hien vi dau do quet - van

7/31/2019 Hien Vi Dau Do Quet - Van

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1. Hin vi u d qutHin vi qut u d qut tn ting anh l Scanning probe microscopy, thng vit tt l SPM.

Hin vi u d qut da trn hin tng: vi cc u d kim loi rt mnh c u

nhn kch thc nguyn t, khi a cc u d ny vo st b mt mu vt khong

cch nanomet th s xut hin lc tng tc gia cc nguyn t ca u d v cc

nguyn t ca b mt vt mu.

Nh vy, trong hin vi u d qut: Ngun l kim d; Tn hiu phn hi l dng

tuel lc nguyn t; phng i ti a v phn gii n nanomet.

C hai loi hin vi u d qut

- Hin vi u d qut chui hm- Hin vi u d lc nguyn tu im ca knh hin vi u d qut

- phn giica knh khng b gii hn do hin tng nhiu x, m ch b giihn bi kch thc ca tng tc gia u d v mu, c th nh ti cp picomet (10-12

m).

- Tng tc gia mi d v mu c s dng lm mt cng c thao tc trn bmt, nhm to ra cc chi tit nh trong cng ngh nano (y l k thut

nanolithography -iu khc nano).

Nhc im ca knh hin vi u d qut

- Qu trnh ghi nh thng rt chm do qu trnh qut i hi thi gian ln.- Kch thc nh khng ln- Ch cho nh vi cu trc b mt.

1.1 Hin vi u d qut chui hm1.1.1 Gii thiu s lc

Hin vi u d qut chui hm tn ting anh l scanning tunneling microscop,

vit tc STM.

Hin vi u d qut chui hm c pht minh nm 1981 v hai nh pht

minh ra thit b ny l Gerd Binnig v Heinrich.
http://vi.wikipedia.org/w/index.php?title=%C4%90%E1%BB%99_ph%C3%A2n_gi%E1%BA%A3i&action=edit&redlink=1http://vi.wikipedia.org/w/index.php?title=%C4%90%E1%BB%99_ph%C3%A2n_gi%E1%BA%A3i&action=edit&redlink=1http://vi.wikipedia.org/wiki/Nhi%E1%BB%85u_x%E1%BA%A1http://vi.wikipedia.org/w/index.php?title=Nanolithography&action=edit&redlink=1http://vi.wikipedia.org/w/index.php?title=%C4%90i%C3%AAu_kh%E1%BA%AFc_nano&action=edit&redlink=1http://vi.wikipedia.org/w/index.php?title=%C4%90i%C3%AAu_kh%E1%BA%AFc_nano&action=edit&redlink=1http://vi.wikipedia.org/w/index.php?title=%C4%90i%C3%AAu_kh%E1%BA%AFc_nano&action=edit&redlink=1http://vi.wikipedia.org/w/index.php?title=%C4%90i%C3%AAu_kh%E1%BA%AFc_nano&action=edit&redlink=1http://vi.wikipedia.org/w/index.php?title=Nanolithography&action=edit&redlink=1http://vi.wikipedia.org/wiki/Nhi%E1%BB%85u_x%E1%BA%A1http://vi.wikipedia.org/w/index.php?title=%C4%90%E1%BB%99_ph%C3%A2n_gi%E1%BA%A3i&action=edit&redlink=1


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Hin vi u d qut chui hm c s dng quan st hnh thi hc b mt

ca vt rn hot ng da trn vic ghi li dng chui hm cain tkhi s dng mt

mi d qut trn b mt mu. Hin vi u d qut chui hm l mt cng c mnh

quan st cu trc b mt ca vt rn vi phn gii ti cp nguyn t.

1.1.2 Cu to ca hin vi u d qut chui hmHin vi u d qut chui hm gm c cc b phn chnh sau:

- u d- Bp in

+ Biu khin qut xy

+ Biu khin hi tip

- B phn chng rung- My tnh

1.1.2.1 u d

- Cch ch toDy vonfram c ch to bng phng php khc in ha hoc c

mi nhn vi bt Fe.

c ct t dy Pt-Ir.

- ng knh vi trm nm (kch thc cnguyn t)

Hnh. Cu t o hin vi u d qut chui hm

Hnh. u d
http://vi.wikipedia.org/wiki/%C4%90i%E1%BB%87n_t%E1%BB%ADhttp://vi.wikipedia.org/wiki/%C4%90i%E1%BB%87n_t%E1%BB%ADhttp://vi.wikipedia.org/wiki/%C4%90i%E1%BB%87n_t%E1%BB%ADhttp://vi.wikipedia.org/wiki/%C4%90i%E1%BB%87n_t%E1%BB%ADhttp://vi.wikipedia.org/wiki/%C4%90i%E1%BB%87n_t%E1%BB%ADhttp://vi.wikipedia.org/wiki/Nguy%C3%AAn_t%E1%BB%ADhttp://vi.wikipedia.org/wiki/Nguy%C3%AAn_t%E1%BB%ADhttp://vi.wikipedia.org/wiki/Nguy%C3%AAn_t%E1%BB%ADhttp://vi.wikipedia.org/wiki/Nguy%C3%AAn_t%E1%BB%ADhttp://vi.wikipedia.org/wiki/%C4%90i%E1%BB%87n_t%E1%BB%AD


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1.1.2.2 Bp in

L trung tm vn hnh ca hin vi qut chui hm.Gip mi d di chuyn

tinh thn.

C hai loi bp in l: triod v tube

Biu khin XY: L b phn iu khin nh v vtr mi d ( pin X

v Y c th dn nkhi t vo n 1 hiu in th) khi n di chuyn rt st vt mu v

qut trn mt phng XY song song vi b mt mu.

Biu khin ni tip: Mch hi tip gi cho dng chui ngm khng

i,bng cch iu chnh khong cch gia mi d v mu( trc z),khong cch ny

c iu khin bng 1tinh thp in (p in z)c th dn nkhi t vo n 1 hiu

in th.

1.1.2.3 B phn chng rung

1.1.3 Nguyn l ca hin vi u d qut chui hm- Da trn cch hin tng xuyn hm (chui hm) ca u d.

Hnh. Bp in Hnh. Triod v tube

Hnh. B phn chng rung


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- Mi d v mu to thnh 2 cc in. Mi d c t st b mt mudn in ti mc xut hin dng in t chui hm gia mi d v mu. Dng in t

chui hm ny ph thuc vo khong cch ca tipmu.

- Nu mu dn in c cu trc in t v mt trng thi ng u khiu d qut trn mt din tch nh b mt theo 2 phng x,y, I vthu c dng in

tch chui hm I tng v tr, th tp hp cc gi tr x,y,I to nn nh a hnh b

mt.

- Nu mu rt phng, th khong cch gia tipmu khng i -> dng slin quan n sthay i cu trc in, mt trng thi ca mu.

- Khi khong cch tip-mu vo khong 0.5- 1 nm th hm sng in t catip-mu ph nhau, to ra khnng cc in tvt qua ro th ti tip hay mu -> hin

tng xuyn hm.

- C 2 ch hot ng: dng khng i v cao khng i: ch dng khng i: dng gia tipmu khng i qua h

thng iu khin phn hi, tip dch chuyn theo hng x,y,z tun theo a hnh b mt,

thay i theo chiu cao (z) c s dng to a hnh.

ch chiu cao khng i , v tr z ca tip gikhng i, d ngtip-mu nhn c nhh thng thu trong khi tip quet trn b mt mu.

Hnh. C ch qut ca u d

Hnh. Chdng khng i v ch chiu cao khng i


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- Nh vy, hin vi u d qut chui hm l thit b quan st vi cu trc bmt thuc v nhm thit b knh hin vi qut u d, tc l vic ghi nh da trn

nguyn tc qut u d trn b mt.

1.1.4 u nhc im ca hin vi u d qut chui hm1.1.4.1 u im ca hin vi u d qut chui hm

- Hin vi u d qut l mt k thut ghi nh hnh thi hc v cu trc(cu trc vt l, cu trc in t...) b mt vi phn gii rt cao v cho nh cht

lng cao.

- Hin vi u d qut khng i hi vic ph hy mu nhknh hin viin t truyn qua (thit b chp nh vi phn gii tng ng).

- Hin vi u d qut cn cho php to ra cc php thao tc trn b mtcho qu trnh ch to.

1.1.4.2Nhc im ca hin vi u d qut chui hm

- Mu s dng trong hin vi u d qut phi l mu dn in hoc bndn.

- Vic o c hin vi u d qut i hi b mt mu siu sch v vicchng rung l mt i hi ln.

- Tc ghi nh trong hin vi u d qut thp.

1.1.5 ng dng ca hin vi u d qut chui hm- nh hng nguyn t: Nghin cu tnh cht b mt ca vt liu, nh

cu trc nguyn t GaSa (110)- Ph hc.- ng dng trong cng ngh khc, sn xut cc nguy n t vi phn

gii cp nguyn t: dng mi nhn c xt trc tip vi b mt, dung dng tunnel

t b mt

- ng dng trong ha hc, sinh hc hu c, kho st b mt, vi in t
http://vi.wikipedia.org/wiki/K%C3%ADnh_hi%E1%BB%83n_vi_qu%C3%A9t_%C4%91%E1%BA%A7u_d%C3%B2http://vi.wikipedia.org/wiki/K%C3%ADnh_hi%E1%BB%83n_vi_qu%C3%A9t_%C4%91%E1%BA%A7u_d%C3%B2http://vi.wikipedia.org/wiki/K%C3%ADnh_hi%E1%BB%83n_vi_qu%C3%A9t_%C4%91%E1%BA%A7u_d%C3%B2http://vi.wikipedia.org/wiki/K%C3%ADnh_hi%E1%BB%83n_vi_%C4%91i%E1%BB%87n_t%E1%BB%AD_truy%E1%BB%81n_quahttp://vi.wikipedia.org/wiki/K%C3%ADnh_hi%E1%BB%83n_vi_%C4%91i%E1%BB%87n_t%E1%BB%AD_truy%E1%BB%81n_quahttp://vi.wikipedia.org/wiki/K%C3%ADnh_hi%E1%BB%83n_vi_%C4%91i%E1%BB%87n_t%E1%BB%AD_truy%E1%BB%81n_quahttp://vi.wikipedia.org/wiki/K%C3%ADnh_hi%E1%BB%83n_vi_%C4%91i%E1%BB%87n_t%E1%BB%AD_truy%E1%BB%81n_quahttp://vi.wikipedia.org/wiki/K%C3%ADnh_hi%E1%BB%83n_vi_%C4%91i%E1%BB%87n_t%E1%BB%AD_truy%E1%BB%81n_quahttp://vi.wikipedia.org/wiki/K%C3%ADnh_hi%E1%BB%83n_vi_%C4%91i%E1%BB%87n_t%E1%BB%AD_truy%E1%BB%81n_quahttp://vi.wikipedia.org/wiki/K%C3%ADnh_hi%E1%BB%83n_vi_%C4%91i%E1%BB%87n_t%E1%BB%AD_truy%E1%BB%81n_quahttp://vi.wikipedia.org/wiki/K%C3%ADnh_hi%E1%BB%83n_vi_%C4%91i%E1%BB%87n_t%E1%BB%AD_truy%E1%BB%81n_quahttp://vi.wikipedia.org/wiki/K%C3%ADnh_hi%E1%BB%83n_vi_%C4%91i%E1%BB%87n_t%E1%BB%AD_truy%E1%BB%81n_quahttp://vi.wikipedia.org/wiki/K%C3%ADnh_hi%E1%BB%83n_vi_%C4%91i%E1%BB%87n_t%E1%BB%AD_truy%E1%BB%81n_quahttp://vi.wikipedia.org/wiki/K%C3%ADnh_hi%E1%BB%83n_vi_%C4%91i%E1%BB%87n_t%E1%BB%AD_truy%E1%BB%81n_quahttp://vi.wikipedia.org/wiki/K%C3%ADnh_hi%E1%BB%83n_vi_%C4%91i%E1%BB%87n_t%E1%BB%AD_truy%E1%BB%81n_quahttp://vi.wikipedia.org/wiki/K%C3%ADnh_hi%E1%BB%83n_vi_qu%C3%A9t_%C4%91%E1%BA%A7u_d%C3%B2


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1.2Hin vi u d lc nguyn t1.2.1 Gii thiu s lcKnh hin vi lc nguyn t hay knh hin vi nguyn t lc tn ting Anh l

Atomic force microscope, vit tt lAFM

Hin vi u d nguyn tc sng ch bi Gerd Binnig, Calvin Quate v

Christoph Gerber vo nm1986.

Hin vi u d lc nguyn t l mt thit b quan st cu trc vi m b mt

ca vt rn da trn nguyn tc xc nh lc tng tcnguyn tgia mt u mi d

nhn vi b mt ca mu, c th quan st phn gii nanmt.

1.2.2 Cu to ca hin vi u d lc nguyn tGm c 6 b phn chnh

- Mt mi nhn- Cn qut ( cantilever).

Hnh: Gerd Binning v Heinrich Rohrer

Hnh. M AFM u tin t i i h c Lun

Hnh. B mt ca Cr Hnh. B mt ca Fe
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- Ngun Laser.- Phn xgng (miroir).- Hai na tm pin quang in (photodiod)- Bqut p in.

1.2.2.1Mt mi nhnc lm bng Si3N4, kch thc khong 1 nguyn t

1.2.2.2Cn qut (cantilever) c cu to t Si3N4

1.2.2.3Ngun LaserHnh. Cn qut (Cantilever)

Hnh. Mi nh n

Hnh. Ngun Laser
http://vi.wikipedia.org/wiki/T%E1%BA%ADp_tin:AFM_(used)_cantilever_in_Scanning_Electron_Microscope,_magnification_3000x.GIF


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1.2.2.4Phn xgng (miroir)

1.2.2.5Hai na tm pin quang in (photodiod)

1.2.2.6Bqut p in

Hnh. Phn xgng

Hnh. Bqut p in

Hnh. Hai na tm in uan i n


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1.2.3 Nguyn l hot ng ca hin vi lc nguyn t- B phn chnh ca hin vi u d lc nguyn t l mt mi nhn

c gn trn mt thanh rung (cantilever). Mi nhn thng c lm bng Si hoc

SiN v kch thc ca u mi nhn l mt nguyn t.

- Khi mi nhn qut gn b mt mu vt, s xut hin lc Van derWaals gia cc nguyn tti b mt mu v nguyn t ti u mi nhn (lc nguyn

t) lm rung thanh cantilever. Lc ny ph thuc vo khong cch gia u mi d v

b mt ca mu.

- Dao ng ca thanh rung do lc tng tc c ghi li nhmt tialaser chiu qua b mt ca thanh rung, dao ng ca thanh rung lm thay i gc lch

ca tia lase v c detector ghi li.

- Vic ghi li lc tng tc trong qu trnh thanh rung qut trn b mts cho hnh nh cu trc b mt ca mu vt.

1.2.4 Ch ghi nh

Hin vi u d lc nguyn t c th hot ng nhiu ch khc nhau,

nhng c th chia thnh cc nhm ch :

- Ch tnh (Contact mode),- Ch ng (Non-contact mode)- Ch nh du (Tapping mode)

Hnh. C ch hot ng ca AFMHnh. u d tip xc vi b mt mu
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1.2.4.1 Chtnh (ch tip xc)

Ch tip tnh l ch m khong cch gia u mi d v b mt

mu c gikhng i trong qu trnh qut, v tn hiu phn hi t tia laser s l tn

hiu tnh. khong cch ny, lc ht s trnn mnh v cantilever b ko li rt gn

b mt (gn nh tip xc). Tuy nhin, biu khin phn hi siu chnh khong

cch gia mi v b mt l khng i trong sut qu trnh qut.

Mi u d c ko l trn b mt mu v cho nh a hnh lm cho

phng php c nhiu nhc im nh sau:

- D ph hy u d v ph hy mu.- Chu nh hng nhiu ca lp vt cht hp th trn b mt mu.

Khc phc: Nu lm vic trong mi trng chn khng cao.

1.2.4.2 Chng (ch khng tip xc)

Ch ng (hay ch khng tip xc) l ch m cantilever b kch

thch bi ngoi lc, dao ng vi tn s gn vi tn s dao ng ring ca n. Tn s,bin v pha ca dao ng s b nh hng bi tng tc gia mu v mi d, do

s c thm nhiu thng tin v mu c bin iu trong tn hiu. Ch khng tip

xc l k thut to nh phn gii cao u tin c thc hin trn hin vi u d lc

nguyn ttrong mi trng chn khng cao.

Trong ch ny u d lun gi mt khong cch rt nh ngay st b

mt mu (10 15 nm) s thay i lch ca l xo do thay i lc ht s c ghinhn v to nh ba chiu trn b mt mu.

Hnh. Ch tip xc tnh


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Nhc im

- Lc ht qu yu v u d phi t st b mt mu d b koxung b mt mu do lc cng v b dy ca cc lp hp ph.

- Hnh nh c phn gii km v d b sai lch.

1.2.4.3 Ch nh du

Ch nh du thc cht l mt ci tin ca ch ng khng tip

xc. Trong ch ny, cantilever c rung trc tip bng b dao ng p in gn

trn cantilever vi bin ln ti 100-200 nm, v tn s rt gn vi tn s dao ng

ring.

Ch khc phc c gn nh tt c nhc im ca cc ch khc

nh:

- Trnh cs ko l u d trn b mt mu, khng b ph hymu v u d.

- Trnh c s nhiu x hnh nh do nhng lp cht lng bm vob mt mu.

Hnh. Ch khng tip xc

Hnh. Chnh du


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1.2.5Phn tch ph hinvi u d lc nguyn t

V hin vi u d lc nguyn thot ng da trn vic o lc tc dng nn n

c mt ch phn tch ph, gi l ph lc hin vi u d lc nguyn t (force

spectrocopy), l ph phn b lc theo khong cch: lc Van der Waals, lc Casmir,lc lin kt nguyn t... vi thi gian hi p nhanh c ps (10-12 giy), chnh xc ti

pN (10-12

Newton) v phn gii v khong cch c th ti 0,1 nm. Cc ph ny c

th cung cp nhiu thng tin v cu trc nguyn t ca b mt cng nh cc lin kt

ha hc

1.2.6 u im v nhc im ca hin vi u d lc nguyn t1.2.6.1 u im ca hin vi u d lc nguyn t

- Hin vi u d lc nguyn t khc phc nhc im ca hin vi ud qut, c th chp nh b mt ca tt c cc loi mu k c mu khng dn in.

- Hin vi u d lc nguyn t khng i hi mi trng chn khngcao, c th hot ng ngay trong mi trng bnh thng.

- Hin vi u d lc nguyn tcng c th tin hnh cc thao tc dichuyn v xy dng cp tng nguyn t, mt tnh nng mnh cho cng ngh

nano. ng thi hin vi u d lc nguyn tcng hot ng m khng i hi s ph

hy hay c dng in nn cn rt hu ch cho cc tiu bn sinh hc.

- Mu c chun bn gin, cho thong tin y hn so vi knhtruyn qua.

1.2.6.2Nhc im ca hin vi u d lc nguyn t

- Hin vi u d lc nguyn t qut nh trn mt din tch hp (ti an 150 micromet).

- Tc ghi nh chm do hot ng ch qut.- Cht lng nh bnh hng bi qu trnh tr ca bqut p in.- u d rung trn b mt nn km an ton, ng thi i hi mu c

b mt sch v s chng rung.

1.2.7 ng dng
http://vi.wikipedia.org/wiki/L%E1%BB%B1c_Van_der_Waalshttp://vi.wikipedia.org/wiki/L%E1%BB%B1c_Van_der_Waalshttp://vi.wikipedia.org/w/index.php?title=L%E1%BB%B1c_Casmir&action=edit&redlink=1http://vi.wikipedia.org/w/index.php?title=L%E1%BB%B1c_Casmir&action=edit&redlink=1http://vi.wikipedia.org/w/index.php?title=L%E1%BB%B1c_Casmir&action=edit&redlink=1http://vi.wikipedia.org/wiki/Newtonhttp://vi.wikipedia.org/wiki/Newtonhttp://vi.wikipedia.org/wiki/K%C3%ADnh_hi%E1%BB%83n_vi_qu%C3%A9t_chui_h%E1%BA%A7mhttp://vi.wikipedia.org/wiki/K%C3%ADnh_hi%E1%BB%83n_vi_qu%C3%A9t_chui_h%E1%BA%A7mhttp://vi.wikipedia.org/wiki/K%C3%ADnh_hi%E1%BB%83n_vi_qu%C3%A9t_chui_h%E1%BA%A7mhttp://vi.wikipedia.org/wiki/K%C3%ADnh_hi%E1%BB%83n_vi_qu%C3%A9t_chui_h%E1%BA%A7mhttp://vi.wikipedia.org/wiki/K%C3%ADnh_hi%E1%BB%83n_vi_qu%C3%A9t_chui_h%E1%BA%A7mhttp://vi.wikipedia.org/wiki/K%C3%ADnh_hi%E1%BB%83n_vi_qu%C3%A9t_chui_h%E1%BA%A7mhttp://vi.wikipedia.org/wiki/Newtonhttp://vi.wikipedia.org/w/index.php?title=L%E1%BB%B1c_Casmir&action=edit&redlink=1http://vi.wikipedia.org/wiki/L%E1%BB%B1c_Van_der_Waals


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- Chp nh ct lp nhanh.- M t, phn tch, xc nh c im b mt.- Kim sot cht lng, kim tra khuyt tt vt liu,.- o c hc n phn t.- Ngoi ra, c rt nhiu ng dng trong cng ngh nh: cng ngh

nano(nanotechnology), cng ngh bn dn, dc phm, sinh hc,cng ngh vt

liu.v.v.

Hnh nh chp bng AFM calp ph polymer mm trn cnhca mt li dao gip lm sngt c ch ca s tch tpolymer trnb mt thp

Hnh chp bng AFM ca mt chui DNA c hnh dung nhmt phc hp mng RecA protein. C 2 hnh l ca cng mt phnt, ngoi tr mu sc khc nhauScan courtesy J. Brockman, F. Harmon and S. Kowalczykowski,

University of California, USA
mailto:[email protected]:[email protected]:[email protected]

hien vi dau do quet - van

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