID> 2. <OBJTYPE>

ExceptionNone

Stream,Function Name (Mnemonic) DirectionS20,F22 QueryRecipeXILList Acknowledge (QRXLA) S,H->EDescriptionHost responds with the list of RecipeXID in specified Security Class by using this message..Structure


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L,2 1. L,n n = number of recipes requested 1. L,5 1. <RecID1> 2. <VERID1> 3. <SECID1> 4. <TYPEID1> 5. <EQID1> . . n. L,5 1. <RecIDn> 2. <VERIDn> 3. <SECIDn> 4. <TYPEIDn> 5. <EQIDn> 2. <QRXACK>

ExceptionNone.

Stream,Function Name (Mnemonic) DirectionS20,F23 QueryRecipe Event Send (QRES) S,H<-E,replyDescriptionThis message requests recipes to the host.StructureL,n n = number of recipes requested 1. L,5 1. <RecID1> 2. <VERID1> 3. <SECID1> 4. <TYPEID1> 5. <EQID1> . . n. L,5 1. <RecIDn> 2. <VERIDn> 3. <SECIDn> 4. <TYPEIDn> 5. <EQIDn>

ExceptionNone

Stream,Function Name (Mnemonic) DirectionS20,F24 QueryRecipe Event Acknowledge (QREA) S,H->EDescriptionThis message returns information concerning the result of the service.StructureQREACK


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ExceptionNone.

Stream,Function Name (Mnemonic) DirectionS20,F25 Pre-ExeCheck Event Send (PCES) S,H<-E,replyDescriptionThis message requests Pre-Execution Check to the host.StructureL,2 1. L,n n = number of recipes requested 1. L,5 1. <RecID1> 2. <VERID1> 3. <SECID1> 4. <TYPEID1> 5. <EQID1> . . n. L,5 1. <RecIDn> 2. <VERIDn> 3. <SECIDn> 4. <TYPEIDn> 5. <EQIDn> 2. <CHKINFO>

ExceptionNone

Stream,Function Name (Mnemonic) DirectionS20,F26 Pre-ExeCheck Event Acknowledge (PCEA) S,H->EDescriptionThis message returns information concerning the result of the service.StructurePECEACKExceptionNone.

Stream,Function Name (Mnemonic) DirectionS20,F27 QueryRecipeXIDList Event Send (QRES) S,H<-E,replyDescriptionThis message requests RecipeXILDlist to the host.StructureL,2 1. <SECID> 2. <EQID>

ExceptionNone


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Stream,Function Name (Mnemonic) DirectionS20,F28 QueryRecipe Event Acknowledge (QREA) S,H->EDescriptionThis message returns information concerning the result of the service.Structure<QRXLEACK>ExceptionNone.

Stream,Function Name (Mnemonic) DirectionS20,F29 PostRecipe Event Send (PRES) S,H<-E,replyDescriptionThis message posts a list of recipes to the host.StructureL,n n = number of recipes requested 1. L,6 1. <RecID1> 2. <VERID1> 3. <SECID1> 4. <TYPEID1> 5. <EQID1> 6. <RCPBODYA1> . . n. L,6 1. <RecIDn> 2. <VERIDn> 3. <SECIDn> 4. <TYPEIDn> 5. <EQIDn> 6. <RCPBODYAn>

ExceptionNone

Stream,Function Name (Mnemonic) DirectionS20,F30 PostRecipe Event Acknowledge (PREA) S,H->EDescriptionThis message returns information concerning the result of the service.StructurePREACKExceptionNone.


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Stream,Function Name (Mnemonic) DirectionS20,F31 SetPRCAttributes Request (SPAR) S,H->E,replyDescriptionThis message requests to initialize and start functionalities of PRC.StructureL,7 1. <OBJID> 2. <OBJTYPE> 3. <PRCSWITCH> 4. <AUTOCLEAR> 5. <MAXNUMBERLIST> 6. <MAXTIME> 7. <PRCPREEXECHK>

ExceptionNone

Stream,Function Name (Mnemonic) DirectionS20,F32 SetPRCAttributes Acknowledge (SPAA) S,H<-EDescriptionThis message returns information concerning the result of the service.Structure<SPAACK>

ExceptionNone.

Stream,Function Name (Mnemonic) DirectionS20,F33 SetRACAttributes Request (SRAR) S,H->E,replyDescriptionThis message requests to initialize and start functionalities of RAC.StructureL,4 1. <OBJID> 2. <OBJTYPE> 3. <RACSWITCH> 4. <AUTOCLOSE>

ExceptionNone

Stream,Function Name (Mnemonic) DirectionS20,F34 SetRACAttributes Acknowledge (SRAA) S,H<-EDescriptionThis message returns information concerning the result of the service.Structure<SRAACK>

ExceptionNone.


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Stream,Function Name (Mnemonic) DirectionS20,F35 OpenRemoteAccess Request (ORAR) S,H->E,replyDescriptionThe host responds to the equipment if the Remote Access request is granted.StructureL,2 1. <OBJID> 2. <OBJTYPE>

ExceptionNone.

Stream,Function Name (Mnemonic) DirectionS20,F36 OpenRemoteAccess Acknowledge (ORAA) S,H<-EDescriptionThis message returns information concerning the result of the service.Structure<ORAACK>

ExceptionNone.

Stream,Function Name (Mnemonic) DirectionS20,F37 OpenRemoteAccess Event (ORAE) S,H<-E,replyDescriptionThis message request to open Remote Access to the host.StructureL,6 1. <OBJID> 2. <OBJTYPE> 3. <OPRID> 4. <OPRPWORD> 5. <SECID> 6. <EQID>

ExceptionZero length <EQID> means “Equipment ID is not specified for this event”.

Stream,Function Name (Mnemonic) DirectionS20,F38 OpenRemoteAccess Event Acknowledge (ORAEA) S,H->EDescriptionThis message returns information concerning the result of the service.Structure<ORAEACK>ExceptionNone.


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Stream,Function Name (Mnemonic) DirectionS20,F39 CloseRemoteAccess Request (CRAR) S,H->E,replyDescriptionThe host responds to the equipment if the Remote Access is properly closed.StructureL,2 1. <OBJID> 2. <OBJTYPE>

ExceptionNone

Stream,Function Name (Mnemonic) DirectionS20,F40 CloseRemoteAccess Acknowledge (CRAA) S,H<-EDescriptionThis message returns information concerning the result of the service.Structure<CRAACK>

ExceptionNone.

Stream,Function Name (Mnemonic) DirectionS20,F41 CloseRemoteAccess Event (CRAE) S,H<-E,replyDescriptionThis message request to close Remote Access to the host.StructureL,4 1. <OBJID> 2. <OBJTYPE> 3. <SECID> 4. <CLSSTS>

ExceptionNone

Stream,Function Name (Mnemonic) DirectionS20,F42 CloseRem oteAccess Event Acknowledge ( CRA EA) S,H->EDescriptionThis message returns information concerning the result of the service.Structure< CRAEACK > ExceptionNone.


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2 Line Item #2: Change nonconforming title of SEMI E5This action is permitted in accordance with Appendix A4-1 of the SEMI Procedure Manual.

2.1 Line Item #2-1 Change title of SEMI E5 as shown below

SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT (SECS-II)Specification for SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT (SECS-II)

Quotations of Required Sections from the DocumentsAccording to the SEMI Standards Procedure Manual, a Line-Item Ballot should include the Purpose, Scope, Limitations (if present), and Terminology (if present) sections, along with the full text of any section to which revisions are being balloted.

SEMI E170-0416SPECIFICATION FOR SECURED FOUNDATION OF RECIPE MANAGEMENT SYSTEM (SFORMS)1 Purpose1.1 The purpose of this Standard is to provide a standardized ‘secure, safe and efficient recipe operation mechanism between Recipe Management System (RMS) and equipment’ which is used as a foundation of RMS for semiconductor manufacturing systems or similar ones.

1.2 The purpose of this Standard is to provide a standardized ‘secure, safe and efficient recipe operation mechanism between RMS and equipment’ which especially supports RMS with the following concepts:

Management of recipes is centralized to RMS (Single Point Of Recipe Management [SPORM] concept)

Storage of the master copies of the recipes are centralized to Recipe Server in RMS (Recipe Server Centric concept)

1.3 The purpose of this Standard is to support RMS in the following aspects:

Extension of recipe identification capability

Protection of the recipes in equipment from non-privileged access by defining protected recipe spaces per purposes

Reduction of operator efforts required to maintain consistency of recipes in equipment with recipes in Recipe Server by providing an automated consistency maintenance mechanism based on cache

Authentication of consistency of recipes in equipment with Recipe Server by providing an optional Pre-Execution Check mechanism

Reduction of operator efforts to download recipes that are used for production from Recipe Server to equipment by providing an automatic transfer mechanism based on cache

Reduction of communication and computation overhead and cost due to recipe download related transactions by adopting cache operation

Addition of remote access capability to access recipes on the host RMS by using recipe applications (such as recipe editor) on equipment or other workstation


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1.4 The purpose of this Standard is to provide a recipe operation mechanism which supports similar with or a superset of current practices in the following aspects for easier deployment.

Recipe identification and uniqueness control

Recipe linkage

Variable Parameter management

Consistency check of a recipe with the recipe in Recipe Server just before execution (Pre-Execution Check)

Conventional recipe download modes such as Pre-Download Mode or Full Download Mode

2 Scope2.1 This Standard covers a definition and usage of secure, safe and efficient recipe operation mechanism intended to be used as a foundation of RMS.

2.2 This Standard covers a definition and usage of extended recipe identification scheme which identifies recipes from multiple aspects including uniqueness and security.

2.3 This Standard covers a definition and usage of secured recipe space management mechanism which manages multiple recipe spaces in order to provide logically separated recipe spaces for different security level of recipe operations.

2.4 This Standard covers a definition and usage of an equipment status flag which shows whether the equipment is in use for mass production or not.

2.5 This Standard covers a definition and usage of recipe feeding mechanism from the host to equipment which enables secure, safe and efficient recipe operation for production execution by the host.

2.5.1 This Standard covers a definition of new recipe space named Production Recipe Cache (PRC) as one of secured recipe space in equipment, which is dedicated for host controlled process execution in which recipes shall be synchronized with the host and shall be protected from modification by unauthorized operations.

2.5.2 This Standard covers definitions of mechanisms and operations which manage PRC so that recipes in PRC are protected from non-privileged access and are consistent with the recipes on the Recipe Server in the host.

2.6 This Standard covers a definition and usage of remote access operation mechanism which enables remote access of the recipes on Recipe Server in RMS by using recipe applications on equipment or other workstation.

NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.

3 Limitations3.1 No Message Definition — This Document does not define any messaging. Messaging may be defined in a separate standard.

3.2 Master Copies on Recipe Server — This Standard has a precondition that the master copies of the recipes that are used for host triggered PJ creation in PEM On state are stored and managed on Recipe Server. This Standard cannot be applied to the factory in which a Recipe Server does not exist.

3.3 Linked Recipe Compatibility — This Standard does not define any requirements for linked recipes but is intended to be compatible with currently implemented recipe linkage schemes by allowing the structure of PRC to be composed as equivalent with the structure of the Conventional Recipe Space.

3.4 Recipe Identification — This Standard introduces extended recipe identification scheme for new requirements but is intended to be compatible with the existing recipe identification schemes for existing functionalities.

3.5 Variable Parameters — This Standard does not define any specific requirements for Variable Parameters but is intended to be compatible with the current implementations.


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3.6 User Authentication and Access Privilege — This Standard does not define any requirement for user authentication and access privileges but only recommends the use of access control on PRC resources and functions. User authentication and access privilege should be defined separately from this Standard.

4 Referenced Standards and Documents4.1 SEMI Standards and Safety Guidelines

SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI E39 — Object Services Standard: Concepts, Behavior, and Services

SEMI E40 — Standard for Processing Management

SEMI E87 — Specification for Carrier Management (CMS)

SEMI E94 — Specification for Control Job Management

NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

5 Terminology5.1 Abbreviations and Acronyms

5.1.1 FOUP — front opening unified pod

5.1.2 GEM — generic equipment model

5.1.3 MES — manufacturing execution system

5.1.4 PEM — Production Execution Mode

5.1.5 PJ — process job

5.1.6 PRC — Production Recipe Cache

5.1.7 RAC — Remote Access Cache

5.1.8 RMS — Recipe Management System

5.2 Definitions

5.2.1 Cache Full — the required recipe cannot be written into the cache because the cache does not have enough space to write the specified recipe.

5.2.2 Cache Hit — the required recipe is found in the cache.

5.2.3 Cache Miss — the required recipe is not found in the cache.

5.2.4 carrier — a container, such as a FOUP or open cassette, with one or more positions for holding substrates. [SEMI E87]

5.2.5 collection event — a collection event is an event (or grouping of related events) on the equipment that is considered to be significant to the host. [SEMI E30]

5.2.6 Conventional Recipe Space — an existing recipe space on the equipment, which is normally used by every user, including the host, for various purposes such as equipment installation, process development and production operation.

5.2.7 extended recipe identifier (Recipe XID) — an identifier of a recipe which is extended with Version ID, Security ID, Type ID, and Equipment ID in addition to conventional Recipe ID.

5.2.8 formalized recipe — a recipe which is recognized by and under control of the RMS in the host.

5.2.9 host — the factory computer system or an intermediate system that represents the factory and the user to the equipment [SEMI E87], the intelligent system which communicates with the equipment. [SEMI E4, SEMI E5]

5.2.10 multi-part equipment — equipment that has a capability to accomplish multiple operations that require recipe execution by multiple users simultaneously.


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5.2.11 object instantiation — the act of storing of information related to a physical or logical entity so that it can be recalled on demand based on its public identifier. [SEMI E87]

5.2.12 operator — a human who operates the equipment to perform its intended function (e.g., processing). The operator typically interacts with the equipment via the equipment supplied operator console. [SEMI E30]

5.2.13 privileged user — a user who is allowed to use system functions that are not available to other users.

5.2.14 production equipment — equipment used to produce product, such as semiconductor devices, including substrate sorting, process, and metrology equipment and excluding material handling equipment. [SEMI E87]

5.2.15 Production Execution Mode (PEM) — a mode of equipment, in which the equipment is used for production. The state which determines whether the equipment operates in this mode or not shall be set by the host or privileged user. In PEM On state, Online/Remote/Auto may typically be used; however other combinations may also be used for some purposes such as operator assistance, so PEM is an independent mode from Online/Offline, Remote/Local or Auto/Manual.

5.2.16 Production Execution Mode Recipe (PEM Recipe) — a recipe which is used in PEM On state. PEM Recipe consists of not only recipes for mass production lots but also recipes for engineering lots, etc., as long as the recipes are used in PEM On state. Any recipe that is prepared to be used in the PEM On state shall be considered as a PEM Recipe.

5.2.17 Production Recipe Cache (PRC) — a recipe space that resides in equipment and holds exact subset copies of PEM Recipes on the Recipe Server by using PRC Operation.

5.2.18 properties — a set of name value pairs assigned to an object or used in a service message to include additional information about the object (i.e., carrier, port, etc.). [SEMI E87]

5.2.19 Recipe Executor — a component of a module that stores and executes recipes. [SEMI E40]

5.2.20 Recipe Execution Space — a recipe space in the equipment which holds the recipe(s) under execution.

5.2.21 Recipe Management System (RMS) — an information system that manages recipes. Especially, the factory information system that manages recipes registered to the factory and is a part of the host. Typically, RMS has a Recipe Server which holds the master copy of the recipes.

5.2.22 Recipe Queue Space — a recipe space in the equipment which holds the recipe(s) already referred and queued for execution.

5.2.23 Recipe Server — a computer system in the host, which maintains the master copy of the recipes that are used by the equipment for host-controlled process executions.

5.2.24 Security Class — a category of recipe which has the same security requirements.

5.2.25 Security ID — an identifier of a recipe which identifies the Security Class of the recipe.

5.2.26 Secured Recipe Space (SRS) — a recipe space which logically discriminates recipes per Security Class identified by Security ID of each recipe.

5.2.27 substrate — material held within a carrier. This can be product, or durables such as reticles. [SEMI E87]

5.2.28 user — a human or humans who represent the factory and enforce the factory operation model. A user is considered to be responsible for many setup and configuration activities that cause the equipment to best conform to factory operations practices. [SEMI E30]

5.2.29 Version ID — an additional ID for a recipe, which provides a unique version name to the recipe. In case Recipe ID cannot ensure naming uniqueness of recipes, Version ID may be used in addition to the Recipe ID.


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SEMI E170.1-0416SPECIFICATION FOR SECS-II PROTOCOL FOR SECURED FOUNDATION OF RECIPE MANAGEMENT SYSTEM1 Purpose1.1 The purpose of this Standard is to provide a mapping of the services and data of SEMI E170, Specification for Secured Foundation Of Recipe Management System to SECS-II message protocol.

2 Scope2.1 The scope of this Standard is to map the services and data of SEMI E170 to SECS-II streams, functions, and items.



SEMI E5 — SEMI Equipment Communications Standard 2 Message Content (SECS-II)

SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI E39 — Object Services Standard: Concepts, Behavior, and Services

SEMI E39.1 — SECS-II Protocol for Object Services Standard (OSS)

SEMI E40 — Standard for Processing Management

SEMI E170 — Specification for Secured Foundation Of Recipe Management System (SFORMS)


4 Terminology4.1 None.


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SEMI E5-0813SEMI EQUIPMENT COMMUNICATIONS STANDARD 2 MESSAGE CONTENT (SECS-II)1 Purpose1.1 The SEMI Equipment Communications Standard Part 2 (SECS-II) defines the details of the interpretation of messages exchanged between intelligent equipment and a host. This Specification has been developed in cooperation with the Japan Electronic Industry Development Association Committee 12 on Equipment Communications.

1.1.1 It is the intent of this Standard to be fully compatible with SEMI E4, Equipment Communications Standard (SECS-I). It is also the intent to allow for compatibility with alternative message transfer protocols. The details of the message transfer protocol requirements are contained in § 6.

1.1.2 It is the intent of this Standard to define messages to such a level of detail that some consistent host software may be constructed with only minimal knowledge of individual equipment. The equipment, in turn, may be constructed with only minimal knowledge of the host.

1.1.3 The messages defined in the Standard support the most typical activities required for IC manufacturing. The Standard also provides for the definition of equipment-specific messages to support those activities not covered by the standard messages. While certain activities can be handled by common software in the host, it is expected that equipment-specific host software may be required to support the full capabilities of the equipment.

2 Scope2.1 SECS-II gives form and meaning to messages exchanged between equipment and host using a message transfer protocol, such as SECS-I.

2.1.1 SECS-II defines the method of conveying information between equipment and host in the form of messages. These messages are organized into categories of activities, called streams, which contain specific messages, called functions. A request for information and the corresponding data transmission is an example of such an activity.

2.1.2 SECS-II defines the structure of messages into entities called items and lists of items. This structure allows for a self-describing data format to guarantee proper interpretation of the message.

2.1.3 The interchange of messages is governed by a set of rules for handling messages called the transaction protocol. The transaction protocol places some minimum requirements on any SECS-II implementation.


3 Limitations3.1 SECS-II applies to equipment and hosts used in the manufacturing of semiconductor devices. Examples of the activities supported by the Standard are: transfer of control programs, material movement information, measurement data, summarized test data, and alarms.

3.1.1 The minimum compliance to this Standard involves meeting the few constraints outlined in § 8. It is expected that a given piece of equipment will require only a subset of the functions described in this Standard. The number of functions and the selection of functions will depend upon the equipment capabilities and requirements. For each piece of equipment, the exact format for each function provided must be documented according to the form outlined in § 10.

3.1.2 It is assumed that the equipment will define the messages used in a particular implementation of SECS-II. It is assumed the host will support equipment implementation.



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SEMI E4 — SEMI Equipment Communications Standard 1 Message Transfer (SECS-I)

SEMI E6 — Guide for Semiconductor Equipment Installation Documentation

SEMI E37 — High-Speed SECS Message Services (HSMS) Generic Services

SEMI E148 — Specification for Time Sychronization and Definition of the TS-Clock Object

4.2 ANSI Standards1

ANSI X3.4-1977 — Code for Information Interchange (ASCII)

4.3 IEEE Standards2

IEEE 754 — Standard for Binary Floating Point Arithmetic

4.4 The Japan Electronic Industry Development Association (JEIDA) has requested that the SECS-II Standard incorporate support for the JIS-8 codes for data exchange. This code would allow support for katakana characters in Japanese implementations of SECS-II.

JIS-6226 — JIS 8-bit Coded Character Set for Information Interchange, Japanese Industrial Standards.3


5 Terminology5.1 Definitions

5.1.1 The following brief definitions refer to sections providing further information.

5.1.2 block — a physical division of a message used by the message transfer protocol (see § 6.3).

5.1.3 conversation — a sequence of related messages (see § 8.4).

5.1.4 conversation timeout — an indication that a conversation has not completed properly (see § 8.4.1).

5.1.5 device ID — a number between 0 and 32767 used in identifying the particular piece of equipment communicating with a host (see § 6.4.1).

5.1.6 equipment — the intelligent system which communicates with a host.

5.1.7 function — a specific message for a specific activity within a stream (see § 7.2).

5.1.8 host — the intelligent system which communicates with the equipment.

5.1.9 interpreter — the system that interprets a primary message and generates a reply when requested (see § 6.2).

5.1.10 item — a data element within a message (see § 9.2).

5.1.11 item format — a code used to identify the data type of an item (see § 9.2).

5.1.12 list — a group of items (see § 9.3).

5.1.13 message — a complete unit of communication (see § 6.2).

5.1.14 message header — information about the message passed by the message transfer protocol (see § 6.4).

5.1.15 multi-block message — a message sent in more than one block by the message transfer protocol (see § 6.3.2).

5.1.16 originator — the creator of a primary message (see § 6.2).

5.1.17 packet — a physical division of a message used by the message transfer protocol (see § 6.3).

5.1.18 primary message — an odd numbered message. Also, the first message of a transaction (see §§ 6.2 and 7.2).

1 American National Standards Institute, 25 West 43rd Street, New York, NY 10036, USA; Telephone: 212.642.4900, Fax: 212.398.0023, http://www.ansi.org2 Institute of Electrical and Electronics Engineers, 3 Park Avenue, 17th Floor, New York, NY 10016-5997, USA; Telephone: 212.419.7900, Fax: 212.752.4929, http://www.ieee.org3 Japanese Standards Association, 4-1-24 Akasaka, Minato-ku, Tokyo 107-8440, Japan; Telephone: 81.3.3583.8005, Fax: 81.3.3586.2014, http://www.jsa.or.jp


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Date: 5/21/23

5.1.19 reply — the particular secondary message corresponding to a primary message (see §§ 6.2 and 7.2).

5.1.20 secondary message — an even-numbered message. Also the second message of a transaction (see §§ 6.2 and 7.2).

5.1.21 single-block message — a message sent in one block by the message transfer protocol (see § 6.3.1).

5.1.22 stream — a category of messages (see § 7.1).

5.1.23 transaction — a primary message and its associated secondary message, if any (see § 8.2).

5.1.24 transaction timeout — an indication from the message transfer protocol that a transaction has not completed properly (see § 6.5).

NOTICE: SEMI makes no warranties or representations as to the suitability of the Standards and Safety Guidelines set forth herein for any particular application. The determination of the suitability of the Standard or Safety Guideline is solely the responsibility of the user. Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant literature, respecting any materials or equipment mentioned herein. Standards and Safety Guidelines are subject to change without notice.

By publication of this Standard or Safety Guideline, SEMI takes no position respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this Standard or Safety Guideline. Users of this Standard or Safety Guideline are expressly advised that determination of any such patent rights or copyrights and the risk of infringement of such rights are entirely their own responsibility.


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