fully depleted charge -coupled devices for scientific ......fully depleted charge -coupled devices...
TRANSCRIPT
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Prototype ATLAS Strip Detector
1994
Dark Energy Camera CCDs
2012
Fully depleted charge-coupled devices for scientific applications: A spin off from silicon detectors for HEP
Steve Holland
Lawrence Berkeley National Laboratory
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Quick overview / Scientific CCDs for astronomy
• Large format: 8 to 16 Megapixel shown below
• Pixel size: 10 to 15 µm typically • iPhone 5: 1.4 µm
8 Mpixel CCDs (DECam, LRIS) 16 Mpixel CCD (BOSS)
150 mm diameter wafers / fabrication at Teledyne DALSA and LBNL MicroSystems Laboratory
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Quick overview / Scientific CCDs for astronomy
• Operated at low temperatures: -100C and below • Dark current ~ few electrons / pixel-hour
• Slow read out rates for low noise
• ~ 20 – 250 kpixels / sec with ~ 2 – 8 e- noise
• High dynamic range • Full well capacity for 15 µm pixel ~ 180 ke-
• Back illuminated for high quantum efficiency (QE) “Thinned” CCDs: 10 – 20 µm thick “Deep depletion”: ~ 40 µm thick “Fully depleted”: 75 – 500 µm thick
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Standard CCD fabricated on a high-resistivity silicon substrate that is fully depleted by the application of a substrate bias voltage
• Merging of CCD / p-i-n detector
• Typical thickness: 200 – 250µm, 500 – 650 µm in some cases
• Typical Vsub ~ 40 – 50V, up to 200V in some cases
Fully depleted CCD
Not to scale
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Fully depleted CCDs cont’
The ability to deplete thick substrates (200 – 250 µm typical) results in • High near-IR quantum efficiency
• Much reduced “fringing” when compared to “thinned CCDs”
• Simpler fabrication compared to “thinned CCDs” (10 – 20 µm thick)
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Quantum efficiency
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Quantum efficiency
Near IR – Silicon becoming transparent, Eph< Si bandgap (~ 1.1 eV) Blue end – Strong absorption in dead layers (n+ of p-i-n structure)
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Quantum efficiency
When the absorption length is > the CCD thickness, multiply reflected light results in “fringing”
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Fringing in thinned CCDs
Fringing – Multiply reflected light in 10 – 20 µm thick CCDs Uniform illumination (R. Stover / M. Wei Lick Observatory)
λ = 8000A 9000A 10,000A
~ ± 40% (Laboratory)
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Fringing in thinned CCDs
D.E. Groom et al, “Quantum efficiency of an back-illuminated CCD imager – An optical approach”, Proc. SPIE, 3649, 80, 1999
Keck Low Resolution Imaging Spectrograph (LRIS) circa 1999 Upgraded with 250 µm thick LBNL CCDs in 2009 (red camera)
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Fully depleted CCDs cont’
Fringing in 250 µm thick Dark Energy Camera CCD P. Martini (Ohio State University)
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Fully depleted CCDs cont’
Fringing in 250 µm thick Dark Energy Camera CCD P. Martini (Ohio State University)
g r i z y
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Fully depleted CCDs cont’
Astronomical cameras and spectrographs using fully depleted CCDs include • Pan-STARRS PS1 Camera • Dark Energy Survey Camera • HyperSuprime Camera • Keck LRIS (spectrograph) • BOSS spectrograph
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CCD cameras with fully depleted CCDs
PS1 camera – 60 5k x 5k, (10 µm)2-pixel CCDs Pan-STARRS telescope (2010)
75 µm thick, fully depleted CCDs MIT Lincoln Laboratory
1.4 Gpixels
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SuprimeCam – 10 2k x 4k, (15 µm)2-pixel CCDs Subaru 8-m Telescope (2008)
~ 200 µm thick, fully depleted CCDs Hamamatsu Corporation
HyperSuprimeCam – 116 2k x 4k, (15 µm)2-pixel CCDs Subaru 8-m Telescope (Fall 2012)
870 Mpixels
84 Mpixels
CCD cameras with fully depleted CCDs
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FermiLab Dark Energy Survey Camera (DECam) – 62 2k x 4k, (15 µm)2-pixel CCDs NOAO Cerro Tololo Blanco 4-m Telescope (Fall 2012)
570 Mpixels
250 µm thick, fully depleted CCDs (DALSA/LBNL)
CCD cameras with fully depleted CCDs
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DECam image – Fornax cluster
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DECam image – Fornax cluster
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DECam image – Fornax cluster
NGC 1365 in Fornax - Image from a single CCD
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DECam image – g-r-i (false color)
Courtesy Tom Diehl (FNAL)
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DECam z-band image (~8000 to 10,000A)
Courtesy Tom Diehl (FNAL)
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DECam z-band galaxy identification
Courtesy Tom Diehl (FNAL)
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DECam z-band galaxy identification
Red: Faint galaxies (Magnitude < 25) Green: Brighter (Magnitude < 22) Blue: Brighter still (Magnitude < 19) ~ 35x more “Red” than “Blue” A change of 1 in Magnitude is 2.51 in brightness
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Emphasis on the 8000 – 10,000A wavelength range Some useful spectral lines [OII]: λ = 3726,3729A Redshift range z ~ 1.15 – 1.68 for λ 8000 – 10,000A Emission line galaxies Hydrogen Lyα: λ = 1226A Redshift range z ~ 5.5 – 7.2 for λ 8000 – 10,000A Early Universe / Reionization Epoch
Selected science highlights
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Emphasis on the 8000 – 10,000A wavelength range Some useful spectral lines [OII]: λ = 3726,3729A Redshift range z ~ 1.15 – 1.68 for λ 8000 – 10,000A Emission line galaxies Hydrogen Lyα: λ = 1226A Redshift range z ~ 5.5 – 7.2 for λ 8000 – 10,000A Early Universe / Reionization Epoch
Selected science highlights
June 2014 Sky and Telescope
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Largest spectroscopic sample to date for massive quiescent galaxies 0.9 < z < 1.6
High quality spectra of 56 galaxies used to
study growth in galaxy mass and size Belli, Newman, and Ellis, ApJ 783:117 2014
Spectra measured with
250 µm thick, fully depleted CCDs Keck Low-Resolution Imaging Spectrograph
3 – 7 hour exposures (1200 sec/exp)
Selected science highlights [O II]
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[OII] lines red shifted to λ ~ 9680A at z=1.598 Spectra cuts off at ~ 1.01 µm
Selected science highlights [O II]
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Subaru search for high redshift galaxies using Lyα (1216A) with narrow band filters tuned to specific z
Lyα search at z ~ 7.3 (λc = 1.0052um)
Shibuya et al, ApJ 752:114 2012
Subaru SuprimeCam 200 µm thick, fully depleted CCDs
Hamamatsu Corporation
Selected science highlights
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Galaxy detected at z ~ 7.3
Subaru SuprimeCam 200 µm thick, fully depleted CCDs
Hamamatsu Corporation Shibuya et al, ApJ 752:114 2012
http://www.naoj.org/Pressrelease/2012/06/03/index.html
Selected science highlights
Color composite image of the Subaru XMM-Newton Deep Survey Field. Right panel: The red galaxy at the center of the image is the most distant galaxy, SXDF-NB1006-2. Left panels: Close-ups of the most distant galaxy. (Credit: NAOJ)
Future: Hyper SuprimeCam
Deep and Ultradeep Narrow-Band Imaging NB filters at z = 2.2, 5.7, 6.6 and 7.3
Takada et al, Publ. Astron. Soc. Jpn, 66, 1, 2014
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Keck high redshift galaxy study
Spectra shown on left from Keck LRIS λ = 9050A corresponds to redshift z of 6.44
7 hour exposures (~ 27th magnitude) Detection to z ~ 7 is feasible with LRIS
z > 7 Keck MOSFIRE (HgCdTe IR spectrograph)
Schenker et al, ApJ 744:179 2012
Selected science highlights
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Future astronomical instrumentation
Future astronomical instruments planning the use of fully depleted CCDs
• Dark Energy Spectroscopic Instrument (~ 2018) • Gemini Multi-Object Spectrograph South (~ 2014) • Subaru SuMIRe Prime Focus Spectrograph (~ 2017) • Keck DEIMOS spectrograph upgrade / MOBIE • Physics of the Accelerating Universe Camera (~ 2014)
• 18 x 8 Mpixel = 144 Mpixel camera, 4.2 m WHT • Large Synoptic Survey Telescope camera (~ 2020)
• 189 x 16 Mpixel = 3 Gpixel camera R&D is needed to improve performance and reduce
systematic errors for precision cosmology
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Improving CCD performance
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Fully depleted CCD R&D
A major source of systematic errors in fully depleted CCDs results from the large aspect ratio
CCD thickness / pixel pitch DECam: 16.7 (250 µm / 15 µm) HyperSuprime CAM: 13.3 (200 µm / 15 µm) LSST: 10 (100 µm / 10 µm)
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Fully depleted CCD R&D
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Fully depleted CCDs – Systematic errors
Large aspect ratio – Pixel distortions at the edge of the array
Note: Cross-section is not to scale 2D simulation – vertical field lines on right at pixel pitch of 10.5 µm
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“Tree ring” pattern seen under uniform illumination
Concentric patterns with origin at wafer center Less than 1% variation
Due to resistivity variations in the silicon Leads to “Astrometric” (position) errors
Fully depleted CCDs – Systematic errors
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A. Plazas, G. Bernstein, E. Sheldon
Fully depleted CCDs – Systematic errors
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1st order model for “Tree rings” • Resistivity variations result in a transverse field
• Space charge in fully depleted region • Charge is deflected during the collection time • Reduce the effect by increasing the vertical field
• Speed up the collection time • Less time for lateral deflection
Fully depleted CCDs – Systematic errors
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Tree rings: Vsub = 50V
LBNL High-voltage compatible CCD IEEE Trans. Elec. Dev., 56, 2612, 2009
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Tree rings: Vsub = 100V
LBNL High-voltage compatible CCD IEEE Trans. Elec. Dev., 56, 2612, 2009
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Tree rings: Vsub = 150V
LBNL High-voltage compatible CCD IEEE Trans. Elec. Dev., 56, 2612, 2009
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CCD R&D efforts
R&D efforts to improve CCD performance
• Quantum efficiency • Technology development at LBNL MicroSystems Laboratory
• Read noise
• Technology development at Teledyne DALSA
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Improvements in Quantum Efficiency
• Standard vs improved QE • Improved AR coatings and thinner backside contact
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Improvements in Quantum Efficiency
• Technology development in the LBNL MicroSystems Lab —Thinner backside contact and improved AR coatings
10 nm thick backside n+ contact
Silicon substrate Cross-sectional TEM
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Conventional with aluminum connection to source follower transistor
CCD R&D efforts – Read noise
Direct connection of SF polysilicon gate to sense node / smaller transistor
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CCD R&D efforts – Read noise
Direct connection of SF polysilicon gate to sense node / smaller transistor
Polysilicon
Silicon substrate
Cross-sectional SEM
SiO2
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CCD R&D efforts – Read noise
Black: Standard amplifier Red: Reduced capacitance Blue: Improved transistor design
Low level image ~ 3.5 e- signal ~ 1.4 e- noise
• Small format R&D CCDs —Amplifiers also implemented on
12 and 16 channel CCDs for improved statistics (in progress)
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Direct detection of low-energy x-rays
Applications of fully depleted CCDs in other fields
x-ray absorption in Silicon 200 µm Si ~ 100% efficient for 8 keV 650 µm Si ~ 50% efficient for 20 keV
• Fast CCDs for x-ray synchrotrons, e.g. LBNL Advanced Light Source
• x-ray astronomy
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“Fast CCD” for X-ray synchrotron applications • 200 frames/sec, fully depleted CCD
• P. Denes et al, LBNL Engineering in collaboration with Argonne APS • Amplifiers every 10 columns
• Used at ALS COSMIC, 5.3.1 STXM, etc • ALS Ptychographic Nanosurveyor: 10’s of thousands of diffraction patterns needed to generate x-ray images
• Used at APS 8-ID XPCS • 1,000 fps with ROI readout
• Soon: NSLS-II coherent scattering
1920 x 960 (30µm)2
192 amplifiers
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Astro-H x-ray astronomy mission – 2015 launch
Soft x-ray imager (SXI) 4 1280 x 1280, 200 µm thick CCDs
Hamamatsu
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Charged-particle detection
Cosmic ray muons Compton electrons from background radiation
• 30 min dark -140C • 650 µm thick • Substrate voltage 200V
• UC-Berkeley Nuclear Eng. / LBNL Nuclear Science
• Compton electrons • LBNL Life Sciences
• Positron detection
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Direct detection of ionization from nuclear recoils
DAMIC – Direct detection of dark matter with FD CCDs J. Estrada et al, FNAL / University of Chicago
Response to 252Cf source
• Increased mass in fully depleted CCDs • Up to 650 µm thick
• Low noise / keV-scale recoil regime • 2.5 e- rms / 9 eV ionization energy
• Inherent low backgrounds in the Si • CCDs at SNOLAB since Nov 2012
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Fully depleted CMOS Image Sensors – Future?
http://image-sensors-world.blogspot.com/2013/01/samsung-proposes-high-voltage-on.html
http://image-sensors-world.blogspot.com/2014/04/brandywine-photonics-shows-1st-picture.html
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Acknowledgements
R. Stover / M. Wei / W. Brown / C. Rockosi
A. Dey / R. Reed DECam staff
H. Padmore / P. Denes
CCD group leaders – C. Bebek / N. Roe / M. Levi / S. Perlmutter
B. Flaugher / T. Diehl / J. Estrada / D. Kubik
R. Groulx / R. Frost / F. Dion
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Acknowledgements – LBNL CCD staff
MSL Co Tran, Guobin Wang,
Nick Palaio, Steve Holland
Testing Armin Karcher, Sufia Haque,
Bill Kolbe, Julie Lee
Probing / Packaging John Emes
Plus Don Groom (QE and other modeling)