Graphene Chemical Vapor Deposition (CVD) Growth

ECE440 Nanoelectronics

Zheng Yang

Timeline of graphene CVD growth

Single-crystalline Graphene Monolayers

~0.2 mm

11/2010 (i)

~0.4 mm

11/2011 (j)

2.3 mm

07/2012 (k)

08/2013 (m)

11/2012 (l)

>2.5 mm

~5 mm

02/2014 (n)

2 inch wafer-scale

Exfoliation

07/2004 (a)

<100 µm

Polycrystalline Graphene Monolayers

100 m

07/2012 (h)

~30 inch

03/2010 (g)~1 cm

01/2009 (e)

~2 cm

10/2008 (d)

Up to ~20 µm

06/2008 (c)03/2007 (b)

several µm

10/2009 (f)

3 inch wafer-scale

Timeline of graphene CVD growth — References

(i) X.S. Li, C.W. Magnuson, A. Venugopal, R.M. Tromp, J.B. Hannon, E.M. Vogel, L. Colombo, R.S. Ruoff. Large-Area Graphene Single Crystals Grown by Low-Pressure Chemical Vapor Deposition of Methane on Copper. Journal of the American Chemical Society 133, 2816-2819 (2011).

(j) L.B. Gao, W.C. Ren, H.L. Xu, L. Jin, Z.X. Wang, T. Ma, L.P. Ma, Z.Y. Zhang, Q. Fu, L.M. Peng, X.H. Bao, H.M. Cheng. Repeated growth and bubbling transfer of graphene with millimetre-size single-crystal grains using platinum. Nature Communications 3, 699 (2012).

(k) Z. Yan, J. Lin, Z.W. Peng, Z.Z. Sun, Y. Zhu, L. Li, C.S. Xiang, E.L. Samuel, C. Kittrell, J.M. Tour. Toward the Synthesis of Wafer-Scale Single-Crystal Graphene on Copper Foils. ACS Nano 6, 9110-9117 (2012).

(l) H.L. Zhou, W.J. Yu, L.X. Liu, R. Cheng, Y. Chen, X.Q. Huang, Y. Liu, Y. Wang, Y. Huang, X.F. Duan. Chemical vapour deposition growth of large single crystals of monolayer and bilayer graphene. Nature Communications 4, 2096 (2013).

(m)L. Gan, Z.T. Luo. Turning off Hydrogen To Realize Seeded Growth of Subcentimeter Single-Crystal Graphene Grains on Copper. ACS Nano 7, 9480-9488 (2013).(n) J.H. Lee, E.K. Lee, W.J. Joo, Y. Jang, B.S. Kim, J.Y. Lim, S.H. Choi, S.J. Ahn, J.R. Ahn, M.H. Park, Wafer-Scale Growth of Single-Crystal Monolayer Graphene on

Reusable Hydrogen-Terminated Germanium. Science 344, 286-289 (2014)

(a)K.S. Novoselov, A.K. Geim, S.V. Morozov, D. Jiang, Y. Zhang, S.V. Dubonos, I.V. Grigorieva, A.A. Firsov. Electric field effect in atomically thin carbon films. Science 306, 666-669 (2004). [2010 Nobel Prize]

(b)A.N. Obraztsov, E.A. Obraztsova, A.V. Tyurnina, A.A. Zolotukhin. Chemical vapor deposition of thin graphite films of nanometer thickness. Carbon 45, 2017-2021 (2007).

(c)A. Reina, X. Jia, J. Ho, D. Nezich, H. Son, V. Bulovic, M.S. Dresselhaus, J. Kong. Large Area, Few-Layer Graphene Films on Arbitrary Substrates by Chemical Vapor Deposition. Nano Letters 9, 30-35 (2009).

(d)K.S. Kim, Y. Zhao, H. Jang, S.Y. Lee, J.M. Kim, K.S. Kim, J.-H. Ahn, P. Kim, J.-Y. Choi, B.H. Hong. Large-scale pattern growth of graphene films for stretchable transparent electrodes. Nature 457, 706-710 (2009).

(e)X.S. Li, W.W. Cai, J.H. An, S. Kim, J. Nah, D.X. Yang, R. Piner, A. Velamakanni, I. Jung, E. Tutuc, S.K. Banerjee, L. Colombo, R.S. Ruoff. Large-Area Synthesis of High-Quality and Uniform Graphene Films on Copper Foils. Science 324, 1312-1314 (2009).

(f) Y. Lee, S. Bae, H. Jang, S. Jang, S.E. Zhu, S.H. Sim, Y.I. Song, B.H. Hong, J.H. Ahn. Wafer-Scale Synthesis and Transfer of Graphene Films. Nano Letters 10, 490-493 (2010).

(g)S. Bae, H. Kim, Y. Lee, X.F. Xu, J.S. Park, Y. Zheng, J. Balakrishnan, T. Lei, H.R. Kim, Y.I. Song, Y.J. Kim, K.S. Kim, B. Ozyilmaz, J.H. Ahn, B.H. Hong, S. Iijima. Roll-to-roll production of 30-inch graphene films for transparent electrodes. Nature Nanotechnology 5, 574-578 (2010).

(h) T. Kobayashi, M. Bando, N. Kimura, K. Shimizu, K. Kadono, N. Umezu, K. Miyahara, S. Hayazaki, S. Nagai, Y. Mizuguchi, Y. Murakami, D. Hobara. Production of a 100-m-long high-quality graphene transparent conductive film by roll-to-roll chemical vapor deposition and transfer process. Applied Physics Letters 102, 023112 (2013).

Polycrystalline Graphene Monolayers

Single-crystalline Graphene Monolayers

Graphene CVD Growth and transfer (1)

Nature Nanotechnology 5, 574-578 (2010).Nature 457, 706-710 (2009).Science 324, 1312-1314 (2009). Nano Letters 10, 490-493 (2010).

Graphene CVD Growth and transfer (2)

T. Kobayashi, M. Bando, N. Kimura, K. Shimizu, K. Kadono, N. Umezu, K. Miyahara, S. Hayazaki, S. Nagai, Y. Mizuguchi, Y. Murakami, D. Hobara. Production of a 100-m-long high-quality graphene transparent conductive film by roll-to-roll chemical vapor deposition and transfer process. Applied Physics Letters 102, 023112 (2013).

Graphene for touch-screenAfter the breakthrough in large-area graphene growth reported in “Nature Nanotechnology

5, 574-578 (2010)”, graphene has been successfully applied in touch screen in laboratory.

https://www.youtube.com/watch?v=3sAc4nqAbOs

https://www.youtube.com/watch?v=0ell4jGDHrw

https://www.youtube.com/watch?v=-YbS-YyvCl4

https://www.youtube.com/watch?v=lnvl5_nJuCo

https://www.youtube.com/watch?v=7TZE3DRgFoA