flat panel display - entegris · manufacturers continually strive ... /pv df h ousings pp h ousings...
TRANSCRIPT
flat panel display
flat panel display
ENTEGRIS, INC. «» FLAT PANEL DISPLAY «» 1
table of contentsSection 1: About Entegris
Purify, Protect and Transport ........................................................ 2
Global Presence .............................................................................. 3
Close to Our Customers ................................................................. 4
Entegris Solutions for FPD Processes .......................................... 5
Section 2: Products/Solutions
liquid contamination control solutionsOverview ...................................................................................... 6
ProcessGard® PL Half Dove Tail Housing ............................... 9
226 Cast HP Half Dove Tail Housing ...................................... 10
334 Cast HP Half Dove Tail Housing ...................................... 11
Panelgard™ EX Filters and Housings .................................... 12
Savana® PTFE Cartridge 222/226 .......................................... 14
gas contamination control solutionsOverview .................................................................................... 16
Wafergard® SG Gas Filters ...................................................... 19
Linegard™ MAX-FP In-line Teflon® Gas Filters ................... 20
Chambergard™ BGN Fast Vent Diffusers .............................. 21
Gas Purification ........................................................................ 22
Aeronex® Gas Purification Systems ...................................... 24
GateKeeper® Purifiers ............................................................ 25
fluid handling solutionsOverview .................................................................................... 26
Tubing and Pipe ........................................................................ 28
Tube and Pipe Fittings ............................................................ 29
PrimeLock® Fittings ................................................................ 30
High Flow PFA Valves .............................................................. 32
Valves ......................................................................................... 33
Dymension® Manifolds ............................................................ 34
NT® Pressure Transducers ...................................................... 36
NT Flowmeter, Model 4400 ..................................................... 37
substrate handlingOverview .................................................................................... 38
Substrate Carriers and Pods ................................................... 39
flat panel displayThe Flat Panel Display (FPD)
fabrication environment is among
the world’s most competitive and
technologically complex. FPD
manufacturers continually strive
to satisfy the worldwide consumer’s
appetite for larger displays, greater
pixel resolution and feature-rich
performance – all at a lower cost
than the previous generation of
technology. The need to control
contamination in air, gas and
liquid process streams is now
a paramount focus of process
engineers and designers. Entegris
provides the solutions to succeed
under these extreme conditions.
«» FLAT PANEL DISPLAY «» ENTEGRIS, INC. ENTEGRIS, INC. «» FLAT PANEL DISPLAY «» 32
With 2,700 employees worldwide, Entegris thrives on the challenge to meet our customers’ expectations through a global network of service, technology, manufacturing and application support teams, all built upon a tradition of product and process innovation.
global presence
Sales office Manufacturing Service center Lab
Dresden
Moirans
Colorado Springs
San DiegoDecatur
FranklinBurlington
BillericaChaskaMinneapolis
SingaporePenang
Kulim (2)
Osaka
Tokyo
Yonezawa (2)Seongnam-si (2)
Beijing
FukuokaShanghai
Tainan
Taoyuan
Kiryat-Gat
Montpellier
Lyon
Hsinchu (3)
Asia and Japan North AmericaEurope and Israel
Wonju-si
lab capabilitiesanalytical services Product testing material science• Airborne molecular contamination • Performance testing • New material development
• Surface contamination • Particle testing • Material characterization
• Applications support • Electrostatic charge • Material selection
• Root-cause analysis • Vibration • Material incoming inspection
• Flow rate optimization • Applications support
• Applied statistics
• Safety and industry standardization
• DOT and UN regulations
• CE marking
Entegris provides products and services for applications across key flat panel display processes to help TFT and color filter makers solve manufacturing challenges, enhance yield and gain sustainable competitive advantage.
purify, protect and transport
materials technology laboratoryMaterial selection is a key element in designing a polymer component. Entegris’ Materials Technology Laboratory uses sophisticated equipment and inspection techniques to characterize polymers before they are converted into molded products used to transport and protect ultrapure process chemicals. We characterize all levels of polymers from commodity resins such as PP and PE to engineering thermo- plastics such as PPS, PEEK™ and PC, to fluoropolymers such as PFA, PTFE, and FEP. Surface modification technology also enables Entegris to develop specific membranes for customers. Our scientists thoroughly analyze resins for contamination potential, chemical compatibility, material properties, structural tolerances and maximum strengths.
technology characterization laboratoryEntegris is a leader in establishing test methods for safety and industry
standardization. Extensive performance testing, evaluation and validation assure product performance, reliability, durability, functionality and safety.
applications laboratoryEntegris offers best-in-class applications support and services. We have a global applications team to respond to customer’s needs quickly. Our Applications Laboratory is equipped with sophisticated equipment to perform extensive filter analysis, evaluation and validation.
system design servicesEntegris has the capability to develop systems, technologies and support strategies that will help you optimize process results and drive higher yields. Use of tools such as Finite Element Analysis (FEA), Com- putational Fluid Dynamics (CFD) and Moldflow® Analysis enable us to optimize product design of fluid handling systems, increasing flow and reliability while minimizing footprint.
Entegris Milestones1966: Founded as Fluoroware, Inc.
2000: Begins trading under the ENTG symbol on NASDAQ
2005: Merges with Mykrolis Corporation, a leading provider of liquid filtration and gas purification products and systems
2006: Expands manufacturing facility in Kulim, Malaysia
2007: Acquires Surmet Corporation’s high-purity semiconductor coatings business
2008: Acquires Poco Graphite, an industry leader in high-performance graphite and silicon carbide
2011: Opens manufacturing facility in Hsinchu, Taiwan
Entegris 2012Industries Served Semiconductor and other high-technology industries
Sales $749 million
Patents Holds 287 U.S. patents
and 593 patents in other countries
Number of Employees 2,700 worldwide
Stock Listing ENTG on NASDAQ
«» FLAT PANEL DISPLAY «» ENTEGRIS, INC. ENTEGRIS, INC. «» FLAT PANEL DISPLAY «» 54
Direct sales and local support gives us the opportunity to achieve customer intimacy.
Customer intimacy helps us better understand our customers’ needs through direct feedback and roadmap sharing.
By aligning our material science, engineering and R&D initiatives, we can develop indispensable contamination control solutions to solve our customers’ roadmap challenges.
close to our customers
Entegris solutions for FPD processesIncreasing display size and performance requirements demand increased process purity and control. Entegris’ liquid and gas contamination control technologies and fluid handling expertise enable increased yields, greater process control and lower cost of ownership.
The following pages highlight Entegris products designed to solve your fab challenges by providing best-in-class solutions for liquid contamination control, gas contamination control, fluid handling solutions and substrate handling. >>>
Challenge
liquid contamination control
gas contamination control
fluid handling solutions
substrate handling
Ptfe
filt
ers
uPe
filte
rs
Ps f
ilter
s
PP f
ilter
s
Pfa/
PVdf
hou
sing
s
PP h
ousi
ngs
sus
hou
sing
s
gas
filte
rs
gas
Purifi
ers
diff
user
s
Valv
es
tube
and
Pip
e fi
ttin
gs
tubi
ng a
nd P
ipe
flow
met
ers
Pres
sure
tra
nsdu
cers
man
ifold
s
carr
iers
and
Pod
s
TFT:
Bar
e Gl
ass
Film Deposition • • • •Coating • • • • • • • • • •Developing • • • • • • • • • •Wet Etching • • • • • • • • •Dry Etching • • • • •Stripping • • • • • • • •DIW Cleaning • • • • •
Colo
r Fi
lter
: Bar
e Gl
ass
Film Deposition • • • •Polishing • • • • • • • • • •Coating • • • • • • • •Developing • • • • • • • • •Wet Etching • • • • • • • • •Stripping • • • • • • • •RGB Rework • • • • • • • •ITO Rework • • • • • • • •DIW Cleaning • • • • • • • • •
Cel
l: (T
FT &
CF)
DIW Cleaning • • • • • • • • •PI Print • • • • • • • • •ODF • • • • • • • • •Rubbing • • • • •PI Rework • • • • • • • • •
Faci
litie
sUtilities • • • • • • • • • • • •HVAC •
ENTEGRIS, INC. «» FLAT PANEL DISPLAY «» 7
LIQU
ID c
on
tam
Ina
tIon
co
ntr
oL
« » FLat PanEL DISPLaY «» EntEGrIS, Inc.6
Developed from Mykrolis® microcontamination technologies, Entegris liquid contamination control solutions are specifically designed for filtration of chemicals used in flat panel display processes and ensure higher flow rate, particle retention and longer lifetime, leading to higher productivity and lower cost of ownership.
liquid contamination control solutions
MEMBRAnE SUPPORT/ (ElEMEnT) SHEll O-RInG FIlTER PORE SIzE EnTEGRIS FIlTER MATERIAl MATERIAl SIzE lEnGTH (µm)
Fluoroline™ DF-HP PTFE PFA — Standard 0.2, 0.5
Fluoroline lC-HP PTFE PFA — Standard 0.2, 0.5
Panelgard 123 PDP PP PP — Short/long 0.6~5.0
Panelgard 123 UPE UPE PP — Short/long 0.05~0.2
Panelgard 226 PDP PP PP 226 10” 0.6~10
Panelgard 226 Plus PES PS PP 226 10” 0.2~1.0
Panelgard 226 Plus PP PP PP 226 10” 1.2~30
Panelgard 334 PES PS PP 334 10” 0.2~1.0
Panelgard 334 PP PP PP 334 10” 2.0~30
Panelgard 334 PTFE PTFE PP 334 10” 1~10
Panelgard 334 PTFE-HP PTFE-HP PP 334 10” 1.0~10
Panelgard EX Plus PP PP PP 233 10” 1.2~30
Panelgard EX PSX PS PP 233 10” 0.1~1
Panelgard EX THF / THP PTFE PP 233 10” 0.1~10
Panelgard PDP PP PP 222 10” 0.6~10
Panelgard PDP Disposable PP PP — Standard 0.6~10
ProcessGard 123 nP PP PP — Short/long 0.5~10
ProcessGard In-line PP PP — Standard 1.2~10
ProcessGard PES PS PP 222 5”~40” 0.04~1.0
ProcessGard PES Disposable PS PP - Half/Short/long 0.05~1.2
ProcessGard PP PP PP 222 5”~40” 0.3~40
ProcessGard PP Disposable PP PP — Half/Short/long 0.3~70
Savana 226 PP PP PP 226 10” 0.2~40
Savana 226 PS /Plus PES PP 226 10” 0.1~1
Savana 334 PP PP PP 334 10” 0.2~40
Savana 334 PS /Plus PES PP 334 10” 0.1~1
Savana AT PTFE PFA 222 4”~30” 0.1~10
Savana MB PP PP 222 10”~50” 1~100
Savana PS /Plus PES PP 222 10”~40” 0.1~1
Savana PTFE 226 THF / THP PTFE PP 226 10” 0.1~10
Savana PTFE Disposable PTFE PP — Half/Short/long 0.1~10
Savana PTFE /PTFE-HP PTFE PP 222 5”~30” 0.1~10
Savana PTFE-X /HPX PTFE PP 222 10” 0.1~10
liquid product portfolio
«» FLAT PANEL DISPLAY «» ENTEGRIS, INC. ENTEGRIS, INC. «» FLAT PANEL DISPLAY «» 98
LIQU
ID c
on
tam
Ina
tIon
co
ntr
oL
ChEMICaL CoMPaTIBILITy For TFT MaNuFaCTurING
MaTErIaLProcess Chemical PTFE PFa uPE hDPE PP PESSiOx etching DHF
SiNx etching BOE
Aλ etching H3PO4 + HNO3
Cr etching (NH4)2Ce(NO3)6 + HClO4
HNO3 + (NH4)2Ce(NO3)6
ITO etching HNO3 + HCl
HCl + FeCl3
(COH)2
Stripper N-300 (70° ~ 80°C)
T-106 (40° ~ 90°C)
KOH (40°C)
NaOH (40°C)
Photolithography Positive photoresist
Thinner
HMDS
Acryl resin
Developer (2.38% TMAH)
<1% KOH
ChEMICaL CoMPaTIBILITy For CF MaNuFaCTurING
MaTErIaLProcess Chemical PTFE PFa uPE hDPE PP PESWet cleaning Alkali detergent
Cr etching (NH4)2Ce(NO3)6 + HClO4
HNO3 + (NH4)2Ce(NO3)6
Stripping & Developing Organic stripper 70°C
KOH 40°C
NaOH 40°C
Na2CO3
<2.38% TMAH
Photolithography Positive photoresist
Thinner
Color resist
Photo spacer
Over coat
Recommended Limited recommendation Not recommended
chemical compatibility charts
ProcessGard® PL half Dove Tail housing
ProcessGard PL half dove housings are high-quality stainless steel housings recommended for use in high-purity chemical processing. The housings are constructed of 316L stainless steel, which has good resistance to corrosive chemicals. Its high-quality electropolished finish eliminates harmful contaminants from leaching into the process stream.
FEaTurE BENEFITEasy cartridge replacement • Makes cartridge changeout very easy
Upgraded o-ring groove design • Protects o-ring from being separated from the housing during filter changeout
Versatile installation • Provides the inlet/outlet connections directly fitting to the type of process installations
Accommodate o-ring or flat type filter cartridge • Keeps cartridge stable in high-flow application
«» FLAT PANEL DISPLAY «» ENTEGRIS, INC. ENTEGRIS, INC. «» FLAT PANEL DISPLAY «» 1110
LIQU
ID c
on
tam
Ina
tIon
co
ntr
oL
226 cast HP half dove tail housings are manufac-tured from high-quality 316L stainless steel and recommended for use in high-purity chemical processing. The housings have good resistance to corrosive chemicals while its high-quality finish eliminates harmful contaminants from leaching into the process stream.
FEaTurE BENEFITConstructed of 316L stainless steel • Provides excellent chemical resistance
Upgraded o-ring groove design • Prevents separation from the housing during filter changeout
Improved connection and various drain/vent ports • Minimizes exposure to contaminants • Maintains high performance of the housing in
high-pressure applications• Allows chemicals to drain faster with wider outlet
drain and vent ports
Accommodate o-ring or flat type filter cartridge • Keeps cartridge stable in high-flow applications• Use housing in gas or fluid applications
226 Cast hP half Dove Tail housing 334 Cast hP half Dove Tail housing
334 HP half dove tail housings are manufactured from high-quality 316L stainless steel and recom-mended for use in high-purity chemical processing. The housings have good resistance to corrosive chemicals while its high-quality finish eliminates harmful contaminants from leaching into the process stream.
FEaTurE BENEFITConstructed of 316L stainless steel • Provides excellent chemical resistance
Easy filter changeout • Enables screw-in clamp band easy filter changeout
Upgraded o-ring groove design • Prevents separation from the housing during filter changeout
Improved connection and drain/vent ports • Minimizes exposure to contaminants• Maintains high performance of the housing in
high-pressure applications• Allows chemicals to drain faster with wider outlet
drain and vent ports• Processes connection available in PTF or flange
«» FLAT PANEL DISPLAY «» ENTEGRIS, INC. ENTEGRIS, INC. «» FLAT PANEL DISPLAY «» 1312
LIQU
ID c
on
tam
Ina
tIon
co
ntr
oL
Panelgard™ EX Filters and housings
performancePressure Drop Curves
Technical Trends/LCD TFT Panel
FEaTurE aDVaNTaGE BENEFIT
filt
er c
artr
idge
Robust polypropylene (PP), polyethersulfone (PS), hydrophobic and hydrophilic PTFE membrane
Strong polypropylene supports
• Provides clean and durable performance
• Excellent chemical compatibility• Long product life
• Minimizes particle-related defects • Lower cost of ownership through
extended filter lifetime
Available in a variety of retention ratings
• Superior particle retention ensures low particle counts in your processes
• Wide variety of applications
• Lower cost of ownership by matching the right filter to the application
Surface area optimized for high flow
• Suitable for large format flat panel display processes
• Lower flow resistance
• Increases productivity and throughput
ho
usin
g
Special notch to ensure cartridge locks into the bowl securely
• Allows quick installation• Reduces procedural errors
• Increases productivity and equipment uptime
Special housing handle design • Reduces contamination• Improves safety
• Improves yield• Promotes healthy workplace
Available in various material options
• Full chemical compatibility• Increased reliability
• Lower cost of ownership
The Panelgard family of filters is a platform of high-flow liquid filters available in a variety of membranes with retention ratings from 0.1 µm to 100 µm and flow rates up to 600 L/min, with minimal pressure drop in a single, user-friendly 10” cartridge.
The Panelgard EX PP housing is specifically designed for use with the high-flow rate Panelgard EX cartridges for large scale flat panel display manufacturing process.
• Used for developer, cleaning applications in weak alkaline solutions and DI water
• Easy filter replacement
• Improved cleanliness and safety
100 200 300 400 500
50
40
30
20
10
00
Diff
eren
tial P
ress
ure
( kPa
)
0.2 µm
Panelgard EX THP(connector size: 65A)
1 µm
10 µm
0.1 µm
0.5 µm
3 µm
Flow Rate (H2O at RT) L/min100 200 300 400 500
50
40
30
20
10
00
Diff
eren
tial P
ress
ure
( kPa
)
2.5 µm
Panelgard EX PP(connector size: 65A)
100 µm
1.2 µm
5 µm
30 µm
Flow Rate (H2O at RT) L/min
10 µm
100 200 300 400 5000
Diff
eren
tial P
ress
ure
( kPa
)
10 µm
Panelgard EX THF(connector size: 65A)
1 µm
3 µm
Flow Rate (H2O at RT) L/min
30
20
10
0
100 200 300 400
50
40
30
20
10
00
Diff
eren
tial P
ress
ure
( kPa
)
0.1 µm
Panelgard EX PSX(connector size: 65A)
0.2 µm
0.45 µm
Flow Rate (H2O at RT) L/min
1.0 µm
222 SeriesDiameter: 70 mm
226 SeriesDiameter: 83 mm
EX SeriesDiameter: 208 mm
334 SeriesDiameter: 130 mm
GENERATION XX
GENERATION 10
GENERATION 8
GENERATION 7.5
GENERATION 6
GENERATION 4
GENERATION 5
Flow Rate Higher
Pane
l Siz
e La
rger
Technical Trends/LCD TFT Panel
60 L/min 200 L/min 400 L/min 600 L/min
Savana Filters
«» FLAT PANEL DISPLAY «» ENTEGRIS, INC. ENTEGRIS, INC. «» FLAT PANEL DISPLAY «» 1514
LIQU
ID c
on
tam
Ina
tIon
co
ntr
oL
Savana® PTFE Cartridge 222/226
Savana PTFE filters are constructed of PTFE pleated membranes with polypropylene supports to provide unmatched durability and cleanliness for filtration of process fluids used in the electronics industry.
• The hydrophobic version can be used in air filtration, stripper and IPA or solvent applications in flat panel display or hard disk industries
• The hydrophilic version can be used in DI water and water-based acid/alkaline solutions for developer, etching and cleaning applications
performanceWater flow rate
Savana PTFE Filter (Ø70 mm)
5
4
3
2
1
00 20 30 40 50 6010
10 µm
0.1 µm
0 4 6 108 1412
Savana PTFE 10” Cartridges
40
35
30
25
20
15
10
5
0
2
0.2 µm
0.5 µm
1 µm
3 µm
Water Flow Rate (L/min)
GPM
Dif
fere
ntia
l Pre
ssur
e (p
sid)
Dif
fere
ntia
l Pre
ssur
e (k
Pa)
Water Flow Rate (L/min)
GPM
Dif
fere
ntia
l Pre
ssur
e (p
sid)
Dif
fere
ntia
l Pre
ssur
e (k
Pa)
4
3
2
1
00 20 30 40 50 6010
10 µm
0.1 µm
0 4 6 108 1412
Savana PTFE-HP 10” Cartridges
30
25
20
15
10
5
0
2
0.2 µm
0.5 µm
1 µm 3 µm
Savana PTFE-X/-hPX Filter (Ø83 mm Code 0)
Water Flow Rate (L/min)
GPM
Dif
fere
ntia
l Pre
ssur
e (p
sid)
Dif
fere
ntia
l Pre
ssur
e (k
Pa)
4
3
2
1
00 20 30 40 50 6010
0 4 6 108 141230
25
20
15
10
5
0
2
10 µm
Savana PTFE-X 10” Cartridges
0.2 µm
0.1 µm
0.5 µm
1 µm3 µm
Water Flow Rate (L/min)
GPM
Dif
fere
ntia
l Pre
ssur
e (p
sid)
Dif
fere
ntia
l Pre
ssur
e (k
Pa)
4
3
2
1
00 20 30 40 50 6010
0 4 6 108 141230
25
20
15
10
5
0
2
10 µm
Savana PTFE-HPX 10” Cartridges
0.1 µm
0.2 µm
1 µm
3 µm
0.5 µm
Savana PTFE 226 ThF/ThP Filter (Ø83 mm Code 6)
10
8
6
4
2
00 100 150 200 250
Water Flow Rate (L/min)50
0.1 µm 0.2 µm
0.5 µm
1 µm
3 µm / 10 µm
0 20 30 5040 60
Savana PTFE 226 THF Cartridges
80
70
60
50
40
30
20
10
0
GPM10
Dif
fere
ntia
l Pre
ssur
e (p
sid)
Dif
fere
ntia
l Pre
ssur
e (k
Pa) 10
8
6
4
2
00 100 150 200 250
Water Flow Rate (L/min)50
0.1 µm
0 20 30 5040 6080
70
60
50
40
30
20
10
0
Savana PTFE 226 THP CartridgesGPM
10
0.5 µm1 µm
3 µm / 10 µm
0.2 µm
Dif
fere
ntia
l Pre
ssur
e (p
sid)
Dif
fere
ntia
l Pre
ssur
e (k
Pa)
ENTEGRIS, INC. «» FLAT PANEL DISPLAY «» 17
GA
S Con
tAm
inA
tion
Con
trol
«» FLAT PANEL DISPLAY «» ENTEGRIS, INC.16
Entegris offers an extensive selection of high quality gas filtration solutions to enable ultra- high purity gas processes.
Our gas filters include nickel, stainless steel and Teflon product families. They can remove particles greater than 0.003 μm from incoming gas. Chambergard fast vent diffusers provide rapid venting to atmosphere without disturbing or adding particles in the chamber.
The following compatibility chart is intended for use as a guide. Variations in gas temperature, pressure, concentrations and system conditions can affect filter lifetime compatibility. Compa-tibility of gas filters is based on temperature less than 60°C and less than 1 ppm moisture.
gas contamination control solutions: gas filtration
ChEMICaL MEMBraNE GaS CaTEGory ForMuLa NICkEL PTFE/PFa STaINLESS
Ammonia Hydrogen/Hydrides NH3
Argon Inerts Ar
Arsine Hydrogen/Hydrides AsH3
Boron 11 Trifluoride Halogen/Halides B11F3
Boron Trichloride Halogen/Halides BCl3
Boron Trifluoride Halogen/Halides BF3
Bromine Halogen/Halides Br2
Carbon Dioxide Oxygen/Oxides CO2
Carbon Monoxide Oxygen/Oxides CO
Carbon Tetrachloride Hydrocarbons/ CCl4 Halogenated Hydrocarbons
Chlorine Halogen/Halides Cl2
Chlorine Trifluoride Halogen/Halides ClF3
Diborane Hydrogen/Hydrides B2H6 2
Dichlorodifluoromethane Hydrocarbons/ CCl2F2 Halogenated Hydrocarbons
Dichloromethane Hydrocarbons/ CH2Cl2 Halogenated Hydrocarbons
Dichlorosilane Halogen/Halides SiH2Cl2
Difluoromethane Hydrocarbons/ CH2F2 Halogenated Hydrocarbons
Ethane Hydrocarbons/ C2H6 Halogenated Hydrocarbons
Fluorine Halogen/Halides F2
Germane Hydrogen/Hydrides GeH4
Halocarbon 115 Hydrocarbons/ C2ClF5 Halogenated Hydrocarbons
Halocarbon 116 Hydrocarbons/ C2F6 Hexafluoroethane Halogenated Hydrocarbons
Halocarbon 13 Hydrocarbons/ CClF3 Halogenated Hydrocarbons
Halocarbon 14 Hydrocarbons/ CF4 Tetrafluoromethane Halogenated Hydrocarbons
Halocarbon 218 Hydrocarbons/ C3F8 Perfluoropropane Halogenated Hydrocarbons
Halocarbon 23 Hydrocarbons/ CHF3 Trifluoromethane Halogenated Hydrocarbons
Halocarbon 318 Hydrocarbons/ C4F8 Octafluorocyclobutane Halogenated Hydrocarbons
Helium Inerts He
Hexafluoro-2-butyne Hydrocarbons/ C4F6 Halogenated Hydrocarbons
Hexafluorobutadiene Hydrocarbons/ C4F6 Halogenated Hydrocarbons
gas filter compatibility chart
Compatible Compatible with limitation Not compatible
«» FLAT PANEL DISPLAY «» ENTEGRIS, INC. ENTEGRIS, INC. «» FLAT PANEL DISPLAY «» 1918
GA
S Con
tAm
inA
tion
Con
trol
ChEMICaL MEMBraNE GaS CaTEGory ForMuLa NICkEL PTFE/PFa STaINLESS
Hydrogen Hydrogen/Hydrides H2
Hydrogen Bromide Halogen/Halides HBr
Hydrogen Chloride Halogen/Halides HCl
Hydrogen Fluoride Halogen/Halides HF
Hydrogen Selenide Hydrogen/Hydrides H2Se
Hydrogen Sulfide Hydrogen/Hydrides H2S
Krypton Inerts Kr
Methane Hydrocarbons/ CH4 Halogenated Hydrocarbons
Methyl Fluoride Hydrocarbons/ CH3F Halogenated Hydrocarbons
Methylsilane Hydrogen/Hydrides SiH3(CH3)
Neon Inerts Ne
Nitric Oxide Oxygen/Oxides NO
Nitrogen Inerts N2
Nitrogen Dioxide Oxygen/Oxides NO2
Nitrogen Trifuoride Halogen/Halides NF3
Nitrous Oxide Oxygen/Oxides N2O
Octafluorocyclopentene Hydrocarbons/ C5F8 Halogenated Hydrocarbons
Oxygen Oxygen/Oxides O2
Ozone Oxygen/Oxides O3
Pentaborane Hydrogen/Hydrides B5H9
Phosphine Hydrogen/Hydrides PH3 2
Phosphorous Trifluoride Halogen/Halides PF3
Silane Hydrogen/Hydrides SiH4 1
Silicon Tetrachloride Halogen/Halides SiCl4
Silicon Tetrafluoride Halogen/Halides SiF4
Sulfur Dioxide Oxygen/Oxides SO2
Sulfur Hexafluoride Halogen/Halides SF6
Trichlorofluoromethane Hydrocarbons/ CCl3F Halogenated Hydrocarbons
Trichloromethane Hydrocarbons/ CHCl3 Halogenated Hydrocarbons
Trichlorosilane Halogen/Halides SiHCl3
Trichlorotrifluoroethane Hydrocarbons/ C2Cl3F3 Halogenated Hydrocarbons
Trimethylamine Hydrocarbons/ (CH3)3N Halogenated Hydrocarbons
Trimethylsilane Hydrogen/Hydrides SiH(CH3)3
Tungsten Hexafluoride Halogen/Halides WF6
Xenon Inerts Xe
1 Compatible to 150°C.
2 Not compatible above room temperature and less than 1000 ppm. Early periodic replacement is recommended. Please consult your Application Specialist or Technical Service for available test data from Entegris’ Specialty Gas Research Center for dopant concentrations under 1000 ppm.
gas filter compatibility chart (continued)
Compatible Compatible with limitation Not compatible
Wafergard® SG Gas Filters
1.0
0.8
0.6
0.4
0.2
0
14121086420
0 10 20 30 40 50 60SLPM Flow Rate @ 23°C (73°F)
Dif
fere
ntia
l Pre
ssur
e (b
ar)
Dif
fere
ntia
l Pre
ssur
e (p
sid)
Wafergard SG Gas Filters FG SeriesWGFGT1PS1 ¼” Compression Seal
4.12 bar inlet(60 psig)
2.06 bar inlet(30 psig)
0 200 400 600 800 1000 1200
1.0
0.8
0.6
0.4
0.2
0
14121086420
SLPM Flow Rate @ 23°C (73°F)
Dif
fere
ntia
l Pre
ssur
e (b
ar)
Dif
fere
ntia
l Pre
ssur
e (p
sid)
Wafergard SG Gas Filters FG SeriesWGFGMBSS4 ½” Compression SealWGFGMBSS3 3⁄8” Compression Seal
4.12 bar inlet(60 psig)
2.06 bar inlet(30 psig)
1.03 bar inlet(14 psig)
6.2 bar inlet(90 psig)
0.5
0.4
0.3
0.2
0.1
0
76543210
SLPM Flow Rate @ 23°C (73°F)
Dif
fere
ntia
l Pre
ssur
e (b
ar)
Dif
fere
ntia
l Pre
ssur
e (p
sid)
Wafergard SG Gas Filters FG SeriesWGFG02PS1 ¼” Compression Seal
6.2 bar inlet(90 psig)
4.12 bar inlet(60 psig)
2.06 bar inlet(30 psig)
0 20 40 60 80 100 120
performance
Wafergard SG gas filters provide superior particulate filtration to maximize photovoltaic cell and display manufacturing production yields. The all-Teflon filter elements are compatible with high-purity process gases as well as inert gas and CDA applications.
• Photovoltaic process gases
• Superior downstream cleanliness
• Excellent compatibility with high-purity gases including N2, CDA, SiH4, H2 and NF3
ENTEGRIS, INC. «» FLAT PANEL DISPLAY «» 21
GA
S Con
tAm
inA
tion
Con
trol
«» FLAT PANEL DISPLAY «» ENTEGRIS, INC.20
Linegard™ MaX-FP In-line Teflon® Gas Filters
Linegard MAX-FP in-line Teflon gas filters with a particle removal rating of > 0.003 µm are designed as cost-effective solution for mid-flow range on noncritical applications. Recommended for filtration of compressed dry air and inert gases such as general nitrogen on applications of instrument air, air knife, purge/vent line, hook up and dryer.
• Filter element –Teflon PTFE membrane supported by polypropylene structures –provides a cost-effective solution for filtration of compressed air and inert gases
• Large inside diameter of filter element is designed for high flow rate/low pressure drop, resulting in up to 1000 SLPM with compact housing
• Various fitting and length configurations provide ease of installation without design changes of gas panel and delivery system
Dif
fere
ntia
l Pre
ssur
e (p
sid)
20181614121086420
Linegard MAX-FP ½” Fittings
Air Flow Rate (SLPM) @ 23°C (73°F)
Inlet = 0.6 MPaD
iffe
rent
ial P
ress
ure
(kPa
)
140
120
100
80
60
40
20
0200 600 800 1000 12000 400
Inlet = 0.1 MPa
Inlet = 0.2 MPa
Inlet = 0.4 MPa
performance
Designed to meet the needs of flat panel display for greater efficiency, decreased chamber downtime and greater throughput.
• Patented sintered nickel filter element diffuses the flow of incoming gas quickly, allowing the loadlock and/or transfer chamber to fill at a higher rate
• Highly retentive nickel element removes submicron particle contamination from incoming gas
We offer other form factors and configurations. Please contact Entegris for more information.
FEaTurE aDVaNTaGE BENEFITEntegris’ patented, sintered nickel technology in a compact diffuser unit
• Rapid vent, gentle flow to atmosphere without particle disturbance or excessive turbulence
• Decreases cycle time, increases throughput and overall equipment efficiency
0.003 mm filtration technology in an integrated diffuser/filter
• Removal of particles greater than 0.003 mm from incoming gas
• Delivers ultra-clean, diffused gas to the process chamber to minimize on-wafer defects
Available in a variety of standard flange and connector configurations
• Easy installation, retrofit into existing tools including loadlock chambers, cooling chambers, transfer chambers and process chambers
• Flexibility in chamber design
Rated at 100,000 cycles before changeout
• Long product life • Lowers cost of ownership and reduces downtime
50403020100
0.4
0.3
0.2
0.1
0
0.5
Supply Pressure (psig)
Vent
-Up
Tim
e Se
cond
s/lit
er
60
BGN-25ST
BGN-NFLT and BGN-25LT
performance
Chambergard™ BGN Fast Vent Diffusers
«» FLAT PANEL DISPLAY «» ENTEGRIS, INC. ENTEGRIS, INC. «» FLAT PANEL DISPLAY «» 2322
GA
S Con
tAm
inA
tion
Con
trol
Entegris provides gas purification solutions for a range of
applications where quality, capacity and reliability are essential.
The technology incorporates an inorganic regenerable media which
purifies gases at ambient temperatures to parts-per-trillion (ppt)
levels. Regenerable purifiers are cost-effective, environmentally
friendly alternatives to nonregenerable getter, organometallic resin
and palladium-based technologies.
gas contamination control solutions: gas purification
GaTEkEEPEr aEroNEX SySTEMS
gas symbol iner
t
corr
osiv
e
non
- re
activ
e
hyd
roge
n
opt
ics
carb
on
mon
oxid
e
hyd
ride
nitr
ogen
opt
ics
amm
onia
hyd
roge
n
Ammonia NH3
Argon Ar
Arsine AsH3
Boron Trichloride BCl3
Bromine Br2
Carbon Dioxide CO2
Carbon Monoxide CO
Chlorine Cl2
Clean Dry Air CDA
Diborane B2H6
Dichlorosilane SiH2Cl2
Ethane C2H6
Germane GeH4
Hexafluoroethane C2F6
Tetrafluoromethane CF4
Octafluoropropane C3F8
Helium He
Hydrogen H2
Hydrogen Bromide HBr
Hydrogen Chloride HCl
Krypton Kr
Methane CH4
Methylsilane SiH3(CH3)
Neon Ne
Nitrogen N2
Nitrous Oxide N2O
Oxygen O2
Phosphine PH3
Silane SiH4
Silicon Tetrachloride SiCl4
Silicon Tetrafluoride SiF4
Sulfur Hexafluoride SF6
Trichlorosilane SiHCl3
Trimethylsilane SiH(CH3)3
Xenon Xe
Note: If a gas is not listed, please contact your regional Entegris Customer Service Center for additional information.
gas purification range chart
GaSES PurIFIED GaS SErIES CoNTaMINaNTS rEMoVED ouTLET PurITy
XCDA® purge gas Z2 Inorganic SO2, SOX, NOX, H2S, H2O, CO2, siloxanes, ammonia, amines, acid gasses, alcohols and nonmethane hydrocarbons (NMHCs)
<1 ppb H2O <10 ppt volatile bases <1 ppt all other contaminants
N2, He, Ne, Kr, Xe, Ar, Halocarbons and light Hydrocarbons
I Inert O2, H2, CO, CO2, H2O, NMHCs <1 ppb
SF6, NF3, O2, NO, N2O, CO2, O2/Inert gas mixtures
N Nonreactive H2O, NMHCs <1 ppb
CDA, N2 O Optics and Z H2O, volatile acid, volatile base, condensable organics, dopants (SOx, NOx, H2S, NH3, CO2, siloxane)
<1 ppb H2O <1 ppt
NH3, AsH3, PH3, GeH4, SiH4, B2H6, Si2H6
SK Hydride O2, CO, CO2, H2O, NMHCs and oxidation by-products
<1 ppb
HCl, Cl2, HF, F2, HBr, BCl3, SiCl4, SiF4
C Corrosive H2O <100 ppb (<1 ppb in N2)
CO L Carbon Monoxide H2O <1 ppb
gas purification series overview
«» FLAT PANEL DISPLAY «» ENTEGRIS, INC. ENTEGRIS, INC. «» FLAT PANEL DISPLAY «» 2524
GA
S Con
tAm
inA
tion
Con
trol
GateKeeper purifiers remove gaseous contaminants down to parts-per-trillion levels with inorganic media. Applications include gas-box installation, single-tool purification, multi-tool purification, facility purification, back-pad purifiers, Aeronex Gas Purification System back-ups and other applications.
• A cost-effective way to prevent contamination of the process or damage to the tool
• Designed for ambient operation and requiring no power
• Maximum flow rates ranging from 1 SLM to 20,000 SLM
• See gas purification selection chart for gases purified
Gatekeeper® Purifiersaeronex® Gas Purification Systems
Entegris Aeronex Gas Purification Systems are stand-alone systems offering in-situ regeneration with advanced controls. The multi-bed design guarantees a continuous supply of pure gas so there is no need to send a purifier back for regen- eration or to install a replacement purifier. The pre-programmed controller knows when to switch to the fresh purifier and when to regenerate the depleted purifier. Applications include single- tool purification, multi-tool purification, facility purification and other applications.
• Offers maximum flow rates ranging from 120 SLM to 5,000 SLM
• Available in an array of optional configurations to meet specific application requirements
• Options include manual or automatic bypass valves, flow meters and integrated backup GateKeeper purifier and online moisture indicators
• Available with XCDA, inert, hydrogen and other specialty gases
FEaTurE aDVaNTaGEAmbient temperature purification • Lower energy costs
• Resource conservation
Self-regenerating purifiers • Lower cost of ownership• Reduced downtime
Complete automatic operation • Saves time - minimal user interface• Increased reliability• Lower cost of ownership
System has breakthrough detection capability (for CDA, Inert, O2 and H2)
• No production yield or tool downtime loss from premature breakthrough. BTI will alarm user and allow a bed swap
Continuous flow of purified gas • No tool downtime associated with purifier change-out procedure
FEaTurE aDVaNTaGEHigh efficiency • Impurity removal to <1 ppb or lower limit of detectability
High capacity • Extended lifetime
Low pressure drop • Maintains consistent flow performance
Renderable media • Low cost of ownership - regen units are half to two thirds of the price of new units
• No hazardous waste
No hydrocarbons released under any conditions
• Will not contaminate the process
Process protection • Consistently delivers ultrapure gas• Guards against bulk gas purifier breakthrough, impurity
spikes from liquid storage tanks, cylinder changeouts and unexpected contaminants in the process
Cost-effective • Improves process consistency, increases product yields and lengthens tool life
• Transforms low-purity gas into UHP grade, reducing process costs
• Minimal installation costs• No power requirements
Safe and simple to use • Easy to install• Uses ambient temperature purification technology
– no power or heat required• No moving parts
«» FLAT PANEL DISPLAY «» ENTEGRIS, INC. ENTEGRIS, INC. «» FLAT PANEL DISPLAY «» 2726
FLUID
HA
ND
LING
reliable, high-purity, high-precision fluid handling solutions
Entegris offers the broadest range of high-purity, corrosion-resistant fluid handling products to maximize productivity, improve yields and reduce cost of ownership throughout chemical distribution and point-of-use.
Entegris chemical compatibility chart for sensing and control products* (pg. 36 - 37)
Chemical Type Chemical
WETTED SurFaCES
SENSor INTErFaCE BoDy PrIMary SEaL
CTFE** PFa**
CTFE (hF com-patible) Sapphire PTFE PFa
kalrez® 4079
kalrez 1050LF
kalrez 6375uP (Default)
Code –P1
Code –P2
Code –P5 NA NA NA
Code -U1 or -S1
Code -U2 or -S2
Code -U3*** or -S3
Acids Acetic A/B B D A A A A C A
HFn A B D A A A A/B B/C A/B
Hydrochloric (HCl) A B D A A A A A A
Hydrofluoric (HF) B C A A A A A B A
nitric (HnO3) A B D A A A A/B B/C A
Phosphoric (H3PO4) A A D A A A A A A
Sulfuric (H2SO4) A A D A A A A A A
Bases Ammonium Fluoride (nH4F) A A D A A A B A/B A
Ammonium Hydroxide (nH4OH) A B D A A A B A/B A
Potassium Hydroxide (KOH) A A D A A A A A A
Oxidants Hydrogen Peroxide (H2O2) A A D A A A A A A
Dissolved Ozone A A D A A A B B A/B
Dissolved Chlorine B A D A A A B B/C B
Organic Solvents
Acetone B A D A A A A A A
n-Butyl Acetate B A D A A A A A A
Ethylene Glycol A A D A A A A A A
Isopropyl Alcohol A A D A A A A A A
Methanol A A D A A A A A A
Methyl Ethyl Ketone (MEK) C A D A A A A A A
n-methyl pyrrolidone (nMP) B A D A A A A A A
Tetra Methyl Ammonium Hydroxide (TMAH)
A B D A A A B A A
Organic Solvents Categories
Acetates B A D A A A A A A
Alcohols A A D A A A A A A
Amines B A D A A A C A A
Hydrocarbons, Aromatic B A D A A A A A A
Hydrocarbons, Alkane A/B A D A A A A A A
Ketones B A D A A A A A A
Media Temperature
High Temperature (>40°C) B A C C A A A/B A A
* The compatibility chart is compiled from information published by: Entegris, DuPont Dow Elastomers, Welch Fluorocarbon, Little Giant Pump Company, the PDL Handbook and Compass Corrosion Guide.
** The suitability of CTFE and PFA is based on both chemical resistance and permeability.
*** Recommended for new application.
Entegris neither represents nor warrants the accuracy or sufficiency of the information set forth in this chart for specific end-user applications. Ultimate responsibility for material selection remains with the end user. Nothing in this chart constitutes a change to the terms and conditions under which the Entegris product was sold.
A: Preferred, suitable for all high-purity applications
B: Acceptable, suitable for nonwetted parts in most applications. May not be suitable for wetted parts in high-purity applications
C: Not recommended for wetted parts in high-purity applications. May be suitable for nonwetted parts in some applications
D: Information not available
ENTEGRIS, INC. «» FLAT PANEL DISPLAY «» 29
FLUID
HA
ND
LING
« » FLAT PANEL DISPLAY «» ENTEGRIS, INC. 28
FEaTurE aDVaNTaGE BENEFITPFA wetted surfaces • Provides high-purity and chemical resistance
• Long product life• Lower cost of ownership
through increased productivity and throughput
Largest installed customer base of PFA fittings
• Global manufacturing and support• Assured reliability and performance
• High service levels in all regions• Lower cost of ownership through
increased manufacturing uptime
Available in a broad range of sizes and configurations
• Single source supplier for all high-purity, corrosive chemical connection needs
• Suitable for a wide variety of FPD applications
• Reduces number of suppliers• Lower design cost
Sweep elbow configurations • Reduced pressure loss with higher flow rates • Increased chemical throughput
Entegris has the broadest range of fitting configurations and sizes available to meet flat panel display, photolithography, wet etch and clean and bulk chemical distribution needs.
• Most complete line of flare fitting connections available
• Flare fittings provide leak-free performance in demanding applications
• PureBond® weldable pipe fittings provide a rigid, permanent, leak-free piping system that is adaptable to other connection types, including NPT, flare, ANSI® and JIS flanges
• Broad range of sizes and configurations: 1⁄4” to 2” sizes of elbows, unions, reducers, caps, tees, crosses and adapters
• Up to 1551 kPa (225 psig) media pressure capability
• Up to 200˚C media temperature capability
Tube and Pipe FittingsTubing and Pipe
FEaTurES aDVaNTaGE BENEFITPFA material of construction • Broad chemical compatibility
• Long product life• Lower cost of ownership through
increased productivity and throughput
Long-term performance testing at various media temperatures
• Products can be used with confidence at maximum continuous ratings
• Added safety• Lower cost of ownership through
increased manaufacturing uptime
Laser marked tubing • Sure method of traceability • Possibility of identification in critical situations
Available in different PFA grades: 4200, 4300 and 4400 (HP plus)
• Customizable in different material quality requirements
• Exact grade of PFA can be selected to best fit the application
• Increased product performance and longer product life
Entegris offers a broad range of tubing and pipe made from 100% virgin high-purity PFA material for highly corrosive, ultrapure applications.
• Multiple tube and pipe materials available to best match material to application
• Tube flaring process provides leak-free connections and offers design flexibility
• PureBond weld process is ideal when permanent connections are required
• Nonintrusive and noncontaminating permanent serialized laser marking allows immediate material, size and manufacturing lot identification
performancePressure vs. Temperature
Fluid Temperature (°C)
300
250
200
150
100
50
0
1724
1379
1034
690
345
0
37.80
50 100 150 200 250 300 350 400
65.5 93.3 121.1 148.9 176.7 204.4
Fluid Temperature (°F)
Pres
sure
(psi
g)
AT250-047
AT375-062
*1” and 1¼” ratings vary slightly. Please consult the factory for specific rating information.
AT500-062
AT1000-062,AT1250-075*
AT750-062
Tubing Size Options
• Standard wall tubing is available in 1⁄4” to 11⁄2” nominal sizes in reel lengths up to 1525 meters (5000’) depending on tube size
• Schedule 40 pipe ranging from 1⁄4” to 2” nominal pipe size is available in straight lengths of 8’, 10’ and 3 meters
«» FLAT PANEL DISPLAY «» ENTEGRIS, INC. ENTEGRIS, INC. «» FLAT PANEL DISPLAY «» 3130
FLUID
HA
ND
LING
PrimeLock® Fittings
The simplest, cleanest and most robust PFA fitting on the market.
• Primelock fittings ensure leak-free performance in the most demanding chemical applications
• Easy to assemble, heat is not required
• The audible and visible indicator allows users to verify the proper makeup of the connection
• Broad range of sizes and configurations: 1⁄4” to 1” elbows, unions, reducers, caps, tees, minimum tube unions and adapters
Ideal for high purity, corrosive chemical handling.
FEaTurE aDVaNTaGE BENEFITEase of assembly • Audible and visual indication of proper
fitting makeup • Consistent and repeatable fitting
makeup
PFA wetted surfaces • Broad chemical compatibility • Simplifies product selection
Robust thread design • No cross threading• Quick makeup• Increased sealing forces
• Consistent leak-free connection
Unique seal design • Nonwetted insert eliminates multiple entrapment, leak points and flow interruptions
• Improved process
Capable of 200°C (392°F) temperature rating, all sizes
• Simplifies product selection • Lower design cost
No heat required to flare tubing • Reduces operator variability • Saves time and money
performanceThe unique seal design removes the insert from the flow stream
• Reduces entrapment
• Reduces leak points
• Eliminates flow interruptions
Backup seal 2: Surface between ID oftube and OD of insert
Primary seal
Backup seal 1: Surface between insert and fitting nose
Backup seal 3: Surface between OD of tube
and inside of fitting body
Tube insert, nonwetted
PrimeLock Cross-section
PrimeLock fittings are compatible with high-temperature chemical processes:
• At temperatures up to 200°C at 40 psi
• At room temperatures it is rated to 120 psi
Dif
fere
ntia
l Pre
ssur
e (P
SIG
)
Dif
fere
ntia
l Pre
ssur
e (k
Pa)
965
827
690
552
414
276
138
021 50 100 150 200
Temperature (°C)
Acceptable operating range
Pressure vs. Temperature RatingTemperature (°F)
70 122 212 302 392
140
120
100
80
60
40
20
0
You can generate fitting part numbers based on your specifications and search the extensive online catalog on: • The web at:
www.entegrisfluidhandling.com• The mobile selection tool at:
m.entegrisfluidhandling.com
Scan Qr Code
Fittings mobile selection tool
«» FLAT PANEL DISPLAY «» ENTEGRIS, INC. ENTEGRIS, INC. «» FLAT PANEL DISPLAY «» 3332
FLUID
HA
ND
LING
FEaTurE aDVaNTaGE BENEFITHigh Cv flows • Minimal pressure drop • Capable of delivering large volumes
of chemical
All wetted material in PFA • Lower cost of ownership through increased valve and tool uptime
• Minimize chemical contamination
• Excellent chemical resistance for ultrapure materials
Multiple port connection configurations
• Lower design cost • Enables design flexibility through easy integration of other process components
high Flow PFa Valves
Custom PureBond configurations are available. Please contact the factory with your requirements.
FEaTurE aDVaNTaGE BENEFITAll wetted material in PFA and PTFE
• Excellent chemical resistance• For ultrapure materials
• Lower cost of ownership through increased valve and tool uptime
• Minimize chemical contamination
Available in broad range of sizes
• Suitable for a wide variety of applications • Lower cost of ownership by matching the correct valve to the application
Multiple port connection configurations
• Enables design flexibility through easy integration of other process components
• Lower design cost
Innovative diaphragm designs and materials
• Enable very high flow rates in relatively small footprint
• Optimized valve design provides high reliability
• Move large volumes of chemicals without multiple lines
• Increases productivity and throughput
Valves
Entegris offers high flow manual and pneumatic 2-way valves capable of distributing high volumes of high-purity chemical. Our high flow valves are manufactured from PFA, PTFE and PFA-lined stainless steel.
• Line sizes up to 50.8 mm (2”)
• CV up to 60
• Manual and pneumatic options
• All wetted surfaces are PFA and PTFE for high-purity chemical applications
• Visual open/closed actuator position indication
Entegris valve solutions safely handle critical fluids while maintaining purity, high-flow and corrosion resistance.
• Designed specifically for flat panel display and semiconductor applications
• PFA or PTFE wetted surfaces to maintain process integrity in the harshest environments
• Broad size range: 1⁄4” to 1” orifice sizes
• Multiple configurations: sampling, 3-way manual or 2-way pneumatic actuators
• High-volume flow capability with media pressures up to 827 kPa (120 psig).
«» FLAT PANEL DISPLAY «» ENTEGRIS, INC. ENTEGRIS, INC. «» FLAT PANEL DISPLAY «» 3534
FLUID
HA
ND
LING
Customized fluid control that optimizes space inside equipment, provides low cost of ownership and allows a wide range of valve types.
• Customized distribution manifold
• Modular method of mounting valves to a manifold block
• Optimized flow path
• Replaceable manifold parts including fitting connections and valve operators
• Interchangeable valves
• Available in orifice sizes up to 1” with wide range of valve operators and styles
Dymension® Manifolds
FEaTurES aDVaNTaGE BENEFITSurface mounted valves • Repairable
• Interchangeable valves• Increased equipment uptime
Low dead volume designs • Reduces internal volume• Reduces cross contamination• Efficient chemical flush out
• Improved process control• Reduced cycle time
Complex flow path and control in a single component
• Smaller footprint• Fewer connecting points
• Lower cost of ownership (COO)
Integrated mixing • Reduces flow volume to mix point • Faster chemical mix response time
PFA and PTFE wetted surfaces • Broad chemical compatibility• Long product life
• Lower cost of ownership through increased productivity and throughput
Manifold designs can include a broad range of fluid control solutions
• Increased manifold functionality, reducing the need for multiple discrete components
• Lower capital costs• Smaller footprint
reduced Footprint
Discrete component assembly (53 cm)
53 cm
Equivalent function in a manifold solution (17 cm)
17 cm
Computational Fluid Dynamics
Flow trajectory and blending analysis Mixing performance analysis
• Media temperatures up to 160°C
• Media pressures to 80 psi
• PFA and PTFE wetted surfaces for broad chemical compatibility
performance• Designed using computational fluid dynamics
- Mixing analysis - Flow velocity - Pressure drop analysis and optimization
«» FLAT PANEL DISPLAY «» ENTEGRIS, INC. ENTEGRIS, INC. «» FLAT PANEL DISPLAY «» 3736
FLUID
HA
ND
LING
NT® Pressure Transducers
FEaTurE aDVaNTaGE BENEFITAll wetted parts are constructed of PTFE, sapphire and other high-purity polymers for corrosion resistance
• Compatible with typical semiconductor process chemistries
• Improves yields by increasing particle performance
Provides compatibility and easy integration with electronic displays and monitoring systems
• Enables tool interaction with pressure transducer and offers increased accuracy in pressure measurements
• Increases overall equipment efficiency
Single port and flow through styles offered in industry standard Flaretek® and Pillar® Super 300 fittings
• Compact design enables easy installation
• Improves system design flexibility
No moving parts or fill fluids • Reduces contamination potential • Increases tool uptime
differential pressure setpoint for filter replacement
Monitoring Differential Pressure To Schedule Filter replacement
performance
NT® Flowmeter, Model 4400
FEaTurE aDVaNTaGE BENEFITPTFE and other high-purity fluoropolymer wetted surfaces
• Compatible with highly corrosive FPD processes• Resistant to harsh chemical environments and
external spraydowns
• Improves yields• Lower cost of ownership through
increased tool uptime
Differential pressure technology • Ability to measure many types of fluids• Capable of measuring flow in the presence
of trapped vapor and bubbles• Provides repeatable measurements and reliable
performance
• Increases overall equipment efficiency and tool uptime
No moving parts • Does not generate particles or bubbles• Provides repeatable and reliable measurements
• Improves process yields and throughput
Flow-through design • Minimizes dead volume• Reduces the possibility of process
contamination
• Lower cost of ownership through increased process efficiency
• Improves yields
NT flowmeter, model 4400 utilizes differential pressure to provide an accurate and reliable flow and pressure measurement in highly corrosive processes.
• No moving parts or fill fluids offers reduced contamination potential
• Nonmetallic sensing technology provides reliable measurement
• Flow ranges up to 0 – 120 L/min• Easy installation in any orientation• Flowmeters are factory calibrated, 100% verified
and require no field calibration• Integral pressure transducer provides additional
process information for alarming conditions and process follow-up
Provide accurate and reliable inert pressure measurements. Measure gas or liquid pressure, allowing you to monitor process conditions for increased safety and system performance.
• No moving parts or fill fluids help reduce contamination potential
• Nonmetallic sensing technology provides reliable measurement
• Compact design
• Dymension manifold mountable
• Kalrez, PTFE, Sapphire, PFA and CTFE
Optimized for aggressive chemical applications.
performanceSensor interface: PFA or CTFE
Process temperature: 50° to 149°F (10° to 65°C)
Flow measurement accuracy: 10:1 turndown 20-100% of range ±1.0% FS
10-20% of range ±2.5% FS
20:1 turndown 10-100% of range ±1.0% FS
5-10% of range ±2.5% FS
Repeatability: 10:1 turndown 20-100% of range ±0.5% FS
10-20% of range ±1.0% FS
20:1 turndown 10-100% of range ±0.5% FS
5-10% of range ±1.0% FS
Operating pressure: 0 to 60 psig (0 to 414 kPa)
Pressure measurement accuracy: ±1% of full scale
«» FLAT PANEL DISPLAY «» ENTEGRIS, INC. ENTEGRIS, INC. «» FLAT PANEL DISPLAY «» 3938
substra
te ha
nd
ling
substrate handlingEntegris manufactures a number of wafer
pods, FOUPs and wafer cassettes that can
be adapted to safely protect FPD square
and round substrates during processing
and transport.
Substrate Carriers and Pods
Entegris can customize solutions to cost-effectively manage your substrates such as an LCD wafer pod to process x-ray panels. Materials, capacities, automation and general specifications can all be designed to your requirements.
LCD Carrier Features
• Materials available
- PFA - Polypropylene - Blue polypropylene
• LCD Sizes
- 112 mm x 102 mm x 18 mm (4.4 x 4.0 x 0.7) to 203 mm x 152 mm x 30 mm (8.0 x 6.0 x 1.2)
- Custom sizes available above 1 meter
• Designed for equipment interface and automation
• Low particulate generation
• Chemical compatibility
Entegris®, the Entegris Rings Design®, Flaretek®, PureBond®, NT®, Dymension®, ProcessGard®, Fluoroline™, Wafergard®, Chambergard™, Aeronex®, GateKeeper®, Mykrolis®, XCDA®, Panelgard™, PrimeLock®, Savana® and Linegard™ are trademarks of Entegris, Inc.; Teflon® is a registered trademark of E. I du Pont de Nemours and Company; PEEK™ is a trademark of Victrex PLC; Kalrez® is a registered trademark of DuPont Dow Elastomers, L.L.C.; Moldflow® is a registered trademark of Moldflow Corporation; ANSI® is a registered trademark of American National Standards Institute and Pillar® is a trademark of Nippon Pillar Packing Company, Ltd.
north america
massachusetts Entegris, Inc. Corporate Headquarters 129 Concord Road Billerica, MA 01821 USA Tel. +1 978 436 6500 Fax +1 978 436 6735
minnesotaEntegris, Inc. 101 Peavey Road Chaska, MN 55318 USA Tel. +1 952 556 3131 Fax +1 952 556 1880
Customer Service Tel. +1 952 556 4181 Tel. 800 394 4083 (toll-free within
North America)Fax +1 952 556 8022 Fax 800 763 5820 (toll-free within
North America)
euroPe
franceCustomer Service Center for Southern, Western and Northern Europe Entegris S.A.S. Parc Centr’ Alp Ouest 196 rue du Rocher de Lorzier 38430 Moirans France Tel. +33 (0) 4 76 35 73 50 Fax +33 (0) 4 76 35 73 80
germanyCustomer Service Centers for Eastern and Central Europe Entegris GmbH Hugo-Junkers-ring 5 Gebaude 107 Industriegebiet Klotzsche 01109 Dresden Germany Tel. +49 (0) 351 79597 0 Fax +49 (0) 351 79597 499
israelEntegris Israel Limited Izmargad Street 12 Kiryat-Gat Israel Tel. +972 (0) 73 221 00 00 Fax +972 (0) 73 221 00 22
JaPan
Nihon Entegris K.K. Regional Headquarters Mita-Kokusai Bldg. 4-28, 1-Chome Mita Minato-Ku Tokyo, Japan 108-0073 Tel. +81 3 5442 9718 Fax +81 3 5442 9738
Nihon Entegris K.K. Shin-Osaka Prime Tower Bldg. 1-1, Nishinakajima 6-Chome Yodogawa-Ku Osaka, Japan 532-0011 Tel. +81 6 6390 0594 Fax +81 6 6390 3110
Nihon Entegris K.K. Hakataekihigashi 113 Bldg. 13-9 Hakataekihigashi 1-Chome Hakata-Ku Fukuoka, Japan 812-0013 Tel. +81 92 471 8133 Fax +81 92 471 8134
asia/Pacific
chinaEntegris (Shanghai) Microelectronics Trading Co., Ltd. Unit 606-609, Tower 1 German Centre No. 88, Ke Yuan Road Zhangjiang Hi-Tech Park Shanghai 201203 P.R. of China Tel. +86 21 2898 6710 Fax +86 21 5080 5598
Entegris (Beijing) Microelectronics Trading Co., Ltd. Room 1105, Zhaolin Mansion No. 15 Ronghua Middle Road BDA, Beijing 100176 P.R. of China Tel. +86 10 5107 8379 Tel. +86 10 5107 8300 Fax +86 10 5107 8326
asia/Pacific
KoreaEntegris Korea, Ltd. 8F, Seongok Bldg. 4-1, Sunae-dong Bundang-gu, Seongnam-city Kyunggi-do, Korea 463-825 Tel. +82 31 738 5300 Fax +82 31 738 5301
malaysiaEntegris (Malaysia) Sdn Bhd Unit 14 & 15, Lower Level 5 (Executive Wing), Hotel Equatorial No. 1 Jalan Bukit Jambul 11900 Bayan Lepas, Penang MalaysiaTel. +60 4 427 4200Fax +60 4 641 3294
singaporeEntegris Singapore Pte Ltd. 31 Kaki Bukit Road 3 Techlink, #06-08/11 Singapore 417818 Tel. +65 6745 2422 Fax +65 6745 4477
taiwanEntegris Asia LLC, Taiwan Branch 14F., No. 120, Sec. 2, Gong Dao Wu Road Hsinchu City 30072 Taiwan (R.O.C.) Tel. +886 3 571 0178 Fax +886 3 572 9520
Entegris Singapore Pte Ltd. Taiwan Science Park Branch1F., No. 6-7, Duxing Road East Dist. Hsinchu City 30072 Taiwan (R.O.C.)Tel. +886 3 565 3000 Fax +886 3 565 3099
Entegris Asia LLC, Taiwan Branch Rm. 313/314, 3F., No. 6, Zhongxin Road Xinshi Dist. Tainan City 74148 Taiwan (R.O.C.) Tel. +886 6 589 6008 Fax +886 6 501 3799
Entegris regional customer service centersregion telePhone faxnorth America 800 394 4083 800 763 5820Germany +49 (0) 351 795 97 0 +49 (0) 351 795 97 499France +33 (0) 4 76 35 73 50 +33 (0) 4 76 35 73 80United Kingdom +33 476 357 354 +33 476 357 380Italy +33 476 357 352 +33 476 357 380Israel +972 (0) 73 221 00 00 +972 (0) 73 221 00 22Japan +81 3 5442 9718 +81 3 5442 9738Malaysia +60 4 427 4200 +60 4 641 3294Korea +82 31 738 5300 +82 31 738 5301Taiwan +886 3 571 0178 +886 3 572 9520Singapore +65 6745 2422 +65 6745 4477China +86 21 2898 6710 +86 21 5080 5598
entegris, inc.
Corporate Headquarters129 Concord RoadBillerica, MA 01821 USATel. +1 978 436 6500Fax +1 978 436 6735
www.entegris.com
©2010-2012 Entegris, Inc.Printed in USAAll rights reserved.9000-5415ENT-0912