heater systems for science and semiconductor...

HEATER SYSTEMSfor Science and Semiconductor

application

representing

Anlagen- und Komponententechnik GmbH Dresden

+ maintenance friendly

Advanced Heater SystemsAnlagen- und Komponententechnik GmbH Dresden

+ excellent life time

+ cost saving

&

Presenting Today

ADVANCED HEATER SYSTEMS

with up to 450°C line operation

In Cooperation with Anlagen- und Komponententechnik GmbH Dresden

Benefits from heating


•Reduction of particles

•Greater process yield

•Better run-to-run repeatability

•Increased uptime

•More throughput

•Reduced PM effort – fewer pump rebuilds, less line cleaning

•Increased pump lifetime

1- Requirements for heater application

differences in heater constructionAnlagen- und Komponententechnik GmbH Dresden

• exists 3 big construction groups & some mixtures between

Silicon foam heater

Glass fibre / mineralwool insulated heater

B - Special Features of Heater Jackets

Construction causes differences in quality features

fibre free Insulatedheater

HEMI Heater Jackets

Glass fibre free insulation


Special

NOMEX ™ multi layer sandwich construction

A key advantage !Less particle !

Less outgassing !

Insulation: 4-layer META-Aramide fibresThickness: 26mm ( 4x6mm )

.Maximum jacket temp: 200 degr. C.Thermal conductivity: 200 degr.C : 0,055 W/mk

HEMI MAIN FEATURES

B) 200°C TEMPERATURE CAPABILITY


2 - Special construction of HEMI Heater JAcketsis creating

D) High Energy efficiency

C) extended lifetime (keeps the budget fair)

Long time stable & proper construction

A) full CLEANROOM COMPATIBLE Very Low Particle Load for max. yield lowest cross contamination

0

200

400

600

800

1000

1200

1400

1600

0 50 100 150 200Object temperature [ °C ]

Cyc

led

med

ium

pow

er [

W ]

at

refe

renc

e se

ctio

n

reference heater B reference heater A HEMI-Heating Jacket

Ø POWER CONSUMPTION vs. TEMP.


d – high energy efficiency construction HEMI Heater Jackets

CONNECTED POWER


Compare 2 different products in your fab


POWER CONSUMPTION AT 1 TOOL

exhaust line forvacuum line

1.0 : 2.6 kW plus 2.8 : 7.3 kW = 3.8 kW or 9.9 kWin total per heated tool


:

+


POWER CONSUMPTIONin 1 fab

3.8 : 9.9 kW per heated chamber

No. tool-cham ber

1 CVH01-A2 CVH01-B3 CVH01-C

4 CVP01-A5 CVP01-B

6 EM T01-A7 EM T01-B8 EM T01-C9 EM T01-D

10 FHT -0111 FNT -0112 FPY -01

13 CVL 01-A14 CVL 01-B

15 CVW 01-A16 CVW 01-B17 CVW 01-C

18 CVB 01-A19 CVB 01-B20 CVB 01-C

21 EPY 01-A22 EPY 01-B23 EPY 01-C

No. tool-cham ber

24 CVB 02-A25 CVB 02-B26 CVB 02-C

27 CVW 02-A28 CVW 02-B29 CVW 02-C

30 EM T 02-A31 EM T 02-B

32 EM T 03-A33 EM T 03-B

34 FNT 0235 FHT 0236 FPY -02

37 CVL 02-A38 CVL 02-B

39 EPY 02-A40 EPY 02-B41 EPY 02-C

42 FNT 0343 FHT 03

44 EPY 03-A45 EPY 03-B

No. tool-cham ber

46 CVP 02-A47 CVP 02-B

48 EM T 04-A49 EM T 04-B

50 EM T 05-A51 EM T 05-B

52 CVW 03-A53 CVW 03-B54 CVW 03-C

55 CVP 21-A56 CVP 21-B

57 EPY 04-A58 EPY 04-B59 EPY 05-A60 EPY 05-B

61 EM T 42-A62 EM T 42-B

63 FNT 04

64 OCR-EOX 22-A

total 64 chamber

244 : 634 kW

per fab

=390 kW

difference in power supply

2.900 MWhsaving p.a.

≅

Anlagen- und Komponententechnik GmbH DresdenHeated tool chambersin 1 fab

Connected heater load

~ 15.000 MWhsaving in 5 years.

LOW CONNECTING POWER

LOW THERMAL LOSSES TOINSTALLATION AREA

LOW RUNNING COSTS

Energy cost saving construction


D – high energy efficiency construction

0

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100

0 25 50 75 100 125 150 175 200Object temperature [ °C ]

Jack

et s

urfa

ce te

mpe

ratu

re [

°C ]

Touch protection lim it Silicon rubber jacket HEMI-Heating Jacket

B – Process Flexibility and Object Temp.


UVV limitThe higher You heat - The longer you free (from cleaning)

- Special construction of HEMI Heater Jackets

For harshproceses


APPLICATION NOTES

The full range of vacuum heater application

possible from one handWe are serving not only simple tube heater...

- but all types of special componentsrequired in a real process installation (hook up))

( incl. metal flex lines, bellows, valves,..)

incl. functional elements from many manufacturers

Isolation valve

heater

DN 100..250 throttle valves

Jalapeno valves

from DN 25 up to DN 500

valve arrays


full range of gas supply heaterfrom one hand

Pressure Regulator heater ( CO2, N2O,...)

MFC heaterGas cylinder heater (NH3, CO2, N2O,...)

Gas supply line heater (BCl3, DCS, C4F8,...)


heater for ALD gas supply (R & D )

Heater jackets for gas components up to 230°


UHV supply heater (R & D )

DN500 vacuum system with 12.000 L/s cryo pumps


heater for Solar Cell manufacturing

Complete DN150 vacuum system with 450°C temperature range


XHV – Physics & Analytics


Thermo Regulating devices

Customized Monitoring systems

pipe trace heater systems


Central fab controller


Semi central fab controller


Semi central fab controller -Group


Signalisation & Monitoring systems

TOTAL PROCESS MONITORINGINDIVIDUAL JACKET CONTROLHIGH / LOW DEVIATION CONTROLCONTROL DESK SIGNALISATION

with increasing steps of function control

HEMI HEATING pipe trace heater system

200°C TEMPERATURECLEANROOM COMPATIBLELOW PARTICLE LOADIN CONFORMITY WITH UVVLOW COO

FLEXIBLE FITTOTAL COVERING – NO COLD SPOTSSTABLE CONSTRUCTIONLOW CONNECTING POWERLOW THERMAL LOSSES

TOTAL PROCESS MONITORINGINDIVIDUAL JACKET CONTROLHIGH / LOW DEVIATION CONTROLCONTROL DESK SIGNALISATION

MAIN FEATURES STATUS INDICATION


+ maintenance friendly

Advanced Heater Systems


+ cost saving

&

+ full range of heater solution


heater systems

thank you for your attention

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heater systems for science and semiconductor...

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