gem 300 overview
DESCRIPTION
Learn about the SEMI GEM300 Standards for 300mm semiconductor wafer manufacturing.TRANSCRIPT
Cimetrix Confidential1
GEM 300 Overview
An overview of the SEMI SECS/GEM 300 connectivity standards.
2 Cimetrix Confidential
Standards HierarchyFactory Host
E37 HSMS-SSE5 SECS-II
E30 GEM E39 Object Services
E90 SubstrateTracking
E87 Carrier
Services
E40Process
Jobs
E94ControlJobs
E58ARAMS
E116Equipment
TrackingPerformance
3 Cimetrix Confidential
Standards HierarchyFactory Host
E37 HSMS-SSE5 SECS-II
E30 GEM E39 Object Services
E90 SubstrateTracking
E87 Carrier
Services
E40Process
Jobs
E94ControlJobs
E58ARAMS
E116Equipment
TrackingPerformance
4 Cimetrix Confidential
E37 HSMS-SS
What physical mediums are acceptable?How is the data packaged?What is the message delivery system?How are lost messages detected?
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E37 HSMS-SS
High Speed Message Service, Single SessionMessage TransferMessage Packet StructureTCP/IP based communicationTimeouts
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Standards HierarchyFactory Host
E37 HSMS-SSE5 SECS-II
E30 GEM E39 Object Services
E90 SubstrateTracking
E87 Carrier
Services
E40Process
Jobs
E94ControlJobs
E58ARAMS
E116Equipment
TrackingPerformance
7 Cimetrix Confidential
E5 SECS-II
How is the data organized in the messaging?What data types are acceptable?How can multiple data be put into one message?What messages can the host and equipment send?What is the response to badly formatted messages? What is the normal response?How can custom messages be defined?
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E5 SECS-II
Message ContentStandard Message Definitions and Reservations (Streams and Functions)Event, Alarm, and Data Collection ConceptsData Structure and Format DefinitionsBasic HandshakingUnit Declarations
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Standards HierarchyFactory Host
E37 HSMS-SSE5 SECS-II
E30 GEM E39 Object Services
E90 SubstrateTracking
E87 Carrier
Services
E40Process
Jobs
E94ControlJobs
E58ARAMS
E116Equipment
TrackingPerformance
10 Cimetrix Confidential
E30 GEM
Exactly what minimum set of SECS-II messages should be used?When is the equipment considered ‘communicating’?Who is in control, the host system or equipment operator?What tools and displays does the equipment operator need in the user interface?
11 Cimetrix Confidential
E30 GEM
Generic Model for Communications and Control of Manufacturing EquipmentCommunication, Control, Processing, and Spooling State MachinesStandard Implementation of E5 SECS-IIStandardize the equipment behavior—not the host. Event Reports, Alarms, Process Program (Recipe) Management, Terminal Services
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Standards HierarchyFactory Host
E37 HSMS-SSE5 SECS-II
E30 GEM E39 Object Services
E90 SubstrateTracking
E87 Carrier
Services
E40Process
Jobs
E94ControlJobs
E58ARAMS
E116Equipment
TrackingPerformance
19 Cimetrix Confidential
E39 Object Services
How can an object-oriented paradigm work with the SECS-II standard?How can I query object attributes?How can I set object attributes?How can I logically organize objects?How can object attributes be protected?
20 Cimetrix Confidential
E39 Object Services
Object Oriented Data Top:: objectRead-Only and Read/Write AttributesSECS-II Messages for Accessing ObjectsExample Objects (None are defined in E39!)
Carriers, Substrates, Substrate Locations, Process Jobs, Control Jobs
Example AttributesSlotMap, SubsrHistory, SubstID, PRJobState
21 Cimetrix Confidential
Standards HierarchyFactory Host
E37 HSMS-SSE5 SECS-II
E30 GEM E39 Object Services
E90 SubstrateTracking
E87 Carrier
Services
E40Process
Jobs
E94ControlJobs
E58ARAMS
E116Equipment
TrackingPerformance
22 Cimetrix Confidential
E90 Substrate Tracking
Where is each substrate?What substrate is at a particular location?Where has a substrate been?How do I know the status of each substrate?How do I know if a substrate was completed normally, aborted, rejected, or lost?
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E90 Substrate Tracking
Substrate Locations, and Substrate ObjectsTrack the substrate source, location changes throughout the equipment, and final destination. Track whether a substrate needs processing, is ‘in process’, or completed. Track whether each completed substrate was processed completely, skipped, aborted, lost or rejected.
25 Cimetrix Confidential
Standards HierarchyFactory Host
E37 HSMS-SSE5 SECS-II
E30 GEM E39 Object Services
E90 SubstrateTracking
E87 Carrier
Services
E40Process
Jobs
E94ControlJobs
E58ARAMS
E116Equipment
TrackingPerformance
26 Cimetrix Confidential
E87 Carrier Management Services
How do I know the correct carrier arrived at the load port with the correct content? How do I manage carriers buffered inside the machine? How do I know whether carriers will arrive via the AMHS or manual system?How do I write data on the carrier tag?
27 Cimetrix Confidential
E87 Carrier Management Services
How do I know when the load port is ready for carrier pickup, delivery, or out of service?How do I know whether the carrier’s door is open or closed and whether or not substrates have been removed?How do I tell the equipment to expect a carrier’s arrival?
28 Cimetrix Confidential
E87 Carrier Management Services
Carrier and Slot Map VerificationHost or Equipment Based VerificationEnsure that the carrier is at the correct locationEnsure that it contains the expected substrates
Internal Buffer ManagementCarrier ID ReaderTag Reader/WriterAccess Mode
AUTO, MANUAL
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E87 Carrier Management Services
Reservation and Association StatesLoad Port Transfer Status
OUT OF SERVICE, TRANSFER BLOCKED, READY TO LOAD, READY TO UNLOAD, IN SERVICE, TRANSFER READY
Slot MapAccessing Status
NOT ACCESSED, IN ACCESS, CARRIER COMPLETE, CARRIER STOPPED
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Standards HierarchyFactory Host
E37 HSMS-SSE5 SECS-II
E30 GEM E39 Object Services
E90 SubstrateTracking
E87 Carrier
Services
E40Process
Jobs
E94ControlJobs
E58ARAMS
E116Equipment
TrackingPerformance
36 Cimetrix Confidential
E40 Process Job Management
How do I schedule a specific recipe to be run on specific set of substrates?How do I dictate the order to process substrates?How do I make small recipe adjustments?How do I control execution? How do I manage machines that with multiple process chambers?
37 Cimetrix Confidential
E40 Process Job Management
Assign one recipe to one or more carriers or to a set of substrates.Process substrates in the order specifiedServices to start, stop, abort, pause, and resume processingStart automatically manuallyProcess tuning for recipe adjustmentsQueue jobs for maximum throughputConcurrent jobs for multiple process chambers
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Standards HierarchyFactory Host
E37 HSMS-SSE5 SECS-II
E30 GEM E39 Object Services
E90 SubstrateTracking
E87 Carrier
Services
E40Process
Jobs
E94ControlJobs
E58ARAMS
E116Equipment
TrackingPerformance
40 Cimetrix Confidential
E94 Control Job Management
How do I manage a set of Process Jobs?How do I implement Process Jobs in highly automated factory?How do I move substrates from a source carrier into a destination carrier? How do I manage sorting substrates based on the processing status?
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E94 Control Job Management
Specify a set of Process Jobs to be executed.Configure processing to start manually or automatically based on material arrival.Specify substrate source and destination maps.Specify substrate destination based on the material status.
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Standards HierarchyFactory Host
E37 HSMS-SSE5 SECS-II
E30 GEM E39 Object Services
E90 SubstrateTracking
E87 Carrier
Services
E40Process
Jobs
E94ControlJobs
E58ARAMS
E116Equipment
TrackingPerformance
44 Cimetrix Confidential
E116 Equipment Performance Tracking
How do I measure an equipment’s productivity without relying on operator interaction?How do I know which internal modules determine the equipment’s productivity?
45 Cimetrix Confidential
E116 Equipment Performance Tracking
State Model for the equipment and each internal module:
IDLE: ready but waiting for materialBUSY: executing a taskBLOCKED: paused or in a fault condition
Equipment’s state is determined by the state of the internal modulesTrack the time in each stateReport the reason for the BLOCKED state
46 Cimetrix Confidential
Equipment Performance Tracking State Model
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The End
Questions?