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May 18 2005 1
Sensors
May 18 2005 2
Future Technology Center
• Technology Trends• Statistical trend analysis of technologies (patents & papers) and markets• Analysis and assessment of industrial roadmaps• Workshops with technology leaders and business innovators
• Business Assessment• Matching future technologies with individual business lines• Selection and assessment business opportunities and future innovations• Strategic business partners in the field
• Concept Creation• Defining innovation routes and new product concepts• Conceptual elaboration of specific innovative productlines
• Development & implementation• Business case assessment• Technological feasibility• Partnerships and system engineering for further development and
implementation
May 18 2005 3
Outline
• why “lab on chip” , “mems” sensors and rf-sensors
• several examples, commercial & in development
• performance data (indicative)
• some future concepts for defense
• ideas for cooperation
May 18 2005 4
Bench Process
Book Size System
cm
Watch Size System
dm
m Micro System
Several micro system platforms1) Si (CMOS)2) Glass/ceramic (high temperature)3) Plastic (low cost, disposable) mm
Lab on chip, microlab (fluidic)
Rapid, Specific and Sensitive Micro (Fluidic) Detection System
May 18 2005 5
0.5mm
4.0 mm
500 um
Airbag Accelerometers
Inertial Measurement
Units
Fuel Injection Nozzle
Tire Pressure Sensors
Microelectromechanical Systems: Advanced Materials and Fabrication Methods
...and MEMS
MEMS are physically small and integrate electrical, mechanical and sensoriccomponents (micro electro mechanical systems)
1 micron beams
Accelerometer
Platforms1) Si (CMOS)2) Glass/ceramic (high temperature)
May 18 2005 6
Why “Lab on chip” Thanks to miniaturisation down to micron & nano level:
• small dimensions function integration possible (dsp, rf-wireless)(mm, µm, nm) efficient thermal and material transport
cheap, easy for mass productionportable, point of analysisdisposable
• small sample volume fast response(µL, nL, pL) high throughput
multi parallel analysis, matrix arraysingle cell/molecule detectionless chemical waste
• high sensor-sample ratio high sensitivityhigh signal to noise
Shrink volume by 108
Improve power efficiency by108
ENIAC~1950 Jornada
~2000
Stan Williams, HP
May 18 2005 7
• Signal to noise improvements:
yocto(10-24) joule, atto(10-18) newton, femto (10-15) mol/L, ppb, single molecule
• Miniaturization – size/weight - arrays
• Lower power, potentially scavenged
• Locally process data into information
Nanocalorimeter; Roukes CITCantilever Sensor; Thundat ORNL
Lab-on-a-chip; Sandia
+
15 μ
NanoAu Chemiresistor; Snow NRL
Magneticbead
DNA-coatedpad
Fieldgeneration wire
Shortingmetal
Magnetoresistivestrip
GMR Biosensor; Whitman/Prinz, NRL
Why nanostructures for sensing
May 18 2005 8
Cantilever Array-based Artificial Nose
M.K. Baller, et al., Ultramicroscopy 82, 1 (2000); F.M. Battiston, et al., Sensors & Actuators 77, 122 (2001)
Gases and Vapours- ppm range
May 18 2005 9
Gas sensor array metal oxide type, NRL
1
10
100
2-propanol benzene toluene 2-nitro-toluene
dete
ctio
n lim
it [p
pb]
Detection limits at 250..300 °C
G a s e s
SE1
Substrate: Si/SiO2 or Al2O3
SE2 SE3
Gradient membraneSiO2 or Al2O3Thickness 2 to 20 nm
Heater (Pt)
Gas detector layer SnO2 or WO3, Pt-endowed, approx. 150 nm
Platinum electrodes Thickness 1 µm
Cross-section of a 3X3.5 mm2 microarray
with 16 sensor segments
Temperature gradient50°C / 2mm
Gases and Vapors - ppb level
NO2, H2O, NH3, CH4 , SO2, CO2, H2S, alcohols, aromatics
May 18 2005 10
Microfluidic lab-on-chip systems
May 18 2005 11
Sample preparation & sensing, csmise, tno
Micro pump
Micro sensor
Body fluid
Outlet
filterGeneticallyengineeredcell amplifier
Geneticallyengineeredcell sensor
May 18 2005 12
Droplet based microfluidics, csmise
• Droplet-based microfluidics
• Electrically control surface tension to drive droplets
• Reconfigurable digital microfluidic circuits
• Fluorescence or magnetic bead detection
May 18 2005 13
Bacteriological DNA fingerprinting, caltech, tno
peristaltic pump micro valvecell lysis
substrate solutionenzyme solutionwash solution
lysis reagent
E. colisample
probe solutiondrain
DNAsensor
DNA / RNA
500 nm
1.5
μm Sample preparation
May 18 2005 14
• counting and measuring cells – one by one• measuring level of soluble factor by fluorescent labeling :
• hormones, antibodies, antigens, DNA • quick and accurate• compact tool for cells diagnostics• micro optical mechanical device (MOMS)
Micro flowcytometer (cell counter)
May 18 2005 15
Micro X-ray source & detector (amptek)
Miniature carbon nanotube field emission X-ray tube
May 18 2005 16
Spectrometer on a chip (B-I)
Microspectrometer on chip by Boehringer-Ingelheim
May 18 2005 17
SPR surface plasmon resonance
SPR detects changes in refractive index in the immediate vicinity of the surface layer of a sensor chip. The SPR angle shifts when biomolecules bind to the surface.
SPR is non-invasive (process reactor, fluidic chip)
May 18 2005 18
Gas sensing with carbon nanotubes
Chemiresistorfor volatiles
Biosensorfor in situ life detection,biomedical applications
May 18 2005 19
Micro gaschromatograph, C2V, tno
• Dimensions: 7x7x7 mm3• Det. limit: <1 ppm• Response time: 25ms • Int. volume: < 1 µl • Dead volume: 0.1 µL • Temperature: 80 / 150 C
May 18 2005 20
HPLC on Chip (Tai, Caltech)agilent
9 Extrated Individual Peptides
Total
The chip performance is as good as commercial system
Gradient Pumps Passive Mixer
ESI Nozzle
Column
Sample Injector Electrodes
1 cm
May 18 2005 21
Caltech: Integrated Large-Scale Micro/NanoFluidics
Check Valve
Electrolysis Pump
In-Channel Check Valve
Parylene ChannelMicro Pump
Reaction Chamber or Reservoir
100 μmMicro Active Valve
Thermal Flow
Sensor
May 18 2005 22
Single molecule detection, Wang JHU
Sample preparation, Microfluidics, Optical cavity fluidic channel & Biosensing Chips
Electrical Molecular Manipulationand Positioning Single Molecule Dynamics
Quatum dot fluorescenceSingle Molecule Detection
Fluidic manipulation plus quantum-dot fluorescence in optical cavity channel
May 18 2005 23
Indicative sensitivities bio(molecule)sensor
ppb (gaseous)Metal oxide nanostructures, nanotubes/wiresChemical
10-3/4CalorimetricThermal
10-8/9
10-13
(10-14)
SPR (surface plasmon resonance)PWG (planar waveguide fluorescence, in dev)THz (early experimental phase, in dev)
Other optical
10-12/13
10-15/16
Membrane (catalytic hybridization)Enzymatic assisted charge transfer
ElectricalElectrochemical
ppm (gaseous)ppb (gaseous)ppm, 10-9
Cantilever resonator (tuning fork)Nanotube/nanowire resonatorsSAW (surface acoustic waves)
Mechanical/acoustic
10-13/14
10-14/16
GMR/nanobeads (in development)concentration step (to be developed)
Magnetic
10-10/11
10-12
PCR (polymerase chain reaction) Elisa (enzyme linked immunoabsorbent assay)
Fluorescence
Sensitivity(mol/liter)
PrincipleTechnology
May 18 2005 24
Future: senstenna, passive RF-readable sensorRF-antenna circuit with reactivepolymer or sensitized nanotubes(TNO)
Passive RFID-tag with integrated sensor function
Semi-active credit card sized sensor with logic/battery
Operates without battery, activated by RF reader��PDA, mobile with ZigBee, BluetoothApplications: health monitoring, BC sensing, food
quality
May 18 2005 25
Future: B/C sensing with conductive polymers in passive or semi active system
May 18 2005 26
Body sensor functionalities Body condition•T (core temperature, skin temperature)•Heart rate•ECG(electrocardiogram) sensor for monitoring heart activity•EEG (electroencephalography) sensor for monitoring brain electrical activity•EMG (electromyography) sensor for monitoring muscle activity•Hydratation•Moisture level of wounds•Bacterial contanimation•Glucose/lactate level in blood•Drug delivery, need for medication•Ph value of sweat, body fluids•Chemical and bio influences•Air quality, breath sensing•Blood pressure sensor• Body position/motion•Motion, acceleration•Positioning body (indoor/outdoor)•Body parts position• Body environment (B/C/N/T/humidity/air)
May 18 2005 27
Body sensors, BAN
IMEC human++, UWB BAN
May 18 2005 28
Body sensors, BAN
May 18 2005 29
Body sensors, medical BAN
May 18 2005 30
£
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